CN206017108U - Piezoelectric actuator structure - Google Patents

Abstract

A kind of piezoelectric actuator structure, including：Suspension board, is foursquare kenel, with the length of side between 8 10, and can be by central part to peripheral part bending vibration；Housing, around the outside for being arranged at suspension board；An at least support, is connected between suspension board and housing, to provide resilient support；And Piezoelectric Driving body, it is foursquare kenel, with the length of side less than the suspension board length of side, is attached on the first surface of suspension board, in order to applied voltage driving suspension board bending vibration.

Description

Piezoelectric actuator structure

【Technical field】

This utility model be with regard to a kind of piezoelectric actuator structure, espespecially a kind of suitable for micro ultrathin and quiet miniature The piezoelectric actuator structure of fluid control device.

【Background technology】

The at present either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro- Littleization direction is developed, the fluid delivery structure included by the product such as wherein micro- side Pu, aerosol apparatus, ink gun, industrial printing devices For its key technology, therefore how to break through its technical bottleneck by means of innovation structure, it is the important content of development.

For example, in medicinal industry, many instruments or equipment needed using Pneumatic pressure power driving, for example：Blood pressure Meter or portable, Wearable instrument or equipment, such instrument and equipment are generally adopted and are reached its stream with conventional motor and air pressure valve The purpose of body conveying.However, being limited to the volumetric constraint of these conventional motors and fluid valve so that such instrument and equipment is difficult To reduce the volume of its single unit system, that is, the target being thinned is difficult to, cannot more made reaches portable purpose.This Outward, these conventional motors and fluid valve can also produce the problem of noise when start, cause using upper not convenient and uncomfortable.

Therefore, how developing one kind can improve above-mentioned known technology disappearance, the instrument that drive can conventionally employed Pneumatic pressure power Device or equipment reach small volume, miniaturization and quiet, and then reach the minisize fluid control dress of light comfortably portable purpose The piezoelectric actuator structure that puts and its adopted, actually problem in the urgent need to address at present.

【Utility model content】

Main purpose of the present utility model is to provide a kind of micro- suitable for portable or Wearable instrument or equipment Type fluid control device and its piezoelectric actuator structure for being adopted, by the fluid wave that the start of piezo-activator high frequency is produced Dynamic, barometric gradient is produced in the runner after design, and makes fluid high-speed flow, and enter the impedance contrast of outgoing direction through runner Different, fluid is transmitted to outlet side by suction side, the instrument or equipment institute in order to the employing Pneumatic pressure power driving for solving known technology The volume that possesses is big, be difficult to be thinned, cannot reach portable purpose, and big grade of noise lacks.

It is that of the present utility model one broader aspect of implementing is wrapped for providing a kind of piezoelectric actuator structure up to above-mentioned purpose Include：Suspension board, is foursquare kenel, with the length of side between 8-10, and can be by central part to peripheral part bending vibration；Outward Frame, around the outside for being arranged at suspension board；An at least support, is connected between suspension board and housing, to provide resilient support；With And Piezoelectric Driving body, it is foursquare kenel, with the length of side less than the suspension board length of side, is attached at the first surface of suspension board On, in order to applied voltage driving suspension board bending vibration.

【Description of the drawings】

Positive combination structural representations of the Fig. 1 for the minisize fluid control device of this utility model preferred embodiment.

Fig. 2A is the front decomposition texture schematic diagram of the minisize fluid control device shown in Fig. 1.

Fig. 2 B are the back side decomposition texture schematic diagram of the minisize fluid control device shown in Fig. 1.

Fig. 3 is the cross-sectional view of the minisize fluid control device shown in Fig. 1.

Front groups of Fig. 4 A for the piezo-activator of the minisize fluid control device of another preferred embodiment of this utility model Close structural representation.

Fig. 4 B are the back side combining structure schematic diagram of the piezo-activator shown in Fig. 4 A.

Fig. 4 C are the cross-sectional view of the piezo-activator shown in Fig. 4 B.

Fig. 5 A are multiple enforcement aspect schematic diagrams of the piezo-activator shown in Fig. 2A.

Fig. 5 B are other multiple enforcement aspect schematic diagrams of the piezo-activator shown in Fig. 4 A.

Fig. 6 A to Fig. 6 C are the illustrative view of the minisize fluid control device shown in Fig. 2A.

Fig. 7 A to Fig. 7 D are the local illustrative view of the minisize fluid control device shown in Fig. 2A.

Fronts of Fig. 8 A for the minisize fluid control device and micro valve device of another preferred embodiment of this utility model Combining structure schematic diagram.

Fig. 8 B are the front decomposition texture schematic diagram of the minisize fluid control device shown in Fig. 8 A and micro valve device.

Fig. 8 C are the structure schematic diagram of the micro valve device shown in Fig. 8 A.

Fig. 9 A are the collection pressure illustrative view of the minisize fluid control device shown in Fig. 8 A and micro valve device.

Fig. 9 B are the blood pressure lowering or release start signal of the minisize fluid control device shown in Fig. 9 A and micro valve device Figure.

【Specific embodiment】

Embody this utility model feature to be described in the explanation of back segment in detail with some exemplary embodiments of advantage.Ying Li Solution be that this utility model can have various changes in different aspects, its all without departing from scope of the present utility model, And explanation therein and diagram are treated as purposes of discussion in itself, and nand architecture is in restriction this utility model.

