CN206211877U - Piezo-activator and its minisize fluid control device being applicable - Google Patents

Abstract

A kind of piezo-activator, it is adaptable to a minisize fluid control device, comprising：One suspension board, one housing, several supports and a piezoelectric ceramic plate, the suspension board is that square kenel has a first surface and a corresponding second surface, and there is a convex portion on the second surface, the housing has a first surface and a corresponding second surface around the outside for being arranged at the suspension board, and the whole face of second surface of the second surface of housing and suspension board except the exterior domain of convex portion be copline, the support is connected between the suspension board and the housing, with length between the ㎜ of 1.11 ㎜ to 1.21, width is between the ㎜ of 0.2 ㎜ to 0.6, the piezoelectric ceramic plate has the length of side for being not more than the suspension board length of side, it is attached on the first surface of the suspension board.

Description

Piezo-activator and its minisize fluid control device being applicable

Technical field

The utility model is espespecially a kind of suitable for micro ultrathin and Jing Yin minisize fluid control on a kind of piezo-activator The piezo-activator of device processed.

Background technology

The current either industry such as medicine, computer science and technology, printing, energy in each field, product towards sophistication and Microminiaturization direction is developed, the fluid conveying knot that wherein product such as micropump, sprayer, ink gun, industrial printing devices is included Structure is its key technology, therefore, how its technical bottleneck is broken through by innovation structure, it is the important content of development.

For example, it is many to need, using the instruments or equipment of Pneumatic pressure power driving, generally to adopt to pass in medicinal industry System motor and air pressure valve come reach its gas conveying purpose.However, being limited to the volume of these conventional motors and gas trap Limitation so that such instrument and equipment is difficult to reduce the volume of its single unit system, that is, be difficult to the target of slimming, more cannot It is allowed to reach portable purpose.Additionally, these conventional motors and gas trap can also produce the problem of noise when start, cause Using upper not convenient and uncomfortable.

Therefore, how developing one kind can improve above-mentioned known techniques missing, can make the instrument of conventionally employed fluid control device Device or equipment reach small volume, are miniaturized and Jing Yin, and then reach the minisize fluid control dress of light comfortable portable purpose Put and its piezo-activator, actually problem in the urgent need to address at present.

Utility model content

Main purpose of the present utility model is to provide a kind of micro- suitable for portable or Wearable instrument or equipment Type fluid control device and its piezo-activator for being used, by the piezo-activator, with suspension board, housing and four Frame, each support is vertically connected between suspension board and housing, to provide resilient support, vertically suspension board is located at by this Support between housing, to reduce the inhomogenous swing of suspension board, helps to increase suspension board in the amplitude on Z axis, so that It is more stable during suspension board start, consistent, so that beneficial to the stability and efficiency of lifting piezo-activator start.

Another object of the present utility model is to provide a kind of micro- suitable for portable or Wearable instrument or equipment Type fluid control device, is formed in one metal plate structure by the suspension board of piezo-activator, housing, support, and by phase Convex portion and the support demand kenel of suspension board are etched out with depth, make the second surface of housing, the second surface of support and The second surface of suspension board is coplanar structure, and can simplify need to repeatedly etch in response to the carrying out of the different depth of housing in the past Technique, while again by the glue-line being arranged between housing and resonance plate, housing is coated in the rough surface produced after etching, So that bond strength between glue-line and housing can be increased, and because the thickness of housing is to reduce compared to passing preparation method, because This thickness for being coated with the glue-line in the gap increases, and is increased by the thickness of glue-line, can be effectively improved the inhomogeneity of glue-line coating, The assembly error of horizontal direction when suspension board is assembled is reduced, and lifts the energy utilized efficiency of suspension board vertical direction, while Assist absorption vibrational energy and noise can be reduced reach Jing Yin effect, and this miniaturization piezo-activator can more make it is miniature The overall volume of fluid control device reduces and is thinned, to reach light comfortable portable purpose.

A further object of the present utility model be provide it is a kind of for portable or Wearable instrument or equipment in it is miniature Fluid control device, by the work also in the design and suspension board of the suspension board square kenel of the piezo-activator with convex portion It is dynamic, fluid is flowed into by the air admission hole of the inlet plate of base, and flowed along the total string holes and the chamber that confluxes that are connected, lead to The hollow bore of resonance plate is crossed so as to produce pressure ladder in the compression chamber that is formed between resonance plate and piezo-activator of fluid Degree, and then flows fluid high-speed, and the flow of fluid will not be reduced, and will not also produce the pressure loss, and can continue transmission and reaches Obtain discharge pressure higher.

