CN205850314U - Silicon fluoride. complex preparation dehydrating tower - Google Patents

Silicon fluoride. complex preparation dehydrating tower Download PDF

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Publication number
CN205850314U
CN205850314U CN201620867452.4U CN201620867452U CN205850314U CN 205850314 U CN205850314 U CN 205850314U CN 201620867452 U CN201620867452 U CN 201620867452U CN 205850314 U CN205850314 U CN 205850314U
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CN
China
Prior art keywords
tower body
signal transmission
transmission port
port
control module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620867452.4U
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Chinese (zh)
Inventor
唐克
常春
赵刚
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Bohai University
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Bohai University
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Priority to CN201620867452.4U priority Critical patent/CN205850314U/en
Application granted granted Critical
Publication of CN205850314U publication Critical patent/CN205850314U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

This utility model belongs to Silicon fluoride. complex and produces apparatus field, particularly relates to a kind of Silicon fluoride. complex preparation dehydrating tower, including tower body (1);It is provided with molecular sieve filling layer (2) at tower body (1) inner chamber;It is provided with liquid distributor (4) in molecular sieve filling layer (2) bottom;The port of export of feed(raw material)inlet (3) communicates with the entrance of liquid distributor (4);Heating chamber (5) longitudinally it is provided with at tower body (1) inner chamber;It is provided with calandria (6) in heating chamber (5);It is provided with temperature sensor (7) at tower body (1) inner chamber;It is externally provided with temperature control module (8) at tower body (1);The signal transmission port of temperature sensor (7) connects the signal transmission port of temperature control module (8);The signal transmission port of calandria (6) connects the signal transmission port of temperature control module (8).This utility model low cost, dewatering efficiency is high, saves the energy.

