CN206116459U - Flexible capacitanc pressure sensor of sandwich formula - Google Patents
Flexible capacitanc pressure sensor of sandwich formula Download PDFInfo
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- CN206116459U CN206116459U CN201620853642.0U CN201620853642U CN206116459U CN 206116459 U CN206116459 U CN 206116459U CN 201620853642 U CN201620853642 U CN 201620853642U CN 206116459 U CN206116459 U CN 206116459U
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Abstract
The utility model discloses a flexible capacitanc pressure sensor of sandwich formula, the flexible substrate layer, down metal electrode layer, flexible dielectric layer, go up the metal electrode layer and arrange in proper order from supreme down, the metal electrode layer includes a plurality of electric capacity, electrode down, it includes a plurality of electric capacity, electrode to go up the metal electrode layer, electric capacity includes: capacitor sheet, bending line, capacitor electrode, it is connected to lead to the turn the corner curve between capacitor sheet and a plurality of capacitor electrode, flexible substrate layer, flexible dielectric layer all adopt PDMS dimethyl silicone polymer or PI polyimide or PET polydiethylene terephthalate or flexible glass or metal forming or test paper. The utility model discloses flexible performance makes this device can adapt to multivariable surface texture better, therefore has extensive application prospect.
Description
Technical field
This utility model is related to a kind of sandwich style flexible capacitance type pressure transducer, belongs to microelectronics technology.
Background technology
Flexible electronic is an emerging technology.In the impression of people, organic material, such as plastics are all good
Insulator, few people will recognize that plastics also can be conductive.In recent years, because the research to conducting polymer has new breakthrough, have
Machine material can become conductive quasiconductor, flexible electronic from traditional insulator（Flexible Electronics）Just should
Transport and give birth to.The development of the technologies such as modern chemistry, promotes the development of the such subject of flexible electronic.The pass of flexible electronic manufacture
Key includes manufacturing process, substrate and material etc., and its core is micro-nano patterning（Micro-and Nanopatterning）System
Make, be related to the interdisciplinary researchs such as machinery, material, physics, chemistry, electronics.
Flexible electronic technology is a brand-new electronic technology revolution, causes global extensive concern and has obtained rapid
Development.The U.S.《Science》Organic electronic technical progress is classified as one of big scientific and technological achievement in the world ten in 2000 by magazine, with mankind's base
Find because a group sketch, Cologne technology etc. are great arranged side by side.American scientist Alan's black square, Alan mark Diarmid and day undergraduate course
Scholar's Hideki Shirakawa obtains Nobel chemistry Prize in 2000 due to them in the starting sex work of conducting polymer field.
Flexible electronic technology is currently under the starting stage, is also called plastic electronic（Plastic Electronics）, print
Brush electronics（Printed Electronics）, organic electronic（Organic Electronics）, polymer electronics（Polymer
Electronics）Deng；And with regard to its definition, the clear and definite concept of unification is there is presently no, can be summarized as organic/inorganic materials
Electronic device is produced on the new electronic technology on flexibility/Drawability plastics and thin metal matrix plate.Flexible electronic is with its uniqueness
Flexibility/ductility and efficient, inexpensive manufacturing process, before the fields such as information, the energy, medical treatment, national defence tool is widely used
Scape, such as flexible electronic displays, Organic Light Emitting Diode OLED, printing RFID, thin-film solar cell panel, electronic newspaper, electricity
Sub- skin/artificial-muscle etc..Except integrating, electronic circuit, electronic building brick, material, plane show flexible electronic, nanotechnology etc. is led
Outside field technique, while across industries such as quasiconductor, envelope survey, material, chemical industry, printed circuit board (PCB), display floaters, traditional product can be assisted
Industry, such as plastics, printing, chemical industry, the transition of metal material industry, lifting industry surcharge, therefore flexible electronic technology
Development will be that the industrial structure and human lives bring revolutionary change.
At present, partially flexible application of electronic technology is in related pressure electric capacity, but it is in the ductility for processing metal electrode
When, also there are problems that very big, and the flexible ductility for how lifting the metal electrode on flexible material will be flexible electronic technology one
Need the problem of key breakthrough.
Utility model content
Purpose：In order to overcome the deficiencies in the prior art, this utility model to provide a kind of sandwich style flexibility electric capacity
Formula pressure transducer.
