CN206248049U - Laser geometry detector - Google Patents

Abstract

A kind of laser geometry detector is disclosed, mainly for detection of the pattern of object, is particularly used under conditions of having strong ambient light interference.The laser geometry detector includes laser, and imaging lens, laser spot detection device swings gyroaxis, swinging driver, pivot angle detector, necessary light projection reflective mirror, and signal processor.Using laser beam flying testee, the positional information put on its pattern is obtained, improve environment resistant light jamming performance, reduce laser power.Because processing information is reduced to the judgement to a position, message handling program can be simplified, real-time, reliability is high.

Description

Laser geometry detector

Technical field

The present invention relates to a kind of object appearance testing equipment, more particularly to setting for object appearance detection is carried out with laser beam It is standby.

Technical background

At present, usually use and laser beam is diffused into by prism by a thin lasing area, then project object to be detected Up, make object to be detected surface formed a pattern for the method detection object of bright line, according to principle of triangulation obtain by Detection object surface topography.The shortcoming of such object appearance testing equipment is that environment resistant light interference performance is poor, in order to have strong Strong light interference, such as sunlight of direct projection, welding electricity orphan's light irradiation, must just there is laser power requirement very high, could obtain foot Enough signal to noise ratios high, and image procossing is complicated, and poor real, reliability are low.

On the other hand, at present also often according to principle of triangulation, with the position of certain point on laser beam detection object.And lead to Cross the position detection to multiple spot, it is also possible to realize the detection to object appearance.The advantage detected using laser beam is laser Energy is concentrated, small to laser power requirement, and antijamming capability is just strong.Further, since information per treatment is in preceding method Pattern analysis is reduced to the judgement to the position put, and can greatly simplify message handling program, and real-time, reliability is high.This A kind of solution of use laser beam detection object appearance of disclosure of the invention.

The content of the invention

The present invention provides a kind of laser geometry detector, and solution is：It is constructed using laser beam detection object appearance Into Shape measure device the characteristics of be, including one transmitting narrow laser beam laser, imaging lens, a laser spot detection Device, swing gyroaxis, swinging driver, pivot angle detector, a signal processor.

Laser launches narrow laser beam, can be simply a semiconductor laser tube inside it, it is also possible to further wrap The optical component that concentrating element etc. improves beam collimation performance is included, can also be including light intensity drive control circuit etc..

Laser spot detection device can be any device that can be detected facula position according to photovoltaic principals, for example, can Being various devices such as CCD sensor devices, CMOS, PSD.Especially, laser spot detection device can be that line array CCD is photosensitive Device, linear array CMOS, are the linear array type element only with single or only a small amount of a few row's photaesthesia units, Ke Yigeng Big degree ground reduces the expense of information processing.At present, if laser spot detection device uses face formation element, device model can also be obtained Optional interests are enriched, and even with such face formation element, the expense of information processing can also have than one web for the treatment of The picture of the striped that face laser is formed is simple many, and information processing rate faster, solves the range of application of engineering problem also more Extensively.

Straight line where laser beam is coplanar with the primary optical axis of imaging lens, and in laser spot detection device, with the plane On intersection, row's photosensitive unit is at least arranged.In order to subsequent descriptions are convenient, the face is called optical flat.

By on laser beam projects to object to be detected, it is assumed that laser beam is aimed downwardly, when laser beam is met on different height During to object to be detected, an irreflexive hot spot is formed, be called object light spot.The irreflexive light of object light spot, some By imaging lens, focus on and be imaged on laser spot detection device and form a hot spot, be called as hot spot, correspond on object Object light spot picture.The photosignal corresponded to as facula position information is produced by laser spot detection device；By photosensitive light Spot detector obtains the position of picture, and this information further passes through signal processor, with laser projecting direction, imaging lens master The information such as optical axis direction, laser spot detection device position are combined, it is possible to calculate the thing facula position illuminated on object to be detected Elevation information, therefore constitute a position detecting system.

Laser, or laser and collimation optics, constitute light emission system；Imaging lens are constituted with laser spot detection device Optical receiver system.Further, the entirety for the two systems being formed, that is, above-mentioned position detecting system is fixed around one Axis oscillating, so that it may so that laser beam flying is by side object, make object light spot be covered with the intersection of testee and optical flat, so that Realize contour detecting.

The swinging driver driving position detecting system carries out Integral swinging, the corner that the detection of pivot angle detector swings； Swinging driver and pivot angle detector can be separately positioned on the overall two ends, or be all disposed within same one end of the entirety, depending on Depending on applied environment needs.

Especially, in design axis of oscillation can be located in the optical flat, can so obtains signal processor Resolve the interests that model is simple, the errors of principles is small.

In order to subsequent descriptions are convenient, the axis that definition swings gyroaxis is Y-coordinate axle, and its direction is referred to by transmitting laser side To reception diffusing reflection laser side.

The corresponding angular signal that signal processor receives aforementioned Photon-Electron signal, pivot angle detector monitors are arrived, and by this two Plant signal and the angle between laser projecting direction, imaging lens key light direction of principal axis, laser spot detection device position, each related device The information such as relation are combined, and calculate the positional information of object to be detected exposure point.By measuring the position of series of points, realize Detection to object appearance.

The advantage of the program is directly can to build required Shape measure device using ready-made laser position detector.

Straight line must be at an angle with imaging lens primary optical axis where laser beam, and laser and laser spot detection Principle of triangulation must could be utilized from a distance between device, swinging driver, pivot angle detector occupy one in addition Fixed volume, the Shape measure device overall structure, the size on revolution direction of principal axis will certainly be more long, is not easy to application.Hanging down Directly in the size of rotor shaft direction, its use condition can be also limited.In order to reduce size, so as to reduce the shadow of application space constraint Ring, The present invention gives various solutions, so that the Shape measure device can preferably be applied.

In terms of installation and debugging, the installation site of laser spot detection device, direction will make the object light spot institute in all detection ranges On the corresponding photosensitive unit focused on as hot spot in laser spot detection device.This is only needed to by the point farthest from imaging lens, most Near point is able to focal imaging, because being determined by the principle of the laser geometry detector, property hot spot is in camera lens All fallen within the visual field on same straight line, it is corresponding also necessarily to fall point-blank as hot spot.

Evolution very abundant in above technical foundation, in order to make it easy to understand, follow-up explanation employs subtitle, to weigh Profit requires that item number points out BROAD SUMMARY for clue, but the content under subtitle is not limited to suggestion content, is also not necessarily limited to Mentioned claim element number, other parts are refer to if necessary carries out comprehensive analysis and understanding.

(corresponding claims 2：Introduce transmission mechanism)

It is curved by swinging driver gyroaxis, and/or pivot angle detector gyroaxis it is possible, firstly, to pass through to introduce transmission mechanism Folding, by swinging driver, and/or pivot angle detector, to be transferred to other positions up, revolution direction of principal axis is swung so as to shorten Total length.

So just can arrange swinging driver and pivot angle detector by one of following measures：

Measure 1：Swinging driver is coaxially connected firmly with swinging axle, pivot angle detector by the transmission mechanism in the gap that disappears offsettingly Installed in the side of swinging axle；

Measure 2：Pivot angle detector is coaxially connected firmly with swinging axle, and swinging driver is offsettingly arranged on pendulum by transmission mechanism The side of moving axis；

Measure 3：Connect firmly coaxial with pivot angle detector of swinging driver is integrally formed, then by the transmission mechanism in the gap that disappears This is integral biased installed in the side of swinging axle.