Minisize fluid control device 1 of the present utility model is to can be applicable to the raw skill of medicine, the energy, computer technology or printing Deng industry, in order in order to transmit fluid, but it is not limited.It is this utility model preferred embodiment to refer to Fig. 1 and Fig. 2A, Fig. 1 Minisize fluid control device positive combination structural representation, Fig. 2A be Fig. 1 shown in minisize fluid control device front Decomposition texture schematic diagram, Fig. 2 B back side decomposition texture schematic diagrams then for the minisize fluid control device shown in Fig. 1, Fig. 3 is Fig. 1 The cross-sectional view of shown minisize fluid control device.As shown in Figure 1, Figure 2 shown in A, Fig. 2 B and Fig. 3, of the present utility model Minisize fluid control device 1 mainly includes the structure such as housing 10 and piezo-activator 13, and wherein, housing 10 includes carrying housing 11 And base 12, it is the frame structure that there is side wall 118 for periphery to carry housing 11, and the side wall 118 being made up of the periphery with The plate common definition of its bottom goes out an accommodation space 11a (as shown in Figure 2 B), and base 12 is then by cover plate 120 and flexible sheet 121 Constituted, but be not limited.And as shown in Figure 2 A, piezo-activator 13 is to include Piezoelectric Driving body 131, suspension board 132, outer Frame 133 and at least a support 134, wherein Piezoelectric Driving body 131 are to be but not be limited to a piezoelectric ceramic plate, and which is for square Platy structure, and its length of side is less than the length of side of suspension board 132, and can be attached on suspension board 132.In the present embodiment, hang Kickboard 132 is for flexible square platy structure；Outside suspension board 132, side ring is around setting housing 133, the type of housing 133 State also corresponds roughly to the kenel of suspension board 132, is so that, in the present embodiment, housing 133 is tied for foursquare hollow out frame-type Structure；And between suspension board 132 and housing 133 connected and resilient support is provided with support 134.And, such as Fig. 2A and Fig. 2 B Shown, minisize fluid control device 1 of the present utility model more may include the structure such as insulation spacer 14 and conductive spacer 15, felt pad It can be two insulation spacers 141,142 that piece 14 is, and two insulation spacer 141,142 is upper and lower sandwiched conductive spacer 15 and arranges. When minisize fluid control device 1 of the present utility model is assembled, i.e., as shown in Fig. 2A, Fig. 2 B and Fig. 3, sequentially make carrying housing 11st, the corresponding group such as insulation spacer 142, conductive spacer 15, insulation spacer 141, piezo-activator 13, flexible sheet 121 and cover plate 120 Dress, and the structures such as aforementioned dielectric pad 142, conductive spacer 15, insulation spacer 141, piezo-activator 13 and base 12 are assembled It is located in the accommodation space 11a carried in housing 11 so as to be as shown in figure 1, may make up small volume and miniaturization after combination The minisize fluid control device 1 of profile.

Fig. 1, Fig. 2 B and Fig. 3 is referred to, as it was previously stated, the carrying housing 11 of minisize fluid control device 1 is that have for periphery There is the frame structure of side wall 118, and the side wall 118 being made up of the periphery goes out an accommodating sky with the plate common definition of its bottom Between 11a, when aforementioned piezo-activator 13 is located in accommodation space 11a, then its meeting as shown in figure 3, i.e. carry housing 11 side Wall 118 can be around the outside for being arranged at piezo-activator 13, and the bottom of piezo-activator 13 can give closing by base 12 and set Put.In the present embodiment, the plate for carrying the bottom of housing 11 is with outer surface 110 and inner surface 111, wherein inner surface 111 are more recessed to form chamber 112, and in carrying housing 11 with more multiple through the of inner surface 111 and outer surface 110 One intercommunicating pore 113,114.As shown in Figures 1 and 3, can more be recessed on the outer surface 110 for carrying housing 11 the first pressure-releasing cavity of setting Room 115 and first outlet chamber 116, and one end of the first intercommunicating pore 113,114 is connected with chamber 112, the other end then divides It is not connected with the first release chamber 115 and first outlet chamber 116.And, in the present embodiment, in first outlet chamber A convex portion structure 117 can be further set up more at 116, for example, can be but not be limited to a column structure.

In the present embodiment, the base 12 of minisize fluid control device 1 is made up of cover plate 120 and flexible sheet 121, but It is not limited.Wherein, as shown in Figure 2 A and 2 B, cover plate 120 has first surface 120a and relative with first surface 120a The second surface 120b of setting, and at least one is provided with cover plate 120 through first surface 120a's and second surface 120b Second intercommunicating pore 120c.As Fig. 2 B are visible, visible at least one second intercommunicating pore 120c on first surface 120a, with this enforcement As a example by example, the quantity of the second intercommunicating pore 120c is for 4, but is not limited, its mainly with for fluid from device outer via At least one second intercommunicating pore 120c is flowed in minisize fluid control device 1.And second intercommunicating pore 120c is through to second On the 120b of surface, and as shown in Figure 2 A, from the second surface 120b of cover plate 120, also there is at least total string holes thereon 120d, these total string holes 120d are connected and are correspondingly arranged with the second intercommunicating pore 120c on first surface 120a, in these At the center exchange of total string holes 120d be with central recess 120e, i.e. central recess 120e also with these total string holes 120d phases Connection, so being input into fluid by least one second intercommunicating pore 120c and be guided at least one total string holes 120d, then thoroughly Cross at least one total string holes 120d and conflux and be concentrated at central recess 120e, and as shown in figure 3, when cover plate 120 and flexible sheet 121 pairs After should assembling, be can correspondingly to constitute a chamber 120f that confluxes for confluxing fluid at this central recess 120e, for fluid temporary. In some embodiments, the material of cover plate 120 be can by but be not limited to be made up of a stainless steel, but be not limited. In other embodiments, by depth and these total string holes 120d of the chamber 120f that confluxes constituted at central recess 120e Depth identical, but be not limited.