It is that, up to above-mentioned purpose, of the present utility model one broader aspect of implementing is a kind of piezo-activator of offer, comprising one Suspension board, is foursquare kenel, and can be by a central part to a peripheral part flexural vibrations；One housing, hangs around this is arranged at The outside of kickboard；Several supports, each support vertical is connected between the suspension board and the housing, to provide resilient support, And the support has length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6；And a piezoelectric ceramic plate, it is just Square kenel, with the length of side for being not more than the suspension board length of side, is attached on the first surface of the suspension board, is used to apply Voltage is driving the suspension board flexural vibrations.

It is that, up to above-mentioned purpose, another broader implementation aspect of the present utility model is filled to provide a kind of minisize fluid control Put, comprising：One piezo-activator, with a suspension board, a housing, four supports and a piezoelectric ceramic plate, the suspension board is for just Square kenel, and there is a convex portion, the housing with a first surface and a corresponding second surface, and on the second surface Around being arranged at the outside of the suspension board, and also there is a first surface and a corresponding second surface, and the housing should Second surface is copline with the region outside the convex portion of the second surface of the suspension board, and the support is connected to the suspension Between plate and the housing, and its length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6, piezoelectric ceramic plate tool There is the length of side of the no more than suspension board length of side, be attached on the first surface of the suspension board；And a housing, including a gas collection Plate and a base, the gas collection plate have side wall to constitute a frame structure of an accommodation space for periphery, make this piezoelectric actuated Device is arranged in the accommodation space, and the base is engaged and formed by an inlet plate and a resonance plate, and is incorporated into the gas collection plate The accommodation space in, to close the piezo-activator, the inlet plate have an at least air admission hole and be attached thereto it is logical at least One total string holes, is confluxed chamber with constituting one, and the resonance plate sets and is fixed on the inlet plate, and with a hollow bore, relatively In the chamber that confluxes of the inlet plate, and corresponding to the convex portion of the suspension board；Wherein, the housing of the piezo-activator should A glue-line is set between the resonance plate of second surface and the base so that the resonance plate of the piezo-activator and the base it Between maintain composition demand the compression chamber a gap depth.

Brief description of the drawings

Figure 1A is that the utility model is the front decomposition texture schematic diagram of the minisize fluid control device of preferred embodiment.

Figure 1B is the positive combination structural representation of the minisize fluid control device shown in Figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of the minisize fluid control device shown in Figure 1A.

Fig. 2 B are the back side combining structure schematic diagram of the minisize fluid control device shown in Fig. 2A.

Fig. 3 A are the positive structure schematic of the piezo-activator of the minisize fluid control device shown in Figure 1A.

Fig. 3 B are the structure schematic diagram of the piezo-activator of the minisize fluid control device shown in Figure 1A.

Fig. 3 C are the cross-sectional view of the piezo-activator of the minisize fluid control device shown in Figure 1A.

Fig. 4 A to Fig. 4 E are the local illustrative view of the minisize fluid control device shown in Figure 1A.

Fig. 5 is the section mplifying structure schematic diagram of minisize fluid control device shown in Figure 1B.

【Symbol description】

1：Minisize fluid control device

1a：Housing

10：Base

11：Inlet plate

11a：The second surface of inlet plate

11b：The first surface of inlet plate

110：Air admission hole

111：Conflux chamber

112：Total string holes

12：Resonance plate

12a：Movable part

12b：Fixed part

120：Hollow bore

121：Compression chamber

13：Piezo-activator

130：Suspension board

130a：The second surface of suspension board

130b：The first surface of suspension board

130c：Convex portion

130d：Central part

130e：Peripheral part

130f：Side

131：Housing

131a：The second surface of housing

131b：The first surface of housing

131c：Inner side edge

132：Support

132a：The second surface of support

132b：The first surface of support

133：Piezoelectric ceramic plate

134、151：Conductive connecting pin

135：Space

136：Glue-line

141、142：Insulating trip

15：Conducting strip

16：Gas collection plate

16a：Accommodation space

160：Surface

161：Reference surface

162：Gas collection chamber

163：First through hole

164：Second through hole

165：First release chamber

166：First outlet chamber

167：Convex portion structure

168：Side wall

h：Gap

Specific embodiment

Embodying the utility model feature will in detail describe with some exemplary embodiments of advantage in the explanation of back segment.Ying Li Solution is that the utility model can have various changes in different aspects, and it does not all depart from scope of the present utility model, And explanation therein and accompanying drawing are inherently to be illustrated as being used, and nand architecture is in limitation the utility model.

