CN102323656A - High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge - Google Patents
High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge Download PDFInfo
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Abstract
The invention discloses a high-frequency response two-dimensional micro angular deflection control reflector based on a double-shaft flexible hinge, and belongs to a light beam control device. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge comprises a reflector, a two-dimensional deflection mechanism based on the double-shaft flexible hinge, a drive mechanism and a control system, wherein the reflector is fixedly assembled on a rigid platform of the two-dimensional deflection mechanism based on the double-shaft flexible hinge; an incident light beam is emitted after being reflected by the reflector; and the control system controls a positive micro drive mechanism and a negative micro drive mechanism to push the rigid platform at a high speed along a negative position and a positive position respectively at symmetric positions, so that the reflector on the rigid platform deflects at a micro angle to realize the direction control of the emitted light beam; and a displacement sensor of the control system feeds the rotation angle information of the reflector back to a computer system to adjust the micro deflection angle of the reflector in real time. The high-frequency response two-dimensional micro angular deflection control reflector based on the double-shaft flexible hinge has the characteristics of no-coupling and no-axial translation in a two-dimensional deflecting direction, and high response speed.
Description
Technical field
The invention belongs to the Beam Control technical field, relate generally to a kind of little angle swing control of high frequency sound two dimension catoptron based on the shaft flexible hinge.
Background technology
Little angle swing control catoptron is usually used in the optical system, the quick angle deflection of control bundle, and the correction for direction of realizing light beam is with stable.As being used to proofread and correct the integral inclination of Beam Wave-Front in the ADAPTIVE OPTICS SYSTEMS; The aligning that is used in the wireless light communication technical field realize light beam is with stable; Be used for the large area scanning of laser beam in the laser radar and to the slewing and the tracking of target; Be used to realize the stable of beam direction in superlaser and the precise alignment field.In the application of these optical systems; In order to improve the Beam Control precision; Obtain good compensation, tracking and control effect; Require the quick deflection control device of light beam must have the high angular deflection sensitivity and the ability of response fast, promptly high angular sensitivity and high frequency sound, and require to have simultaneously bigger angle scanning scope in some occasions such as laser radars.
At present, the quick deflection control method of light beam includes the mechanical type beam deflector, and the traditional mechanical beam deflector is based on mainly that universal joint or flexible hinge structure realize, is the more a kind of beam deflection mode of using at present.
The gimbals structure is that catoptron is installed on the gimbals; Rotation through gimbals drives the deflection at any angle of catoptron realization outgoing beam, and the advantage of gimbals structure is to realize the beam deflection of very big space angle, but carries out the deflection control of light beam with this gimbals structure; All need operate whole frame; Because rack construction inertia is big, frequency band is narrow, low-response; Reach high precision than difficulty, only be fit to do the beam deflection control under medium accuracy or the low speed situation.
Little angle swing control catoptron based on the flexible hinge structure has characteristics such as compact conformation, no frictional dissipation; Utilize piezoelectric ceramics or voice coil motor driver to promote flexible hinge or directly promote catoptron and realize angular deflection; Owing to adopt the piezoelectric ceramics or the voice coil motor driver of high displacement sensitivity; Can realize very high beam deflection sensitivity, but the response speed during its quick deflection often receives the resonance frequency restriction of flexible hinge self, the resonance frequency that how to improve flexible hinge is the problem that needs research; And the flexible hinge structure is easy to generate coupling on the two-dimensional deflection direction when carrying out two dimension angular deflection.
People such as the Li Xinyang of Photoelectric Technology Inst., Chinese Academy of Sciences have made the two-dimensional high speed tilting mirror of single-point flexible support unsymmetric structure; The dynamic mathematical models of high speed inclined mirror mechanical resonant have been set up according to measurement data; Propose to adopt the network filtering technology to reduce the mechanical resonant of inclined mirror, make the control stiffness of high speed inclined mirror and control bandwidth all obtain bigger improvement.But this method does not solve the problem of mechanical resonant from system architecture; And the dynamic mathematical models in this method directly can have influence on the effect of network filtering; Set up relatively difficulty of accurate dynamic mathematical model, limited the further raising of control stiffness and bandwidth.
People such as the Zhu Heng of Photoelectric Technology Inst., Chinese Academy of Sciences propose a kind of analysis of fast piezo steering mirror based on the thin plate radial support; Added the thin plate radial support at eyeglass and driver junction; In order to the restriction radial deflection; Increase axial rigidity simultaneously, the integral rigidity that has effectively improved tilting mirror distributes, and has improved the resonance frequency of original structure tilting mirror.But structure is complicated, and is higher to installation requirement, and drive point is less apart from the distance of catoptron center of rotation, has limited the angular resolution of system.