Technical scheme：To solve above-mentioned technical problem, the technical solution adopted in the utility model is：
A kind of sandwich style flexible capacitance type pressure transducer, including：Flexible base layer, lower metal electrode layer, flexible Jie
Matter layer, upper metal electrode layer, the flexible base layer, lower metal electrode layer, flexible media layer, upper metal electrode layer are from bottom to up
It is arranged in order；The lower metal electrode layer includes multiple electric capacity, electrode, and the electric capacity is in matrix structure in flexible base layer
Top surface, the electrode is arranged on flexible base layer top surface in symmetrical structure；The upper metal electrode layer includes multiple electric capacity, electricity
Pole, in matrix structure in flexible media layer top surface, the electrode is arranged in flexible media the electric capacity in symmetrical structure
Layer top surface；The electric capacity includes：Capacitance sheet, sweep, capacitance electrode, by curved between the capacitance sheet and multiple capacitance electrodes
Curve is connected；The flexible base layer, flexible media layer are using PDMS polydimethylsiloxane or PI polyimides or PET
Polyethylene terephthalate or flexible glass or metal forming or reagent paper.
Also include sacrifice layer, the flexible base layer bottom is provided with sacrifice layer, the sacrifice layer periphery and flexible substrates
Layer bottom is provided with the space of 1-10mm；The sacrifice layer is using photoresist layer or magnalium layer or nickel aluminium lamination.
Preferably, the flexible base layer, the thickness of flexible media layer are set to 200nm-1000nm.
Preferably, the lower metal electrode layer, the thickness of upper metal electrode layer are set to 1um-5um.
Preferably, the live width of the sweep is set to 200nm-500nm.
A kind of preparation method of sandwich style flexible capacitance type pressure transducer, comprises the steps：
Step one：One layer of photoresist is applied using sol evenning machine is even on silicon chip, then baking-curing, cleans a cast at edge
Into sacrifice layer；
Step 2：PDMS polydimethylsiloxane liquids are coated into uniform one layer on sacrifice layer using sol evenning machine, then
Baking-curing forms flexible base layer；
Step 3：Schemed using Auto CAD Software on Drawing electric capacity and electrode lay-out, and be fabricated to film mask piece；Electric capacity
It is connected by sweep between piece and multiple capacitance electrodes；Electric capacity is in matrix structure, and electrode is arranged in symmetrical structure；So
Afterwards, using photoetching, sputtering, electric capacity and electrode deposition are become lower metal electrode by additional galvanoplastic on flexible base layer top surface
Layer；
Step 4, applies one layer of PDMS polydimethylsiloxane liquid, then using sol evenning machine is even on lower metal electrode layer
Baking-curing forms flexible media layer；
Step 5：Schemed using Auto CAD Software on Drawing electric capacity and electrode lay-out, and be fabricated to film mask piece；Electric capacity
It is connected by sweep between piece and multiple capacitance electrodes；Electric capacity is in matrix structure, and electrode is arranged in symmetrical structure；So
Afterwards, using photoetching, sputtering, additional galvanoplastic, by electric capacity and electrode deposition become on flexible media layer top surface on metal electrode
Layer.
Beneficial effect：A kind of sandwich style flexible capacitance type pressure transducer that this utility model is provided, using flexible base
Bottom, flexible media layer, and with flexible material PDMS polydimethylsiloxane or PI polyimides or PET poly terephthalic acid second
Diol ester or flexible glass or metal forming or reagent paper are made.Lower metal electrode layer, upper metal electrode layer are using copper or aluminum.Sacrifice layer
Can be photoresist, magnalium layer, nickel aluminium lamination.The design innovatively proposes the Direct precipitation metal electricity on flexible high molecular material
Pole and prepare new departure of flexible device.Wherein, being connected using sweep causes the extension retractility of capacitance electrode to obtain effectively
Lifting, better adapt to the flexibility of flexible substrates extremely medium, can be greatly enhanced on the premise of using metal electrode
The flex capability of device.The capacitance profile of matrix form, by the change in voltage of multiple electric capacity near measurement, can sense and accurate
Calculate out depressed position and its pressure size.
Advantage of the present utility model is：
1st, the flexible electronic device fusion conventional pressure inductance capacitance manufacture method and flexibility described in this utility model
Electronic device process is in one, novel uniqueness.
2nd, the device preparation technology described in this utility model is simple, and possesses good flex capability.
