CN106493861B - Micro-cutting system of processing under the ultrasonication of hard brittle material - Google Patents
Micro-cutting system of processing under the ultrasonication of hard brittle material Download PDFInfo
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- CN106493861B CN106493861B CN201610824314.2A CN201610824314A CN106493861B CN 106493861 B CN106493861 B CN 106493861B CN 201610824314 A CN201610824314 A CN 201610824314A CN 106493861 B CN106493861 B CN 106493861B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
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Abstract
Micro-cutting system of processing under the ultrasonication of hard brittle material disclosed by the invention is connected and composed by machinery-detection integrated mechanism and control mechanism through drag chain a, drag chain b.Micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention is solved the problems, such as to hard brittle material plastic region micro-cutting processing difficulties.
Description
Technical field
The invention belongs to material processing plant technical fields, and in particular to fine under a kind of ultrasonication of hard brittle material to cut
Cut system of processing.
Background technique
Hard brittle material makes its answering in the high-precision pointed collar domain such as aerospace due to having the property better than common material
With more and more extensive.
Common hard brittle material mainly has: quartz glass, silicon carbide, silicon, ceramics etc..Compared with common material, hard crisp material
Expect to have that high rigidity, high heat conductance, wear-resistant, high temperature resistant, chemical stability is good, is not easy oxidation corrosion and low thermal coefficient of expansion
Advantage.But since hard brittle material itself has apparent hard brittleness, cause conventional machining extremely difficult.
In recent years, having scholar to study confirms: the plastic region machinings of these materials can be realized in miniature scale, and
Its machining surface quality can be greatly improved under ultrasonication, obtains the part of preferable processing quality, and principle is:
Bump is cut under ultrasonic vibration effect, can when cutting depth is less than the critical cutting depth of the crisp transformation of modeling of the material
It realizes and is similar to the same plasticity cutting processing of conventional metal material, tool pressure is lower, cutting stress and cutting heat are smaller, no
Can be deformed and burn, machining accuracy is higher, can reach ± 0.02mm~0.05mm, surface roughness up to Ra0.16 μm,
Substantially reduce surface defect.
The critical cutting depth for moulding crisp transformation is micron order, nanoscale, therefore, for making in ultrasound for these hard brittle materials
It is extremely important to go out micro-cutting system of processing under a kind of ultrasonication of hard brittle material with lower micro-cutting fabrication design.
Summary of the invention
The purpose of the present invention is to provide micro-cutting system of processing under a kind of ultrasonication of hard brittle material, solve hard
The problem of crisp material plasticity domain micro-cutting processing difficulties, be able to achieve to different hard brittle materials its plastic region micro-cutting
Processing.
The technical scheme adopted by the invention is that micro-cutting system of processing under the ultrasonication of hard brittle material, by machinery-
Detection integrated mechanism and control mechanism are connected and composed through drag chain a, drag chain b.
The features of the present invention also characterized in that:
Machinery-detection integrated mechanism includes fuselage main body, and fuselage main body is by horizontally disposed base and is vertically arranged
It is constituted in the column on frame upper surface, base and column are process using granite；X-axis is provided on the upper surface of base
Direction feed unit is connected with Y direction feed unit on X-direction feed unit, is provided with XY on Y direction feed unit
Plane micro- leveling unit is provided with ultrasonic vibration platform on the micro- leveling unit of X/Y plane, is provided with work on ultrasonic vibration platform
Platform；Z-direction feed unit, main axle unit are respectively arranged on column, and Z-direction feed unit is connect with main axle unit；X
Axis direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and ultrasonic vibration platform pass through drag chain b and control
Mechanism connection processed, Z-direction feed unit, main axle unit pass through drag chain a and connect with control mechanism.
Control mechanism includes computer, and computer passes through conducting wire respectively and X-direction feed unit, Y direction are fed
Unit, the connection of Z-direction feed unit；Computer also passes through conducting wire and one-dimensional micro-nanometer mobile platform drive control electricity respectively
Source, mechanical encapsulation formula drive power supply for piezoelectric ceramics, motor drive power supply and ultrasound control power supply connection；One-dimensional micro-nanometer is mobile flat
Platform is connect by conducting wire with Z-direction feed unit with drive control power supply, and mechanical encapsulation formula drive power supply for piezoelectric ceramics passes through
Conducting wire is connect with the micro- leveling unit of X/Y plane, and motor drive power supply passes through conducting wire and X-direction feed unit, Y direction respectively
Feed unit, Z-direction feed unit and main axle unit connection, ultrasound control power supply are connected by conducting wire and ultrasonic vibration platform
It connects；The conducting wire connected between the control mechanism and machinery-detection integrated mechanism is divided into two parts: a part of conducting wire is set to
In drag chain a, as the connecting line of control mechanism and Z-direction feed unit and main axle unit, another part conducting wire, which is set to, to be dragged
In chain b, shake as control mechanism and X-direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and ultrasound
Connecting line between moving platform.