The transmission mechanism most probable uses the gyroaxis gear mechanism parallel with reflective mirror gyroaxis, and this can be by Swinging driver, and/or pivot angle detector, are folded into the form in parallel with reflective mirror gyroaxis.Certainly according to concrete structure bar Part limit, it would however also be possible to employ the structure such as bevel gear and drive, roll angle inspection part carry out bending process.

(corresponding claims 3：Using fan-shaped motor)

Generally, the swinging driver can be a disc type electric machine.And Shape measure device of the present invention is One gyroaxis deviates geometric center structure farther out, is made if desired compact, can be with whole circular disc type electric machine Larger obstacle, in order to reduce perpendicular to the size for swinging rotor shaft direction, the present invention provides a kind of solution using fan-shaped motor Scheme.

Swinging driver can be the swing electricity that a stator is permanent magnet using fan-shaped oscillating motor, such as it Machine, parallel to the direction of swinging axle, its rotor is a solenoid for sector, solenoidal axle for the magnetic direction of its working portion Line is parallel to swinging axle.

(corresponding claims 4,5,6：Using fan-shaped roll angle inspection device)

Situation with above-mentioned treatment motor is similar, and the pivot angle detector can also be using a roll angle inspection for sector Device.

Here pivot angle detector is a roll angle inspection element for almost fan, rather than complete circle or approximate complete circle The roll angle inspection element such as grating or magnetic grid of shape.By taking grating type roll angle inspection element as an example, grating is typically made whole annulus Shape, and herein only with one part, with the fan-shaped part of one, can thus reduce the overall dimensions of equipment.Pendulum If angle detector is also similar to using devices such as magnetic grid, rotary slide potentiometers, its sector for including appropriate central angle is only taken Part, rather than circular overall.

Further, if the swinging driver is a motor for sector, the pivot angle detector is also a sector Roll angle inspection device, it is easy to combined with fan-shaped motor, can preferably reduce overall dimensions, ensure driving moment, ensure detection Required precision.Said two devices even can be attached to the degree that cannot be taken apart and use, by overall dimensions, particularly axial chi It is very little, it is reduced to ultimate attainment.

Pivot angle detector can be high using fan-shaped grating type angle detector, accuracy of detection, because its moving part is easy In sector is made, it is adapted to the fan-shaped roll angle inspection device needed for being made the present invention.

Above two sector device can combine or be dispersively installed in any desired position,

(corresponding claims 7：Using the reflective mirror for swinging)

For the ease of improving scan frequency during detection, it should reduce the inertia of rotating part.Therefore, the present invention is further The reflective mirror of a face rotary oscillation is employed, swinging driver only with reflective mirror, is done around swing gyroaxis direction of rotation Swing；The laser beam that laser sends, reflects through rocking mirror, then just projects on object to be detected, forms one and overflows The object light spot of reflection, the irreflexive light of object light spot returns to rocking mirror, and through secondary reflection again, then imaged camera lens is in light Shape imaging facula is focused on spot detector.

So, only have reflective mirror in position detecting system swinging, light emission system is maintained static with optical receiver system, its Remaining all parts can be maintained static, and can be achieved with the contour detecting for having effect same with integrally swing position detecting system Function.

Especially, swing gyroaxis is made to be located within the reflecting surface of reflective mirror in design, that is, the reflective table of reflective mirror Face meets at reflecting surface by swinging the axis of gyroaxis rather than a bit, can obtain the resolving model letter of signal processor The small interests of the single, errors of principles.

(corresponding claims 8：Rocking mirror is divided into two sections)

The surface of above-mentioned rocking mirror does not require that all plays reflection action in entire area, then just can be anti-by this Light microscopic is divided into coplanar two sections, wherein first paragraph reflective mirror, and referred to as the first galvanometer is specifically used to the light beam that laser is launched Project on object to be detected, second segment reflective mirror, referred to as the second galvanometer, be specifically used to from diffusing reflection on object to be detected Light projection on imaging lens.So swinging driver, or/and pivot angle detector, it is possible to be arranged on the two galvanometers it Between, it is preferred that being positioned close to the position of the first galvanometer, space is more abundant.

According to foregoing definition, the Y-coordinate axle is pointed to the second galvanometer, can further be defined to from the first galvanometer Straight line where the origin of Y-axis is laser beam intersects part with the first galvanometer.

The swinging driver can take one of following manner to be configured with the pivot angle detector：

Mode 1, swinging driver is arranged between this two sections of reflective mirrors, it is preferred that being positioned close to the position of the first galvanometer Put；And pivot angle detector is arranged on outside two sections of reflective mirrors；

Mode 2, pivot angle detector are arranged between this two sections of reflective mirrors, it is preferred that being positioned close to the position of the first galvanometer Put；And swinging driver is arranged on outside two sections of reflective mirrors；

Mode 3, swinging driver and pivot angle detector are arranged between this two sections of reflective mirrors, it is preferred that be arranged on leaning on The position of nearly first galvanometer；

Mode 4, swinging driver and pivot angle detector are arranged between this two sections of reflective mirrors, it is preferred that be arranged on leaning on The position of nearly first galvanometer；And similar foregoing transmission mechanism is employed, by swinging driver or/and pivot angle detector Offsettingly installed in the side of reflective mirror swinging axle, that is, using one of following measure：

Measure 1：Swinging driver is coaxially connected firmly with reflective mirror swinging axle, the transmission mechanism that pivot angle detector passes through the gap that disappears Offsettingly installed in the side of reflective mirror swinging axle；

Measure 2：Pivot angle detector is coaxially connected firmly with reflective mirror swinging axle, and swinging driver is offsettingly pacified by transmission mechanism Mounted in the side of reflective mirror swinging axle；

Measure 3：Connect firmly coaxial with pivot angle detector of swinging driver is integrally formed, then by the transmission mechanism in the gap that disappears This is integral biased installed in the side of reflective mirror swinging axle.

Measure 4：Connect firmly coaxial with pivot angle detector of swinging driver is integrally formed, then by the transmission mechanism in the gap that disappears By pivot angle detector offsettingly installed in the side of reflective mirror swinging axle, by the transmission mechanism in the gap that need not disappear by wobble drive Device is offsettingly installed in the side of reflective mirror swinging axle.

On this basis, various evolution can also be realized, preferably by optimizing swinging driver, or/and pivot angle detector Ground, such as：

1st, the swinging driver is using a motor for sector.

2nd, the pivot angle detector is using a roll angle inspection device for sector.

3rd, the swinging driver using sector motor, and the pivot angle detector is also adopted by sector Roll angle inspection device.

4th, use one fan-shaped motor is combined closely to can not be split the entirety for using with fan-shaped roll angle inspection device, and Wherein fan-shaped roll angle inspection is using grating principle.

(corresponding claims 9：Realization detection pivot angle is combined with laser spot detection device using laser beam)

Pivot angle detector can also combine realization using laser beam with laser spot detection device.For example, using laser beam, one Individual reflective mirror and a laser spot detection device；The reflective mirror is fixed on swing gyroaxis, and the laser beam is by the mirror reflection Afterwards, project on the laser spot detection device, the degree deflected by reflective mirror with the laser spot detection device detection laser beam, so as to sentence The disconnected angle for swinging gyroaxis.

The laser beam can be from independent laser, or with a beam splitter, from for generation Sub-fraction light is separated in the laser beam of hot spot and is produced.

(corresponding claims 10：Fold light path)

In order to reduce the overall dimensions of the looks detector, can also be using the measure of various folding light paths, with folding light Road system bending optical flat, by receiving light path, and/or transmitting light path, is folded, is curved, and the optical property of system is not Can change.