3rd, a kind of universal performance that possess pressure capacitance of the device as electric capacity in the eyes --- accurately inductively measure out
Pressurized position and its pressure size.Meanwhile, it is diverse that the flex capability of itself allows the device to better adapt to
Surface texture.
Description of the drawings
Fig. 1 is section of structure of the present utility model；
Fig. 2 is the structural representation of metal electrode layer under this utility model；
Fig. 3 is the structural representation of metal electrode layer on this utility model；
Fig. 4 is the structural representation of electric capacity.
Specific embodiment
This utility model is further described below in conjunction with the accompanying drawings.
As Figure 1-4, a kind of sandwich style flexible capacitance type pressure transducer, including：Flexible base layer 1, lower metal
Electrode layer 2, flexible media layer 3, upper metal electrode layer 4, the flexible base layer 1, lower metal electrode layer 2, flexible media layer 3,
Upper metal electrode layer 4 is arranged in order from bottom to up；The lower metal electrode layer 2 includes multiple electric capacity 21, electrode 22, the electric capacity
21 in matrix structure in the top surface of flexible base layer 1, the electrode 22 is arranged on the top surface of flexible base layer 1 in symmetrical structure；
The upper metal electrode layer 4 includes multiple electric capacity 21, electrode 22, and the electric capacity 21 is in matrix structure in flexible media layer 3
Top surface, the electrode 22 is arranged in the top surface of flexible media layer 3 in symmetrical structure；The electric capacity 21 includes：It is capacitance sheet 211, curved
Curve 212, capacitance electrode 213, are connected between the capacitance sheet 211 and multiple capacitance electrodes 213 by sweep 212；Institute
Flexible base layer 1, flexible media layer 3 are stated using PDMS polydimethylsiloxane or PI polyimides or the poly- terephthaldehydes of PET
Sour glycol ester or flexible glass or metal forming or reagent paper.
Also include sacrifice layer 5, the bottom of the flexible base layer 1 is provided with sacrifice layer 5, the periphery of the sacrifice layer 5 and flexibility
The bottom of basal layer 1 is provided with the space of 1-10mm；The sacrifice layer 5 is using photoresist layer or magnalium layer or nickel aluminium lamination.
Concrete processing technology is as follows：：
Sacrifice layer：Purpose is easy for the disengaging of device and substrate, and one layer is applied on clean substrate uniformly using sol evenning machine
Photoresist, then marginal portion is wiped, then baking-curing is formed.
Flexible base layer：A strata dimethyl siloxane is applied on sacrifice layer with sol evenning machine is even（PDMS）Liquid, then 90
DEG C baking 30 min solidify to form.
Lower metal electrode layer：To polydimethylsiloxane（PDMS）Flexible base layer is done a hydrophilic and hydrophobic and is processed, true
With oxygen plasma bombardment PDMS top layers in empty cleaning device, radio frequency 8W continues 10 min, recycles ready-made film mask piece bottom
On do photoetching, develop, then one layer of copper of sputtering sedimentation, then adds thick metal layers using electroplating technology.Finally, cleaned with acetone
Except noncapacitive and electrode part, lower metal electrode layer is formed.
Flexible media layer：First, the even resist coating on lower metal electrode layer, according to film mask piece figure, does light
Carve, development, then the electrode not manifested is pasted with PI glue band.Then, with sol evenning machine in above-mentioned lower metal electrode layer surface
It is uniform to apply a strata dimethyl siloxane（PDMS）Liquid, then 90 DEG C of baking 30 min solidifications are formed.
Upper metal electrode layer：To polydimethylsiloxane（PDMS）Flexible media layer does a hydrophilic and hydrophobic and processes, true
With oxygen plasma bombardment PDMS top layers in empty cleaning device, radio frequency 8W continues 10 min, recycles ready-made film mask piece bottom
On do photoetching, develop, then one layer of copper of sputtering sedimentation, then adds thick metal layers using electroplating technology.Finally, cleaned with acetone
Except noncapacitive and electrode part, electrode of metal layer is formed.
Scratch to sacrifice layer is exposed along substrate edge blade, device is immersed in acetone soln, sacrifice layer（Photoetching
Glue）Dissolving, device takes out complete device from the substrate that comes off.
The above is only preferred implementation of the present utility model, it should be pointed out that：For the common skill of the art
For art personnel, on the premise of without departing from this utility model principle, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as protection domain of the present utility model.