And, in the present embodiment, flexible sheet 121 is made up of flexible materials, for example, can be but not be limited to copper Material is constituted, but is not limited, and there is stream hole 121a in flexible sheet 121, corresponds to the second of cover plate 120 Central recess 120e of surface 120b and arrange, therefore stream hole 121a is as shown in figure 3, can be connected with the chamber 120f that confluxes Logical.And as shown in figure 3, between flexible sheet 121 and piezo-activator 13 be with a gap g0, in the present embodiment, be in A material is filled in gap g0 between the housing 133 of flexible sheet 121 and piezo-activator 13, for example：Conducting resinl, but not with this It is limited, so as to the depth of gap g0 between the suspension board 132 of flexible sheet 121 and piezo-activator 13, can be maintained, another to constitute One keeps in chamber 121d, and then the stream hole 121a guiding fluid of permeable flexible sheet 121 more quickly flows between chamber, and Because suspension board 132 and flexible sheet 121 keep suitable distance to make the interference minimizing that contacts with each other, promoting noise to produce can be lowered；In In other embodiments, also can be by the height of the housing 133 for increasing piezo-activator 13, so which is assembled with flexible sheet 121 Mono- gaps of Shi Zengjia, but be not limited.

Additionally, please refer to Fig. 2A, Fig. 2 B and Fig. 3, having more insulating trip 142 in minisize fluid control device 1, leading The structure such as electric piece 15 and another insulating trip 141, its are sequentially located between carrying housing 11 and piezo-activator 13, and its shape State approximately corresponds to the form of the housing of piezo-activator 13.In some embodiments, insulating trip 141,142 is i.e. by can insulate Material constituted, for example：Plastic cement, but be not limited, with the use for being insulated；In other embodiments, conducting strip 15 It is made up of conductive material, for example：Metal, but be not limited, to carry out conducting being used.And, in this enforcement In example, a conductive connecting pin 151 can be also set on conducting strip 15, to carry out conducting being used.

Please refer to Fig. 4 A, Fig. 4 B and Fig. 4 C, which is the miniature stream of respectively another preferred embodiment of this utility model The positive structure schematic of the piezo-activator of the positive combination structural representation of the piezo-activator of member control apparatus, back side knot Structure schematic diagram and cross-sectional view, as illustrated, piezo-activator 13 is by a suspension board 132, a housing 133, extremely A few support 134 and a Piezoelectric Driving body 131 assemble jointly, and wherein, the Piezoelectric Driving body 131 is for piezoelectricity unit Part, you can be but be not limited to a piezoelectric ceramic plate, in the present embodiment, suspension board 132, housing 133 and support 134 are for one Body formed structure, and can be made up of a metallic plate, for example can be made up of stainless steel, but be not limited, therefore The piezo-activator 13 of minisize fluid control device 1 of the present utility model be by Piezoelectric Driving body 131 and bonding metal plates and Into, but be not limited.And as illustrated, suspension board 132 have first surface 132a and corresponding second surface 132b, Piezoelectric Driving body 131 is attached on the first surface 132a of suspension board 132, and as shown in Figure 4 B, during suspension board 132 has more Center portion 132d and peripheral part 132e, are so that when Piezoelectric Driving body 131 is driven by voltage, suspension board 132 can be by the central part 132d is to peripheral part 132e bending vibrations；Housing 133 is around the outside for being arranged at suspension board 132；And an at least support 134 It is to be connected between suspension board 132 and housing 133, to provide resilient support.In the present embodiment, one end of the support 134 It is to be connected to housing 133, the other end is then connected to suspension board 132, and between support 134, suspension board 132 and housing 133 more There is an at least space 136, with for fluid stream logical, and the kenel and quantity of the suspension board 132, housing 133 and support 134 It is with multiple changes.In addition, housing 133 can more have the conductive connecting pin 135 of an outside projection, in order to supply electrical connection to be used, But it is not limited.

As shown in Figure 4 A, the first surface 132a of suspension board 132 and the first surface 133a of housing 133 and support 134 First surface 134a is smooth coplanar structure, and by taking the present embodiment as an example, wherein suspension board 132 is for foursquare knot Structure, and each length of side of the suspension board 132 is that and thickness is between 0.1mm-0.4mm between 8mm-10mm.With And, the length of side of Piezoelectric Driving body 131 is less than the length of side of suspension board 132, and same design be corresponding with suspension board 132 just Square platy structure, and the thickness of Piezoelectric Driving body 131 is between 0.05mm-0.3mm, is adopted through this utility model Square Piezoelectric Driving body 131 and square suspension board 132 design, be different from known technology and adopt disc-shape, and In micro ultrathin and under quiet designer trends, effect of low power consumption design can be more reached.

Again as shown in Figure 4 B, in the present embodiment, for a square and structure with cascaded surface, i.e., suspension board 132 is A convex portion 132c is had more in the second surface 132b of suspension board 132, convex portion 132c is disposed in second surface 132b Between region, and can be but not be limited to a circular protrusions structure.In some embodiments, the height of convex portion 132c be between Between 0.02mm-0.08mm, its a diameter of 5.5mm, but be not limited.So the kenel of suspension board 132 is not limited thereto, its Can also be a two-sided smooth platy structure, and the enforcement aspect as shown in aforementioned Fig. 2A to Fig. 3, so its form be can be according to reality Border applies situation and appoints and apply change, is not limited with these enforcement aspects.And, as shown in Fig. 4 B and Fig. 4 C, suspension board 132 Convex portion 132c is the second surface 133b coplines with housing 133, and the second surface 132b and support 134 of suspension board 132 Second surface 134b is also copline, and the second surface 133b and suspension board of the convex portion 132c and housing 133 of the suspension board 132 It is with a certain depth between 132 second surface 132b and the second surface 134b of support 134.