The folding light path system, including transmitting light path reflecting element, and/or receiving light path reflecting element；By described Light path system is folded, by imaging lens, and/or laser spot detection device, and/or the laser, suitable reduction is arranged on described sharp The position of light Shape measure device overall dimensions.

For example, using reflective mirror in the emitting light path of laser, can be arranged in laser can optimize overall body Long-pending position；Reflective mirror is used in the light path for receiving light, can be arranged in laser spot detection device can optimize overall volume Position.

(corresponding claims 11：Vertical folding light path)

On the basis of the above, the adjustment target of the folding light path can also further be optimized：

If the folding light path system includes transmitting light path reflecting element, the laser beam that the laser sends is first Through the transmitting light path reflecting element turnover direction of the folding light path system, it is irradiated to again on the first galvanometer afterwards.And, especially Ground, can make the straight line where this laser beam after transferring be intersected vertically with axis of rotation.

If not including transmitting light path reflecting element in the folding light path system, make the laser beam institute that laser sends In straight line, directly intersected vertically with axis of rotation.It is that solution in detection process counts with the advantage that axis of rotation intersects vertically Learn model easy.

In the case where straight line where this laser beam and axis of rotation intersect vertically, in order to subsequent descriptions are convenient, definition Straight line where the laser beam of the galvanometer of directive first is X-coordinate axle, and the positive direction of X-axis is the direction of advance of laser beam；According to described X, Y-coordinate axle set up the rectangular coordinate system in space of right-handed system, so as to generate Z coordinate axle.

So, further, it is possible to using it is described folding light path system receiving light path part, by the primary optical axis of imaging lens It is adjusted to perpendicular to the direction of X-Y plane, even if also primary optical axis is parallel to Z coordinate axle, and imaging lens is placed in Z coordinate axle Negative direction side.Its specific practice is：By the normal of receiving light path reflecting element, parallel to the master before imaging lens adjustment The angle separated time of the primary optical axis after optical axis and adjustment.

If the folding light path system also includes transmitting light path reflecting element, laser can be also placed in the negative of Z axis Direction side, or laser is placed in, make its outgoing beam place straight line parallel in Y-coordinate axle, and positioned at Y-axis positive direction one Side.

According to the thought of this bending light path, suitably can also develop more complicated certainly, be arranged to each component It is more compact.Do the size that several change transducings of the above effectively reduce X-coordinate direction of principal axis.

(corresponding claims 12：Visual angle is adjusted by the receiving light path reflecting element for folding light path system)

In the case where the primary optical axis of above-mentioned imaging lens is parallel to Z coordinate axle, the reception light for folding light path system Road reflecting element, can also be around an axis trimming parallel to Z axis, the primary optical axis weight of this adjustment axis and imaging lens Close, or close to and parallel to the primary optical axis of imaging lens.The adjustment will cause visual angle change, so as to realize to detection model The adjustment enclosed.This range to product brings great convenience with accuracy Design, adjustment.

(corresponding claims 16：Laser spot detection device is adjusted with elongated slot)

Aborning, the adjustment of position, attitude of the laser spot detection device in receiving light path, photaesthesia list particularly therein The position of unit and the adjustment of orientation, it is closely related with image quality, it is necessary to take special measure.

If the laser spot detection device is installed on fixed matrix using screw, the hole of its mounting screw can be made Perpendicular to the elongated slot of photosensitive unit orientation, it is possible to be adjusted by lateral passage laser spot detection device, be adapted in position Trip bolt again afterwards.The method features simple structure, however it is necessary that the auxiliary of passage laser spot detection device is realized in careful operation, or configuration Instrument.

(corresponding claims 13：Laser spot detection device is adjusted by translating receiving light path reflecting element)

If employing the folding light path system, and its receiving light path reflecting element is designed to that fine setting can be translated , the direction of its fine setting is, along the incident direction or exit direction for penetrating laser beam thereon, will all to cause as hot spot position Put in the position translation on key light direction of principal axis.Can be conveniently realized as hot spot and laser spot detection device using this feature Position co-ordination relation, be particularly more suitable in the case where the primary optical axis of above-mentioned imaging lens is parallel to Z coordinate axle use.

(corresponding claims 14,15：Adjustment visual angle with adjust laser spot detection device combined, using cylindrical oblique angle reflective mirror)

If with reference to above-mentioned two technologies, that is, it is described fold light path system receiving light path reflecting element, can be around One parallel to the axis trimming of Z axis, the key light overlapping of axles of this adjustment axis and imaging lens, or close to imaging lens Primary optical axis；And further, the receiving light path reflecting element can be translation fine setting, its fine setting direction be along penetrate in The incident direction or exit direction of laser beam thereon, then obviously can bring very golden eggs.And the realization of the combination is without original The obstacle then gone up.

Especially, if the receiving light path reflecting element for folding light path system is anti-using 45 ° of oblique angles of a cylinder Light microscopic, its reflective surface is the inclined-plane in 45° angle with cylinder axis, and periphery as mounting surface then can be realized smoothly Purpose is stated, at this moment the axis of cylinder is both the axis of revolution adjustment, the direction of minute surface translation when being also translation fine setting.Two parameters Adjustment process can be independent mutually, mechanical structure is simply easily achieved.

Obviously, the transmitting light path reflecting element folded in light path system can also easily using such oblique Angle cylinder reflective mirror, is easily installed, and be conveniently adjusted.

(corresponding claims 17：Laser spot detection device is adjusted by eccentric bushing)

In position adjustment, the photosensitive unit arranging line of laser spot detection device is set to intersect with primary optical axis and in specific side Upwards, this 2 points it is especially important, and the position on photosensitive unit arranging line direction is without accurate.According to this feature, In order to more easily adjust position of the laser spot detection device in receiving light path aborning, the present invention uses an eccentric bushing, The position of the laser spot detection device is adjusted by it.

The axis of the interior cylindrical hole of the eccentric bushing and the diameter parallel of external cylindrical surface, the axis of the external cylindrical surface of eccentric bushing with The key light overlapping of axles of imaging lens, and can be rotated around the primary optical axis of imaging lens, so as to drive laser spot detection device to shift；Light Spot detector can rotate around the axis of the interior cylindrical hole of eccentric bushing, to keep the arrangement of photaesthesia unit after position adjustment Direction is constant；Locked after adjustment, prevent laser spot detection device from being rotated around any axle.

(corresponding claims 18：The arrangement of bearings position)

In terms of to the support for swinging gyroaxis, if not using scanning reflective mirror, one side can be as needed taken Cantilevered is supported, it is also possible to select bi-lateral support, except selecting in addition to which side applies arm-type support, do not had more than more options Ground.And unilateral support be it is preferred that light receiver end should be alternatively provided at, can so make light beam have better access to testee and The barrier influence in environment is not susceptible to, makes the attainability of the laser geometry detector more preferable.

If as needed, gyroaxis were swung to be supported by first axle and second bearing, and the first galvanometer and the would be used in scanning Two galvanometers, it is preferred that clutch shaft bearing to be arranged on the inner side of the first galvanometer, can so make light beam have better access to testee And the influence of the barrier in environment is not susceptible to, that is, the first galvanometer is closer to extraneous, and make the laser geometry detector can Reaching property is more preferable；Second bearing is arranged on the outside of the second galvanometer, can so be avoided second bearing from blocking and be shaken into second The diffusing reflection laser rays of mirror.

(corresponding claims 19：The size selection and concrete structure of bearing)

Further, scan axis is easily installed aspect, do following design：

Because projection laser beam is very thin, the first galvanometer need not be very wide, and the internal diameter of the clutch shaft bearing can be made to be more than first The width of galvanometer, the size of clutch shaft bearing internal diameter also will not be very big.