X-direction feed unit includes traverse feed bracket；Traverse feed bracket includes rectangle cross-brace plate,
And rectangle cross-brace plate is fixedly installed along the x axis on the upper surface of base；On the upper surface of rectangle cross-brace plate
One X-axis precise guide rail is respectively set close to two opposite long edge positions, is provided with X-axis side on a long side surface of rectangle cross-brace plate
Scale grating into precision linear encoder is respectively vertically arranged a bearing on two relative short edges on rectangle cross-brace plate upper surface
Seat a, is connected with X-direction precision ball screw between the axis hole of two bearing block a；One end of X-direction precision ball screw
It feeds shaft coupling by X-axis to connect with X-axis servo motor, X-axis servo motor is connect with motor drive power supply, X-axis servo motor
It is fixed on motor base a, motor base a is fixed on the upper surface of base, and a motor base a and bearing block a is linked together；X-axis
It is socketed with X-direction ball-screw nut on the precision ball screw of direction, the nut seat of X-direction ball-screw nut and vertical
The X-axis planker of setting is linked together, and the top of X-axis planker is connect with Y direction feed unit, the lower part of X-axis planker and sliding block a
Connection, and sliding block a can be slided in two X-axis precise guide rails, and X-axis grating reading head support a, X-axis side are provided on X-axis planker
Grating reading head into precision linear encoder is set on X-axis grating reading head support a, and in X-direction precision linear encoder
Grating reading head is connect with computer；Shaft coupling is fed by X-axis by X-axis servo motor, rotation is passed to X-direction precision
Ball-screw rotates together, and the rotation of X-direction precision ball screw is changed into X-axis by X-direction ball-screw nut and drags
Scale grating and grating of the plate along two X-axis precise guide rails in X-direction precision straight-line feed, X-direction precision linear encoder
Reading head cooperates, and detects for realizing to the X-direction amount of feeding.
Y direction feed unit includes length feed bracket；Length feed bracket includes to be fixed on X-axis planker
The rectangle longitudinal supporting plate in portion, and rectangle longitudinal supporting plate is vertical with traverse feed bracket；In the upper table of rectangle longitudinal supporting plate
One Y-axis precise guide rail is respectively set close to two opposite long edge positions on face, is provided with Y on a long side surface of rectangle longitudinal supporting plate
Scale grating in axis direction precision linear encoder；A bearing block b is respectively vertically arranged on two relative short edge of rectangle longitudinal supporting plate,
Y direction precision ball screw is connected between the axis hole of two bearing block b；One end of Y direction precision ball screw passes through Y
Axis feeding shaft coupling is connect with Y-axis servo motor, and Y-axis servo motor is connect with motor drive power supply, and Y-axis servo motor is arranged
In on motor base b, motor base b is set on rectangle longitudinal supporting plate and is linked together with a bearing block b；Y direction is accurate
Y direction ball-screw nut, the nut seat of Y direction ball-screw nut and the Y being vertically arranged are socketed on ball-screw
Axis carriage is linked together, and the top of Y-axis planker is provided with the micro- leveling unit of X/Y plane, and the lower part connection sliding block b of Y-axis planker is sliding
Block b can be slided in two Y-axis precise guide rails；Grating reading head support b, Y direction precision linear encoder are provided on Y-axis planker
Interior grating reading head is set on grating reading head support b, and grating reading head and calculating in Y direction precision linear encoder
Machine connection；Rotation Y direction precision ball screw is passed to by Y-axis feeding shaft coupling by Y-axis servo motor to rotate together,
The rotation of Y direction precision ball screw is changed into Y-axis planker by Y direction ball-screw nut and leads along two Y-axis precisions
Scale grating and grating reading head of the rail in Y direction precision straight-line feed, Y direction precision linear encoder cooperate, and use
The Y direction amount of feeding is detected in realizing.
The micro- leveling unit of X/Y plane, includes leveling flexible hinge, and ultrasonic vibration platform is set on leveling flexible hinge；
Setting is leveled in flexible hinge there are two mechanical encapsulation formula piezoelectric ceramics, each mechanical encapsulation formula piezoelectric ceramics is and mechanical encapsulation
The connection of formula drive power supply for piezoelectric ceramics respectively drives two mechanical encapsulation formula piezoelectric ceramic energies and generates micro-displacement, to realize XY
Plane relative level.
The model PST150VS250 of mechanical encapsulation formula piezoelectric ceramics.
Workbench includes workbench main body, and the upper surface of workbench main body keeps horizontal, and in the upper of workbench main body
The fixture for clamping workpiece to be processed is provided on surface, the lower surface of workbench main body is connect with ultrasonic vibration platform, warp
The control of computer and ultrasound control power supply, obtain ultrasonic vibration platform energy band move workbench main body realize X, Y direction it is super
Acoustic vibration loads ultrasonication in micro-cutting processing, improves machining quality.