People such as National University of Defense Technology model roc are at patent of invention " based on the light beam precision pointing device of the resolution multiplied compliant mechanism " (application number: CN 101794020.A) of application in 2010; The resolution multiplied lever construction of a kind of employing is proposed; The characteristics of the proportional variation of two ends displacement of utilization multiplication lever improve the angular resolution of system; Have characteristics such as compact conformation, bearing accuracy height, angular resolution height; But because parallel conductive is chip architecture of the spring to the flexible hinge of compliant mechanism and resolution multiplied lever, the response speed of system is lower, can't under the situation that needs respond fast, use.
New mechanical formula beam deflector mainly contains decentered lens formula, rotating prism formula, eccentric microlens array formula, controlled microprism array formula.
The decentered lens formula beam deflector that people such as the J.Gibson of U.S. Dayton university propose; With confocal placement of former and later two lens; Previous lens are fixed; Through of the angular deflection of back lens with respect to the transverse translation realization outgoing beam of last lens, compare with the traditional mechanical deflection structure, have optical axis, the big characteristics such as (can reach 45 °) of deflection angle without spin; The national dedicated fiducial device that is used for the linearity measurement of planeness that the USSR (Union of Soviet Socialist Republics) sets up is used a kind of same structure; Incident beam is converted into the translation of outgoing beam through the translation of back lens with respect to the angle variation of optical axis; Realize the angular deflection of outgoing beam, to reach the purpose of proofreading and correct the beam angle drift value with respect to incident beam; People such as J.Gibson also propose a kind of rotary wedge lens type beam deflector, and the diffusing prism wedge of two two gummeds colour killing is placed relatively, and two prism wedges are that turning axle rotatablely moves as circumference with the incident beam, realize the deflection of outgoing beam direction; More than two kinds of beam deflectors all can reach resolving power 1mrad, deflection speed 1rad/s and greater than 45 ° two dimension angular range of deflection.Owing to adopt the motion realization beam deflection of lens, prism wedge in the device; Volume, quality and power consumption do not improve; The beam deflection response speed is difficult to be improved, and the two-dimension translational of lens is easy to generate coupling, the complicacy of control procedure that rotatablely moves of two prism wedges.
The A.Akatay of Turkey Koc university and H.Urey propose a kind of high resolution microlens array beam deflector that adopts binary optical to make; By a pair of spacing is that several microns microlens array is formed, and preceding group is positive lens, and the back group is negative lens; Collimated light focuses on behind positive lens; Become collimated light again through negative lens then, when producing horizontal relative motion between the positive and negative lens arra, the direction of outgoing collimated light beam will deflect.Utilize micro optical element to replace the traditional optical element; Can reduce volume, quality and the power consumption of beam deflection system effectively, this lens only need very little relative displacement output beam will produce very big angular deflection, and lens arra is more little; It is just more little to reach the required relative displacement of identical deflection; Therefore the sweep speed of this scanner can reach very high, but scanning angle less relatively (can reach the several years), transmitance is low; The manufacture craft of micro optical element is the key factor of its performance of decision, and is still immature in the practical applications at present.
People such as the N.R.Smith of U.S. Cincinnati university propose the beam deflection device of the wetting little prism wedge of a kind of electricity (EMPs); The fluent material of certain refractive index of in microdischarge cavities, packing into, liquid ground connection, the both sides of cavity are two battery lead plates; When two-plate is imposed different voltages with different; Liquid upper surface in the cavity will constitute the angle of wedge with the liquid bottom surface with the different inclined-planes that demonstrate different angles of polar plate voltage, become a little prism wedge that the angle of wedge is controlled; Change the angle of wedge of little prism wedge through the polar plate voltage of control cavity both sides, realize deflection control the light beam shooting angle.The maximum deflection angle of light beam is relevant with the refractive index of used fluent material in the method, and the beam deflection scope that is realized can reach 30 °, and response speed is a Millisecond; Because making, the existence of cavity wall has loss to a certain degree when light beam passes through in this method; Voltage during use between the battery lead plate of cavity wall both sides need reach tens volts, and in order to increase the beam deflection angle, the voltage difference between the needs increase battery lead plate is to increase the angle of wedge of the little prism wedge of liquid; And the spacing between the battery lead plate is micron to a millimeter magnitude; Thereby in cavity, form very strong electric field, cause puncture easily, and the manufacturing process more complicated of this device.