Since it is desired that receive diffusing reflection laser dispersion, it is necessary to larger area reception light the second galvanometer, in order to reduce Overall dimensions, the second bearing is set one of in the following way：

Mode 1：The external diameter of second bearing is more than the width of the second galvanometer, and its outer shroud is directly connected with fixed part, at this moment Very frivolous bearing is selected, to reduce rotary inertia；

Mode 2：, less than the width of the second galvanometer, its outer shroud is by an external diameter more than the second galvanometer for the external diameter of second bearing The transition rings of width be connected with fixed part, the effect for reducing rotary inertia can be more preferable.

(corresponding claims 20：Using narrow-band-filter technology)

In order to reduce ambient light interference to greatest extent, can take various in the light path that reception, convergence diffuse Optical filtering measure, for example with 1 or multi-disc narrow band pass filter.For example, can be before imaging lens, measured object and imaging lens Between plus optical filter；Optical filter can also be added after imaging lens, before laser spot detection device, can so reduce the chi of optical filter It is very little；Optical filter can also be respectively provided with above-mentioned two, to improve filter effect.Further, can also be by reflective mirror, imaging lens Each lens surface in head is designed with the structure of filter action plated film.

(corresponding claims 21：Using CCD or cmos image sensor)

At present, the light-sensitive device with CCD or cmos image sensor as representative is developed rapidly, using such device conduct The laser spot detection device, accuracy of detection is high.

(corresponding claims 22：Signal processor provides picture signal and pivot angle signal to external world)

Current microelectronic component develops also rapidly, powerful, can be used for realizing the described laser of abundant function Shape measure device.Can also by the signal processor of described laser geometry detector be designed to provide to external world picture signal and The form of pivot angle signal, its advantage is that external equipment can easily develop distinctive resolving side according to the characteristics of detected material Method, the deciphering ability to being detected pattern is stronger, also simplify the structure of the signal processor.

(corresponding claims 23：Signal processor provides tested point coordinates to external world)

Signal processor can also be designed to provide to external world the form of measured point coordinate value, that is, at signal Reason device inside completes calculating coordinate.This is the demand of most application scenarios.

(corresponding claims 24：Signal processor receives external control information)

Signal processor can also be designed to the form of the control information of the outside input for being subjected to abundant, so as to realize Setting to running parameters such as scan frequency, sweep limits, projection luminous intensities.Wherein normal operation state parameter information includes：

Scan frequency, determines the speed of scanning；

Scan amplitude angle, determines the width of scanning；

Scan angle center line and the angle of Z coordinate axle, determine direction interested；

Under particular job state, stop scanning, and detect displacement in particular directions, now setup parameter includes：Sweep It is certain numerical value that the angle of 0 ° of angle, scan angle center line and Z coordinate axle is needs for 0Hz, scan amplitude to retouch frequency.

(corresponding claims 25：The control of laser beam intensity)

To laser luminous intensity control aspect, signal processor can be designed to directly be set by external signal And the luminous intensity of laser is controlled, or send luminous intensity by analyze that the information of laser spot detection device automatically controls laser Form.Because laser spot detection device inherently will be directly reacted light strong production, completely can be according to the highest of photosensitive unit Response signal or average response signal, or the average value of response signal higher than certain level, etc. information, make tune The adjustment of whole emitted luminescence intensity, the photosignal high to obtain signal to noise ratio.

The common measures taken of also many control laser intensities, for example, carry out impulse modulation, adjustment light pulse duty to light intensity Than, adjustment optical pulse frequency etc., can be used to obtain more reliable detection result, do not discuss one by one.

In order to improve the collimation performance of laser beam, various optical design measures are may also take on, also do not repeated one by one.

Any of the above measure reasonably independent assortment can be used, it is impossible to exhaustive list, be belonged in thought of the invention Hold.

The beneficial effects of the invention are as follows using laser beam raising environment resistant light jamming performance, reduction laser power, using pendulum Dynamic scan method realizes the detection to contour of object.Because information per treatment is reduced to the pattern analysis in conventional method Judgement to a position, can simplify message handling program, and real-time, reliability is high.Driven by taking arranged off-centre to swing Dynamic unit's device and pivot angle detector, wobble drive unit's device and pivot angle detector the technology such as moved between two sections of effective reflective positions arrange Apply, the size perpendicular to revolution shaft section can be effectively reduced；By the knot for reconfiguring drive mechanism and angle detection device Conjunction relation, also efficiently reduces the size of the Shape measure device integrated model.

Brief description of the drawings

In order to illustrate more clearly of technical scheme, the accompanying drawing for being used is briefly introduced below, it is clear that attached Figure description is only some principles of the invention and embodiment, is not required to pay creative work in those of ordinary skill in the art Under the premise of, it is possible to other schemes are deduced out again according to these accompanying drawings.

Fig. 1 is using the schematic diagram of laser beam detection object space；

Fig. 2 is the schematic diagram by swing position detecting system realization laser beam detection object appearance；

Fig. 3 is the object appearance detector concept figure that only a face reflective mirror swings and avoids other elements from swinging；

Fig. 4 is the optical flat expanded schematic diagram in the case of reflective mirror swings；

Fig. 5 be by change driver, the arrangement of roll angle inspection device and shorten one of measure schematic diagram of axial dimension；

Fig. 6 be by change driver, the arrangement of roll angle inspection device and shorten the two of the measure schematic diagram of axial dimension；

Fig. 7 be by change driver, the arrangement of roll angle inspection device and shorten the three of the measure schematic diagram of axial dimension；

Fig. 8 be by change driver, the arrangement of roll angle inspection device and shorten the four of the measure schematic diagram of axial dimension；

Fig. 9 be by change driver, the arrangement of roll angle inspection device and shorten the five of the measure schematic diagram of axial dimension；

Figure 10 is the schematic diagram as swinging driver using fan-shaped oscillating motor；

Figure 11 is a kind of schematic diagram of structure of fan-shaped oscillating motor；

Figure 12 is the schematic diagram combined with rounded corner detector using fan-shaped oscillating motor driver；

Figure 13 is the schematic diagram combined with fan-shaped roll angle inspection device using fan-shaped oscillating motor driver；

Figure 14 is the fan-shaped oscillating motor driver schematic diagram integrated with fan-shaped roll angle inspection device；

Figure 15 is a kind of differentiation schematic diagram combined with fan-shaped roll angle inspection device using fan-shaped oscillating motor driver；

Figure 16 is another differentiation schematic diagram combined with fan-shaped roll angle inspection device using fan-shaped oscillating motor driver；

Figure 17 is to realize one of schematic diagram of roll angle inspection device using laser beam combination laser spot detection device；

Figure 18 is the two of the schematic diagram that roll angle inspection device is realized using laser beam combination laser spot detection device；

Figure 19 is that the receiving light path reflecting element that light path system is folded by rotatably adjusting realizes selection detection range Schematic diagram；

Figure 20 is the installation measure schematic diagram for taking direct micro-adjustment laser spot detection device；

Figure 21 is adjusted indirectly as hot spot and laser spot detection device position relationship measure by adjusting the position of light path break Schematic diagram；

Figure 22 is the measure schematic diagram by the angle of eccentric sleeves micro-adjustment laser spot detection device position indirectly；

Figure 23 is the top view by eccentric sleeves micro-adjustment laser spot detection device position measure mechanism；

Figure 24 is bearing arrangement schematic diagram of the support positioned at two ends；

Figure 25 is that preferably bearing arranges one of schematic diagram；

Figure 26 is the two of preferably bearing arrangement schematic diagram；

Figure 27 is the schematic diagram for investigating gyroaxis bearing mounting structure；

Reference：

1：Laser；

2：Imaging lens；

3：Laser spot detection device, 3-1：Adjustment elongated slot, 3-2：Eccentric bushing；

4：Swing gyroaxis, 4-1：Clutch shaft bearing, 4-2：Second bearing, 4-3：Transition rings；

5：Swinging driver, 5a：Swinging driver moving part, 5b：Swinging driver fixed part；

6：Pivot angle detector,

6a：Pivot angle detector moving part, 6a-1：Reflective mirror,

6b：Pivot angle detector fixed part, 6b-1：Laser, 6b-2：Laser spot detection device, 6b-3：Beam splitter, 6b-4：Instead Light microscopic；

7：Scanning reflective mirror, 7-1：First galvanometer, 7-2：Second galvanometer；

8：Filter；

9：Transmission mechanism；

10：Signal processor；

11：Fold the transmitting light path reflecting element of light path system；

12：Fold the receiving light path reflecting element of light path system；

100：Measured object.