Z-direction feed unit includes two Z axis precise guide rails, and two Z axis precise guide rails are individually fixed in column
Two opposite side edges on one side, the scale grating in Z-direction precision linear encoder are arranged close to a Z axis precise guide rail；
It is parallel between two Z axis precise guide rails to be provided with a Z-direction precision ball screw, Z-direction precision ball screw
One end feeds shaft coupling by Z axis and connects Z axis servo motor, and Z axis servo motor is connect with motor drive power supply, Z axis servo electricity
Machine is set on motor base c, and motor base c is fixed on column；Z-direction ball is socketed on Z-direction precision ball screw
Feed screw nut, the nut seat of Z-direction ball-screw nut are connect with the Z axis planker being vertically arranged, the lower part connection of Z axis planker
Sliding block c, and sliding block c can be slided in two Z axis precise guide rails；Grating reading head support c, Z-direction are provided on Z axis planker
Grating reading head in precision linear encoder is set on grating reading head support c, and the grating in Z-direction precision linear encoder is read
Several connect with computer；Z axis servo motor feeds shaft coupling by Z axis and gives Z-direction precision ball screw torque transfer,
The rotation of Z-direction precision ball screw is changed into Z axis planker along the Z of Z axis precise guide rail by Z-direction ball-screw nut
The linear movement feeding of axis direction precision；It is provided with extension block on Z axis planker, and is provided with one-dimensional micro-nanometer movement on extension block
Platform, scale grating and grating reading head phase interworking for realizing the micro-nano feeding of Z-direction, in Z axis precision linear encoder
It shares and is detected in the Z-direction amount of feeding；One-dimensional micro-nanometer mobile platform is mobile with main axle unit, one-dimensional micro-nanometer respectively
Platform is connected with drive control power supply.
Main axle unit, includes spindle motor mounting rack, and a side end face of spindle motor mounting rack and one-dimensional micro-nanometer move
Moving platform connection, and spindle motor is provided on the upper surface of spindle motor mounting rack, the lower surface of spindle motor mounting rack
Center connects cutter by knife handle, and spindle motor is connect by drive shaft with knife handle, and spindle motor can be by knife handle torque
Pass to cutter.
The beneficial effects of the present invention are:
(1) micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention is able to achieve under no ultrasonication hard
Plastic region machining of the crisp material in its micro-nano-scale.
(2) micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention, be able to achieve traditional micro-nano impression,
Scratch test.
(3) micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention, can be hard crisp for the processing of height NC postprocessing
Material provides good theoretical basis and test platform.
Detailed description of the invention
Fig. 1 be hard brittle material of the present invention ultrasonication under micro-cutting system of processing structural schematic diagram；
Fig. 2 be hard brittle material of the present invention ultrasonication under circuit connection diagram inside micro-cutting system of processing；
Fig. 3 be hard brittle material of the present invention ultrasonication under X-direction feed unit and Y-axis in micro-cutting system of processing
The structural schematic diagram of direction feed unit；
Fig. 4 be hard brittle material of the present invention ultrasonication under in micro-cutting system of processing Z-direction feed unit knot
Structure schematic diagram.
In figure, 1. computers, 2. one-dimensional micro-nanometer mobile platform drive control power supplies, 3. mechanical encapsulation formula piezoelectric ceramics
Driving power, 4. motor drive power supplies, 5. ultrasound control power supplys, 6. bases, 7.X axis servo motor, 8.X axis feed shaft coupling,
9. traverse feed bracket, 10.Y axis servo motor, 11.X axis direction precision linear encoder, 12.X axis carriage, 13.X axis direction ball
Feed screw nut, 14.X axis precise guide rail, 15.X axis direction precision ball screw, 16.Y axis feed shaft coupling, and 17.Y axis precision is led
Rail, 18.Y axis direction precision ball screw, 19.Y axis direction ball-screw nut, 20.Y axis direction precision linear encoder, 21. is longitudinal
Feeding carriage, 22.Y axis carriage, 23. leveling flexible hinges, 24. mechanical encapsulation formula piezoelectric ceramics, 25. ultrasonic vibration platforms, 26.
Workbench main body, 27. fixtures, 28. workpieces to be processed, 29. drag chain a, 30.Z axis precise guide rails, 31.Z axis servo motor, 32. is vertical
Column, 33.Z axis feed shaft coupling, 34.Z axis direction precision ball screw, 35.Z axis direction ball-screw nut, 36.Z axis direction
Precision linear encoder, 37.Z axis carriage, 38. extension blocks, 39. one-dimensional micro-nanometer mobile platforms, 40. spindle motors, the installation of 41. main shafts
Frame, 42. knife handles, 43. cutters, 44. grating reading head support a, 45. grating reading head support b, 46. motor base a, 47. motor bases
B, 48. sliding block a, 49. sliding block b, 50. bearing block a, 51. bearing block b, 52. motor base c, 53. grating reading head support c, 54. is sliding
Block c, 55. drag chain b.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
Micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention, structure is as shown in Figure 1, by machinery-inspection
It surveys integrated mechanism and control mechanism is connected and composed through drag chain a29, drag chain b55.
Machinery-detection integrated mechanism, includes fuselage main body, and fuselage main body is set by horizontally disposed base 6 and vertically
The column 32 being placed on 6 upper surface of base is constituted；Be provided with X-direction feed unit on the upper surface of base 6, X-direction into
To Y direction feed unit is connected on unit, the micro- leveling unit of X/Y plane, X/Y plane are provided on Y direction feed unit
It is provided with ultrasonic vibration platform 25 on micro- leveling unit, is provided with workbench on ultrasonic vibration platform 25；It is set respectively on column 32
It is equipped with Z-direction feed unit, main axle unit, and Z-direction feed unit is connect with main axle unit；X-direction feed unit,
The micro- leveling unit of Y direction feed unit, X/Y plane and ultrasonic vibration platform 25 are connect by drag chain b55 with control mechanism, Z
Axis direction feed unit, main axle unit pass through drag chain a29 and connect with control mechanism.
