CN206123961U - Fine cutting process system of hard brittle material - Google Patents
Fine cutting process system of hard brittle material Download PDFInfo
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- CN206123961U CN206123961U CN201621054261.2U CN201621054261U CN206123961U CN 206123961 U CN206123961 U CN 206123961U CN 201621054261 U CN201621054261 U CN 201621054261U CN 206123961 U CN206123961 U CN 206123961U
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Abstract
The utility model discloses an is fine cutting process system of hard brittle material by machinery it constitutes through connecting to detect integration system and control system, machinery detect the integration system, including the fuselage main part, the fuselage main part by the frame and the stand of connecting perpendicularly on the frame upper surface constitute, be provided with X axle direction feed unit on the upper surface of frame, connect Y axle direction feed unit on the X axle direction feed unit, be provided with fine setting flat unit in XY plane on the Y axle direction feed unit, be provided with the workstation on the flat unit of XY plane fine setting, be provided with Z axle direction feed unit, spindle unit on the stand respectively, X axle direction feed unit, Y axle direction feed unit and the flat unit of XY plane fine setting all are connected through tow chain b and control mechanism, and Z axle direction feed unit, spindle unit all are connected through tow chain an and control mechanism. The utility model discloses a fine cutting process system of hard brittle material has solved the problem to the hard fragile fine cutting process in material plasticity territory difficulty.
Description
Technical field
This utility model belongs to materials processing technology field, and in particular to a kind of hard brittle material micro-cutting system of processing.
Background technology
With the fast development of scientific application technology, many hard brittle materials are due to the superiority better than common material
Can so as to be increasingly widely applied in fields such as Aero-Space.
It is more representative to have quartz glass, carborundum, silicon and ceramics etc. in hard brittle material, compared to common material
For, they are respectively provided with high rigidity, high heat conductance, wear-resistant, high temperature resistant, chemical stability is good, be difficult oxide etch and low grade fever
The advantage of the coefficient of expansion.But, the characteristics of there is hard fragility due to hard brittle material itself, cause conventional machining to be stranded very much
It is difficult.
In recent years, scholar Jing researchs confirm：The plastic region machining of these materials can be realized in miniature scale, i.e.,
When critical cutting depth of the cutting depth less than the crisp transformation of modeling of the material, it is capable of achieving the same similar to conventional metal material
Plasticity cutting is processed, and can substantially reduce surface defect.
Utility model content
The purpose of this utility model is to provide a kind of hard brittle material micro-cutting system of processing, is solved to hard brittle material
The problem of plastic region micro-cutting processing difficulties, the micro-cutting for realizing different hard brittle materials in its plastic region is processed.
The technical scheme that this utility model is adopted is, a kind of hard brittle material micro-cutting system of processing, by machinery-detection
Integral system and control system Jing are connected and composed；Machinery-detection integral system, includes fuselage main body, fuselage main body by
Horizontally disposed support and the column being vertically connected on frame upper surface are constituted；X-direction is provided with the upper surface of support
Feed unit, is connected with Y direction feed unit on X-direction feed unit, on Y direction feed unit X/Y plane is provided with
Micro- leveling unit, on the micro- leveling unit of X/Y plane workbench is provided with；Be respectively arranged with column Z-direction feed unit,
Main axle unit, and Z-direction feed unit is connected with main axle unit；X-direction feed unit, Y direction feed unit and XY
The micro- leveling unit of plane is connected by drag chain b with controlling organization, Z-direction feed unit, main axle unit by drag chain a with
Controlling organization connects.
The characteristics of this utility model, also resides in：
Controlling organization, includes computer, and computer is fed respectively by wire with X-direction feed unit, Y direction
Unit, the connection of Z-direction feed unit；Computer is also respectively by wire and one-dimensional micro-nanometer mobile platform drive control electricity
The connection of source, mechanical encapsulation formula drive power supply for piezoelectric ceramics and motor drive power supply；One-dimensional micro-nanometer mobile platform drive control
Power supply is connected by wire with Z-direction feed unit, and mechanical encapsulation formula drive power supply for piezoelectric ceramics is by wire and X/Y plane
Micro- leveling unit connection, motor drive power supply is respectively by wire and X-direction feed unit, Y direction feed unit, Z axis
Direction feed unit and main axle unit connect；It is above-mentioned to use all wires and be divided into two parts：A part of wire is arranged at drag chain a
In, used as controlling organization and the connecting line of Z-direction feed unit and main axle unit, another part wire is arranged in drag chain b,
As the connecting line between controlling organization and X-direction feed unit, Y direction feed unit and the micro- leveling unit of X/Y plane.