Specific embodiment

Below in conjunction with the accompanying drawings, the technical scheme in the present invention is further described.Obviously, described embodiment is unlikely to be Whole embodiments.Based on this, the i.e. obtainable all other embodiment of creative work is not required to, belongs to protection domain.

Specific embodiment is explained below in conjunction with the accompanying drawings, so that thought of the invention is expanded on further.

Embodiment 1 (realizes the basic structure of function)

It is with the principle of laser beam detection object space shown in Fig. 1.The linear beam of the wherein transmitting of laser 1 is running into During object 100, irreflexive object light spot is formed in P points, in the light that object light spot diffusing reflection sends, some is by imaging lens 2 receive and focus on, and on device for sensing optic position, that is, laser spot detection device 3, one are formed as hot spot in p points.If tested The position surveyed on object in P1 points or P2 points, then the facula position for correspondingly being formed on laser spot detection device 3 change into p1 points or P2 points.The position of hot spot is converted into light spot position signal by laser spot detection device 3, and the signal further send signal processor 10, There resolves the positional information for obtaining P points, P1 points or P2 points on object to be detected.Obviously, in order to simplify resolving model, In optical design, desirably, laser beam should be made coplanar with the primary optical axis of imaging lens, the plane is called optical flat, and And the optical flat is by effective photosensitive unit of laser spot detection device 3, that is, p1 points, p2 points should also fall optical flat it It is interior.So, in optical flat, extend the line of p1, p2 point, G points can be met at straight line where laser beam.The essence of testing result Degree, except being influenceed outer by hot spot detector 3 resolution ratio of itself, also to receive visual angle β, the enlargement ratio of imaging lens 2 and into As the position of camera lens 2 influences；Under conditions of ceteris paribus, β value is higher closer to 90 ° of accuracy of detection, further, into When the picture deviation of camera lens 2 G-P straight line degree is constant, β value is bigger, and detection range is smaller.

Above is with the principle of laser beam detection object space.

Above-mentioned object space detecting system is set integrally to be swung around a swing gyroaxis 4 being located within optical flat, As shown in Figure 2.If laser beam meets at A points with the axis of swinging axle 4, the primary optical axis of imaging lens meets at B with axis of rotation is swung Point, then above-mentioned object position detection device, can scan an intersection on by side object 100.If on this intersection P, Q, R point to A points apart from identical, then the hot spot for being formed on these aspects in the imaging of p points, for sake of simplicity, being not drawn into figure Scan to the form of the other elements such as laser when Q points, R points.Detection so densely need only be one by one put enough as the position of hot spot p Put, correspondingly, using pivot angle detector 6, corner during each point is swept in monitoring scanning process, you can try to achieve a complete thing The position of each point on body surface facial contour line.A plurality of such contour line can just be depicted the pattern of body surface.

The driving element of swing, i.e. swinging driver 5, can be a controlled motors, be put installed in upper rheme object The overall one end of detecting system.Pivot angle detector 6 is arranged on the other end of above-mentioned object space detecting system, or is driven with swinging Dynamic device 5 is arranged on same one end.The advantage of the program is, it is possible to use ready-made object space detector builds Shape measure Device.

Embodiment 2 (introduces scanning reflective mirror)

In these cases, laser 1 and imaging system are both needed to swing, and inertia is big, scan frequency is low.For this The present invention is using the structure shown in Fig. 3：Swinging driver 5 only drives a scanning reflective mirror 7, at this moment scans reflective mirror 7 by original The optical flat for coming, to be broken line along the line of A points, B points, is bent.In figure, the measured object before bending in optical flat The evolution of point P has arrived C points, that is, C points are to launch the tested object point in light path.Although the angle that optical flat is bent is received Swinging driver 5 is controlled, and C points are changeless.

Although it is worth noting that, in position detector, the swing axis of rotation 4 of reflective mirror is normal with straight line where laser beam Often it is designed to plumbness, the light path expanded view of this state is as shown in figure 4, simple to resolve model, but this is not required , intersection can be inclined completely.

If only according to the mode shown in earlier figures 2, Fig. 3, in the left and right end portions of gyroaxis wobble drive arranged in series Device 5, roll angle inspection device 6, then necessarily cause the consequence of longer dimension in the looks detector rotor shaft direction.For this present invention be given with Under several solutions, selection can be needed to use according to applied environment.

Embodiment 3 (introducing transmission mechanism)

As shown in figure 5, pivot angle detector 6 is connected firmly on gyroaxis 4, and swinging driver 5 is passed through into a driver Structure, such as a pair of gear driving pairs, is biased to the side of rotating shaft 4.Such advantage is both to have reduced the length for swinging direction of principal axis Degree, remain again angle detection device and gyroaxis be directly connected to, the advantage without corner gap.

Embodiment 4 (by transmission mechanism bulk migration swinging driver and pivot angle detector)

As shown in fig. 6, swinging driver 5 is coaxially connected firmly with pivot angle detector, then again by a transmission mechanism, example As a pair take the gear driving pair 9 for eliminating back lash measure, the side of rotating shaft 4 is integrally biased to.

Swinging driver (is moved on to centre) by embodiment 5

Developed on the basis of the embodiment 2 shown in Fig. 3, as shown in Figure 7.Still pivot angle detector 6 is connected firmly The position at the two ends on gyroaxis 4, and reflective mirror 7 is resolved into two sections, but this two sections of reflective mirrors remain in that coplanar relation. The light beam that wherein the first galvanometer 7-1 is specifically used to laser to launch is projected on object to be detected, and the second galvanometer 7-2 is special For from irreflexive light projection on object to be detected to imaging lens.Swinging driver 5 be arranged on this two sections it is reflective Between mirror, it is preferred that the position of the first galvanometer 7-1 is positioned close to, in order to avoid block the diffusing reflection light into imaging lens.

Embodiment 6 (pivot angle detector is moved on to centre, or swinging driver and angle detector move on to centre)

Developed on the basis of embodiment 5, as shown in Figure 8.Pivot angle detector 6 is also transplanted to the first galvanometer 7-1 and Between two galvanometer 7-2.Obviously, if only pivot angle detector 6 is transplanted between the first galvanometer 7-1 and the second galvanometer 7-2, and put The scheme that dynamic driver 5 is retained in outside the galvanometer of both sides also can be to take as needed.

Embodiment 7 (in intermediate application transmission device)

The biasing wobble drive or/and the thought of angle detection device being introduced into embodiment 3, embodiment 4, in embodiment 5 Or developed on the basis of 6, as shown in Figure 9.Swinging driver 5 is coaxially connected firmly with pivot angle detector, then again by a biography Motivation structure 9, takes the gear driving pair for eliminating back lash measure for such as a pair, is integrally biased to the side of rotating shaft 4.