Piezo-activator of the present utility model 13 is applied in minisize fluid control device 1, and minisize fluid control dress It is that can be applied to the industry such as the raw skill of medicine, the energy, computer science and technology or printing to put 1, to be used to transmit fluid, but not as Limit.It is the minisize fluid control device of the utility model preferred embodiment to refer to Figure 1A, Figure 1B, Fig. 2A and Fig. 2 B, Figure 1A Front decomposition texture schematic diagram, Figure 1B is the positive combination structural representation of the minisize fluid control device shown in Figure 1A, Fig. 2A The back side decomposition texture schematic diagram of the minisize fluid control device shown in Figure 1A, Fig. 2 B are the minisize fluid control shown in Fig. 2A The back side combining structure schematic diagram of device, Fig. 5 is the amplification profile structural representation of minisize fluid control device shown in Figure 1B.Such as Shown in Figure 1A, Fig. 2A and Fig. 5, minisize fluid control device 1 of the present utility model has housing 1a, piezo-activator 13, insulation The structure such as piece 141,142 and conducting strip 15, wherein, housing 1a includes gas collection plate 16 and base 10, and base 10 then includes inlet plate 11 and resonance plate 12, but be not limited.Piezo-activator 13 corresponds to resonance plate 12 and sets, and makes inlet plate 11, is total to Shaking, sequentially storehouse is set for piece 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142, gas collection plate 16 etc., And the piezo-activator 13 is assembled by a suspension board 130 and a piezoelectric ceramic plate 133.In the present embodiment, as schemed Shown in 1A and Fig. 5, gas collection plate 16 is not only single plate structure, can also have the frame structure of side wall 168 for periphery, and by The side wall 168 that the periphery is constituted goes out an accommodation space 16a with the plate common definition of its bottom, with for the piezo-activator 13 are arranged in accommodation space 16a.Described also as before, the gas collection plate 16 of the present embodiment has a surface 160, the surface 160 On be depression to form a gas collection chamber 162, by minisize fluid control device 1 downwards transmission gas then temporarily accumulate in this collection In gas chamber 162, and there is the first through hole 163 and the second through hole 164, the first through hole 163 and the in gas collection plate 16 One end of two through holes 164 is connected with gas collection chamber 162, the other end then respectively with the reference surface 161 of gas collection plate 16 on First release chamber 165 and first outlet chamber 166 are connected.And, further set up one at first outlet chamber 166 Convex portion structure 167, for example, can be but not be limited to a cylindrical structure.

As shown in Figure 2 A, piezo-activator 13 includes piezoelectric ceramic plate 133, suspension board 130, the support of housing 131 and four 132, wherein piezoelectric ceramic plate 133 is square platy structure, and its length of side is not more than the length of side of suspension board 130, and can be attached at On suspension board 130.In the present embodiment, suspension board 130 is flexible square platy structure；In the outside of suspension board 130 Around housing 131 is set, the kenel of housing 131 also corresponds roughly to the kenel of suspension board 130, therefore in the present embodiment, outward Frame 131 is also foursquare hollow out frame-type structure；And between suspension board 130 and housing 131 connected and carry with four supports 132 For resilient support.And, as shown in Figure 1A and Fig. 2A, minisize fluid control device 1 of the present utility model may also include insulating trip The structure such as 14 and conducting strip 15, insulating trip 14 can be two insulating trips 141,142, and two insulating trip 141,142 is upper and lower sandwiched Conducting strip 15 and set.When minisize fluid control device 1 of the present utility model is assembled, i.e., such as Figure 1A, Figure 1B, Fig. 2A and Fig. 2 B It is shown, sequentially the assembling of the structures such as insulating trip 142, conducting strip 15, insulating trip 141, piezo-activator 13 and base 10 is located in In accommodation space 16a in gas collection plate 16, it is set to be that as shown in Figure 1B and Fig. 2 B, may make up small volume and miniaturization after combining The minisize fluid control device 1 of profile.