X-direction feed unit, includes traverse feed bracket；Traverse feed bracket, includes rectangle cross-brace plate,
And rectangle cross-brace plate is fixedly installed on the upper surface of support along X-direction；On the upper surface of rectangle cross-brace plate
One X-axis precise guide rail is respectively set near two relative long edge positions, on a long side surface of rectangle cross-brace plate X-axis side is provided with
To the scale grating in precision linear encoder；A bearing is respectively vertically arranged on rectangle cross-brace plate upper surface on two relative short edges
Seat a, is connected with X-direction precision ball screw between the axis hole of two bearing block a；One end of X-direction precision ball screw
Shaft coupling is fed by X-axis to be connected with X-axis servomotor, X-axis servomotor is connected with motor drive power supply, X-axis servomotor
It is fixed on motor base a, motor base a is fixed on the upper surface of support, and a motor base a and bearing block a is connected as a single entity；X-axis
Be socketed with X-direction ball-screw nut on the precision ball screw of direction, the nut seat of X-direction ball-screw nut with it is vertical
The X-axis planker of setting is connected as a single entity, and the top of X-axis planker is connected with Y direction feed unit, bottom and the slide block a of X-axis planker
Connect, and slide block a can slide in two X-axis precise guide rails, and X-axis grating reading head bearing a, X-axis side are provided with X-axis planker
It is arranged on X-axis grating reading head bearing a, and in X-direction precision linear encoder to the grating reading head in precision linear encoder
Grating reading head is connected with computer；Shaft coupling is fed by X-axis by X-axis servomotor rotation is passed to X-direction precision
Ball-screw is rotated together, and the rotation of X-direction precision ball screw is changed into X-axis and drags by X-direction ball-screw nut
Plate is along two X-axis precise guide rails in X-direction precision straight-line feed, the scale grating and grating in X-direction precision linear encoder
Read head cooperates, and realization is detected to the X-direction amount of feeding.
Y direction feed unit, includes length feed bracket；Length feed bracket, includes and is fixed on X-axis planker
The rectangle longitudinal supporting plate in portion, and rectangle longitudinal supporting plate is vertical with traverse feed bracket；In the upper table of rectangle longitudinal supporting plate
One Y-axis precise guide rail is respectively set near two relative long edge positions on face, on a long side surface of rectangle longitudinal supporting plate Y is provided with
Scale grating in direction of principal axis precision linear encoder；A bearing block b is respectively vertically arranged on the relative short edge of rectangle longitudinal supporting plate two,
Y direction precision ball screw is connected between the axis hole of two bearing block b；One end of Y direction precision ball screw passes through Y
Axle feeding shaft coupling is connected with Y-axis servomotor, and Y-axis servomotor is connected with motor drive power supply, and Y-axis servomotor is arranged
On motor base b, motor base b is arranged on rectangle longitudinal supporting plate and a motor base b and bearing block b is connected as a single entity；Y-axis side
Y direction ball-screw nut is socketed with precision ball screw, the nut seat of Y direction ball-screw nut sets with vertically
The Y-axis planker put is connected as a single entity, and the top of Y-axis planker is provided with the micro- leveling unit of X/Y plane, the bottom connection sliding block of Y-axis planker
B, slide block b can slide in two Y-axis precise guide rails；Grating reading head bearing b, Y direction precise light are provided with Y-axis planker
Grating reading head in grid chi is arranged on grating reading head bearing b, the grating reading head in Y direction precision linear encoder with meter
Calculation machine connects；Rotation is passed to Y direction precision ball screw by Y-axis feeding shaft coupling by Y-axis servomotor to turn together
Dynamic, the rotation of Y direction precision ball screw is changed into Y-axis planker along two Y-axis precisions by Y direction ball-screw nut
Guide rail cooperates in Y direction precision straight-line feed, the scale grating and grating reading head in Y direction precision linear encoder,
For detecting to the Y direction amount of feeding.
The micro- leveling unit of X/Y plane, includes leveling flexible hinge, and workbench is arranged on leveling flexible hinge；Leveling is soft
Be provided with two mechanical encapsulation formula piezoelectric ceramics in property hinge, and each mechanical encapsulation formula piezoelectric ceramics with mechanical encapsulation formula pressure
Electroceramics driving power supply connects, and drives two mechanical encapsulation formula piezoelectric ceramic energies to produce micrometric displacement respectively, to realize X/Y plane
Relative level.
Model PST150VS250 of mechanical encapsulation formula piezoelectric ceramics.
Workbench, includes workbench main body, and the upper surface of workbench main body keeps level, and in the upper of workbench main body
The fixture for clamping workpiece to be processed is provided with surface.