Obviously, using two transmission mechanisms, such as two gear pairs are inclined with pivot angle detector 6 by swinging driver 5 respectively The side of gyroaxis 4 is put, is also a kind of possible arrangement for meeting certain needs.

Embodiment 8 (swinging driver is using fan-shaped motor)

Developed on the basis of embodiment illustrated in fig. 75, as shown in Figure 10.Here swinging driver 5 is designed to fan-shaped pendulum The form of dynamic motor, makes swinging driver make asymmetrical shape in itself, to reduce overall structure size.For sake of simplicity, figure In be not drawn into the stator of motor.

The characteristics of fan-shaped oscillating motor, is, on the premise of pendulum angle needed for required torque being provided, being produced, phase The bulk that is occupied to disc motor is smaller, be more suitable for being embedded between two sections of foregoing reflective mirrors.If as Fig. 7, Fig. 8 Shown in use disc motor like that, in the case where structure is extremely compact, it is possible to block the light into imaging lens Line.

The fan-shaped oscillating motor can be designed to the structure with permanent magnet as stator, and the magnetic direction of its working portion is put down In the direction of swinging axle, its rotor is a solenoid for sector to row, solenoidal diameter parallel in the axis of oscillation of reflective mirror, Wire detours along fan-shaped periphery.Figure 11 gives a kind of structure of this fan-shaped oscillating motor, wherein swinging driver can Dynamic part 5a is coil and its skeleton, and the fixed part 5b of swinging driver is permanent magnet.The magnetizing direction of the permanent magnet Parallel to swing gyroaxis 4, and left-half is opposite with the magnetizing direction of right half part.

Obviously, this fan-shaped oscillating motor scheme, may apply to any rational position, may all effectively reduce described Shape measure device is in the size perpendicular to Y direction.

Embodiment 9 (fan-shaped motor and pivot angle detector are combined and used in centre)

Developed on the basis of embodiment illustrated in fig. 10 8, as shown in figure 12.By pivot angle detector 6 be designed to fan-shaped pendulum The swinging driver 5 of dynamic motor form, is used in combination, between the first galvanometer 7-1 and the second galvanometer 7-2 to reduce gyroaxis Overall dimensions.

Embodiment 10 (is combined with fan-shaped motor using fan-shaped pivot angle detector, is reduced the size measure)

The profile of pivot angle detector 6 can also be designed to fan-shaped pivot angle inspection as treatment disc motor in embodiment 9 Device is surveyed, or substantially in sector, or any form that detected gyroaxis side can be placed on.So-called fan-shaped pivot angle detector, Refer to, if its moving part has an independent part being connected with gyroaxis, sector to be just rendered as on the whole, and it is fixed Part is then not necessarily rendered as sector.

Developed on the basis of embodiment illustrated in fig. 12 9, as shown in figure 13.By pivot angle detector 6 and fan-shaped oscillating motor Swinging driver 5 further combined with form：Pivot angle detector 6 is also designed to sector, so as to the overall dimensions of reducing mechanism. The moving part 6a of pivot angle detector 6 can be slided using the part or revolution of a part for Circular gratings or circular magnetic grid A rheostatic part, herein, is bonded directly on the moving part of swinging driver 5, extra so as to eliminate With gyroaxis coupling part.This just makes swinging driver 5 reach the degree that cannot be split and use with pivot angle detector 6.This In, as a example by using grating angle measuring principle, the moving part 6a of pivot angle detector 6 is fan-shaped dynamic grating, the dynamic grating and pendulum The rotor of dynamic driver 5 is combined into one, and the fixed part 6b of pivot angle detector 6 is grating signal detector, grating signal inspection Go out device to be combined into one with the stator of swinging driver 5, be not drawn into the stator 5b of oscillating motor for simplified form Figure 13, and Expressed in more detail in side sectional view shown in Figure 14.So substantially reduce the chi of the laser geometry contour detecting device It is very little.

Embodiment 11 (driving of swing and detection device are organically combined with imaging system)

Developed on the basis of embodiment illustrated in fig. 13 10, as shown in figure 15.

After fan-shaped swinging driver 5 is combined with fan-shaped roll angle inspection device 6, a fan-shaped plane of symmetry substantially is had, also The fan-shaped plane of symmetry can be arranged in optical flat or close according to the structure of the opticator of Shape measure device The position of optical flat.For example, by the fan-shaped swinging driver 5 in Figure 13 and the combination of fan-shaped roll angle inspection device 6, around swing Gyroaxis, the direction away from C points rotates 90 °, makes the combination towards the direction of laser 1.So can be further Reduce the overall dimensions of the topographical profiles detector.In other embodiment, using fan-shaped swinging driver 5 or/and sector In the case of roll angle inspection device 6, similar process also can be done.

Embodiment 12 (using the measure for folding light path)

Developed on the basis of embodiment illustrated in fig. 13 10, as shown in figure 16.

Introduce reflective mirror 11, laser can be arranged in be conducive to reduce left and right directions, that is, A-D directions size position Put, for example, be arranged in top.If further, introducing reflective mirror 12, imaging lens 2, laser spot detection device 3 can be also arranged in Be conducive to the position for reducing left and right directions size, such as in Figure 16, be arranged in top.According to practical structures, it is also possible to The miniaturization of the Shape measure device is realized using the measure of more complicated folding light path.

Embodiment 13 (laser beam combination laser spot detection device realizes that pivot angle is detected)

Pivot angle detector 6 can also be combined and realized with laser spot detection device using laser beam.For example, shown in Figure 17, using One laser beam, a reflective mirror 6a-1 and a laser spot detection device 6b-2；Reflective mirror 6a-1 can equivalent to pivot angle detector Dynamic part 6a, is fixed on swing gyroaxis 4, after the laser beam is reflected by reflective mirror 6a-1, projects laser spot detection device 6b-2 On, the degree being deflected with hot spot detector 6b-2 detection laser beams, so as to judge to swing the angle of gyroaxis.

The laser beam can be from independent laser 6b-1, it is also possible to be with a beam splitter as shown in figure 18 6b-3, separates sub-fraction light from the laser beam for generation hot spot, then the reflective mirror of light path is folded by one side 6b-4, by the laser beam projects to reflective mirror 6a-1.

Embodiment 14 (selects detection range interested) by the receiving light path reflecting element for folding light path system

Developed on the basis of embodiment illustrated in fig. 16 12.In order to simplification eliminates reflective mirror 11, and imaging moiety is discussed Light path.It is the top view of Shape measure device shown in the left side of Figure 19, the deploying portion of light path is represented by dotted lines in figure.If with E-p straight lines rotate counterclockwise reflective mirror 12 for axle, then visual angle β is increased, and have just obtained measurement range P1-P2 and have reduced and detect and divide Resolution Shape measure device higher, as shown in the right side of Figure 19.Also i.e., it is possible to the reflective unit of receiving light path that light path system will be folded Part is designed to the form of rotatable regulation, so as to conveniently realize the purpose of selection detection range interested.

Embodiment 15 (screw mounting hole of laser spot detection device is designed to elongated slot, directly finely tunes laser spot detection device installation site)

Figure 20 is perpendicular to photaesthesia unit orientation, i.e. perpendicularly to the section in p1-p2 directions, is saved in order to succinct Imaging lens have been omited to be not drawn into.Under current state, do not fall correctly in the photaesthesia position of laser spot detection device 3 as hot spot p It is upper, it is necessary to by laser spot detection device 3 to left, therefore, the screw mounting hole of laser spot detection device 3 has been changed system into elongated slot 3-1.Also That is, the measure of the directly installation site of micro-adjustment laser spot detection device 3 is taken.