Description

Silicon fluoride. complex preparation dehydrating tower
Technical field
This utility model belongs to Silicon fluoride. complex and produces apparatus field, particularly relates to a kind of Silicon fluoride. complex and prepares Use dehydrating tower.
Background technology
In hyundai electronics and semi-conductor industry, silicon materials obtain a wide range of applications, the semiconductor components and devices more than 90% All it is made up of silicon.Natural silicon contains three kinds of stable isotope 28Si, 29Si, 30Si, and its content is respectively 92.23%, 4.67%, 3.10%.In recent years, the silicon materials of isotopically pure start to be paid close attention to by scientists with its excellent characteristic.
Along with modern information industry and the development of electronic computer industry, the volume of semiconductor chip becomes less, integrated Change degree is higher.But semiconductor chip volume is the least, circuit integrated level is the highest, and electric current density will be gradually increased, in unit volume Caloric value increases, and components and parts operationally temperature so will be made to raise, and chip temperature is too high will cause semiconductor components and devices Performance and life-span decline to a great extent.Use isotopically pure 28Si(99.85%) semiconductor device made, the thermal conductivity under room temperature is comparable Natural silicon increases by 10%~60%, and increase at some specific temperature is more.The diode reverse that isotopically pure 28Si makes The natural silicon diode of breakdown voltage than same process can improve more than 80%.Enrichment 29Si be a kind of potential for storing and The material of operation quantum computerized information.Silicon ingot containing 30Si is the new material realizing neutron transmutation doping (NDT), and NDT is Using a kind of technology that material is doped by the way of neutron irradiation, the advantage of its maximum is exactly that the impurity concentration mixed is divided Cloth is highly uniform.
In Silicon fluoride. complex production equipment, dehydrating tower is very important system component.Existing dehydrating tower is universal There is cost high, dewatering efficiency is low, and consume energy high.
Utility model content
A kind of simple in construction, low cost, dehydration effect are provided in place of this utility model is intended to overcome the deficiencies in the prior art Rate is high, saves the Silicon fluoride. complex preparation dehydrating tower of the energy.
For solving above-mentioned technical problem, this utility model is realized in.
Silicon fluoride. complex preparation dehydrating tower, it includes tower body;It is provided with molecular sieve filling layer at described tower body inner chamber; It is provided with feed(raw material)inlet bottom described tower body;It is provided with material outlet at described tower body top;In described molecular sieve filling layer bottom It is provided with liquid distributor;The port of export of described feed(raw material)inlet communicates with the entrance of liquid distributor;At described tower body inner chamber longitudinally It is provided with heating chamber;It is provided with calandria at described heating intracavity;It is provided with temperature sensor at described tower body inner chamber;Outside described tower body It is provided with temperature control module;The signal transmission port of described temperature sensor connects the signal transmission port of temperature control module;Described calandria Signal transmission port connect the signal transmission port of temperature control module.
As a kind of preferred version, temperature control module described in the utility model includes power circuit, CPU, control output circuit And timing circuit;The signal transmission port of described temperature sensor connects the signal transmission port of CPU;The signal of described CPU Transmission port connects the signal output port controlling output circuit;The signal transmission port of described timing circuit connects control output circuit Signal output port.
Further, this utility model is fixed with orifice plate bottom described molecular sieve filling layer.
Further, this utility model is fixed with drain and vacuum port at described tower body top.
This utility model simple in construction, low cost, dewatering efficiency is high, saves the energy.This utility model is by taking out tower body Application of vacuum, the most heated intracavity calandria, to the molecular sieve filling regeneration activating in tower body, then turns off Vacuum interface, aqueous methanol is passed through molecular sieve filling, is reached the purpose of dehydration.
Accompanying drawing explanation
The utility model is described in further detail with detailed description of the invention below in conjunction with the accompanying drawings.Protection model of the present utility model Enclose the statement being not only limited to following content.
Fig. 1 is overall structure schematic diagram of the present utility model.
Fig. 2 is this utility model temperature-controlled portion schematic block circuit diagram.
In figure: 1, tower body;2, molecular sieve filling layer;3, feed(raw material)inlet;4, liquid distributor;5, heating chamber;6, calandria; 7, temperature sensor;8, temperature control module;9, orifice plate;10, drain;11, vacuum port;12, material outlet;13, discharging hole.
Detailed description of the invention
As it can be seen, Silicon fluoride. complex preparation dehydrating tower, it includes tower body 1;It is provided with point at described tower body 1 inner chamber Son sieve packing layer 2;It is provided with feed(raw material)inlet 3 bottom described tower body 1;It is provided with material outlet 12 at described tower body 1 top;Described Molecular sieve filling layer 2 bottom is provided with liquid distributor 4;The port of export of described feed(raw material)inlet 3 and the entrance phase of liquid distributor 4 Logical;Heating chamber 5 longitudinally it is provided with at described tower body 1 inner chamber;It is provided with calandria 6 in described heating chamber 5;At described tower body 1 inner chamber It is provided with temperature sensor 7;It is externally provided with temperature control module 8 at described tower body 1;The signal transmission port of described temperature sensor 7 connects temperature The signal transmission port of control module 8;The signal transmission port of described calandria 6 connects the signal transmission port of temperature control module 8.
Temperature control module 8 described in the utility model includes power circuit, CPU, control output circuit and timing circuit;Described The signal transmission port of temperature sensor 7 connects the signal transmission port of CPU;It is defeated that the signal transmission port of described CPU connects control Go out the signal output port of circuit;The signal transmission port of described timing circuit connects the signal output port controlling output circuit.
This utility model is fixed with orifice plate 9 bottom described molecular sieve filling layer 2.This utility model is at described tower body 1 Top is fixed with drain 10 and vacuum port 11.
This utility model temperature sensor input signal enters the CPU in temperature control module.Data after CPU will process input Carry out showing and export control to display circuit and control output circuit.Power circuit provides power supply for CPU;Timing circuit is Control output circuit and time data is provided.The temperature signal of dehydrating tower molecular sieve filling layer is gathered by temperature sensor.Temperature is believed Number it is converted into the signal of telecommunication, is input in CPU carry out data process, and by the temperature of display circuit display current molecular sieve packing layer Degree.Power circuit provides power supply for whole temperature control system.The timing circuit real-time judge response time, when set by system arrival During the time, system stops heating.When the response time that system not up to sets, system will continue the reaction temperature judging to set.
When Silicon fluoride. complex prepares practical operation, this utility model by vacuum port 11 to tower body evacuation at Reason, the most heated intracavity calandria, to the molecular sieve filling regeneration activating in tower body, then turns off vacuum and connects Mouthful, methanol is squeezed into this utility model from chelating agent storage tank through feed(raw material)inlet 3 and liquid distributor 4 and is taken off by startup chelating agent delivery pump Molecular sieve filling layer 2 in water tower, enters anhydrous chelating agent storage tank and stores, detect anhydrous chelating agent water content, be less than after dehydration 50ppm is qualified, if higher than this value, then the chelating agent in anhydrous chelating agent storage tank is squeezed into dehydrating tower dehydration again, to qualified Till.
This utility model can also be when overhauling tower body, by drain and discharging hole respectively to the gas phase in tower body and liquid Discharge mutually.
The foregoing is only preferred embodiment of the present utility model, be not limited to this utility model, for this For the technical staff in field, this utility model can have various modifications and variations.All in spirit of the present utility model and principle Within, any modification, equivalent substitution and improvement etc. made, within should be included in protection domain of the present utility model.

