CN205999479U - 分流式cvd沉积室 - Google Patents
分流式cvd沉积室 Download PDFInfo
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- CN205999479U CN205999479U CN201621067827.5U CN201621067827U CN205999479U CN 205999479 U CN205999479 U CN 205999479U CN 201621067827 U CN201621067827 U CN 201621067827U CN 205999479 U CN205999479 U CN 205999479U
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- 230000008021 deposition Effects 0.000 title claims abstract description 35
- 238000009826 distribution Methods 0.000 claims abstract description 25
- 239000012530 fluid Substances 0.000 claims abstract description 11
- 239000011148 porous material Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 abstract description 27
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 3
- 239000002131 composite material Substances 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 39
- 238000000034 method Methods 0.000 description 6
- 238000000197 pyrolysis Methods 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 239000003610 charcoal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
Claims (6)
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CN201621067827.5U CN205999479U (zh) | 2016-09-21 | 2016-09-21 | 分流式cvd沉积室 |
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CN201621067827.5U CN205999479U (zh) | 2016-09-21 | 2016-09-21 | 分流式cvd沉积室 |
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CN205999479U true CN205999479U (zh) | 2017-03-08 |
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CN201621067827.5U Active CN205999479U (zh) | 2016-09-21 | 2016-09-21 | 分流式cvd沉积室 |
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CN (1) | CN205999479U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110430651A (zh) * | 2019-07-29 | 2019-11-08 | 四川大学 | 平行板dbd等离子体发生器 |
CN113845370A (zh) * | 2021-12-01 | 2021-12-28 | 中南大学 | 一种变密度炭/炭复合材料保温桶及其制备方法 |
-
2016
- 2016-09-21 CN CN201621067827.5U patent/CN205999479U/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110430651A (zh) * | 2019-07-29 | 2019-11-08 | 四川大学 | 平行板dbd等离子体发生器 |
CN113845370A (zh) * | 2021-12-01 | 2021-12-28 | 中南大学 | 一种变密度炭/炭复合材料保温桶及其制备方法 |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Shunting CVD deposition chamber Effective date of registration: 20200616 Granted publication date: 20170308 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: SHAANXI MEILANDO CARBON Co.,Ltd. Registration number: Y2020990000622 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210402 Granted publication date: 20170308 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: SHAANXI MEILANDO CARBON Co.,Ltd. Registration number: Y2020990000622 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Split flow CVD chamber Effective date of registration: 20210402 Granted publication date: 20170308 Pledgee: Xi'an innovation financing Company limited by guarantee Pledgor: SHAANXI MEILANDO CARBON Co.,Ltd. Registration number: Y2021990000299 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
CP03 | Change of name, title or address |
Address after: 710608 Factory Building 2, No. 2299 Qinwang Second Road, Weibei New City, Xi'an Economic and Technological Development Zone, Shaanxi Province Patentee after: Shaanxi Meilan New Materials Co.,Ltd. Address before: 710600 Modern 3rd Road, Lintong Tourism and Trade Development Zone, Xi'an City, Shaanxi Province Patentee before: SHAANXI MEILANDO CARBON CO.,LTD. |
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CP03 | Change of name, title or address |