As it was previously stated, in minisize fluid control device 1 of the present utility model, for making minisize fluid control device 1 miniature Change, be with this utility model under identical device Outside Dimensions, using the piezo-activator 13 of square appearance design, its phase Compared with the design of conventionally known circular piezo-activator, hence it is evident that the advantage with power saving, its power consumption is relatively as follows Shown in table one：

Table one

Piezo-activator kenel	Operation frequency	Power consumption
			Square (the 10mm length of sides)	18kHz	1.1W
Circular (10mm diameters)	28kHz	1.5W
			Square (the 9mm length of sides)	22kHz	1.3W
Circular (9mm diameters)	34kHz	2W
			Square (the 8mm length of sides)	27kHz	1.5W
Circular (8mm diameters)	42kHz	2.5W

Therefore the upper table by experiment is learnt：13 phase of piezo-activator of size dimension (8mm to 10mm) square _type layout Compared with the circular piezoelectric actuator of same diameter (8mm to 10mm), more power saving.The cause of its power saving can be speculated as：Because altogether The capacity load operated under vibration frequency, its power consumption can increase with the rising of frequency, and set because of size dimension square The piezo-activator of the obvious more same diameter circular of the resonant frequency of the piezo-activator 13 of meter is low, therefore its relative power consumption Also significant lower, that is, the piezo-activator 13 of the adopted square _type layout of this utility model is compared to conventional circular piezoelectric cause The design of dynamic device, real have savings advantage, is particularly applied to object wearing device, and it is very important design focal point to save electric power.

Fig. 5 A are referred to, which is multiple enforcement aspect schematic diagrams of the piezo-activator shown in Fig. 2A.As illustrated, then It can be seen that the suspension board 132 of piezo-activator 13, housing 133 and support 134 are that to have various kenel, and can at least have figure Multiple aspects such as (g)～(l) shown in (a) shown in 5A～(f) and Fig. 5 B, only in this little aspect, suspension board 132 and housing 133 are foursquare structure.For example, (a) the housing a1 and suspension board a0 of aspect are foursquare structure, and both Between by multiple support a2 to link, for example：4, but be not limited, and in support a2 and suspension board a0, housing a1 Between be with space a3, for fluid circulate.And in this embodiment, the support that is linked between housing a1 and suspension board a0 A2 is to be but not be limited to a plate connecting portion a2, and this plate connecting portion a2 has both ends a2 ' and a2 ", wherein one end a2 ' is Be connected with housing a1, and the other end a2 " be then connected with suspension board a0, and this both ends a2 ' and a2 " be correspond to each other and It is arranged on same axis.In (b) aspect, which equally has housing b1, suspension board b0 and is connected to housing b1, suspension board Support b2 between the b0 and space b3 for fluid circulation, and support b2 can also be but not be limited to a plate connecting portion b2, plate Connecting portion b2 equally has both ends b2 ' and b2 ", and end b2 ' is connected with housing b1, and the other end b2 " then with suspension board B0 connects, and only in this enforcement aspect, plate connecting portion b2 is to be connected to housing b1 and suspension board with the oblique angle between 0～45 degree B0, in other words, and both ends b2 ' and b2 " be not arranged on same level axis, which is the setting pass for mutual dislocation System.In (c) aspect, its housing c1, suspension board c0 and the support c2 being connected between housing c1, suspension board c0 and supply The structure such as space c3 of fluid circulation is similar with previous embodiment, design kenel wherein only as the plate connecting portion c2 of support Be slightly different with (a) aspect, so in this aspect, the both ends c2 ' and c2 of plate connecting portion c2 " still for corresponding to each other and It is arranged on same axis.

Again in (d) aspect, which equally has housing d1, suspension board d0 and is connected between housing d1, suspension board d0 Support d2 and the structure such as space d3 for fluid circulation, in this enforcement aspect, the plate connecting portion d2 as support has more Have structures such as suspension board connecting portion d20, beam portion d21 and housing connecting portion d22, wherein beam portion d21 be arranged at suspension board d0 with outer In gap d 3 between frame d1, and its direction for arranging is parallel to housing d1 and suspension board d0, and, suspension board connecting portion D20 is connected between beam portion d21 and suspension board d0, and housing connecting portion d22 is connected between beam portion d21 and housing d1, and Suspension board connecting portion d20 and housing connecting portion d22 also corresponds to each other and is arranged on same axis.

In (e) aspect, its housing e1, suspension board e0 and the support e2 being connected between housing e1, suspension board e0, with And, plate connecting portion e2 wherein only as support similar with aforementioned (a), (c) aspect for the structure such as space e3 of fluid circulation Design kenel be slightly different with (a), (c) aspect, in this aspect, suspension board e0 be for foursquare kenel, and its per While be respectively provided with two plate connecting portion e2 be connected with housing e1, and the both ends e2 ' and e2 of each of which plate connecting portion e2 " is similarly Correspond to each other and be arranged on same axis.But in (f) aspect, which also has housing f1, suspension board f0, support f2 And the component such as space f3, and support f2 can also be but not be limited to a plate connecting portion f2, in this embodiment, plate connecting portion f2 is For the structure of V-shaped, in other words, plate connecting portion f2 is also connected to housing f1 and suspension board f0 with the oblique angle between 0～45 degree, Therefore one end f2 is respectively provided with each plate connecting portion f2 " be connected with suspension board f0, and there is both ends f2 ' to be connected with housing f1, Imply that both ends b2 ' and end b2 " it is not arranged on same level axis.