Please continue refering to shown in Figure 1A and Fig. 2A, the inlet plate 11 of minisize fluid control device 1 has first surface 11b, the Two surface 11a and at least an air admission hole 110, in the present embodiment, the quantity of air admission hole 110 is 4, but is not limited, its The first surface 11b and second surface 11a of inlet plate 11 are through, atmospheric pressure is mainly complied with from outside device to supplied gas Act on and flowed into minisize fluid control device 1 from an at least air admission hole 110.And again as shown in Figure 2 A, by inlet plate 11 First surface 11b is visible, thereon with least one total string holes 112, at least one enters to this with the second surface 11a of inlet plate 11 Stomata 110 is correspondingly arranged.Have at the center exchange of these total string holes 112 and conflux chamber 111, and conflux chamber 111 with it is total String holes 112 is connected, and can be thereby concentrated to guiding and confluxing into the gas of total string holes 112 from an at least air admission hole 110 Conflux chamber 111, to transmit downwards.Therefore in the present embodiment, inlet plate 11 has integrally formed air admission hole 110, bus Hole 112 and the chamber 111 that confluxes, and after the assembling corresponding with resonance plate 12 of inlet plate 11, a remittance is constituted at this confluxes chamber 111 The chamber of fluid is flowed, so that fluid is temporary.In certain embodiments, the material of inlet plate 11 is can be but not be limited to stainless by one Steel matter is constituted, and its thickness is that between 0.4mm to 0.6mm, and its preferred values is 0.5mm, but is not limited. It is identical with the depth of these total string holes 112 by the depth that chamber is constituted at the chamber 111 that confluxes in other embodiments, but It is not limited.

In the present embodiment, resonance plate 12 is made up of a flexible materials, but is not limited, and on resonance plate 12 With a hollow bore 120, the first surface 11b corresponding to inlet plate 11 confluxes chamber 111 and sets, so that gas can flow It is logical.In further embodiments, resonance plate 12 can be made up of a copper material, but be not limited, and its thickness between Between 0.03mm to 0.08mm, and its preferred values is 0.05mm, but is also not limited.

And for example shown in Fig. 4 A and Fig. 5, there is a gap h between resonance plate 12 and piezo-activator 13, in the present embodiment, A glue-line 136 is filled with gap h between the housing 131 of resonance plate 12 and piezo-activator 13, for example：Conducting resinl, But it is not limited, so as to the depth of gap h can be maintained between the suspension board 130 of resonance plate 12 and piezo-activator 13, enters And air-flow can be guided and more quickly flowed；And, can make in response to the depth of this gap h resonance plate 12 and piezo-activator 13 it Between form compression chamber 121, and then fluid can be guided by the hollow bore 120 of resonance plate 12 and more quickly be flowed between chamber It is dynamic, and make the interference reduction that contacts with each other because suspension board 130 and resonance plate 12 keep suitable distance, promoting noise to produce can be dropped It is low.

Additionally, please refer to Figure 1A and Fig. 2A, also there is insulating trip 141, conducting strip in minisize fluid control device 1 The structure such as 15 and another insulating trip 142, it is sequentially located between piezo-activator 13 and gas collection plate 16, and its form is substantially The form of the upper housing 131 corresponding to piezo-activator 13.In certain embodiments, insulating trip 141,142 is by that can insulate Material is constituted, for example：Plastics, but be not limited, it is used with carrying out insulation；In further embodiments, conducting strip 15 is It is made up of conductive material, for example：Metal, but be not limited, conduct being used.And, in the present embodiment In, a conductive connecting pin 151 also can be set on conducting strip 15, conduct being used.

Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, the piezoelectricity that it is respectively the minisize fluid control device shown in Figure 1A is caused The positive structure schematic of dynamic device, structure schematic diagram and cross-sectional view, as illustrated, piezo-activator 13 by One suspension board 130, a housing 131, the piezoelectric ceramic plate 133 of several supports 132 and assemble jointly, in the present embodiment In, several supports 132 are 4 supports 132, but are not limited, and these quantity can appoint and apply change according to situation is actually applied Change；And, suspension board 130, the support 132 of housing 131 and four can be but not be limited to integrally formed structure, and can be by a metal Plate is constituted, for example, can be made up of stainless steel, but is not limited, therefore, minisize fluid control of the present utility model The piezo-activator 13 of device 1 is to be formed with metallic plate bonding by piezoelectric ceramic plate 133, but is not limited.And such as figure institute Show, suspension board 130 has first surface 130b and corresponding second surface 130a, wherein, the piezoelectric ceramic plate 133 is attached at The first surface 130b of suspension board 130, to applied voltage driving the flexural vibrations of suspension board 130.As shown in Figure 3A, suspend Plate 130 has central part 130d and peripheral part 130e, therefore when piezoelectric ceramic plate 131 is driven by voltage, suspension board 130 can be by Central part 130d is to peripheral part 130e flexural vibrations；Housing 131 is to surround the outside for being arranged at suspension board 130, and with one The conductive connecting pin 134 of outside projection, the connection that is used to power is used, but is not limited.

