CN205839188U - A kind of new electronic control integration single crystal growing furnace - Google Patents
A kind of new electronic control integration single crystal growing furnace Download PDFInfo
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- CN205839188U CN205839188U CN201620538125.4U CN201620538125U CN205839188U CN 205839188 U CN205839188 U CN 205839188U CN 201620538125 U CN201620538125 U CN 201620538125U CN 205839188 U CN205839188 U CN 205839188U
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- single crystal
- crystal growing
- growing furnace
- main body
- hydraulic cylinder
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Abstract
nullThe utility model discloses a kind of new electronic control integration single crystal growing furnace，Including single crystal growing furnace main body，Single crystal growing furnace main body upper end is provided with the described deck of card and connects draw-in groove，Draw-in groove is arranged on the lower end of furnace chamber，Rising rotating mechanism is arranged on and turns feed liquid cylinder pressure front end，Turn feed liquid cylinder pressure to be horizontally set in top base，Top base is additionally provided with charging hydraulic cylinder，Charging hydraulic cylinder front end is provided with charging ladle，Charging ladle lower end connects discharging gate by discharging control valve，Top base is arranged on lifting hydraulic cylinder upper end，Lifting hydraulic cylinder arranges lower end and arranges in rotating base，Driven gear engagement connects rotating driving device，Equipped with driving motor on rotating driving device，Side, single crystal growing furnace main body upper end is provided with diameter control sensor，Single crystal growing furnace body side is provided with control chamber and distribution box，This utility model novel structure，Turn material、Discharging and charging are convenient and swift，It is capable of centralization and controls management，Electrical Safety，Realize monitoring in real time，Improve product quality，Also production efficiency is further increased.
Description
Technical field
This utility model relates to a kind of single crystal growing furnace, specifically a kind of new electronic control integration single crystal growing furnace.
Background technology
Monocrystal silicon is a kind of semi-conducting material, is generally used for manufacturing integrated circuit and other electronic components, monocrystalline silicon growing
Technology has two kinds: one is zone-melting process, and another kind is vertical pulling method, and wherein vertical pulling method makes the most commonly used method.Vertical pulling method
The method of growing single-crystal silicon is as follows: highly purified polycrystalline silicon raw material is put into the silica crucible of Czochralski method mono-crystal furnace, then exists
Coarse vacuum has under the protection of slumpability gas and adds heat fusing, has the monocrystal silicon in particular growth direction (also referred to as one
Seed crystal) load in seed crystal clamping device, and make seed crystal contact with silicon solution, adjust the temperature of molten silicon solution so that it is close
Melting temperature, then drives seed crystal stretch into from top to bottom in melted silicon solution and rotate, and the most slowly upper lifting seed is brilliant, now,
Monocrystal silicon enters the growth of conical section, when the diameter of cone is close to aimed dia, improves the lifting speed of seed crystal, makes monocrystalline
Silicon body diameter no longer increases and enters the middle part growth stage of crystal, at the end of monocrystalline silicon body growth is close, then improves seed crystal
Lifting speed, monocrystalline silicon body progressively disengages molten silicon, forms lower cone and terminates growth.The list grown out in this way
Crystal silicon, it is shaped as two sections of tapered cylinders, is cut into slices by this cylinder, i.e. obtains single-crystal semiconductor raw material, this circle
Shape monocrystalline silicon piece can serve as the material of integrated circuit or solar energy.Pulling single crystal silicon typically enters in Czochralski method mono-crystal furnace
OK.The structure of single crystal growing furnace is relatively simple the most on the market, it is impossible to holding the production status of monocrystal silicon accurately, production efficiency is low
Under, control mode is disperseed and single, it is impossible to concentrated controling management, inefficiency.
Utility model content
The purpose of this utility model is to provide a kind of new electronic control integration single crystal growing furnace, to solve in above-mentioned background technology
The problem proposed.