Please continue refering to Fig. 5 B, which is other multiple enforcement aspect schematic diagrams of the piezo-activator shown in Fig. 4 A.As schemed Show, other aspects multiple such as wherein (g)～(l) are that show can be used as the piezoelectricity of minisize fluid control device 1 of the present utility model Multiple designs of actuator 13.The outward appearance kenel of these (g)～(l) aspects approximately correspond to (a) shown in Fig. 5 A～ F the kenel of (), only in these (g)～(l) aspects, is equipped with convex portion on the suspension board 132 of each piezo-activator 13 132c, the i.e. structure such as g4, h4, i4, j4, k4, l4 as illustrated in the drawing, and either (a)～(f) aspects or (g)～(l) etc. Aspect, the suspension board 132 and housing 133 are and are designed as foursquare kenel, to reach effect of aforementioned low power consumption；And thus Deng implementing, aspect is visible, and no matter suspension board 132 is for two-sided flat slab construction, or there is the stepped of convex portion for a surface Structure, in protection domain of the present utility model, and the kenel of the support 134 being connected between suspension board 132 and housing 133 Also can appoint according to situation is actually applied with quantity and apply change, be not limited with the aspect shown in this utility model.It is described also as before, These suspension boards 132, housing 133 and support 134 are the structures that can be formed in one, but are not limited, as its manufacturer Formula then can be etched by traditional processing or gold-tinted or the mode such as Laser Processing or eletroforming or electro-discharge machining be made, not with This is limited.

Please refer to Fig. 6 A to Fig. 6 C, wherein Fig. 6 A to Fig. 6 C are the works of the minisize fluid control device shown in Fig. 2A Dynamic schematic diagram.This Fig. 6 A to Fig. 6 C be for this utility model minisize fluid control device 1 transmit gas when the step of decompose show It is intended to, and which is the schematic diagram of the cutting action situation for such as several milliseconds of ultra-short Time or microsecond.First, as shown in Figure 6A, It can be seen that minisize fluid control device 1 be sequentially by carry housing 11, insulating trip 142, conducting strip 15, another insulating trip 142, piezoelectricity The build stacks such as actuator 13, flexible sheet 121 and cover plate 120 are formed, and are wherein being carried between housing 11 and piezo-activator 13 It is with chamber 112.And be and the stream of flexible sheet 121 with a gap g0 between flexible sheet 121 and piezo-activator 13 Road hole 121a is nearby arranged relative to the central part 132d or central part 132d of the suspension board 132, as it was previously stated, the gap It is to fill a material in g0, for example：Conducting resinl, but be not limited, so that the suspension of flexible sheet 121 and piezo-activator 13 The depth of gap g0 can be maintained, and then air-flow can be guided more quickly to flow between plate 132；And, in response to this gap g0's Depth and can make between flexible sheet 121 and piezo-activator 13, to form another temporary chamber 121d, be configured to temporarily store fluid, this keep in Chamber 121d be can pass through flexible sheet 121 stream hole 121a and can be between cover plate 120 and flexible sheet 121 the chamber that confluxes 120f is connected, also can pass through piezo-activator 13 support 134 between space 136 and with carry housing 11 with piezoelectric actuated Chamber 112 between device 13 is connected.

When minisize fluid 1 start of control device, mainly in 131 applied voltage of Piezoelectric Driving body of piezo-activator 13, And piezo-activator 13 can be made with support 134 as fulcrum, to be carried out the reciprocating vibration of vertical direction by voltage actuation.Such as Fig. 6 A Shown, when piezo-activator 13 is bent upwards vibration by voltage actuation, then fluid is connected by least one second on cover plate 120 Through hole 120c is entered, and through coupled at least one logical total string holes 120d to be pooled at central recess 120e in central authorities, Conflux chamber 120f, then temporary via flowing into stream hole 121a that central recess 120e is correspondingly arranged in flexible sheet 121 In chamber 121d, thereafter, due to being driven by 13 vibration of piezo-activator, flexible sheet 121 also can with resonance and carry out vertical Reciprocating vibration, as shown in Figure 6B, then for corresponding central recess 120e of flexible sheet 121 part in also can be bent upwards Vibration deformation, by the deformation of this flexible sheet 121, to compress the volume of temporary chamber 121d, and promotes the fluid in which to push Flow to both sides；Again as shown in Figure 6 C, vibration is bent downwardly when piezo-activator 13 is driven by voltage, flexible sheet 121 is replied To initial position, the fluid that only now keeps in chamber 121d is squeezed to both sides flowing, and via piezo-activator 13 Space 136 between support 134 and pass through flowing upwards, and then enter in chamber 112, and can more make fluid by carrying housing 11 The first intercommunicating pore 113,114 and discharge outside minisize fluid control device 1, to reach using the micro- of piezoelectricity switching kinetics Type, ultra-thin and quiet minisize fluid control device 1.