Embodiment 16 (by adjust the position of light path turning point and Indirect method facula position)

Developed on the basis of embodiment illustrated in fig. 16 12.Figure 21 is the generalized section of plane where point B, E, p.Working as Under preceding state, do not fall correctly as hot spot p on the photaesthesia position of laser spot detection device 3, it is necessary to excessively straight where by light beam The line E-p and plane perpendicular to paper is adjusted to dotted line position to the right, therefore, reflective mirror 12 is made the shape that can be adjusted up and down Formula；Obviously can also be made can left and right adjustment form.That is, the position by adjusting light path turning point E is taken, and it is indirect The measure of ground micro-adjustment facula position p, is more convenient for installing and adjusts.

Embodiment 17 (finely tunes laser spot detection device position using eccentric bushing) indirectly

Developed on the basis of embodiment illustrated in fig. 16 12.Figure 22 is the schematic cross-sectional view of plane where point B, E, p.Working as Under preceding state, do not fall correctly as hot spot p on the photaesthesia position of laser spot detection device 3, it is necessary to by laser spot detection device 3 to the left Translation, therefore, laser spot detection device 3 increased into an eccentric bushing 3-2, has been made the shape that can be rotated around E-p straight lines and adjusted Formula.Figure 23 is the top view of the mechanism.The offset very little of eccentric bushing 3-2, can cover the departure for needing adjustment.In order to Perpendicular to B-E straight lines, eccentric bushing can not be formed integrally straight line where keeping photaesthesia unit with photaesthesia unit, but in bias Can be rotated in set, so that in eccentric sleeves, itself can be compensated towards rightabout.With the center generation of laser spot detection device 3 Its position of table, as shown in FIG., by above-mentioned adjustment, although the point is not accurately adjusted p points, but it is slightly on the lower side, But, to detection performance without influence substantially, only the detection range of target is slightly displaced from design attitude for this.That is, The present embodiment takes the angle by eccentric sleeves 3-2, so that the measure of the position of micro-adjustment laser spot detection device 3 indirectly, Can meticulously adjustment position, be easily installed and adjust.

Embodiment 18 (optimization of position of bearings)

The Support Position for swinging gyroaxis 4 also should rationally be designed, and can just accomplish compact conformation.As shown in figure 24, by One bearing and second bearing are located at two ends, and the overall size of Y direction is just long.As shown in figure 25, by clutch shaft bearing and second bearing All it is located between two galvanometers, the overall size of Y direction is most short, but is so likely to result in second bearing 4-2 and blocks from thing The diffusing reflection light of hot spot enters the second galvanometer 7-2, although be can't see from this simply illustrative figure.Consider selection This scheme can be used, can just be used when only visual angle β is less.

It is closer to the distance for measured object, until distance is not very remote most of application scenarios, it is preferred that such as Figure 26 institutes Show, it should clutch shaft bearing 4-1 is arranged between two sections of galvanometers, at the first galvanometer 7-1, and second bearing 4-2 is arranged on Outside two sections of galvanometers, at the second galvanometer 7-1, useful light will not be both blocked, cause that Y direction is compact again.

Embodiment 19 (size selection and concrete structure of bearing)

The further evolution on the basis of embodiment 18, as shown in figure 27.

Because projection laser beam is very thin, the first galvanometer 7-1 need not be very wide, and the internal diameter of the clutch shaft bearing 4-1 can be made big In the width of the first galvanometer 7-1, the size of clutch shaft bearing internal diameter also will not be very big.This thought also has in more detail in fig. 14 Expression.

Since it is desired that receive diffusing reflection laser dispersion, it is necessary to larger area reception light the second galvanometer 7-2, in order to subtract Small overall dimensions, the second bearing 4-2 is set one of in the following way：

Mode 1：Width of the external diameter of second bearing 4-2 more than the second galvanometer 7-2, its outer shroud directly connects with fixed part Connect, at this moment to select very frivolous bearing, to reduce rotary inertia；

Mode 2：The external diameter of second bearing 4-2 is less than the width for receiving the second galvanometer 7-2, and its outer shroud is big by an external diameter In the transition rings 4-3 of the width of the second galvanometer 7-2, it is connected with fixed part, the effect for reducing rotary inertia can be more preferable.

Take above method, it is possible to achieve two galvanometers are first installed, then axle has been pre-installed first against Y direction insertion In the main body of bearing, accomplish simple structure, easy for installation.

Embodiment 20 (uses narrow band pass filter)

Optical filtering measure can be taken in the contour detecting device to improve environment resistant light interference performance.Such as Fig. 7, Figure 10 Shown in figure, optical filter 8 allows the light high transmittance ground of optical maser wavelength to pass through here, and the ambient light of other frequencies, then obtain Very strong decay.

Claims (25)

1. laser geometry detector, is characterized in, including：One laser；One imaging lens；One laser spot detection device；One Individual swing gyroaxis, the axis for defining the swing gyroaxis is Y-coordinate axle；One swinging driver；One pivot angle detector；One Individual signal processor；

Laser launches narrow laser beam, and concentrating element is may further include inside it, straight line where the laser beam for being sent, with The primary optical axis of imaging lens is coplanar, referred to as optical flat；In laser spot detection device, in optical flat, a row is at least arranged Photaesthesia unit；

The axis for swinging gyroaxis is located in the optical flat；

Laser beam projects form irreflexive object light spot on object to be detected, and the irreflexive light of object light spot is by imaging lens Focus on, shape imaging facula on the photaesthesia unit in laser spot detection device, laser spot detection device produces the photosignal of correspondence position；

Laser, or laser and collimation optics, constitute light emission system；Imaging lens constitute light and connect with laser spot detection device Receipts system；It is overall around swing gyroaxis swing that the two systems are formed；Swinging driver drives the Integral swinging, pivot angle inspection Survey the corner that device detection swings；Swinging driver and pivot angle detector are separately positioned on the overall two ends, or to be all disposed within this whole Same one end of body；

Signal processor receives the swing angular signal that photosignal and roll angle inspection device are monitored, calculates a series of being detected The position of the object light spot on object.

2. laser geometry detector according to claim 1, is characterized in, also including transmission mechanism, and is arranged by following One of apply arrangement swinging driver and pivot angle detector：

Measure 1：Swinging driver is coaxially connected firmly with swinging axle, and pivot angle detector is offsettingly installed by the transmission mechanism in the gap that disappears In the side of swinging axle；

Measure 2：Pivot angle detector is coaxially connected firmly with swinging axle, and swinging driver is offsettingly arranged on swinging axle by transmission mechanism Side；

Measure 3：Connect firmly coaxial with pivot angle detector of swinging driver is integrally formed, then should by the transmission mechanism in the gap that disappears Integral biasedly installed in the side of swinging axle.

3. laser geometry detector according to claim 1, is characterized in, the swinging driver is an electricity for sector Machine.

4. laser geometry detector according to claim 1, is characterized in, the pivot angle detector is an angle for sector Degree detector.

5. laser geometry detector according to claim 1, is characterized in, the swinging driver is an electricity for sector Machine, the pivot angle detector is a roll angle inspection device for sector, and the swinging driver and the pivot angle detector knot It is integrated, it is impossible to which fractionation is used.

6. the laser geometry detector according to claim 4 or 5, is characterized in, pivot angle detector is the light of sector structure Grid-type roll angle inspection device.