For achieving the above object, the following technical scheme of this utility model offer:
A kind of new electronic control integration single crystal growing furnace, including single crystal growing furnace main body, described single crystal growing furnace main body is arranged on underframe, institute
Being provided with crucible in stating single crystal growing furnace main body, described crucible is arranged on stool, and stool lower end is provided with rotating shaft, described rotating shaft
Connecting crucible and rise rotating mechanism, described crucible is arranged in heater, is provided with insulating barrier outside described heater, described
Single crystal growing furnace main body upper end is provided with deck, and described deck connects draw-in groove, and described draw-in groove is arranged on the lower end of furnace chamber, described upper furnace chamber
Side, upper end is provided with inert gas interface, is provided with the rising at lifting rod, described lifting rod and upper furnace chamber top in described upper furnace chamber
Rotating mechanism connects, and described rising rotating mechanism is arranged on and turns feed liquid cylinder pressure front end, described in turn feed liquid cylinder pressure and be horizontally set on
In pedestal, being additionally provided with charging hydraulic cylinder in described top base, described charging hydraulic cylinder front end is provided with charging ladle, under described charging ladle
Holding and connect discharging gate by discharging control valve, described top base is arranged on lifting hydraulic cylinder upper end, and described lifting hydraulic cylinder is arranged
Lower end arranges in rotating base, and described rotating base is arranged in base by thrust bearing, and described rotating base lower end is provided with
Driven gear, the engagement of described driven gear connects rotating driving device, equipped with driving motor on described rotating driving device, described
Side, single crystal growing furnace main body upper end is provided with diameter control sensor, and described single crystal growing furnace body side is provided with control chamber and distribution box, institute
State control chamber connection diameter to control sensor, crucible rising rotating mechanism, rise rotating mechanism, discharging control valve, top base, liter
Descending liquid cylinder pressure, driving motor and distribution box, side, described single crystal growing furnace main body lower end is provided with air pump interface, described air pump interface
It is connected with the air pump on underframe.
As further program of the utility model: described stool is provided with the crucible groove matched with crucible.
As further program of the utility model: described single crystal growing furnace main body lower end is provided with rotating shaft passage.
As further program of the utility model: described heater is electric heating device, described heater is arranged on
On the electrode of lower end, described electrode connects distribution box.
As further program of the utility model: described control chamber is provided with control panel, and described control panel sets
There is control knob.
As this utility model further scheme:
Compared with prior art, the beneficial effects of the utility model are: this utility model novel structure, turn material, discharging and
Feed convenient and swift, it is possible to realize centralization and control management, Electrical Safety, it is achieved monitor in real time, improve product quality, also enter
One step improves production efficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of new electronic control integration single crystal growing furnace.
In figure: bleed steel pipe, 3-insulating barrier, 4-crucible, 5-monocrystal silicon, 6-diameter control sensor, 7-of 1-underframe, 2-is lazy
Property gas interface, 8-rise rotating mechanism, the upper furnace chamber of 9-, 10-lifting rod, 11-isolating valve, 12-seed crystal, 13-single crystal growing furnace main body,
14-heater, 15-air pump interface, 16-stool, 17-rotating shaft, 18-rotating shaft passage, 19-sealing device, 20-bleed
Pump, 21-crucible rise rotating mechanism, 22-deck, 23-draw-in groove, 24-mattess, 25-discharging gate, 26-discharging control valve,
27-charging ladle, 28-charging hydraulic cylinder, 29-bracing frame, 30-top base, 31-turn feed liquid cylinder pressure, 32-lifting hydraulic cylinder, 33-machine
Frame, 34-base, 35-drive motor, 36-rotating driving device, 37-thrust bearing, 38-driven gear, 39-rotating base,
40-control chamber, 41-distribution box.
