CN205879132U - Inferior rad level angle measurement device - Google Patents

Inferior rad level angle measurement device Download PDF

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Publication number
CN205879132U
CN205879132U CN201620778968.1U CN201620778968U CN205879132U CN 205879132 U CN205879132 U CN 205879132U CN 201620778968 U CN201620778968 U CN 201620778968U CN 205879132 U CN205879132 U CN 205879132U
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China
Prior art keywords
bearing
feedback system
workbench
mandrel
measuring equipment
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CN201620778968.1U
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Chinese (zh)
Inventor
黄明
李梦阳
夏仰球
陈东生
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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Abstract

The utility model provides an inferior rad level angle measurement device, workstation in the device is located the bearing top, and feedback system is located the bearing below. Be provided with axial supporting clearance between workstation and the bearing. Code wheel immobilization connection with workstation immobilization connection, among lower extreme and the feedback system on the dabber. Be provided with a radial supporting clearance between dabber and the bearing. Driving motor and bearing immobilization connection. The reading head among the feedback system and the bottom surface immobilization connection of bearing. The controller respectively with reading head, driver, industrial computer electric connection. The driver respectively with the driving motor electric connection. The utility model is suitable for a device angles such as the multiaspect arris body, multiple tooth dividing table, circle grating, optical scale are measured, use extensively, and closed loop stable state precision is high, has good repeatability, convenient operation, simple.