Please continue refering to Fig. 7 A to Fig. 7 D, wherein Fig. 7 A to Fig. 7 D are the local of the minisize fluid control device shown in Fig. 2A Illustrative view.This Fig. 7 A to Fig. 7 D be for this utility model minisize fluid control device 1 transmit gas when the step of decompose Schematic diagram, and which is the schematic diagram of the cutting action situation for such as several milliseconds of ultra-short Time or microsecond.Such as Fig. 7 A and Fig. 7 B institutes Show, when the piezo-activator 13 of minisize fluid control device 1 is bent upwards vibration by voltage actuation, then on cover plate 120 At least one second intercommunicating pore 120c enter, and through coupled at least one logical total string holes 120d be pooled to central authorities center At recess 120e, that is, conflux chamber 120f, then via stream hole 121a being correspondingly arranged with central recess 120e in flexible sheet 121 Flow in temporary chamber 121d.And, as flexible sheet 121 is for light, thin laminated structure, it is with when piezo-activator 13 During vibration, flexible sheet 121 also can with resonance and carry out vertical reciprocating vibration, the as corresponding central recess of flexible sheet 121 The part of 120e also can with bending vibration deformation, i.e. the part of corresponding central recess 120e is for the movable of flexible sheet 121 Portion 121b, is so that when piezo-activator 13 is bent upwards vibration, now flexible sheet 121 corresponds to the movable part of central recess 120e 121b can because fluid bring into and push and the vibration of piezo-activator 13 drive, and be bent upwards with piezo-activator 13 Vibration deformation, i.e., as shown in Figure 7 B, but now, the movable part 121b of corresponding central recess 120e of flexible sheet 121 still maintain to Upper bending vibration deformation, but piezo-activator 13 is bent downwardly vibration by voltage actuation again, and in the present embodiment, due to pressure There is convex portion 132c (as shown in Figure 4 B) on the second surface 132b of the suspension board 132 of electric actuator 13, be with control piezoelectricity When actuator 13 is bent downwardly, you can make the movable part 121b of the flexible sheet 121 for being bent upwards vibration deformation contact at suspension board 132 convex portion 132c, and then the passage that fluid enters temporary chamber 121d is closed, and shaking for piezo-activator 13 can be suppressed Dynamic, make the temporary chamber between the fixed part 121c of 121 both sides of region and flexible sheet beyond the convex portion 132c of suspension board 132 The spacing of 121d will not diminish, and the flow for therefore flowing through the fluid between them will not reduce, and will not also produce the pressure loss, such as This is more effectively to compress the volume of temporary chamber 121d, and as seen in figure 7 c, shakes when piezo-activator 13 is persistently bent downwardly When dynamic, then the fluid in temporary chamber 121d can be promoted to push and to be flowed to both sides, and via piezo-activator 13 support 134 it Between space 136 and pass through flowing upwards, to obtain higher discharge pressure；And in now, with hanging for piezo-activator 13 The downward drive and collision of the convex portion 132c of kickboard 132, the movable part 121b of flexible sheet 121 also be bent downwardly vibration shape Become, and return back to initial position；Finally, then can as illustrated in fig. 7d, when piezo-activator 13 is not returned back to by voltage actuation just During beginning position, the movable part 121b of flexible sheet 121 also returns back to initial position.In the present embodiment, it is seen that this piezo-activator 13 suspension board 132 possesses the design of convex portion 132c and is applied to more can reach in minisize fluid control device 1 of the present utility model Good fluid efficiency of transmission, as long as the design kenel of convex portion 132c, quantity and position etc. be can according to actually applying situation and Appoint and apply change, be not limited thereto.

Please refer to Fig. 8 A to Fig. 8 C, which is the minisize fluid control dress of another preferred embodiment of this utility model respectively Put the back of the body with the positive combination structural representation, front decomposition texture schematic diagram and the micro valve device of micro valve device Face structural representation.As shown in Fig. 8 A and Fig. 8 B, minisize fluid control device 1 of the present utility model more further can be arranged in pairs or groups one kind Micro valve device 2, using light, thin, flexible valve sheet 22 in response to the start of pressure differential, and makes the 22 passive real estate of valve sheet Raw flow channel switch, and make fluid one way flow, can cumulative stress in any container of the port of export, when release is needed, through regulation and control The output of minisize fluid control device 1, passes the fluid through and is discharged and blood pressure lowering by connection runner in right amount, or be completely exhausted out and release, In order to may achieve the minisize fluid control device 1 that is applied to sphygomanometer.As shown in Figure 8 B, micro valve device 2 is comprising outlet cap Plate 21 and valve sheet 22, and the Outlet cover plate 21 and valve sheet 22 are that sequentially stacking is arranged at holding for minisize fluid control device 1 Carry on housing 11.As it was previously stated, carrying can more be recessed on the outer surface 110 of housing 11 the first release chamber 115 of setting and the One outlet chamber 116, and the first release chamber 115 respectively can through the first intercommunicating pore 113,114 with first outlet chamber 116 It is connected with chamber 112, and, convex portion structure 117 is had more at first outlet chamber 116.And, in the present embodiment, Valve sheet 22 is to be but not be limited to light, thin, flexible laminated structure, and there is a valve opening 220 thereon, when valve sheet 22 with go out During the positioning assembling of carrying housing 11 of velar plate 21 and minisize fluid control device 1, it is corresponding to carrying housing by its valve opening 220 The convex portion structure 117 of 11 first outlet chamber 116 and be correspondingly arranged, by the design of this single valve opening 220, so that fluid The purpose of one-way flow can be reached in response to its pressure differential.