7. laser geometry detector according to claim 1, is characterized in, including a scanning reflective mirror；Wobble drive Device is only swung with the scanning reflective mirror around gyroaxis is swung, and light emission system is maintained static with optical receiver system；Scanning The reflecting surface of reflective mirror is by swinging the axis of gyroaxis；

The laser beam that laser sends, first through mirror reflection, then projects on object to be detected, formation hot spot；Object light The irreflexive light of spot returns to reflective mirror, then secondary reflection, is then focused on laser spot detection device by imaging lens and forms picture Hot spot.

8. laser geometry detector according to claim 7, is characterized in, scanning reflective mirror be divided into two sections it is coplanar Reflective mirror, wherein the light beam that the first galvanometer is used to laser launch projects object to be detected, the second galvanometer is used for handle From in irreflexive light projection on object to be detected to imaging lens；

Define the positive direction of the Y-coordinate axle and the second galvanometer pointed to by the first galvanometer, the origin of Y-axis where laser beam straight line with The intersecting part of first galvanometer；

The swinging driver takes one of in the following manner to set with the pivot angle detector：

Mode 1, swinging driver is arranged on the position of close first galvanometer between this two sections of reflective mirrors；Pivot angle detector is arranged on Outside two sections of reflective mirrors；

Mode 2, pivot angle detector are arranged on the position of close first galvanometer between this two sections of reflective mirrors；Swinging driver is arranged on Outside two sections of reflective mirrors；

Mode 3, swinging driver and pivot angle detector are arranged at the position of close first galvanometer between this two sections of reflective mirrors；

Mode 4, swinging driver and pivot angle detector are arranged at the position of close first galvanometer between this two sections of reflective mirrors；And And transmission mechanism is employed, by swinging driver or/and pivot angle detector offsettingly installed in the side of swinging axle.

9. laser geometry detector according to claim 8, is characterized in, also includes that an angle measurement is used in pivot angle detector Laser beam, an angle measurement reflective mirror, and an angle measurement hot spot detector；The angle measurement reflective mirror is fixed on swing revolution Axle, after the angle measurement laser beam is by the angle measurement mirror reflection, projects on the angle measurement hot spot detector, with described Angle measurement hot spot detector detects the deflected degree of the angle measurement laser beam, so as to judge to swing the angle of gyroaxis.

10. laser geometry detector according to claim 7, is characterized in, employs folding light path system, the folding Light path system includes receiving light path reflecting element, and/or transmitting light path reflecting element；By the folding light path system, will be into As camera lens, and/or laser spot detection device, and/or the laser, it is arranged on and is adapted to reduce the laser geometry detector entirety chi Very little position.

11. laser geometry detectors according to claim 10, are characterized in,

If the folding light path system includes transmitting light path reflecting element, the laser beam that the laser sends, first through institute The transmitting light path reflecting element for folding light path system is stated, direction of transferring is irradiated on the first galvanometer, and pass through this again afterwards Straight line where laser beam after turnover intersects vertically with axis of rotation；

If not including transmitting light path reflecting element in the folding light path system, the laser beam place for sending laser is straight Line, directly intersects vertically with axis of rotation；

The laser beam place straight line that definition directive penetrates the first galvanometer is X-coordinate axle, and the positive direction of X-axis is the advance side of laser beam To；The rectangular coordinate system in space of right-handed system is set up according to the X, Y-coordinate axle, so as to generate Z coordinate axle；

If the folding light path system includes transmitting light path reflecting element, laser is placed in the negative direction side of Z coordinate axle, Or straight line where the outgoing beam of laser is placed in the positive direction side parallel to Y-coordinate axle, Y-axis；

The receiving light path reflecting element for folding light path system, the primary optical axis of imaging lens is adjusted to parallel to Z coordinate axle Direction, and imaging lens and laser spot detection device are placed in the negative direction side of Z coordinate axle.

12. laser geometry detectors according to claim 11, are characterized in, the receiving light path for folding light path system Reflecting element, can be the primary optical axis weight of this adjustment axis and imaging lens around an axis trimming parallel to Z axis Close, or close to and parallel to the primary optical axis of imaging lens.

13. laser geometry detectors according to claim 11, are characterized in, the receiving light path for folding light path system Reflecting element, can be translation fine setting, and the direction of its fine setting is along the incident direction for penetrating laser beam thereon or goes out Penetrate direction.

The 14. laser geometry detector according to claim 12 or 13, is characterized in, described to fold connecing for light path system Receive light path reflecting element and employ cylindrical 45 ° of oblique angle reflective mirrors.

15. laser geometry detectors according to claim 11, are characterized in, the receiving light path for folding light path system Reflecting element, is 45 ° of oblique angle reflective mirrors of a cylinder；The axis of its cylinder and the key light overlapping of axles of imaging lens, cylinder can Rotatably adjusted with around an axis parallel to Z axis, and this cylinder can also translationally along the outgoing side of laser beam To fine setting, can be locked after adjustment.

16. laser geometry detectors according to claim 1, are characterized in, the laser spot detection device is installed using screw, The hole of its mounting screw is perpendicular to the elongated slot of photosensitive unit orientation.

17. laser geometry detectors according to claim 1, are characterized in, the laser spot detection device is inclined by one Heart set adjustment position；

The axis of the interior cylindrical hole of the eccentric bushing and the diameter parallel of external cylindrical surface, laser spot detection device can be in eccentric bushing The axis of cylindrical hole is rotatably adjusted；The axis of the external cylindrical surface of eccentric bushing and the key light overlapping of axles of imaging lens, eccentric bushing is then Can rotatably be adjusted around the primary optical axis of imaging lens；Locked after adjustment, prevent laser spot detection device from being rotated around any axle.

18. laser geometry detectors according to claim 8, are characterized in, it swings gyroaxis by clutch shaft bearing and the Two bearings, clutch shaft bearing is arranged between the first galvanometer and the second galvanometer, is close at the first galvanometer, and second bearing is arranged on The outside of the second galvanometer.

19. laser geometry detectors according to claim 18, are characterized in, the internal diameter of the clutch shaft bearing is more than first The width of galvanometer；

The second bearing is set one of in the following manner：

Mode 1：The external diameter of second bearing is more than the width of the second galvanometer, and its outer shroud is directly connected with fixed part；

Mode 2：The external diameter of second bearing is less than the width of the second galvanometer, width of its outer shroud by an external diameter more than the second galvanometer The transition rings of degree are connected with fixed part.

20. laser geometry detectors according to claim 1, are characterized in, in the light path for receiving, convergence diffuses In, at least 1 narrow-band pass filter is employed, its thang-kng frequency is consistent with the glow frequency of laser.

21. laser geometry detectors according to claim 1, are characterized in, the laser spot detection device is CCD or CMOS figures As sensor.

22. laser geometry detectors according to claim 1, are characterized in, signal processor provides figure to external world As signal and pivot angle signal.

23. laser geometry detectors according to claim 1, are characterized in, signal processor provide to external world by Measuring point coordinate value.

24. laser geometry detectors according to claim 1, are characterized in, signal processor receives to set working condition The information of the outside input of parameter；

Wherein normal operation state parameter information includes：Scan frequency, scan amplitude angle, scan angle center and Z coordinate axle Angle；

Wherein particular job state parameter information includes：Scan frequency is 0Hz, scan amplitude is 0 ° of angle, scan angle center and Z The angle of reference axis.

25. laser geometry detectors according to claim 1, are characterized in, signal processor directly passes through external signal Set and control the luminous intensity of laser, or light is sent by analyze that the information of laser spot detection device automatically controls laser Intensity.