Z-direction feed unit, includes two Z axis precise guide rails, and two Z axis precise guide rails are individually fixed in column
Two relative side edge on one side, the scale grating in Z-direction precision linear encoder is arranged near a Z axis precise guide rail；
Parallel erection between two Z axis precise guide rails has a Z-direction precision ball screw, Z-direction precision ball screw
One end feeds shaft coupling and connects Z axis servomotor by Z axis, and Z axis servomotor is connected with motor drive power supply, Z axis servo electricity
Machine is arranged on motor base c, and motor base c is fixed on column；Z-direction ball is socketed with Z-direction precision ball screw
Feed screw nut, the nut seat of Z-direction ball-screw nut is connected with the Z axis planker being vertically arranged, the bottom connection of Z axis planker
Slide block c, and slide block c can slide in two Z axis precise guide rails；Grating reading head bearing c, Z-direction are provided with Z axis planker
Grating reading head in precision linear encoder is arranged on grating reading head bearing c, the grating reading in Z-direction precision linear encoder
Head is connected with computer；Z axis servomotor feeds shaft coupling and torque is passed to Z-direction precision ball screw, Z by Z axis
The rotation of direction of principal axis precision ball screw is changed into Z of the Z axis planker along Z axis precise guide rail by Z-direction ball-screw nut
The accurate rectilinear movement feeding of direction of principal axis；Extension block is provided with Z axis planker, and one-dimensional micro-nanometer movement is provided with extension block
Platform, the scale grating and grating reading head phase interworking for realizing the micro-nano feeding of Z-direction, in Z axis precision linear encoder
Share the Z-direction amount of feeding is detected in realization；One-dimensional micro-nanometer mobile platform respectively with main axle unit, one-dimensional micro-nanometer
Mobile platform is connected with drive control power supply.
Main axle unit, includes spindle motor installing rack, and a side end face and the one-dimensional micro-nanometer of spindle motor installing rack are moved
Moving platform connects, and spindle motor is provided with the upper surface of spindle motor installing rack, the lower surface of spindle motor installing rack
Central authorities connect cutter by handle of a knife, and spindle motor is connected by drive shaft with handle of a knife, and spindle motor can be by handle of a knife torque
Pass to cutter.
The beneficial effects of the utility model are：
(1) a kind of hard brittle material micro-cutting system of processing of this utility model, can realize hard brittle material in its micro-nano meter ruler
The plastic region machining of degree, the machining for hard brittle material provides a kind of good method.
(2) a kind of hard brittle material micro-cutting system of processing of this utility model, can realize traditional micro-nano impression, cut
Test.
(3) a kind of hard brittle material micro-cutting system of processing of this utility model, can process hard brittle material for height NC postprocessing
The good theoretical basiss of offer and test platform.
Description of the drawings
Fig. 1 is a kind of structural representation of hard brittle material micro-cutting system of processing of this utility model；
Fig. 2 is the circuit connection diagram inside a kind of hard brittle material micro-cutting system of processing of this utility model；
Fig. 3 is X-direction feed unit and Y direction in a kind of hard brittle material micro-cutting system of processing of this utility model
The structural representation of feed unit；
Fig. 4 is that the structure of Z-direction feed unit in a kind of hard brittle material micro-cutting system of processing of this utility model is shown
It is intended to.
In figure, 1. computer, 2. one-dimensional micro-nanometer mobile platform drive control power supply, 3. mechanical encapsulation formula piezoelectric ceramics
Driving power supply, 4. motor drive power supply, 5. support, 6.X axle servomotors, 7.X axles feeding shaft coupling, 8. traverse feed bracket,
9.Y axles feed shaft coupling, and 10.Y axle servomotors, 11.X direction of principal axis precision linear encoders, 12.X axis carriages, 13.X axle precisions are led
Rail, 14.X direction of principal axis ball-screw nuts, 15.X direction of principal axis precision ball screws, 16.Y direction of principal axis precision ball screws, 17.Y
Axle precise guide rail, 18.Y direction of principal axis ball-screw nuts, 19.Y direction of principal axis precision linear encoders, 20. length feed brackets, 21.Y axles
Planker, 22. mechanical encapsulation formula piezoelectric ceramics, 23. leveling flexible hinges, 24. workbench main bodys, 25. fixtures, 26. works to be processed
Part, 27. drag chain a, 28.Z axle precise guide rails, 29. columns, 30.Z axle servomotors, 31.Z axles feeding shaft coupling, 32.Z direction of principal axis
Precision ball screw, 33.Z direction of principal axis ball-screw nuts, 34.Z direction of principal axis precision linear encoders, 35.Z axis carriages, 36. extend
Block, 37. one-dimensional micro-nanometer mobile platforms, 38. spindle motors, 39. main shaft installing racks, 40. handle of a knifes, 41. cutters, 42. drag chain b,
43. grating reading head bearing a, 44. grating reading head bearing b, 45. motor base a, 46. motor base b, 47. slide block a, 48. slide blocks
B, 49. bearing block a, 50. bearing block b, 51. motor base c, 52. grating reading head bearing c, 53. slide block c.
Specific embodiment
This utility model is described in detail with reference to the accompanying drawings and detailed description.
A kind of hard brittle material micro-cutting system of processing of this utility model, its structure is as shown in figure 1, by machinery-detection one
Body system and control system Jing drag chain a27, drag chain b42 are connected and composed.
Machinery-detection integral system, includes fuselage main body, and fuselage main body is by horizontally disposed support 5 and vertically connects
The column 29 being connected on the upper surface of support 5 is constituted；X-direction feed unit is provided with the upper surface of support 5, X-direction is entered
To Y direction feed unit is connected with unit, the micro- leveling unit of X/Y plane, X/Y plane are provided with Y direction feed unit
Workbench is provided with micro- leveling unit；Z-direction feed unit, main axle unit, and Z axis side are respectively arranged with column 29
It is connected with main axle unit to feed unit；X-direction feed unit, Y direction feed unit and the micro- leveling unit of X/Y plane are equal
It is connected with controlling organization by drag chain b42, Z-direction feed unit, main axle unit are connected by drag chain a27 and controlling organization
Connect.