X-direction feed unit is removably connect with base 6, and Y direction feed unit is with dismountable side
Formula is connect with X-direction feed unit.Z-direction feed unit and main axle unit removably connect with column 32
It connects.
Wherein, base 6 and column 32 are process using granite.
Control mechanism includes as shown in Figures 1 and 2 computer 1, computer 1 respectively by conducting wire and X-direction into
To unit, Y direction feed unit, the connection of Z-direction feed unit；Computer 1 also passes through conducting wire and one-dimensional micro-nanometer respectively
Mobile platform drive control power supply 2, mechanical encapsulation formula drive power supply for piezoelectric ceramics 3, motor drive power supply 4 and ultrasound control electricity
Source 5 connects；One-dimensional micro-nanometer mobile platform is connect by conducting wire with Z-direction feed unit with drive control power supply 2, machinery envelope
Dress formula drive power supply for piezoelectric ceramics 3 is connect by conducting wire with the micro- leveling unit of X/Y plane, and motor drive power supply 4 passes through conducting wire respectively
It is connect with X-direction feed unit, Y direction feed unit, Z-direction feed unit and main axle unit, ultrasound control power supply 5
It is connect by conducting wire with ultrasonic vibration platform 25；The conducting wire connected between the control mechanism and machinery-detection integrated mechanism
Be divided into two parts: a part of conducting wire is set in drag chain a29, as control mechanism and Z-direction feed unit and main axle unit
Connecting line, another part conducting wire is set in drag chain b55, as control mechanism and X-direction feed unit, Y direction into
To the connecting line between unit, the micro- leveling unit of X/Y plane and ultrasonic vibration platform 25.
X-direction feed unit includes as shown in Figures 1 and 3 traverse feed bracket 9；Traverse feed bracket 9, including
There is rectangle cross-brace plate, and rectangle cross-brace plate is fixedly installed along the x axis on the upper surface of base 6；In rectangle cross
One X-axis precise guide rail 14 is respectively set close to two opposite long edge positions on the upper surface of support plate, rectangle cross-brace plate
The scale grating being provided in X-direction precision linear encoder 11 on one long side surface, two is opposite on rectangle cross-brace plate upper surface
It is respectively vertically arranged a bearing block a50 on short side, is connected with X-direction precise ball silk between the axis hole of two bearing block a50
Thick stick 15, one end of X-direction precision ball screw 15 feed shaft coupling 8 by X-axis and connect with X-axis servo motor 7, X-axis servo
Motor 7 is connect with motor drive power supply 4, and X-axis servo motor 7 is fixed on motor base a46, and motor base a46 is fixed on base 6
Upper surface, and a motor base a46 and bearing block a50 is linked together；X-axis side is socketed on X-direction precision ball screw 15
To ball-screw nut 13, the nut seat of X-direction ball-screw nut 13 is linked together with the X-axis planker 12 being vertically arranged, X
The top of axis carriage 12 is connect with Y direction feed unit, and the lower part of X-axis planker 12 is connect with sliding block a48, and sliding block a48 energy
It is slided in two X-axis precise guide rails 14, X-axis grating reading head support a44, X-direction precise light is provided on X-axis planker 12
Grating reading head in grid ruler 11 is set on X-axis grating reading head support a44, and the light in X-direction precision linear encoder 11
Grid reading head is connect with computer 1；Shaft coupling 8 is fed by X-axis by X-axis servo motor 7, rotation is passed to X-direction precision
Ball-screw 15 rotates together, and the rotation of X-direction precision ball screw 15 is changed by X-direction ball-screw nut 13
Scale of the X-axis planker 12 along two X-axis precise guide rails 14 in X-direction precision straight-line feed, X-direction precision linear encoder 11
Grating and grating reading head cooperate, and detect for realizing to the X-direction amount of feeding.
As shown in Figures 1 and 3, motor base a46 is in cubic frame-like, and lighter weight, the bottom energy of motor base a46
It is fixed on the upper surface of base 6, for accommodating X-axis feeding shaft coupling 8 and X-axis servo motor 7 can be consolidated inside motor base a46
It lives calmly.
X-direction precision linear encoder 11 is KA300 Series Precision grating scale, mainly by scale grating and grating reading head group
At, and indication grating is provided in the grating reading head.
Y direction feed unit includes as shown in Figures 1 and 3 length feed bracket 21；Length feed bracket 21, packet
The rectangle longitudinal supporting plate for being fixed on 12 top of X-axis planker is included, and rectangle longitudinal supporting plate is vertical with traverse feed bracket 9；
One Y-axis precise guide rail 17 is respectively set close to two opposite long edge positions on the upper surface of rectangle longitudinal supporting plate, rectangle is longitudinal
The scale grating being provided on one long side surface of support plate in Y direction precision linear encoder 20；Rectangle longitudinal supporting plate two is opposite
It is respectively vertically arranged a bearing block b51 on short side, is connected with Y direction precise ball silk between the axis hole of two bearing block b51
Thick stick 18, one end of Y direction precision ball screw 18 feed shaft coupling 16 by Y-axis and connect with Y-axis servo motor 10, and Y-axis is watched
It takes motor 10 to connect with motor drive power supply 4, and Y-axis servo motor 10 is set on motor base b47, motor base b47 is set to
It is linked together on rectangle longitudinal supporting plate and with a bearing block b51；Y-axis side is socketed on Y direction precision ball screw 18
To ball-screw nut 19, the nut seat of Y direction ball-screw nut 19 is linked together with the Y-axis planker 22 being vertically arranged, Y
The top of axis carriage 22 is provided with the micro- leveling unit of X/Y plane, and the lower part connection sliding block b49 of Y-axis planker 22, sliding block b49 can be two
It is slided in Y-axis precise guide rail 17；Grating reading head support b45, Y direction precision linear encoder 20 are provided on Y-axis planker 22
Interior grating reading head is set on grating reading head support b45, and the grating reading head in Y direction precision linear encoder 20 with
Computer 1 connects；Shaft coupling 16 is fed by Y-axis by Y-axis servo motor 10, rotation is passed to Y direction precision ball screw
18 rotate together, and the rotation of Y direction precision ball screw 18 is changed into Y-axis planker by Y direction ball-screw nut 19
22 along scale grating of two Y-axis precise guide rails 17 in Y direction precision straight-line feed, Y direction precision linear encoder 20 and
Grating reading head cooperates, and detects for realizing to the Y direction amount of feeding.