In the present embodiment, wherein four supports 132 are respectively perpendicular and are connected between suspension board 130 and housing 131, to carry For resilient support, it is, the side 130f of suspension board 130 is to be arranged in parallel with the inner side edge 131c of housing 131, and it is each this One end of support 132 is the side 130f for being vertically connected at suspension board 130, and the other end is then vertically connected at the inner side of housing 131 Side 131c, makes four supports 132 be connected in coaxial right angle with the side 130f of suspension board 130, the inner side edge 131c of housing 131, and An at least space 135 is had more between support 132, suspension board 130 and housing 131, is led to for fluid stream, and the suspension board 130th, the kenel and quantity of housing 131 and support 132 are with various changes.By this be vertically located at suspension board 130 with Support 132 between housing 131, to reduce inhomogenous deviation angle when operating of suspension board 130, helps to increase suspension board 130 in the amplitude on Z axis, suspension board 130 is had more preferable displacement state in up-down vibration, i.e. the start of suspension board 130 When it is more stable, consistent, be beneficial to lifting the start of piezo-activator 13 stability and efficiency.

In piezo-activator of the present utility model 13, the different length and width of support 132 will cause piezo-activator 13 performance difference, the data of its properties are as shown in following table one：

Table one

From the data of table one, in the present embodiment, the length of each support 132 be between 1.11mm to 1.21mm it Between, its performance is preferable, and the preferred values of the length of the support 132 is 1.16mm, and its performance can be obviously improved, and often The width of one support 132 is that between 0.2mm to 0.6mm, and its preferred values is 0.4mm, but is not limited.

And for example shown in Fig. 3 A and Fig. 3 C, the second surface 130a of suspension board 130 and the second surface 131a of housing 131 and branch The second surface 132a of frame 132 is smooth coplanar structure, and by taking the present embodiment as an example, wherein suspension board 130 is square Structure, and the suspension board 130 each length of side be between 7.5mm to 12mm, and its preferred values be 7.5 to 8.5mm, and Thickness is that between 0.1mm to 0.4mm, its preferred values is 0.27mm, but is not limited.And the thickness of the housing also between Between 0.1mm to 0.4mm, but it is not limited.And, the length of side of piezoelectric ceramic plate 131 is not more than the length of side of suspension board 130, And same design is the square platy structure corresponding with suspension board 130, and piezoelectric ceramic plate 131 thickness be between Between 0.05mm to 0.3mm, and its preferred values is 0.10mm, the square piezoelectric ceramic plate used by the utility model 131 and the design of square suspension board 130, its reason is to be set compared to the circular suspension board of conventional prior art piezo-activator Meter, the square suspension board 130 of the utility model piezo-activator 13 substantially has the advantage of power saving, the comparing of its consumption power As shown in following table two：

Table two

Therefore, learnt by the upper table of experiment：The square suspension board size dimension (8mm to 10mm) of piezo-activator sets Circular suspension board diameter dimension (8mm to 10mm) the more power saving compared to piezo-activator is counted, the cause of its power saving can speculate For：Because of the capacity load operated under resonant frequency, its consumption power can increase with the rising of frequency, and because of size dimension The suspension board of the obvious more same diameter circular of resonant frequency of the design of square suspension board 130 is low, therefore its relative consumption power Also it is significant lower, that is, the utility model uses the suspension board 130 of square _type layout compared to conventional circular suspension board Design, it is real that there is savings advantage, in the case where minisize fluid control device 1 adopts micro ultrathin and Jing Yin designer trends, can more reach Effect of low power consumption design, especially more can apply to object wearing device, and it is very important design focal point to save electric power.