X-direction feed unit is removably connected with support 5, and Y direction feed unit is with dismountable side
Formula is connected with X-direction feed unit.Z-direction feed unit and main axle unit removably connect with column 29
Connect.
Wherein, support 5 and column 29 are processed using granite.
Control system, as shown in Figures 1 and 2, includes computer 1, and computer 1 is entered respectively by wire with X-direction
To unit, Y direction feed unit, the connection of Z-direction feed unit；Computer 1 is also respectively by wire and one-dimensional micro-nanometer
Mobile platform drive control power supply 2, mechanical encapsulation formula drive power supply for piezoelectric ceramics 3 and motor drive power supply 4 connect；It is one-dimensional micro-
Nano moving platform is connected by wire with drive control power supply 2 with Z-direction feed unit, and mechanical encapsulation formula piezoelectric ceramics drives
Galvanic electricity source 3 is connected by wire with the micro- leveling unit of X/Y plane, and motor drive power supply 4 is fed respectively by wire with X-direction
The connection of unit, Y direction feed unit, Z-direction feed unit and main axle unit；It is above-mentioned to use all wires and be divided into two
Point：A part of wire is arranged in drag chain a27, as controlling organization and the connecting line of Z-direction feed unit and main axle unit,
Another part wire is arranged in drag chain b42, used as controlling organization and X-direction feed unit, Y direction feed unit and XY
Connecting line between the micro- leveling unit of plane.
X-direction feed unit, as shown in Figures 1 and 3, includes traverse feed bracket 8；Traverse feed bracket 8, including
There is rectangle cross-brace plate, and rectangle cross-brace plate is fixedly installed on the upper surface of support 5 along X-direction；It is horizontal in rectangle
One X-axis precise guide rail 13 is respectively set near two relative long edge positions on the upper surface of gripper shoe, rectangle cross-brace plate
The scale grating being provided with one long side surface in X-direction precision linear encoder 11, two is relative on rectangle cross-brace plate upper surface
A bearing block a49 is respectively vertically arranged on minor face, X-direction precise ball silk is connected between the axis hole of two bearing block a49
Thick stick 15；One end of X-direction precision ball screw 15 feeds shaft coupling 7 and is connected with X-axis servomotor 6 by X-axis, X-axis servo
Motor 6 is connected with motor drive power supply 4, and X-axis servomotor 6 is fixed on motor base a45, and motor base a45 is fixed on support 5
Upper surface, and a motor base a45 and bearing block a49 is connected as a single entity；X-axis side is socketed with X-direction precision ball screw 15
To ball-screw nut 14, the nut seat of X-direction ball-screw nut 14 is connected as a single entity with the X-axis planker 12 being vertically arranged, X
The top of axis carriage 12 is connected with Y direction feed unit, and the bottom of X-axis planker 12 is connected with slide block a47, and slide block a47 energy
Slide in two X-axis precise guide rails 13, X-axis grating reading head bearing a43, X-direction precise light are provided with X-axis planker 12
Grating reading head in grid chi 11 is arranged on X-axis grating reading head bearing a43, and the light in X-direction precision linear encoder 11
Grid read head is connected with computer 1；Shaft coupling 7 is fed by X-axis by X-axis servomotor 6 rotation is passed to X-direction precision
Ball-screw 15 is rotated together, and the rotation of X-direction precision ball screw 15 is changed into by X-direction ball-screw nut 14
X-axis planker 12 is along two X-axis precise guide rails 13 in X-direction precision straight-line feed, the scale in X-direction precision linear encoder 11
Grating and grating reading head cooperate, and realization is detected to the X-direction amount of feeding.
As shown in Figures 1 and 3, motor base a45 is in cubic frame-like, and lighter weight, the bottom of motor base a45 can be consolidated
On the upper surface of support 5, motor base a45 inside feeds shaft coupling 7 and fixes X-axis servomotor 6 for accommodating X-axis.
X-direction precision linear encoder 11 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and indication grating is provided with grating reading head.