Please continue refering to Fig. 8 B and Fig. 8 C, as illustrated, Outlet cover plate 21 has table within outer surface 210 and corresponding setting Face 211, and there is on Outlet cover plate 210 the release through hole 212 and outlet through hole through outer surface 210 and inner surface 211 213, as shown in Figure 8 C, it is that depression formation the second release chamber 214 and second goes out on the inner surface 211 of Outlet cover plate 210 Oral chamber 215, and the second release chamber 214 is correspondingly arranged at release through hole 212, the second outlet chamber 215 is then right Should be arranged at outlet through hole 213, and, with more depression between the second release chamber 214 and second outlet chamber 215 The connection runner 216 being connected, with circulating between the second release chamber 214 and second outlet chamber 215 for fluid.And In the present embodiment, one end of release through hole 212 is connected with the second release chamber 214, and its end can further set up one Convex portion structure 212a that protrudes and formed, for example, can be but not be limited to column structure, the other end be then communicated in Outlet cover plate 21 it Outer surface 210, and be communicated with the outside；And one end of outlet through hole 213 is connected with second outlet chamber 215, the other end is then It is connected with outlet 23, in the present embodiment, outlet 23 is can be connected with a device (not shown), for example：Sphygomanometer, but not As limit.And, Outlet cover plate 21 has more an at least position limiting structure 217 (as shown in Figure 9 A), by taking the present embodiment as an example, limit Bit architecture 217 is disposed in the second release chamber 214, and is an annular block structure, and is not limited, and which is predominantly worked as When micro valve device 2 carries out collection pressure operation, it is provided with Auxiliary support valve sheet 22 and is used, to prevent valve sheet 22 from subsiding, and can Make valve sheet 22 can more quickly opening and closing of fault, cause valve sheet 22 to reach the opening and closing of fault of control fluid conveying.

As shown in Figure 9 B, miniature stream is arranged at when the Outlet cover plate 21 and valve sheet 22 of micro valve device 2 are sequentially stacked When on the carrying housing 11 of member control apparatus 1, the valve opening 220 of valve sheet 22 is 213 phase of outlet through hole with Outlet cover plate 21 In the presence of connection, and the atmospheric pressure being input into due to the outlet through hole 213, valve sheet 22 can be made downwards, and make valve opening 220 tight Stick to the convex portion structure 117 in the first outlet chamber 116 for peaking at carrying housing 11 and close, consequently, it is possible to carry housing 11 Chamber 112 in fluid will not adverse current into first outlet chamber 116, meanwhile, carry housing 11 the first release chamber 115 are also blockaded by valve sheet 22, therefore can reach the effect for preferably preventing fluid from leaking outside, while and existing through Outlet cover plate 21 The position limiting structure 217 of the second release chamber 214, with Auxiliary support valve sheet 22 so as to will not produce and subside, and can make valve sheet 22 can more quickly opening and closing of fault.

Fig. 9 A are referred to, which is that the minisize fluid control device shown in Fig. 8 A is shown with the collection pressure start of micro valve device It is intended to.As illustrated, when fluid is subject to the transmission start of minisize fluid control device 1, and connected by carry housing 11 first Hole 114 is flowed out in first outlet chamber 116, due to pressing upwards on for fluid, will cause to be correspondingly arranged in first outlet chamber Valve sheet 22 on 116 be bent upwards deformation, so can then make the aforementioned valve opening 220 for being close to be resisted against convex portion structure 117 Open up, make fluid that the second outlet chamber of Outlet cover plate 21 can be flowed into from first outlet chamber 116 via valve opening 220 In 215, and then discharge outside outlet through hole 213；Simultaneously, the fluid in the chamber 112 of minisize fluid control device 1 It is squeezed and flow in the first release chamber 115 through another first intercommunicating pore 113, now as fluid pushes the pressure for producing Power, and cause valve sheet 22 to elapse deformation upwards and contradict the release through hole 212 of closing Outlet cover plate 21, and as illustrated, can See that valve sheet 212 not only closes release through hole 212, while the second release chamber 214 of Outlet cover plate 21 of also having blockaded and connection Runner 216, therefore fluid can concentrate by opposite side outlet through hole 213 and outlet 23 discharge in outer.In some embodiments, go out Mouth through hole 213 and outlet 23 are the airbags that may connect to sphygomanometer, using the application as gas collection, but are not limited.

Please continue refering to Fig. 9 B, its be minisize fluid control device shown in Fig. 9 A with the blood pressure lowering of micro valve device or Release illustrative view.As illustrated, work as the devices being connected with outlet through hole 213 and outlet 23, for example：The airbag of sphygomanometer, The pressure release used time to be made, 2 deblocking minisize fluid control device 1 of micro valve device now to be then controlled, whereby to discharge fluid, And the fluid transmission quantity of permeable regulation and control minisize fluid control device 1, make fluid no longer be input into the chamber 112 for carrying housing 11 In, now fluid will be input into second outlet chamber 215 by outlet through hole 213 is downward so that second outlet chamber 216 Volumetric expansion, and then oppress and promote flexible valve sheet 22 to be bent downwardly deformation, and downwards smooth, be resisted against and carry housing 11 In the convex portion structure 117 of first outlet chamber 116, so when valve sheet 22 valve opening 220 again can be because being resisted against the convex portion structure 117 and close；And, the gas in second outlet chamber 216 can flow to the second release chamber 214 via connection runner 217 In, and then make the volume expanded of the second release chamber 214, and make the valve sheet 22 corresponding to the second release chamber 214 same to Lower Bending Deformation, now as valve sheet 22 is bent downwardly, therefore which will not be resisted against the convex portion structure of 212 end of release through hole again 212a, therefore release through hole 212 is in opening, then the device that will can be connected with outlet 23 by this unidirectional release operation Fluid in (not shown) is discharged and blood pressure lowering；If illustrating by taking aforesaid embodiment as an example, outlet through hole is now communicated in 213 and outlet 23 sphygomanometer airbag in fluid via release through hole 212 being discharged and blood pressure lowering, or can arrange completely Go out and complete release operation.