As it was previously stated, in the present embodiment, these suspension boards 130, housing 131 and four are perpendicular to suspension board 130, housing 131 and the support 132 that sets is can be but not be limited to integrally formed structure, as its manufacture then can by traditional processing, Or gold-tinted etching Laser Processing or the mode such as eletroforming or electro-discharge machining make, be not limited.So with this implementation As a example by example, the structure that the suspension board 130 of piezo-activator of the present utility model 13, housing 131, four supports 132 are formed in one, An as metallic plate, and be etched with same depth by making housing 131, four supports 132 and suspension board 130, and then can make The second surface 130a of the second surface 131a of housing 131, the second surface 132a of four supports 132 and suspension board 130 is altogether The structure of plane；By the etch process of this same depth, can simplify in the past need to be more in response to the carrying out of the different depth of housing 131 Secondary etch process, while again by the foregoing glue-line 136 being arranged between housing 131 and resonance plate 12, coat housing 131 in The rough surface produced after etching, so that bond strength between glue-line and housing can be increased, and because the thickness of housing 131 is compared It is to reduce in passing preparation method, therefore is coated with the thickness increase of the glue-line 136 of gap h, is increased by the thickness of glue-line 136 Plus, the inhomogeneity of the coating of glue-line 136 can be effectively improved, the assembly error of horizontal direction when suspension board 130 is assembled is reduced, and carry The energy utilized efficiency of the vertical direction of suspension board 130 is risen, while also assist absorption vibrational energy and noise can be reduced.

In minisize fluid control device 1 of the present utility model, the different-thickness of glue-line 136 will cause minisize fluid control The data of the performance and fraction defective of device difference, its properties and fraction defective are as shown in following table three：

Table three

By the data of table three, it is apparent that the thickness of glue-line 136 can significantly affect the performance of minisize fluid control device 1, if Be glue-line 136 thickness it is too thick, although then gap h can maintain thicker depth, its due to compression chamber 121 depth become Deep, volume becomes big, will be deteriorated with respect to its performance for compressing start, therefore its performance can decline；If but the thickness of glue-line 136 Excessively thin, then the depth of the gap h that it can be provided also can be not enough, and is easily caused the convex portion 130c and resonance plate of suspension board 130 12 contact with each other collision, and then make hydraulic performance decline and produce noise, and noise problem is also one of the reason for causing product bad. Therefore, in the utility model embodiment, sampled 25 minisize fluid control devices 1 product does in fact, and the thickness of glue-line 136 is Between 50 to 60 μm, in this section of numerical intervals, not only performance has and is obviously improved, while its fraction defective is relatively low, with And, preferred values therein is 55 μm, and its performance is performed better, and fraction defective is minimum, but is not limited.

Again as shown in Figure 3 B, in the present embodiment, suspension board 130 be one square and the structure with cascaded surface, i.e., in Also there is a convex portion 130c, convex portion 130c to be arranged at the center of second surface 130a on the second surface 130a of suspension board 130 Portion 130d, and can be but not be limited to a circular protrusions structure.In certain embodiments, the height of convex portion 130c is between 0.02mm To between 0.08mm, preferred values is 0.03mm, its a diameter of 4.4mm, but is not limited.

Therefore, refer to shown in Figure 1A, Fig. 4 A to Fig. 4 E and Fig. 5, the base 10, piezo-activator 13, insulating trip 141, After the sequentially storehouse assembling such as conducting strip 15, another insulating trip 142 and gas collection plate 16, as shown in Fig. 4 A and Fig. 5, it is seen that minisize fluid Control device 1 can be collectively forming a chamber for confluxing gas at the hollow bore 120 of resonance plate 12 with inlet plate 11 thereon, That is, the chamber at the chamber 111 that confluxes of the first surface 11b of inlet plate 11, and between resonance plate 12 and piezo-activator 13 also Form a compression chamber 121, be configured to temporarily store gas, and compression chamber 121 be by the hollow bore 120 of resonance plate 12 with enter Chamber at the chamber 111 that confluxes of the first surface 11b of gas plate 11 is connected, and controls to drive below with regard to minisize fluid control device 1 The partial schematic diagram that the suspension board 130 of piezo-activator 13 carries out the start implementation state of vertical reciprocating type vibration is explained.