Y direction feed unit, as shown in Figures 1 and 3, includes length feed bracket 20；Length feed bracket 20, bag
The rectangle longitudinal supporting plate for being fixed on the top of X-axis planker 12 is included, and rectangle longitudinal supporting plate is vertical with traverse feed bracket 8；
One Y-axis precise guide rail 17, rectangle longitudinal direction are respectively set near two relative long edge positions on the upper surface of rectangle longitudinal supporting plate
The scale grating being provided with one long side surface of gripper shoe in Y direction precision linear encoder 19；Rectangle longitudinal supporting plate two is relative
A bearing block b50 is respectively vertically arranged on minor face, Y direction precise ball silk is connected between the axis hole of two bearing block b50
Thick stick 16；One end of Y direction precision ball screw 16 feeds shaft coupling 9 and is connected with Y-axis servomotor 10 by Y-axis, Y-axis servo
Motor 10 is connected with motor drive power supply 4, and Y-axis servomotor 10 is arranged on motor base b46, and motor base b46 is arranged at square
On shape longitudinal supporting plate and a motor base b46 and bearing block b50 is connected as a single entity；It is socketed on Y direction precision ball screw 16
There is Y direction ball-screw nut 18, the nut seat of Y direction ball-screw nut 18 connects with the Y-axis planker 21 being vertically arranged
It is integrated, the top of Y-axis planker 21 is provided with the micro- leveling unit of X/Y plane, the bottom connection sliding block b48 of Y-axis planker 21, slide block
B48 can slide in two Y-axis precise guide rails 17；Grating reading head bearing b44 is provided with Y-axis planker 21, Y direction is accurate
Grating reading head in grating scale 19 is arranged on grating reading head bearing b44, and the grating in Y direction precision linear encoder 19 is read
Several are connected with computer 1；Shaft coupling 9 is fed by Y-axis by Y-axis servomotor 10 rotation is passed to the accurate rolling of Y direction
Ballscrew 16 is rotated together, and the rotation of Y direction precision ball screw 16 is changed into Y by Y direction ball-screw nut 18
Axis carriage 21 is along two Y-axis precise guide rails 17 in Y direction precision straight-line feed, the scale in Y direction precision linear encoder 19
Grating and grating reading head cooperate, for detecting to the Y direction amount of feeding.
The structure of motor base b46 is identical with the structure of motor base a45, in cube frame shape；Motor base b46 can be fixed
On one end of rectangle longitudinal supporting plate, motor base b46 inside is for accommodating Y-axis feeding shaft coupling 9 and can be by Y-axis servomotor
10 fix.
Y direction precision linear encoder 19 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and indication grating is provided with grating reading head.
The micro- leveling unit of X/Y plane, as shown in Figures 2 and 3, includes leveling flexible hinge 23, and workbench is arranged at leveling
On flexible hinge 23；Two mechanical encapsulation formula piezoelectric ceramics 22, and each mechanical encapsulation formula are provided with leveling flexible hinge 23
Piezoelectric ceramics 22 is connected with mechanical encapsulation formula drive power supply for piezoelectric ceramics 3, and two mechanical encapsulation formula piezoelectric ceramics are driven respectively
22 can produce micrometric displacement, to realize X/Y plane relative level.
Model core PST150VS250 tomorrow of mechanical encapsulation formula piezoelectric ceramics 22.
Workbench, as shown in figure 1, workbench main body 24 is included, the upper surface holding level of workbench main body 24, and
The fixture 25 for clamping workpiece to be processed 26 is provided with the upper surface of workbench main body 24.
Z-direction feed unit, as shown in Fig. 1 and Fig. 4, includes two Z axis precise guide rails 28, and two Z axis precisions
Guide rail 28 is individually fixed in two relative side edges on the one side of column 29, the scale grating in Z-direction precision linear encoder 34
Arrange near a Z axis precise guide rail 28；Parallel erection between two Z axis precise guide rails 28 has the accurate rolling of a Z-direction
Ballscrew 32, one end of Z-direction precision ball screw 32 feeds shaft coupling 31 and connects Z axis servomotor 30, Z axis by Z axis
Servomotor 30 is connected with motor drive power supply 4, and Z axis servomotor 30 is arranged on motor base c51, and motor base c51 is fixed on
On column 29；Z-direction ball-screw nut 33, Z-direction ball-screw spiral shell are socketed with Z-direction precision ball screw 32
Female 33 nut seat is connected with the Z axis planker 35 being vertically arranged, the bottom connection sliding block c53 of Z axis planker 35, and slide block c53 energy
Slide in two Z axis precise guide rails 28；Grating reading head bearing c52, Z-direction precise grating are provided with Z axis planker 35
Grating reading head in chi 34 is arranged on grating reading head bearing c52, the grating reading head in Z-direction precision linear encoder 34
It is connected with computer 1；Z axis servomotor 30 feeds shaft coupling 31 and torque is passed to Z-direction precision ball screw by Z axis
32, the rotation of Z-direction precision ball screw 32 is changed into Z axis planker 35 along Z axis essence by Z-direction ball-screw nut 33
The accurate rectilinear movement feeding of the Z-direction of close guide rail 28；Extension block 36 is provided with Z axis planker 35, and is set on extension block 36
One-dimensional micro-nanometer mobile platform 37 is equipped with, for realizing the micro-nano feeding of Z-direction, the scale in Z axis precision linear encoder 34
Grating and grating reading head cooperate for realizing detecting the Z-direction amount of feeding；One-dimensional micro-nanometer mobile platform 37
It is connected with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply 2 respectively.
Arrange extension block 36 main mesh be：The locus of adjustment one-dimensional micro-nanometer mobile platform 37, to adapt to work
The process requirements main axle unit of part.
Z-direction precision linear encoder 34 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and indication grating is provided with grating reading head.
As shown in figure 4, the plate-like structures of motor base c51, light weight, motor base c51 is fixed on column 29, for supporting
Z axis servomotor 30.