Claims (4)

1. Silicon fluoride. complex preparation dehydrating tower, including tower body (1);It is characterized in that: be provided with at described tower body (1) inner chamber Molecular sieve filling layer (2);It is provided with feed(raw material)inlet (3) in described tower body (1) bottom;It is provided with raw material at described tower body (1) top to go out Mouth (12);It is provided with liquid distributor (4) in described molecular sieve filling layer (2) bottom;The port of export of described feed(raw material)inlet (3) and liquid The entrance of body allotter (4) communicates;Heating chamber (5) longitudinally it is provided with at described tower body (1) inner chamber;Set in described heating chamber (5) There is calandria (6);It is provided with temperature sensor (7) at described tower body (1) inner chamber;It is externally provided with temperature control module at described tower body (1) (8);The signal transmission port of described temperature sensor (7) connects the signal transmission port of temperature control module (8);Described calandria (6) Signal transmission port connect the signal transmission port of temperature control module (8).
Silicon fluoride. complex preparation dehydrating tower the most according to claim 1, it is characterised in that: described temperature control module (8) power circuit, CPU, control output circuit and timing circuit are included;The signal transmission port of described temperature sensor (7) connects The signal transmission port of CPU;The signal transmission port of described CPU connects the signal output port controlling output circuit;Described fixed Time circuit signal transmission port connect control output circuit signal output port.
Silicon fluoride. complex preparation dehydrating tower the most according to claim 2, it is characterised in that: fill out at described molecular sieve The bed of material (2) bottom is fixed with orifice plate (9).
Silicon fluoride. complex preparation dehydrating tower the most according to claim 2, it is characterised in that: in described tower body (1) Top is fixed with drain (10) and vacuum port (11).
CN201620867452.4U 2016-08-12 2016-08-12 Silicon fluoride. complex preparation dehydrating tower Expired - Fee Related CN205850314U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620867452.4U CN205850314U (en) 2016-08-12 2016-08-12 Silicon fluoride. complex preparation dehydrating tower

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620867452.4U CN205850314U (en) 2016-08-12 2016-08-12 Silicon fluoride. complex preparation dehydrating tower

Publications (1)

Publication Number Publication Date
CN205850314U true CN205850314U (en) 2017-01-04

Family

ID=57593429

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620867452.4U Expired - Fee Related CN205850314U (en) 2016-08-12 2016-08-12 Silicon fluoride. complex preparation dehydrating tower

Country Status (1)

Country Link
CN (1) CN205850314U (en)

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170104

Termination date: 20170812