Description

A kind of sub-rad level angle-measuring equipment
Technical field
This utility model belongs to high precision angle-measuring technical field, is specifically related to a kind of sub-rad level angle-measuring equipment.
Background technology
Angular surveying is the important component part of geometric sense measurement technology, currently mainly has following a few class angle-measuring method: machine Tool angle-measuring method, electromagnetism angle-measuring method, optics angle-measuring method and photoelectric measuring horn cupping etc..Mechanical measurement method with multiteeth indexing table as representative, its Simple in construction, low cost, but it is usually present that equipment volume is big, can not measure shortcoming at any angle;Electromagnetism angle-measuring method with Inductosyn is representative, and its speed of service is fast, reliable and stable, but there is, assembly precision requirement high with the system under test (SUT) degree of coupling High shortcoming;Optics angle-measuring method is with laser interference clinometer and photoelectric auto-collimator as representative, and it has high accuracy, non-contacting Advantage, but there is the shortcoming that light path is complicated, measurable angle range is little simultaneously;Photoelectric measuring horn cupping is with optical code disc type sensor angle measurement and figure As sensor angle measurement is representative, both of which is widely used, but the former exists the shortcoming that angle resolution is limited, and the latter then deposits Shortcoming poor at environmental suitability, that field adjustable is complicated.
The Chinese patent of entitled one " Dynamic High-accuracy angle-measuring equipment and method " (notification number: CN 105091844 A) Provide a kind of based on height segmentation space Four-frequency differential ring laser gyroscope, with in the unit interval angle step export high-precision Degree dynamic angle measurer, the angle measurement accuracy of this device is high, and dynamic range is big, to tested carrier no-backs square effect, it is adaptable to right The dynamic characteristic of rotating shaft carries out high-precision measurement, but cannot meet static angular measurement requirement.Entitled " angle-measuring equipment " is (public Accuse number: Chinese patent CN 1936505 A) provide a kind of rule-based signal generating element, irregular generating device turn Moving device and for obtaining the angle-measuring equipment of the sensor of signal, this device can conveniently carry out angular surveying, suitable Strong by property, but it is the highest to measure system accuracy.
Summary of the invention
The purpose of this utility model is to provide a kind of sub-rad level angle-measuring equipment, and this utility model disclosure satisfy that high accuracy angle Degree test, has high rotating accuracy and axial precision, and resolution is high, angle measurement accuracy is high, temperature coefficient is little, measuring object should With extensively.
The technical solution of the utility model is as follows:
Sub-rad level angle-measuring equipment of the present utility model, is characterized in, described angle-measuring equipment include several driving motor, Workbench, mandrel, feedback system, bearing, angular display unit, driver, controller, industrial computer.Wherein, feedback system contains Code-disc and read head.Its annexation is, described workbench is positioned at above a bearing, and feedback system is positioned at below a bearing. It is provided with an axial supported clearance between workbench and a bearing.Mandrel is positioned at the center of a bearing, mandrel upper end and workbench Being fixedly connected, lower end is fixedly connected with the code-disc in feedback system.It is provided with a radial support gap between mandrel and a bearing. Prop up and in bearing, be provided with driving motor, drive motor to be fixedly connected with a bearing.Read head in feedback system and a bearing Bottom surface is fixedly connected.Controller electrically connects with read head, driver, industrial computer respectively.Driver respectively with drive motor Electricity Federation Connect;Measurand is placed on workbench, and electrically connects with angular display unit.
It is 2~4 that described driving motor arranges quantity, is distributed on around workbench, is used for driving work table rotation Motion.
The central axis of described measurand, mandrel center of rotation axle for being coaxially disposed.
Described axial supported clearance, radial support gap use air as supporting medium.
The code-disc central axis of described feedback system, mandrel center of rotation axle for being coaxially disposed.
Measurand in this utility model can be polygon, multiteeth indexing table, Circular gratings, optical circle angularly One in device.
When measurand is polygon or multiteeth indexing table, angular display unit uses photoelectric auto-collimator.
When measurand is Circular gratings, angular display unit uses Moire fringe read head.
When measurand is optical circle, angular display unit uses photoelectric microscope.
Static air pressure supporting is used so that whole axle system realizes high-precision between workbench and a bearing in this utility model Degree rotates, it is thus achieved that higher rotating accuracy and axial precision.
Driving motor in this utility model can be piezoelectric ceramic motor, torque motor or servomotor.
When described driving motor uses piezoelectric ceramic motor, drive and pass through friction-driven between motor and workbench.
When described driving motor uses torque motor or servomotor, drive and pass through electromagnetism between motor and workbench Drive.
Feedback system in this utility model is by signal Real-time Feedback to controller, controller and industrial computer communication, simultaneously Sending control signals to driver, driver control drives motor to make system rotate to specifying position.
The beneficial effects of the utility model are, use superhigh precision static air pressure axle system, have high rotating accuracy and Axially precision;When using nanoscale friction-driven, the feedback system using high graduating accuracy, high power to segment, there is resolution The advantages such as high, angle measurement accuracy height, temperature coefficient are little;This utility model is applicable to polygon, Circular gratings, code-disc, multiple tooth indexing The design factors such as platform are measured, and are widely used, and closed loop stable state accuracy is high, has excellent repeatable accuracy, convenient and simple for operation, tool There is preferably actual application value.
Accompanying drawing explanation
Fig. 1 is a kind of sub-rad level angle-measuring equipment structural representation of the present utility model;
In figure, 1. drive motor 3. workbench 4. measurand 5. 8. bearings of mandrel 7. code-disc 9. jiaos Degree display 10. driver 11. controller 12. industrial computer 13. read head.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment describes this utility model content in detail.
Following example are merely to illustrate this utility model, and are not limitation of the utility model.Relevant technical field Personnel in the case of without departing from spirit and scope of the present utility model, it is also possible to make a variety of changes, replace and modification, because of This equal technical scheme falls within category of the present utility model.
Embodiment 1
Fig. 1 is a kind of sub-rad level angle-measuring equipment structural representation of the present utility model.In FIG, of the present utility model Sub-rad level high precision angle measuring apparatus includes driving motor 1, workbench 3, mandrel 5, feedback system, bearing 8, angular display unit 9, driver 10, controller 11, industrial computer 12.Wherein, feedback system contains code-disc 7 and read head 13.Its annexation is, institute The workbench 3 stated is positioned at above a bearing 8, and feedback system is positioned at below a bearing 8.It is provided with between workbench 3 and a bearing 8 One axial supported clearance.Mandrel 5 upper end is fixedly connected with workbench 3, and lower end is fixedly connected with the code-disc 7 in feedback system.Core Axle 5 is positioned at the center of a bearing 8, is provided with a radial support gap between mandrel 5 and a bearing 8.Prop up to be provided with in bearing 8 and drive Galvanic electricity machine, drives motor 1 to be fixedly connected with a bearing 8.Read head 13 in feedback system is fixing connection with the bottom surface of a bearing 8 Connect.Controller 11 electrically connects with read head 13, driver 10, industrial computer 12 respectively.Driver 10 respectively with drive motor 1 Electricity Federation Connect.Measurand 4 is placed on workbench 3, and electrically connects with angular display unit 9.
The described central axis of measurand 4, the center of rotation axle of mandrel 5 are for being coaxially disposed.
Described axial supported clearance, radial support gap use air as supporting medium so that whole axle system realizes High-precision rotary, it is thus achieved that higher rotating accuracy and axial precision.
The central axis of code-disc 7 of described feedback system, mandrel 5 center of rotation axle for being coaxially disposed.
In the present embodiment, it is four that described driving motor arranges quantity, is distributed on workbench 3 around, drives motor 1 For one of them, motor is driven to be used for driving workbench 3 gyration.
Signal Real-time Feedback to controller 11, controller 11 are led to by the feedback system in this utility model with industrial computer 12 Letter, sends control signals to driver 10 simultaneously, and driver 10 controls to drive motor 1 to make system rotate to specifying position.
In the present embodiment, measurand 4 is polygon;Angular display unit 9 uses photoelectric auto-collimator;Drive motor 1 Use piezoelectric ceramic motor, between piezoelectric ceramic motor and workbench 3, pass through friction-driven.
In the present embodiment, the angle precision of one piece of 0 grade of 36 polygon is detected.Implementing step is:
1. Asia rad level high precision angle measuring apparatus is arranged on a vibrating isolation foundation.
2. adjust polygon centre of gyration axis and angle-measuring equipment centre of gyration axis so that it is deviation is not more than 0.002 mm。
3. adjust photoelectric auto-collimator, make the beam center of photoelectric auto-collimator outgoing directional light work with polygon Face center superposition, the optical axis is perpendicular to rib body running face and center superposition.
4. press the adjacent surface sub-degree angle rotation angle measurement device detection polygon of polygon.
Embodiment 2
The present embodiment is identical with the structure of embodiment 1, is a difference in that, measurand 4 is Circular gratings;Angular display unit 9 Use Moire fringe read head;Drive motor 1 to use torque motor, between torque motor and workbench 3, pass through Electromagnetic Drive.