Main axle unit, as shown in Fig. 1 and Fig. 4, includes spindle motor installing rack 39, the side of spindle motor installing rack 39
End face is connected with one-dimensional micro-nanometer mobile platform 37, and spindle motor 38 is provided with the upper surface of spindle motor installing rack 39,
The central authorities of the lower surface of spindle motor installing rack 39 connect cutter 41, and spindle motor 38 by drive shaft and knife by handle of a knife 40
Handle 40 connects, and spindle motor 38 can pass to cutter 41 by handle of a knife 40 torque.
The displacement that X-axis precision linear encoder 11, Y-axis precision linear encoder 19, Z axis precision linear encoder 34 are measured is sent to calculating
In machine 1, computer 1 drives X-axis servomotor 6, Y-axis servomotor 10 according to processing request controlled motor driving power supply 4 respectively
And Z axis servomotor 30, X-axis, Y-axis, three direction feedings of Z axis are finally realized, the micro-nano feeding of Z-direction is by computer 1
Control one-dimensional micro-nanometer mobile platform drive control power supply 2 drives one-dimensional micro-nanometer mobile platform 37 to realize, spindle motor 38
Control realized by the controlled motor driving power supply 4 of computer 1 according to processing request.
A kind of method that machining is carried out to hard brittle material using hard brittle material micro-cutting system of processing：It is respectively started
Computer 1, motor drive power supply 4 and one-dimensional micro-nanometer mobile platform drive control power supply 2；According to the chi of workpiece to be processed 26
Very little and processing dimension requires that write cutter 41 feeds track processing program code relative to the walking of workpiece to be processed 26, and should
Walking feeding track processing program code is delivered in computer 1；Workpiece to be processed 26 is being held in fixture 25；Using meter
The controlled motor driving power supply 4 of calculation machine 1 drives respectively X-axis servomotor 6, Y-axis servomotor 10 and Z axis servomotor 30 to carry out work
Make, and position of the workpiece to be processed 26 relative to cutter 41 is adjusted according to workpiece size processing request, to realize to knife；Using meter
The walking feeding track processing program code controlled motor driving power supply 4 of the workpiece to be processed 26 of input in calculation machine 1, using motor
Driving power supply 4 drives respectively X-axis servomotor 6, Y-axis servomotor 10, Z axis servomotor 30 and spindle motor 38 to work, together
When control one-dimensional micro-nanometer mobile platform drive control power supply 2 drive one-dimensional micro-nanometer mobile platform 37 realize it is micro-nano enter
Give, be finally completed the contour surface micro-cutting of workpiece to be processed 26；Shut down computer 1, motor drive power supply 4 and one-dimensional micro-nanometer
Mobile platform drive control power supply 2, takes out the workpiece processed in fixture 25, clears up lathe, completes to cut hard brittle material
Cut processing.
A kind of hard brittle material micro-cutting system of processing of this utility model, it is very easy to use, can realize different
Hard brittle material is in its plastic region micro-cutting processing.
Claims (9)
1. a kind of hard brittle material micro-cutting system of processing, it is characterised in that by machinery-detection integral system and control system
Jing is connected and composed；
The machinery-detection integral system, includes fuselage main body, the fuselage main body by horizontally disposed support (5) and
The column (29) being vertically connected on support (5) upper surface is constituted；
X-direction feed unit is provided with the upper surface of the support (5), on the X-direction feed unit Y-axis is connected with
Direction feed unit, is provided with the micro- leveling unit of X/Y plane on the Y direction feed unit, the micro- leveling unit of the X/Y plane
On be provided with workbench；Z-direction feed unit, main axle unit, and the Z axis side are respectively arranged with the column (29)
It is connected with main axle unit to feed unit；
The X-direction feed unit, Y direction feed unit and the micro- leveling unit of X/Y plane are by drag chain b (42) and control
Mechanism's connection processed, the Z-direction feed unit, main axle unit are connected by drag chain a (27) with controlling organization.
2. a kind of hard brittle material micro-cutting system of processing according to claim 1, it is characterised in that the control machine
Structure, includes computer (1), and the computer (1) is single with X-direction feed unit, Y direction feeding by wire respectively
Unit, the connection of Z-direction feed unit；
The computer (1) is also respectively by wire and one-dimensional micro-nanometer mobile platform drive control power supply (2), mechanical encapsulation
Formula drive power supply for piezoelectric ceramics (3) and motor drive power supply (4) connect；
The one-dimensional micro-nanometer mobile platform is connected by wire with drive control power supply (2) with Z-direction feed unit, described
Mechanical encapsulation formula drive power supply for piezoelectric ceramics (3) is connected by the micro- leveling unit of wire and X/Y plane, the motor drive power supply
(4) respectively by wire and X-direction feed unit, Y direction feed unit, Z-direction feed unit and main axle unit company
Connect；
It is above-mentioned to use all wires and be divided into two parts：A part of wire is arranged in drag chain a (27), as the controlling organization with
The connecting line of the Z-direction feed unit and main axle unit, another part wire is arranged in drag chain b (42), as described
Connecting line between controlling organization and the X-direction feed unit, Y direction feed unit and the micro- leveling unit of X/Y plane.