As shown in Figure 4 B, when driving the suspension board 130 of piezo-activator 13 to carry out vertical reciprocating type vibration and curved in control During curved deflecting bottom offset, thus by produce gas entered by least air admission hole 110 on inlet plate 11, and by its first At least one total string holes 112 of surface 11b and be pooled at the chamber 111 that confluxes in center, now because resonance plate 12 is for light, thin Laminated structure can bringing into and push and also can carry out vertical reciprocating vibration with the resonance of suspension board 130 because of fluid, As the correspondence of resonance plate 12 conflux chamber 111 movable part 12a also can flexural vibrations deformation therewith, and as shown in Figure 4 C, when outstanding The vertical reciprocating vibration of kickboard 130 is displaced to a position, makes the movable part 12a of the resonance plate 12 can be very close in suspension board 130 convex portion 130c, and then fluid is entered in the passage of compression chamber 121, the area beyond the convex portion 130c of suspension board 130 In the case of the spacing of the compression chamber 121 between the fixed part 12b of domain and the both sides of resonance plate 12 will not diminish, therefore flow through them Between the flow of fluid will not reduce, will not also produce the pressure loss, so more effectively compress the body of the compression chamber 121 Product, as shown in Figure 4 D, when piezo-activator 13 persistently carries out vertical reciprocating vibration and Bending Deformation is shifted up, you can Promote the fluid in compression chamber 121 to push to be flowed to both sides, and the space between the support 132 of piezo-activator 13 136 and pass through flowing downwards, it is now again as shown in Figure 4 E, outstanding with piezo-activator 13 to obtain discharge pressure higher The convex portion 130c's of kickboard 130 pushes up movement, and make the movable part 12a of resonance plate 12 also be bent upwards vibration deformation, The volume for making to conflux at chamber 111 is compressed, and fluid in total string holes 112 is circulated at the chamber 111 that confluxes and diminishes, finally When the suspension board 130 of piezo-activator 13 persistently carries out vertical reciprocating type to be vibrated, you can repeat real shown in Fig. 4 B to Fig. 4 E Apply state.In the present embodiment, it is seen that the design that the suspension board 130 of this piezo-activator 13 possesses convex portion 130c is applied to this reality With also can reach good fluid efficiency of transmission in new minisize fluid control device 1, as long as the design kenel of convex portion 130c, Quantity and position etc. are can to appoint to apply change according to situation is actually applied, and are not limited thereto.

In addition, in certain embodiments, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezo-activator 13 Vibration frequency is identical, i.e., both can downwards upwards or simultaneously simultaneously, and it can appoint according to situation is actually applied applies change, not with Being limited as flowing mode shown in the present embodiment.

In sum, piezo-activator provided by the utility model is applied in minisize fluid control device, piezoelectricity Actuator has suspension board, housing and four supports, and each support is vertically connected between suspension board and housing, is hung down by this Straight across the support between suspension board and housing, to provide resilient support and reduce the inhomogenous swing of suspension board, contribute to Increase suspension board in the amplitude on Z axis, when suspension board is had more preferable displacement state, i.e. suspension board start in up-down vibration It is more stable, consistent, it is beneficial to the stability and efficiency of lifting piezo-activator start；Meanwhile, by the outstanding of piezo-activator Kickboard, housing, support are formed in one metal plate structure, and convex portion and the support of suspension board are etched out by same depth Demand kenel, makes the second surface of the second surface of housing housing, the second surface of support and suspension board be coplanar knot Structure, can simplify need to carry out multiple etch process in response to the different depth of housing in the past, while again by being arranged at housing and being total to The glue-line shaken between piece, coats housing in the rough surface produced after etching, so that can increase between glue-line and housing combining Intensity, and because the thickness of housing is to reduce compared to passing preparation method, therefore the thickness increase of the glue-line in the gap is coated with, Increased by the thickness of glue-line, the inhomogeneity of glue-line coating can be effectively improved, reduce the group of horizontal direction when suspension board is assembled Dress error, and lift the energy utilized efficiency of suspension board vertical direction, while also assist absorption vibrational energy and noise can be reduced Jing Yin effect is reached, and the piezo-activator of this miniaturization can also be such that the overall volume of minisize fluid control device reduces and thin Type, to reach light comfortable portable purpose；And, by the design of the suspension board square kenel of the piezo-activator And the also start with convex portion on suspension board, fluid is flowed into by the air admission hole of the inlet plate of base, and it is total along what is be connected String holes and the chamber that confluxes are flowed, by the hollow bore of resonance plate so that fluid shape between resonance plate and piezo-activator Into compression chamber in produce barometric gradient, and then flow fluid high-speed, the flow of fluid will not be reduced, and will not also produce pressure Power is lost, and can be continued to transmit to reach and obtained discharge pressure higher；Therefore, the utility model minisize fluid control device more may be used Overall volume is set to reduce and be thinned, to reach light comfortable portable purpose, great industrial utilization.

Even if the utility model is described and can be appointed by those of ordinary skill in the art and apply craftsman in detail by above-described embodiment Think and be it is all as modify, but all without departing from the protection domain that such as appended claims are limited.

Claims (22)

1. a kind of piezo-activator, comprising：

One suspension board, is foursquare kenel, and can be by a central part to a peripheral part flexural vibrations；

One housing, around the outside for being arranged at the suspension board；

Several supports, each support vertical is connected between the suspension board and the housing, to provide resilient support, and the support With length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6；And

One piezoelectric ceramic plate, is foursquare kenel, with the length of side for being not more than the suspension board length of side, is attached at the suspension board On first surface, to applied voltage driving the suspension board flexural vibrations.