Claims (5)

1. a sub-rad level angle-measuring equipment, it is characterised in that described angle-measuring equipment includes several driving motor (1), work Platform (3), mandrel (5), feedback system, bearing (8), display (9), driver (10), controller (11), industrial computer (12); Wherein, feedback system contains code-disc (7) and read head (13);Its annexation is, described workbench (3) is positioned at a bearing (8) top, feedback system is positioned at bearing (8) lower section;It is provided with between workbench (3) and a bearing (8) between an axial supporting Gap;Mandrel (5) is positioned at the center of a bearing (8), and mandrel (5) upper end is fixedly connected with workbench (3), in lower end and feedback system Code-disc (7) be fixedly connected;It is provided with a radial support gap between mandrel (5) and a bearing (8);Prop up the upper setting of bearing (8) There is driving motor (1), drive motor (1) to be fixedly connected with a bearing (8);Read head (13) in feedback system and a bearing (8) bottom surface is fixedly connected;Controller (11) electrically connects with read head (13), driver (10), industrial computer (12) respectively;Drive Device (10) electrically connects with driving motor (1) respectively;Measurand (4) is placed on workbench (3), and electrically connects with display (9).
Sub-rad level angle-measuring equipment the most according to claim 1, it is characterised in that described driving motor (1) arranges number Amount is 2~4, is distributed on workbench (3) around, is used for driving workbench (3) gyration.
Sub-rad level angle-measuring equipment the most according to claim 1, it is characterised in that the center of described measurand (4) Axis, mandrel (5) center of rotation axle for being coaxially disposed.
Sub-rad level angle-measuring equipment the most according to claim 1, it is characterised in that described axial supported clearance, radially Supported clearance uses air as supporting medium.
Sub-rad level angle-measuring equipment the most according to claim 1, it is characterised in that the code-disc (7) of described feedback system Central axis, mandrel (5) center of rotation axle for being coaxially disposed.
CN201620778968.1U 2016-07-22 2016-07-22 Inferior rad level angle measurement device Active CN205879132U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620778968.1U CN205879132U (en) 2016-07-22 2016-07-22 Inferior rad level angle measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620778968.1U CN205879132U (en) 2016-07-22 2016-07-22 Inferior rad level angle measurement device

Publications (1)

Publication Number Publication Date
CN205879132U true CN205879132U (en) 2017-01-11

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106123809A (en) * 2016-07-22 2016-11-16 中国工程物理研究院机械制造工艺研究所 A kind of sub-rad level angle-measuring equipment
CN113483728A (en) * 2021-07-03 2021-10-08 东华理工大学 Nanoscale interference fringe angle measuring system for high-precision electronic theodolite

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106123809A (en) * 2016-07-22 2016-11-16 中国工程物理研究院机械制造工艺研究所 A kind of sub-rad level angle-measuring equipment
CN113483728A (en) * 2021-07-03 2021-10-08 东华理工大学 Nanoscale interference fringe angle measuring system for high-precision electronic theodolite

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