3. a kind of hard brittle material micro-cutting system of processing according to claim 1 and 2, it is characterised in that the X-axis side
To feed unit, traverse feed bracket (8) is included；The traverse feed bracket (8), includes rectangle cross-brace plate, and
The rectangle cross-brace plate is fixedly installed on the upper surface of support (5) along X-direction；In the rectangle cross-brace plate
One X-axis precise guide rail (13), a length of the rectangle cross-brace plate are respectively set near two relative long edge positions on upper surface
The scale grating being provided with side in X-direction precision linear encoder (11)；It is biphase on the rectangle cross-brace plate upper surface
To being respectively vertically arranged a bearing block a (49) on minor face, between the axis hole of two bearing block a (49) X-direction is connected with
Precision ball screw (15)；
One end of the X-direction precision ball screw (15) feeds shaft coupling (7) with X-axis servomotor (6) even by X-axis
Connect, the X-axis servomotor (6) is connected with motor drive power supply (4), the X-axis servomotor (6) is fixed on motor base a
(45) on, the motor base a (45) is fixed on the upper surface of support (5), and the motor base a (45) and bearing block a
(49) it is connected as a single entity；X-direction ball-screw nut (14), the X are socketed with the X-direction precision ball screw (15)
The nut seat of direction of principal axis ball-screw nut (14) is connected as a single entity with the X-axis planker (12) being vertically arranged, the X-axis planker (12)
Top be connected with Y direction feed unit, the bottom of the X-axis planker (12) is connected with slide block a (47), and the slide block a
(47) can slide on two X-axis precise guide rails (13), X-axis grating reading head bearing a is provided with the X-axis planker (12)
(43), the grating reading head in the X-direction precision linear encoder (11) is arranged in X-axis grating reading head bearing a (43), and
Grating reading head in the X-direction precision linear encoder (11) is connected with computer (1)；
Shaft coupling (7) is fed by X-axis by the X-axis servomotor (6) rotation is passed to X-direction precision ball screw
(15) rotate together, the rotation of the X-direction precision ball screw (15) is changed by X-direction ball-screw nut (14)
For X-axis planker (12) along two X-axis precise guide rails (13) in X-direction precision straight-line feed, the X-direction precision linear encoder
(11) the scale grating and grating reading head in cooperates, and realization is detected to the X-direction amount of feeding.
4. a kind of hard brittle material micro-cutting system of processing according to claim 3, it is characterised in that the Y direction
Feed unit, includes length feed bracket (20)；The length feed bracket (20), includes and is fixed on X-axis planker (12)
The rectangle longitudinal supporting plate on top, and the rectangle longitudinal supporting plate is vertical with traverse feed bracket (8)；In the rectangle longitudinal direction
One Y-axis precise guide rail (17), the rectangle longitudinal bracing are respectively set near two relative long edge positions on the upper surface of gripper shoe
The scale grating being provided with one long side surface of plate in Y direction precision linear encoder (19)；The rectangle longitudinal supporting plate is biphase
To being respectively vertically arranged a bearing block b (50) on minor face, between the axis hole of two bearing block b (50) Y direction is connected with
Precision ball screw (16)；
One end of the Y direction precision ball screw (16) feeds shaft coupling (9) with Y-axis servomotor (10) even by Y-axis
Connect, the Y-axis servomotor (10) is connected with motor drive power supply (4), and the Y-axis servomotor (10) is arranged at motor base
On b (46), the motor base b (46) is arranged on rectangle longitudinal supporting plate and motor base b (46) connects with a bearing block b (50)
It is integrated；Y direction ball-screw nut (18), the Y direction are socketed with the Y direction precision ball screw (16)
The nut seat of ball-screw nut (18) is connected as a single entity with the Y-axis planker (21) being vertically arranged, the top of the Y-axis planker (21)
It is provided with the micro- leveling unit of X/Y plane, bottom connection sliding block b (48) of the Y-axis planker (21), the slide block b (48) can be two
Slide on bar Y-axis precise guide rail (17)；Grating reading head bearing b (44), the Y-axis side are provided with the Y-axis planker (21)
It is arranged on grating reading head bearing b (44) to the grating reading head in precision linear encoder (19), the Y direction precise grating
Grating reading head in chi (19) is connected with computer 1；
Shaft coupling (9) is fed by Y-axis by the Y-axis servomotor (10) rotation is passed to Y direction precision ball screw
(16) rotate together, the rotation of the Y direction precision ball screw (16) is changed by Y direction ball-screw nut (18)
For Y-axis planker (21) along two Y-axis precise guide rails (17) in Y direction precision straight-line feed, the Y direction precision linear encoder
(19) the scale grating and grating reading head in cooperates, for detecting to the Y direction amount of feeding.