Claims (5)
1. a kind of sandwich style flexible capacitance type pressure transducer, including：Flexible base layer, lower metal electrode layer, flexible media
Layer, upper metal electrode layer, it is characterised in that：The flexible base layer, lower metal electrode layer, flexible media layer, upper metal electrode
Layer is arranged in order from bottom to up；The lower metal electrode layer includes multiple electric capacity, electrode, and the electric capacity exists in matrix structure
Flexible base layer top surface, the electrode is arranged on flexible base layer top surface in symmetrical structure；The upper metal electrode layer includes many
Individual electric capacity, electrode, in matrix structure in flexible media layer top surface, the electrode is arranged on the electric capacity in symmetrical structure
Flexible media layer top surface；The electric capacity includes：Capacitance sheet, sweep, capacitance electrode, the capacitance sheet and multiple capacitance electrodes it
Between be connected by sweep；The flexible base layer, flexible media layer are using PDMS polydimethylsiloxane or PI polyamides
Imines or PET polyethylene terephthalate or flexible glass or metal forming or reagent paper.
2. a kind of sandwich style flexible capacitance type pressure transducer according to claim 1, it is characterised in that：Also include sacrificial
Domestic animal layer, the flexible base layer bottom is provided with sacrifice layer, and the sacrifice layer periphery is provided with 1- with flexible base layer bottom
The space of 10mm；The sacrifice layer is using photoresist layer or magnalium layer or nickel aluminium lamination.
3. a kind of sandwich style flexible capacitance type pressure transducer according to claim 1, it is characterised in that：The flexibility
Basal layer, the thickness of flexible media layer are set to 200nm-1000nm.
4. a kind of sandwich style flexible capacitance type pressure transducer according to claim 1, it is characterised in that：The lower gold
Category electrode layer, the thickness of upper metal electrode layer are set to 1um-5um.
5. a kind of sandwich style flexible capacitance type pressure transducer according to claim 1, it is characterised in that：The bending
The live width of line is set to 200nm-500nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620853642.0U CN206116459U (en) | 2016-08-09 | 2016-08-09 | Flexible capacitanc pressure sensor of sandwich formula |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620853642.0U CN206116459U (en) | 2016-08-09 | 2016-08-09 | Flexible capacitanc pressure sensor of sandwich formula |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206116459U true CN206116459U (en) | 2017-04-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620853642.0U Withdrawn - After Issue CN206116459U (en) | 2016-08-09 | 2016-08-09 | Flexible capacitanc pressure sensor of sandwich formula |
Country Status (1)
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098927A (en) * | 2016-08-09 | 2016-11-09 | 江苏艾伦摩尔微电子科技有限公司 | A kind of sandwich style flexible capacitance type pressure transducer and preparation method thereof |
| CN109091120A (en) * | 2018-06-19 | 2018-12-28 | 华东师范大学 | A method of flexible sensor is made based on growth in situ silver electrode on paper |
| CN110793677A (en) * | 2019-10-25 | 2020-02-14 | 天津大学 | Degradable paper capacitive flexible pressure sensor and preparation method thereof |
| CN112815823A (en) * | 2020-12-31 | 2021-05-18 | 南京航空航天大学 | Flexible high-tensile-strain sensor based on flexible flat capacitor and preparation method and application thereof |
-
2016
- 2016-08-09 CN CN201620853642.0U patent/CN206116459U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098927A (en) * | 2016-08-09 | 2016-11-09 | 江苏艾伦摩尔微电子科技有限公司 | A kind of sandwich style flexible capacitance type pressure transducer and preparation method thereof |
| CN106098927B (en) * | 2016-08-09 | 2019-11-15 | 江苏艾伦摩尔微电子科技有限公司 | A kind of sandwich style flexible capacitance type pressure sensor and preparation method thereof |
| CN109091120A (en) * | 2018-06-19 | 2018-12-28 | 华东师范大学 | A method of flexible sensor is made based on growth in situ silver electrode on paper |
| CN110793677A (en) * | 2019-10-25 | 2020-02-14 | 天津大学 | Degradable paper capacitive flexible pressure sensor and preparation method thereof |
| CN112815823A (en) * | 2020-12-31 | 2021-05-18 | 南京航空航天大学 | Flexible high-tensile-strain sensor based on flexible flat capacitor and preparation method and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170419 Effective date of abandoning: 20191115 |
|
| AV01 | Patent right actively abandoned |