2. piezo-activator as claimed in claim 1, it is characterised in that those supports are four supports.

3. piezo-activator as claimed in claim 1, it is characterised in that one end of each support is vertically connected at the suspension One side of plate, the other end is vertically connected at an inner side edge of the housing.

4. piezo-activator as claimed in claim 1, it is characterised in that the stent length is 1.16 ㎜.

5. piezo-activator as claimed in claim 1, it is characterised in that the support width is 0.4 ㎜.

6. piezo-activator as claimed in claim 1, it is characterised in that the piezoelectric ceramic plate has between 0.05mm extremely Thickness between 0.3mm.

7. piezo-activator as claimed in claim 6, it is characterised in that the piezoelectric ceramics plate thickness is 0.10mm.

8. piezo-activator as claimed in claim 1, it is characterised in that each length of side of the suspension board between 7.5mm extremely Between 12mm, and thickness is between 0.1mm to 0.4mm.

9. piezo-activator as claimed in claim 8, it is characterised in that each length of side of the suspension board between 7.5mm extremely Between 8.5mm, and thickness is 0.27mm.

10. a kind of minisize fluid control device, comprising：

One piezo-activator, with a suspension board, a housing, four supports and a piezoelectric ceramic plate, the suspension board is square Kenel, and there is a convex portion with a first surface and a corresponding second surface, and on the second surface, the housing surround Be arranged at the outside of the suspension board, and also there is a first surface and a corresponding second surface, and the housing this second Region outside the convex portion of the second surface of surface and the suspension board is copline, the support be connected to the suspension board with Between the housing, with and its length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6, piezoelectric ceramic plate tool There is the length of side of the no more than suspension board length of side, be attached on the first surface of the suspension board；And

One housing, including a gas collection plate and a base, the gas collection plate have side wall to constitute the one of an accommodation space for periphery Frame structure, makes the piezo-activator be arranged in the accommodation space, and the base is engaged by an inlet plate and a resonance plate Form, and be incorporated into the accommodation space of the gas collection plate, to close the piezo-activator, the inlet plate has an at least air inlet Hole and at least one logical total string holes is attached thereto, is confluxed chamber with constituting one, the resonance plate sets and is fixed on the inlet plate, and With a hollow bore, relative to the chamber that confluxes of the inlet plate, and corresponding to the convex portion of the suspension board；

Wherein, a glue-line is set between the second surface of the housing of the piezo-activator and the resonance plate of the base, with Make a gap depth of the compression chamber that composition demand is maintained between the piezo-activator and the resonance plate of the base.

11. minisize fluid control devices as claimed in claim 10, it is characterised in that the stent length is 1.16 ㎜.

12. minisize fluid control devices as claimed in claim 10, it is characterised in that the support width is 0.4 ㎜.

13. minisize fluid control devices as claimed in claim 10, it is characterised in that the piezoelectric ceramic plate have between Thickness between 0.05mm to 0.3mm.

14. minisize fluid control devices as claimed in claim 13, it is characterised in that the thickness of the piezoelectric ceramic plate is 0.10mm。

15. minisize fluid control devices as claimed in claim 10, it is characterised in that each length of side of the suspension board between Between 7.5mm to 12mm, and thickness is between 0.1mm to 0.4mm.

16. minisize fluid control devices as claimed in claim 15, it is characterised in that each length of side of the suspension board between Between 7.5mm to 8.5mm, and thickness is 0.27mm.

17. minisize fluid control devices as claimed in claim 10, it is characterised in that the thickness of the glue-line is between 50 μm to 60 Between μm.

18. minisize fluid control devices as claimed in claim 17, it is characterised in that the thickness of the glue-line is 55 μm.

19. minisize fluid control devices as claimed in claim 10, it is characterised in that the thickness of the housing between 0.1mm extremely Between 0.4mm.

20. minisize fluid control devices as claimed in claim 10, it is characterised in that the protrusion height of the suspension board is to be situated between Between 0.02mm to 0.08mm.

21. minisize fluid control devices as claimed in claim 10, it is characterised in that the convex portion of the suspension board is one circular Bulge-structure, a diameter of 4.4mm.

22. minisize fluid control devices as claimed in claim 10, it is characterised in that the suspension board, the housing and the support It is with made by the etching mode of same depth, so that the second surface of the support is put down altogether with the second surface of the suspension board Face.