Summary of the invention
The object of the invention is exactly in order to overcome the deficiency of prior art, and a kind of little angle swing control of high frequency sound two dimension catoptron based on the shaft flexible hinge is provided, and reaches rapid dynamic response speed, can realize the purpose of two-dimentional little angular deflection simultaneously.
The objective of the invention is to realize like this:
A kind of little angle swing control of high frequency sound two dimension catoptron based on the shaft flexible hinge; On the base upper surface, install the shaft flexible hinge; Rigid platfor vertically places on the output terminal of shaft flexible hinge; And around the shaft flexible hinge two-dimentional little angular deflection takes place, constitute two-dimensional deflection mechanism by base, shaft flexible hinge and rigid platfor; Catoptron fits on the rigid platfor upper surface admittedly, and catoptron, rigid platfor, shaft flexible hinge and center are coaxial; Driving mechanism is made up of four piezoelectric ceramic actuators, corresponding drive power supply for piezoelectric ceramics and securing member; Wherein four piezoelectric ceramic actuators are uniformly distributed with through securing member and are fitted on the base; And corresponding two piezoelectric ceramic actuators constitute one group, and two groups of piezoelectric ceramic actuators are provided with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge respectively; Four displacement transducers and computer system constitute control system, and described four displacement transducers are fitted on the base with respect to shaft flexible hinge symmetry, and with the rigid platfor contact matching; Lead is communicated with displacement transducer with drive power supply for piezoelectric ceramics, drive power supply for piezoelectric ceramics with computer system host, computer system host respectively with piezoelectric ceramic actuator.
Piezoelectric ceramic actuator and drive power supply for piezoelectric ceramics are respectively electrostrictive actuator and drive source or magnetic telescopic driver and drive source or voice coil motor driver and drive source in the two-dimentional little angle swing control catoptron of described high frequency sound based on the shaft flexible hinge.
Described is capacitive transducer or inductance sensor or current vortex sensor based on displacement transducer in the little angle swing control of the high frequency sound two dimension catoptron of shaft flexible hinge.
Distinguishing feature of the present invention and advantage are:
1, the present invention adopts the shaft flexible hinge to realize little angular deflection of two-dimensional quadrature direction, utilizes the shaft flexible hinge on the two-dimensional quadrature yawing moment, not produce angle coupling and interference, can produce high sensitivity micro-angular displacement accurately;
2, on the two-dimensional deflection direction, utilize respectively among the present invention dual drive in symmetric position respectively along the both forward and reverse directions driven in synchronism, catoptron is had does not have at a high speed hysteresis dynamic tracking response characteristic; Through optimizing the width and the thickness of shaft flexible hinge, can when two-dimensional deflection, obtain on all four response characteristic; And shaft flexible hinge greatly axial rigidity can limit the axial displacement of catoptron when deflection.
Description of drawings
Fig. 1 is the overall assembly structure synoptic diagram of the present invention;
Fig. 2 is the overall disassemblying structure synoptic diagram of the present invention;
Fig. 3 is base and shaft flexible hinge among Fig. 1, rigid platfor assembling syndeton synoptic diagram;
Among Fig. 4 (a) be base and shaft flexible hinge among Fig. 1, rigid platfor assembling syndeton y to front elevation, be that base assembles syndeton x to front elevation with shaft flexible hinge, rigid platfor among Fig. 1 (b);
Piece number explanation among the figure: 1, catoptron, 2, rigid platfor, 3, piezoelectric ceramic actuator, 4, base, 5, the shaft flexible hinge, 6, displacement transducer, 7, securing member, 8, drive power supply for piezoelectric ceramics, 9, computer system.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the present invention is described in detail.