In sum, minisize fluid control device provided by the utility model is comprising housing and to be arranged in housing Piezo-activator, and housing is by carrying housing and base combination is formed, the pressure of the square kenel designed using this utility model The start of electric actuator, makes fluid be flowed into by the second intercommunicating pore of the cover plate of base, and along the total string holes and center being connected Hole is flowed, and the stream hole through flexible sheet is so that the temporary chamber that formed between flexible sheet and piezo-activator of fluid Interior generation barometric gradient, and then make fluid high-speed flow, and can continue to transmit, and then fluid can be made promptly to transmit to reach, And can reach quiet effect simultaneously, and the overall volume of minisize fluid control device is reduced and is thinned, light to reach Just comfortable portable purpose；Simultaneously can more arrange in pairs or groups another micro valve device, so be applied more broadly in medical device and In relevant device.Therefore, the great industrial utilization of minisize fluid control device of the present utility model, whence propose Shen in accordance with the law Please.

Even if this utility model can be applied craftsman's think of by this those skilled in the art times are familiar with by above-described embodiment narration in detail and be Modify as all, so neither take off as attached claim is intended to protector.

【Symbol description】

1：Minisize fluid control device

10：Housing

11：Carry housing

11a：Accommodation space

110：Carry the outer surface of housing

111：Carry the inner surface of housing

112：Chamber

113、114：First intercommunicating pore

115：First release chamber

116：First outlet chamber

117、212a：Convex portion structure

118：Side wall

12：Base

120：Cover plate

120a：The first surface of cover plate

120b：The second surface of cover plate

120c：Second intercommunicating pore

120d：Total string holes

120e：Central recess

120f：Conflux chamber

121：Flexible sheet

121a：Stream hole

121b：Movable part

121c：Fixed part

121d：Temporary chamber

13：Piezo-activator

131：Piezoelectric Driving body

132：Suspension board

132a：The first surface of suspension board

132b：The second surface of suspension board

132c：Convex portion

132d：Central part

132e：Peripheral part

133：Housing

133a：The first surface of housing

133b：The second surface of housing

134：Support

134a：The first surface of support

134b：The second surface of support

135、151：Conductive connecting pin

136：Space

14、141、142：Insulation spacer

15：Conductive spacer

2：Micro valve device

21：Outlet cover plate

210：The outer surface of Outlet cover plate

211：The inner surface of Outlet cover plate

212：Release through hole

213：Outlet through hole

214：Second release chamber

215：Second outlet chamber

216：Connection runner

217：Position limiting structure

22：Valve sheet

220：Valve opening

23：Outlet

g0：Gap

(a)～(l)：The different of conductive actuation device implement aspect

A0～l0：Suspension board

A1～l1：Housing

A2～l2：Support, plate connecting portion

a2’、b2’、c2’、e2’、f2’：Support is connected to the end of housing

a2”、b2”、c2”、e2”、f2”：Support is connected to the end of suspension board

d20：Suspension board connecting portion

d21：Beam portion

d22：Housing connecting portion

A3～f3：Space

G4～l4：Convex portion

Claims (13)

1. a kind of piezoelectric actuator structure, it is characterised in that include：

One suspension board, is foursquare structure, between 8mm to the 10mm length of sides, and can be curved to a peripheral part by a central part Qu Zhendong；

One housing, around the outside for being arranged at the suspension board；

An at least support, is connected between the suspension board and the housing, to provide resilient support；And

One Piezoelectric Driving body, is foursquare kenel, with the length of side less than the suspension board length of side, is attached at the one of the suspension board On first surface, in order to applied voltage driving the suspension board bending vibration.

2. piezoelectric actuator structure as claimed in claim 1, it is characterised in that the suspension board is foursquare structure, with 8mm The length of side.

3. piezoelectric actuator structure as claimed in claim 1, it is characterised in that the suspension board is foursquare structure, with 9mm The length of side.

4. piezoelectric actuator structure as claimed in claim 1, it is characterised in that the suspension board is foursquare structure, has The length of side of 10mm.

5. piezoelectric actuator structure as claimed in claim 1, it is characterised in that have on a second surface of the suspension board one convex Portion.

6. piezoelectric actuator structure as claimed in claim 5, it is characterised in that the protrusion height of the suspension board between Between 0.02mm-0.08mm.

7. piezoelectric actuator structure as claimed in claim 5, it is characterised in that the convex portion of the suspension board is circular protrusions knot Structure, a diameter of 5.5mm.

8. piezoelectric actuator structure as claimed in claim 1, it is characterised in that an at least support is a plate connecting portion, in order to Connect the suspension board and the housing.

9. piezoelectric actuator structure as claimed in claim 8, it is characterised in that the both ends of the plate connecting portion correspond to each other, And be arranged on same axis.

10. piezoelectric actuator structure as claimed in claim 8, it is characterised in that the plate connecting portion is with the oblique angle between 0～45 degree It is connected to the suspension board and the housing.

11. piezoelectric actuator structures as claimed in claim 1, it is characterised in that an at least support is included:

One beam portion, is arranged in the gap between the suspension board and the housing, and what which was arranged is oriented parallel to the housing and is somebody's turn to do Suspension board；

One suspension board connecting portion, is connected between the beam portion and the suspension board；And

One housing connecting portion, is connected between the beam portion and the housing, and corresponds to each other and arrange with the suspension board connecting portion On same axis.

12. piezoelectric actuator structures as claimed in claim 1, it is characterised in that the thickness of the suspension board is between 0.1mm-0.4mm Between.

13. piezoelectric actuator structures as claimed in claim 1, it is characterised in that the thickness of the Piezoelectric Driving body is between 0.05mm- Between 0.3mm.