5. a kind of hard brittle material micro-cutting system of processing according to claim 4, it is characterised in that the X/Y plane is micro-
Leveling unit, includes leveling flexible hinge (23), and workbench is arranged on the leveling flexible hinge (23)；
Two mechanical encapsulations formula piezoelectric ceramics (22), and each described mechanical encapsulation are provided with the leveling flexible hinge (23)
Formula piezoelectric ceramics (22) is connected with mechanical encapsulation formula drive power supply for piezoelectric ceramics (3), and two mechanical encapsulations are driven respectively
Formula piezoelectric ceramics (22) can produce micrometric displacement, to realize X/Y plane relative level.
6. a kind of hard brittle material micro-cutting system of processing according to claim 5, it is characterised in that the mechanical encapsulation
Model PST150VS250 of formula piezoelectric ceramics (22).
7. a kind of hard brittle material micro-cutting system of processing according to claim 5, it is characterised in that the workbench,
Workbench main body (24) is included, the upper surface of the workbench main body (24) keeps level, and in the workbench main body
(24) fixture (25) for clamping workpiece to be processed (26) is provided with upper surface.
8. a kind of hard brittle material micro-cutting system of processing according to claim 1 and 2, it is characterised in that the Z axis side
To feed unit, two Z axis precise guide rails (28) are included, and two Z axis precise guide rails (28) are individually fixed in column
(29) two relative side edge on one side, the scale grating in the Z-direction precision linear encoder (34) is near a Z axis essence
Close guide rail (28) is arranged；
Parallel erection between two Z axis precise guide rails (28) has a Z-direction precision ball screw (32), the Z
One end of direction of principal axis precision ball screw (32) feeds shaft coupling (31) and connects Z axis servomotor (30), the Z axis by Z axis
Servomotor (30) is connected with motor drive power supply (4), and the Z axis servomotor (30) is arranged on motor base c (51), described
Motor base c (51) is fixed on column (29)；Z-direction ball wire is socketed with the Z-direction precision ball screw (32)
Thick stick nut (33), the nut seat of the Z-direction ball-screw nut (33) is connected with the Z axis planker (35) being vertically arranged, institute
Bottom connection sliding block c (53) of Z axis planker (35) is stated, and the slide block c (53) can be slided on two Z axis precise guide rails (28)
It is dynamic；Grating reading head bearing c (52) is provided with Z axis planker (35), the grating in the Z-direction precision linear encoder (34) is read
Several are arranged on grating reading head bearing c (52), the grating reading head in the Z-direction precision linear encoder (34) with calculate
Machine (1) connects；The Z axis servomotor (30) feeds shaft coupling (31) and torque is passed to Z-direction precise ball by Z axis
Leading screw (32), the rotation of the Z-direction precision ball screw (32) is changed into Z by Z-direction ball-screw nut (33)
Z-direction accurate rectilinear movement feeding of the axis carriage (35) along Z axis precise guide rail (28)；
Extension block (36) is provided with the Z axis planker (35), and one-dimensional micro-nanometer shifting is provided with the extension block (36)
Moving platform (37), the scale grating and light for realizing the micro-nano feeding of Z-direction, in the Z axis precision linear encoder (34)
Grid read head cooperates for realizing detecting the Z-direction amount of feeding；
The one-dimensional micro-nanometer mobile platform (37) respectively with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply
(2) connect.
9. a kind of hard brittle material micro-cutting system of processing according to claim 8, it is characterised in that the main shaft list
Unit, includes spindle motor installing rack (39), and a side end face and the one-dimensional micro-nanometer of the spindle motor installing rack (39) are moved
Platform (37) connects, and spindle motor (38) is provided with the upper surface of the spindle motor installing rack (39), the main shaft electricity
The central authorities of the lower surface of machine installing rack (39) connect cutter (41), and the spindle motor (38) by driving by handle of a knife (40)
Axle is connected with handle of a knife (40), and the spindle motor (38) can pass to cutter (41) by handle of a knife (40) torque.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621054261.2U CN206123961U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system of hard brittle material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621054261.2U CN206123961U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system of hard brittle material |
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| Publication Number | Publication Date |
|---|---|
| CN206123961U true CN206123961U (en) | 2017-04-26 |
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ID=58570675
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621054261.2U Expired - Fee Related CN206123961U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system of hard brittle material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108417508A (en) * | 2018-01-22 | 2018-08-17 | 西安理工大学 | A kind of micro-arc discharge cutter device for semiconductor |
| CN109449558A (en) * | 2018-10-30 | 2019-03-08 | 北京无线电测量研究所 | A kind of ferrite duct processing unit (plant) for phase shifter |
-
2016
- 2016-09-14 CN CN201621054261.2U patent/CN206123961U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108417508A (en) * | 2018-01-22 | 2018-08-17 | 西安理工大学 | A kind of micro-arc discharge cutter device for semiconductor |
| CN108417508B (en) * | 2018-01-22 | 2020-12-18 | 西安理工大学 | Micro-arc discharge cutting device for semiconductor |
| CN109449558A (en) * | 2018-10-30 | 2019-03-08 | 北京无线电测量研究所 | A kind of ferrite duct processing unit (plant) for phase shifter |
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