The structure of motor base b47 is identical as the structure of motor base a46, is in cube frame shape, and motor base b47 is capable of fixing
In the upper of rectangle longitudinal supporting plate, the inside motor base b47 is used to accommodate Y-axis feeding shaft coupling 16 and can be by Y-axis servo motor 10
It fixes.
Y direction precision linear encoder 20 is KA300 Series Precision grating scale, mainly by scale grating and grating reading head group
At, and indication grating is provided in the grating reading head.
The micro- leveling unit of X/Y plane includes as shown in Figures 2 and 3 leveling flexible hinge 23, and ultrasonic vibration platform 25 is set
It is placed on leveling flexible hinge 23；Leveling setting in flexible hinge 23, there are two mechanical encapsulation formula piezoelectric ceramics 24, each machinery
Packaged type piezoelectric ceramics 24 is connect with mechanical encapsulation formula drive power supply for piezoelectric ceramics 3, respectively drives two mechanical encapsulation formula pressures
Electroceramics 24 can generate micro-displacement, to realize X/Y plane relative level.
Model core PST150VS250 tomorrow of mechanical encapsulation formula piezoelectric ceramics 24.
Workbench, as shown in figure 3, including workbench main body 26, the upper surface of workbench main body 26 keeps horizontal, and
The fixture 27 for clamping workpiece to be processed 28, the lower surface of workbench main body 26 are provided on the upper surface of workbench main body 26
It is connect with ultrasonic vibration platform 25, the control through computer 1 and ultrasound control power supply 5,25 energy band of ultrasonic vibration platform starts building to make
Platform main body 26 realizes the ultrasonic vibration of X, Y direction, to load ultrasonication in micro-cutting processing, improves machining
Quality.
Z-direction feed unit includes two Z axis precise guide rails 30 as shown in Fig. 1 and Fig. 4, and two Z axis precisions
Guide rail 30 is individually fixed in two opposite side edges on 32 one side of column, the scale grating in Z-direction precision linear encoder 36
It is arranged close to a Z axis precise guide rail 30；The parallel Z-direction precision that is provided with is rolled between two Z axis precise guide rails 30
Ballscrew 34, one end of Z-direction precision ball screw 34 feed shaft coupling 33 by Z axis and connect Z axis servo motor 31, Z axis
Servo motor 31 is connect with motor drive power supply 4, and Z axis servo motor 31 is set on motor base c52, and motor base c52 is fixed on
On column 32；Z-direction ball-screw nut 35, Z-direction ball-screw spiral shell are socketed on Z-direction precision ball screw 34
The nut seat of mother 35 is connect with the Z axis planker 37 being vertically arranged, the lower part connection sliding block c54 of Z axis planker 37, and sliding block c54 energy
It is slided in two Z axis precise guide rails 30；Grating reading head support c53, Z-direction precise grating are provided on Z axis planker 37
Grating reading head in ruler 36 is set on grating reading head support c53, and the grating reading in Z-direction precision linear encoder 36
Head is connect with computer 1；Z axis servo motor 31 feeds shaft coupling 33 by Z axis and gives Z-direction precise ball silk torque transfer
The rotation of thick stick 34, Z-direction precision ball screw 34 is changed into Z axis planker 37 along Z axis by Z-direction ball-screw nut 35
The Z-direction precision of precise guide rail 30, which moves linearly, to be fed；Extension block 38 is provided on Z axis planker 37, and on extension block 38
It is provided with one-dimensional micro-nanometer mobile platform 39, the mark for realizing the micro-nano feeding of Z-direction, in Z axis precision linear encoder 36
Ruler grating and grating reading head cooperate for detecting to the Z-direction amount of feeding, and one-dimensional micro-nanometer mobile platform 39 divides
It is not connect with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply 2.
Z-direction precision linear encoder 36 is KA300 Series Precision grating scale, mainly by scale grating and grating reading head group
At, and indication grating is provided in the grating reading head.
38 main purpose of extension block is arranged to be: can be used to adjust the spatial position of one-dimensional micro-nanometer mobile platform 39, with
Adapt to the process requirements main axle unit of workpiece.
As shown in figure 4, the plate-like structure of motor base c52, light weight, the bottom of motor base c52 is capable of fixing on column 32,
It is used to support Z axis servo motor 31.