A kind of little angle swing control of high frequency sound two dimension catoptron based on the shaft flexible hinge; On base 4 upper surfaces, install shaft flexible hinge 5; Rigid platfor 2 vertically places on the output terminal of shaft flexible hinge 5; And around shaft flexible hinge 5 two-dimentional little angular deflection takes place, constitute two-dimensional deflection mechanism by base 4, shaft flexible hinge 5 and rigid platfor 2; Catoptron 1 fits on rigid platfor 2 upper surfaces admittedly, and catoptron 1, rigid platfor 2, shaft flexible hinge 5 and base 4 centers are coaxial; Driving mechanism is made up of four piezoelectric ceramic actuators 3, corresponding drive power supply for piezoelectric ceramics 8 and securing member 7; Wherein four piezoelectric ceramic actuators 3 are uniformly distributed with through securing member 7 and are fitted on the base 4; And corresponding two piezoelectric ceramic actuators 4 constitute one group, and two groups of piezoelectric ceramic actuators 4 are provided with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge 5 respectively; Four displacement transducers 6 constitute control system with computer system 9, and described four displacement transducers 6 are fitted on the base 4 with respect to shaft flexible hinge 5 symmetries, and with rigid platfor 2 contact matching; Lead is communicated with displacement transducer 6 with drive power supply for piezoelectric ceramics 8, drive power supply for piezoelectric ceramics 8 with computer system 9 main frames, computer system 9 main frames respectively with piezoelectric ceramic actuator 3.
Piezoelectric ceramic actuator 3 is respectively electrostrictive actuator and drive source or magnetic telescopic driver and drive source or voice coil motor driver and drive source with drive power supply for piezoelectric ceramics 8.
During operation, as a certain space angle (α of needs catoptron 1 deflection
x, α
y) time, four road output voltages of control system control piezoelectric ceramics power supply 8 drive four piezoelectric ceramic actuators 3 respectively; The drive point of piezoelectric ceramic actuator 3 on rigid platfor 2 is L apart from the distance at rigid platfor 2 centers, and 3 two one group of four piezoelectric ceramic actuator is placed with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge 5 respectively; Two piezoelectric ceramic actuators 3 in each group are all worked with differential mode; Promptly one positive-displacement takes place, and negative sense displacement takes place for another, and the two displacement is identical; In the opposite direction, amount of displacement is respectively: sx=L * tan α
x, s
y=L * tan α
yPiezoelectric ceramic actuator 3 promotes rigid platfor 2 and makes catoptron 1 generation space angular deflection around the center; Four displacement transducers are worked with differential mode respectively for 6 two one group; The corner information of rigid platfor 2 is fed back to computer system 9; Computer system 9 is controlled the displacement of piezoelectric ceramic actuator 3 outputs in real time according to the corner information of displacement transducer 6 feedbacks, thereby accurately adjusts the deflection angle of catoptron 1.The present invention has two-dimentional light beam deflection control ability, does not have coupling, no axial translation in the deflection of two-dimensional directional, and on two-dimensional directional, has identical dynamically quick tracking response ability.
Claims (3)
1. catoptron is controlled in the little angle swing of high frequency sound two dimension based on the shaft flexible hinge; It is characterized in that: on base (4) upper surface, install shaft flexible hinge (5); Rigid platfor (2) vertically places on the output terminal of shaft flexible hinge (5); And around shaft flexible hinge (5) two-dimentional little angular deflection takes place, constitute two-dimensional deflection mechanism by base (4), shaft flexible hinge (5) and rigid platfor (2); Catoptron (1) fits on rigid platfor (2) upper surface admittedly, and catoptron (1), rigid platfor (2), shaft flexible hinge (5) and base (4) center are coaxial; Driving mechanism is made up of four piezoelectric ceramic actuators (3), corresponding drive power supply for piezoelectric ceramics (8) and securing member (7); Wherein four piezoelectric ceramic actuators (3) are uniformly distributed with through securing member (7) and are fitted on the base (4); And corresponding two piezoelectric ceramic actuators (4) constitute one group, and two groups of piezoelectric ceramic actuators (4) are provided with respect to the orthogonal deflection rotational symmetry of shaft flexible hinge (5) respectively; Four displacement transducers (6) and computer system (9) constitute control system, and described four displacement transducers (6) are fitted on the base (4) with respect to shaft flexible hinge (5) symmetry, and with rigid platfor (2) contact matching; Lead is communicated with displacement transducer (6) with drive power supply for piezoelectric ceramics (8), drive power supply for piezoelectric ceramics (8) with computer system (9) main frame, computer system (9) main frame respectively with piezoelectric ceramic actuator (3).
2. the little angle swing control of the high frequency sound two dimension catoptron based on the shaft flexible hinge according to claim 1 is characterized in that piezoelectric ceramic actuator (3) and drive power supply for piezoelectric ceramics (8) are respectively electrostrictive actuator and drive source or magnetic telescopic driver and drive source or voice coil motor driver and drive source.
3. the little angle swing control of the high frequency sound two dimension catoptron based on the shaft flexible hinge according to claim 1 is characterized in that displacement transducer (6) is capacitive transducer or inductance sensor or current vortex sensor.
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