Main axle unit includes spindle motor mounting rack 41, the side of spindle motor mounting rack 41 as shown in Fig. 1 and Fig. 4
End face is connect with one-dimensional micro-nanometer mobile platform 39, and spindle motor 40 is provided on the upper surface of spindle motor mounting rack 41,
The center of the lower surface of spindle motor mounting rack 41 connects cutter 43 by knife handle 42, and spindle motor 40 passes through drive shaft and knife
Handle 42 connects, and spindle motor 40 can pass through knife handle 42 torque transfer to cutter 43.
The displacement that X-axis precision linear encoder 11, Y-axis precision linear encoder 20, Z axis precision linear encoder 36 measure is sent to calculating
In machine 1, computer 1 respectively drives X-axis servo motor 7, Y-axis servo electricity according to processing request control motor drive power supply 4 respectively
Machine 10 and Z axis servo motor 31 finally realize three X-axis, Y-axis, Z axis direction feedings, and the micro-nano feeding of Z-direction is by calculating
Machine 1 controls one-dimensional micro-nanometer mobile platform and drives one-dimensional micro-nanometer mobile platform 39 to realize with drive control power supply 2, spindle motor
40 control controls motor drive power supply 4 by computer 1 according to processing request and realizes that the work of ultrasonic vibration platform 25 is by ultrasound
Control power supply 5 is controlled.
The method that machining is carried out to hard brittle material using micro-cutting system of processing under the ultrasonication of hard brittle material,
It is specifically implemented according to the following steps:
Computer 1, motor drive power supply 4, one-dimensional micro-nanometer mobile platform drive control power supply 2 is respectively started in step 1
And ultrasound control power supply 5；
Step 2 requires to write cutter 43 relative to workpiece to be processed according to the size and processing dimension of workpiece to be processed 28
28 walking feeding track processing program and load ultrasonication code；
Workpiece to be processed 28 is mounted on fixture 27 by step 3；
Step 4 respectively drives X-axis servo motor 7, Y-axis servo motor 10 and Z with the control motor drive power supply 4 of computer 1
Axis servo motor 31 works, and adjusts position realization pair of the workpiece to be processed 28 relative to cutter 43 according to workpiece size processing request
Knife；
The program code control difference of motor drive power supply 4 of step 5, the workpieces processing write with computer 1 according to step 2
X-axis servo motor 7, Y-axis servo motor 10, Z axis servo motor 31 and spindle motor 40 are driven, while controlling one-dimensional micro-nanometer shifting
Moving platform drive control power supply 2 drives one-dimensional micro-nanometer mobile platform 39 to realize micro-nano feeding, controls ultrasound control power supply 5
It drives ultrasonic vibration platform 25 to realize the ultrasonic vibration of X, Y both direction, is finally completed workpiece profile surface micro-cutting；
Step 6, close electric computer 1, motor drive power supply 4, one-dimensional micro-nanometer mobile platform drive control power supply 2 and
Ultrasound control power supply 5, finally removes the workpiece processed, clears up lathe.
Micro-cutting system of processing under the ultrasonication of hard brittle material of the present invention solves fine to hard brittle material plastic region
The problem of machining difficulty, the micro-cutting for realizing different hard brittle materials in its plastic region are processed.
Claims (8)
1. micro-cutting system of processing under the ultrasonication of hard brittle material, which is characterized in that by machinery-detection integrated mechanism and
Control mechanism is connected and composed through drag chain a (29), drag chain b (55)；The machinery-detection integrated mechanism, includes fuselage main body,
The fuselage main body is made of horizontally disposed base (6) and the column (32) being vertically installed on base (6) upper surface, described
Base (6) and column (32) are process using granite；
It is provided with X-direction feed unit on the upper surface of the base (6), is connected with Y-axis on the X-direction feed unit
Direction feed unit is provided with the micro- leveling unit of X/Y plane, the micro- leveling unit of X/Y plane on the Y direction feed unit
On be provided with ultrasonic vibration platform (25), be provided with workbench on the ultrasonic vibration platform (25)；
Be respectively arranged with Z-direction feed unit, main axle unit on the column (32), and the Z-direction feed unit with
Main axle unit connection；
The X-direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and ultrasonic vibration platform (25) are equal
It is connect by drag chain b (55) with control mechanism, the Z-direction feed unit, main axle unit pass through drag chain a (29) and control
Mechanism connection；
The control mechanism includes computer (1), and the computer (1) passes through conducting wire and X-direction feed unit, Y respectively
Axis direction feed unit, the connection of Z-direction feed unit；
The computer (1) also passes through conducting wire and one-dimensional micro-nanometer mobile platform drive control power supply (2), mechanical encapsulation respectively
Formula drive power supply for piezoelectric ceramics (3), motor drive power supply (4) and ultrasound control power supply (5) connection；
The one-dimensional micro-nanometer mobile platform is connect by conducting wire with Z-direction feed unit with drive control power supply (2), described
Mechanical encapsulation formula drive power supply for piezoelectric ceramics (3) is connect by conducting wire with the micro- leveling unit of X/Y plane, the motor drive power supply
(4) connected respectively by conducting wire and X-direction feed unit, Y direction feed unit, Z-direction feed unit and main axle unit
It connects, ultrasound control power supply (5) is connect by conducting wire with ultrasonic vibration platform (25)；
The conducting wire connected between the control mechanism and machinery-detection integrated mechanism is divided into two parts: a part of conducting wire setting
In drag chain a (29), as the connecting line of the control mechanism and the Z-direction feed unit and main axle unit, another portion
Intraphase conductor is set in drag chain b (55), as the control mechanism and the X-direction feed unit, Y direction feeding list
Connecting line between member, the micro- leveling unit of X/Y plane and ultrasonic vibration platform (25).
2. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 1, which is characterized in that described
X-direction feed unit includes traverse feed bracket (9)；Traverse feed bracket (9) includes rectangle cross-brace plate, and
The rectangle cross-brace plate is fixedly installed along the x axis on the upper surface of base (6)；In the rectangle cross-brace plate
One X-axis precise guide rail (14) is respectively set close to two opposite long edge positions on upper surface, the one of the rectangle cross-brace plate is long
The scale grating being provided on side in X-direction precision linear encoder (11), two-phase on the rectangle cross-brace plate upper surface
To a bearing block a (50) is respectively vertically arranged on short side, X-direction is connected between the axis hole of two bearing block a (50)
Precision ball screw (15)；
One end of the X-direction precision ball screw (15) is connected by X-axis feeding shaft coupling (8) and X-axis servo motor (7)
It connects, the X-axis servo motor (7) connect with motor drive power supply (4), and the X-axis servo motor (7) is fixed on motor base a
(46) on, the motor base a (46) is fixed on the upper surface of base (6), and the motor base a (46) and bearing block a
(50) it is linked together；X-direction ball-screw nut (13), the X are socketed on the X-direction precision ball screw (15)
The nut seat of axis direction ball-screw nut (13) is linked together with the X-axis planker (12) being vertically arranged, the X-axis planker (12)
Top connect with Y direction feed unit, the lower part of the X-axis planker (12) is connect with sliding block a (48), and the sliding block a
(48) it can be slided on two X-axis precise guide rails (14), X-axis grating reading head support a is provided on the X-axis planker (12)
(44), the grating reading head in the X-direction precision linear encoder (11) is set on X-axis grating reading head support a (44), and
Grating reading head in the X-direction precision linear encoder (11) is connect with computer (1)；
Rotation is passed to by X-axis feeding shaft coupling (8) by X-direction precision ball screw by the X-axis servo motor (7)
(15) it rotates together, the rotation of the X-direction precision ball screw (15) is changed by X-direction ball-screw nut (13)
For X-axis planker (12) along two X-axis precise guide rails (14) in X-direction precision straight-line feed, the X-direction precision linear encoder
(11) scale grating and grating reading head in cooperate, and detect for realizing to the X-direction amount of feeding.
3. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 2, which is characterized in that described
Y direction feed unit includes length feed bracket (21)；The length feed bracket (21) includes to be fixed on X-axis to drag
The rectangle longitudinal supporting plate on plate (12) top, and the rectangle longitudinal supporting plate is vertical with traverse feed bracket (9)；In the square
One Y-axis precise guide rail (17) is respectively set close to two opposite long edge positions on the upper surface of shape longitudinal supporting plate, the rectangle is vertical
The scale grating being provided on a long side surface of support plate in Y direction precision linear encoder (20)；The rectangle longitudinal bracing
It is respectively vertically arranged a bearing block b (51) on two relative short edge of plate, is connected with Y between the axis hole of two bearing block b (51)
Axis direction precision ball screw (18)；
One end of the Y direction precision ball screw (18) is connected by Y-axis feeding shaft coupling (16) and Y-axis servo motor (10)
It connects, the Y-axis servo motor (10) connect with motor drive power supply (4), and the Y-axis servo motor (10) is set to motor base
On b (47), the motor base b (47) is set on rectangle longitudinal supporting plate and is linked together with a bearing block b (51)；It is described
It is socketed on Y direction precision ball screw (18) Y direction ball-screw nut (19), the Y direction ball-screw spiral shell
The nut seat of female (19) is linked together with the Y-axis planker (22) being vertically arranged, and it is flat that the top of the Y-axis planker (22) is provided with XY
The micro- leveling unit in face, the lower part connection sliding block b (49) of the Y-axis planker (22), the sliding block b (49) can be in two Y-axis precisions
Guide rail slides on (17)；Grating reading head support b (45), the Y direction precise grating are provided on the Y-axis planker (22)
Grating reading head in ruler (20) is set on grating reading head support b (45), and the light in Y direction precision linear encoder (20)
Grid reading head is connect with computer (1)；
Rotation is passed to by Y-axis feeding shaft coupling (16) by Y direction precision ball screw by the Y-axis servo motor (10)
(18) it rotates together, the rotation of the Y direction precision ball screw (18) is changed by Y direction ball-screw nut (19)
For Y-axis planker (22) along two Y-axis precise guide rails (17) in Y direction precision straight-line feed, the Y direction precision linear encoder
(20) scale grating and grating reading head in cooperate, and detect for realizing to the Y direction amount of feeding.
4. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 3, which is characterized in that described
The micro- leveling unit of X/Y plane, includes leveling flexible hinge (23), and ultrasonic vibration platform (25) is set to the leveling flexible hinge
On chain (23)；
There are two mechanical encapsulation formula piezoelectric ceramics (24), each mechanical encapsulation formulas for setting in the leveling flexible hinge (23)
Piezoelectric ceramics (24) is connect with mechanical encapsulation formula drive power supply for piezoelectric ceramics (3), respectively drives two mechanical encapsulation formulas
Piezoelectric ceramics (24) can generate micro-displacement, to realize X/Y plane relative level.
5. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 4, which is characterized in that described
The model PST150VS250 of mechanical encapsulation formula piezoelectric ceramics (24).
6. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 1, which is characterized in that described
Workbench includes workbench main body (26), and the upper surface of workbench main body (26) keeps horizontal, and in the workbench main body
(26) fixture (27) for clamping workpiece to be processed (28), the following table of the workbench main body (26) are provided on upper surface
Face is connect with ultrasonic vibration platform (25), and the control through computer (1) and ultrasound control power supply (5) obtains ultrasonic vibration platform
(25) energy band moves the ultrasonic vibration that workbench main body (26) realize X, Y direction, loads ultrasonication in micro-cutting processing,
Improve machining quality.
7. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 1, which is characterized in that described
Z-direction feed unit includes two Z axis precise guide rails (30), and two Z axis precise guide rails (30) are individually fixed in
Two opposite side edges on column (32) one side, the scale grating in Z-direction precision linear encoder (36) is close to a Z axis essence
Close guide rail (30) setting；
It is parallel between two Z axis precise guide rails (30) to be provided with a Z-direction precision ball screw (34), the Z
One end of axis direction precision ball screw (34) passes through Z axis feeding shaft coupling (33) connection Z axis servo motor (31), the Z axis
Servo motor (31) is connect with motor drive power supply (4), and the Z axis servo motor (31) is set on motor base c (52), described
Motor base c (52) is fixed on column (32)；Z-direction ball wire is socketed on the Z-direction precision ball screw (34)
Thick stick nut (35), the nut seat of the Z-direction ball-screw nut (35) are connect with the Z axis planker (37) being vertically arranged, institute
The lower part connection sliding block c (54) of Z axis planker (37) is stated, and the sliding block c (54) can be slided on two Z axis precise guide rails (30)
It is dynamic；Grating reading head support c (53), the light in the Z-direction precision linear encoder (36) are provided on the Z axis planker (37)
Grid reading head is set on grating reading head support c (53), and the grating reading head in the Z-direction precision linear encoder (36)
It is connect with computer (1)；
The Z axis servo motor (31) gives Z-direction precision ball screw torque transfer by Z axis feeding shaft coupling (33)
(34), the rotation of the Z-direction precision ball screw (34) is changed into Z axis by Z-direction ball-screw nut (35) and drags
Plate (37) moves linearly along the Z-direction precision of Z axis precise guide rail (30) and feeds；Extension is provided on the Z axis planker (37)
Block (38), and one-dimensional micro-nanometer mobile platform (39) are provided on the extension block (38), for realizing the micro-nano of Z-direction
Rice is fed, and the scale grating and grating reading head in the Z axis precision linear encoder (36) cooperate for feeding to Z-direction
Amount is detected；
The one-dimensional micro-nanometer mobile platform (39) respectively with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply
(2) it connects.
8. micro-cutting system of processing under the ultrasonication of hard brittle material according to claim 7, which is characterized in that described
Main axle unit includes spindle motor mounting rack (41), a side end face of the spindle motor mounting rack (41) and one-dimensional micro-nano
Rice mobile platform (39) connects, and spindle motor (40) are provided on the upper surface of the spindle motor mounting rack (41), described
The center of the lower surface of spindle motor mounting rack (41) is by knife handle (42) connection cutter (43), and the spindle motor (40) is logical
Axis of overdriving is connect with knife handle (42), and the spindle motor (40) can give cutter (43) torque transfer by knife handle (42).
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| CN201610824314.2A CN106493861B (en) | 2016-09-14 | 2016-09-14 | Micro-cutting system of processing under the ultrasonication of hard brittle material |
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| CN108417508B (en) * | 2018-01-22 | 2020-12-18 | 西安理工大学 | Micro-arc discharge cutting device for semiconductor |
| CN109439885B (en) * | 2018-12-25 | 2020-04-10 | 南昌航空大学 | Ultrasonic impact device |
| CN110315419A (en) * | 2019-08-08 | 2019-10-11 | 吉林大学 | A kind of inner circle slice ultrasonic vibration auxiliary machining device |
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| US4920946A (en) * | 1987-03-03 | 1990-05-01 | Applied Magnetic Lab. Co., Ltd. | Blade cutting apparatus for hard brittle material |
| TW442370B (en) * | 2000-05-24 | 2001-06-23 | Chien Hui Chuan | Diamond wire saw cutting machine |
| CN203275220U (en) * | 2013-05-24 | 2013-11-06 | 西安理工大学 | Plastic and crisp conversion critical condition determining device for crisp and hard material removal under ultrasonication |
| CN105034180B (en) * | 2015-07-01 | 2016-10-05 | 西安理工大学 | The fine cutter sweep of micro-arc discharge of SiC single crystal sheet and cutting method |
| CN105215487A (en) * | 2015-10-23 | 2016-01-06 | 山东大学 | A kind of fine high-efficiency machining method towards non-conductive hard brittle material and device |
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