Detailed description of the invention
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
Referring to figure, in this utility model embodiment, including single crystal growing furnace main body 13, single crystal growing furnace main body 13 is arranged on underframe 1
On, it being provided with crucible 4 in single crystal growing furnace main body 13, crucible 4 is arranged on stool 16, and stool 16 lower end is provided with rotating shaft 17,
Rotating shaft 17 connects crucible and rises rotating mechanism 21, and crucible 4 is arranged in heater 14, and heater 14 is outside is provided with insulating barrier
3, single crystal growing furnace main body 13 upper end is provided with deck 22, and deck 22 connects draw-in groove 23, and draw-in groove 23 is arranged on the lower end of furnace chamber 9, upper stove
Side, upper end, chamber 9 is provided with inert gas interface 7, is provided with lifting rod 10 in upper furnace chamber 9, and lifting rod 10 is upper with upper furnace chamber 9 top
Rising rotating mechanism 8 to connect, rising rotating mechanism 8 is arranged on and turns feed liquid cylinder pressure 31 front end, turns feed liquid cylinder pressure 31 and is horizontally set on
In pedestal 30, being additionally provided with charging hydraulic cylinder 28 in top base 30, charging hydraulic cylinder 28 front end is provided with charging ladle 27, charging ladle 27 times
End connects discharging gate 25 by discharging control valve 26, and top base 30 is arranged on lifting hydraulic cylinder 32 upper end, and lifting hydraulic cylinder 32 sets
Putting lower end and arrange in rotating base 39, rotating base 39 is arranged in base 34 by thrust bearing 37, rotating base 39 lower end
Being provided with driven gear 38, driven gear 38 engagement connects rotating driving device 36, equipped with driving motor on rotating driving device 36
35, side, single crystal growing furnace main body 13 upper end is provided with diameter control sensor 6, and single crystal growing furnace main body 13 side is provided with control chamber 40 and distribution
Case 41, control chamber 40 connection diameter controls sensor 6, crucible rises rotating mechanism 21, rise rotating mechanism 8, discharging control valve
26, top base 30, lifting hydraulic cylinder 32, driving motor 35 and distribution box 41, side, single crystal growing furnace main body 13 lower end is provided with air pump
Interface 15, air pump interface 15 is connected with the air pump 20 on underframe 1, and stool 16 is provided with the earthenware matched with crucible 4
Crucible groove, single crystal growing furnace main body 13 lower end is provided with rotating shaft passage 18, and heater 14 is electric heating device, and heater 14 is arranged on lower end
Electrode on, electrode connect distribution box 23, control chamber 2 is provided with control panel, and control panel is provided with control knob.
This utility model novel structure, by control chamber and the setting of distribution box, it is achieved centralization controls management, and electricity consumption is pacified
Entirely, convenient and swift, by the setting of isolating valve, greatly improve the quality of product, connect by inert gas interface and air pump
Mouth and the setting of air pump, in making stove, the moment is full of noble gas, meets working condition, improves production efficiency, passes through
The diameter control sensor arranged can hold the growth conditions of monocrystal silicon accurately, it is achieved monitors in real time, improves product matter
Amount, by the design of lifting hydraulic cylinder, it is achieved the elevating function of top base, by turning the design of feed liquid cylinder pressure, it is achieved rise rotation
The locomotive function of rotation mechanism, then by rotating base, driven gear and the design of rotating driving device, it is achieved the rotation of upper furnace chamber
Mobile working so that discharging and turn material are efficient and convenient, then by charging hydraulic cylinder and the design of charging ladle, it is achieved turning material or unloading
Realize charging function while material, also further increase production efficiency.
It is obvious to a person skilled in the art that this utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, it is possible to realize this practicality in other specific forms new
Type.Therefore, no matter from the point of view of which point, all should regard embodiment as exemplary, and be nonrestrictive, this practicality is new
The scope of type is limited by claims rather than described above, it is intended that by the containing of equivalency in claim that fall
All changes in justice and scope are included in this utility model.Should not be considered as any reference in claim limiting
Involved claim.
Although moreover, it will be appreciated that this specification is been described by according to embodiment, but the most each embodiment only wraps
Containing an independent technical scheme, this narrating mode of description is only that for clarity sake those skilled in the art should
Description can also be formed those skilled in the art through appropriately combined as an entirety, the technical scheme in each embodiment
May be appreciated other embodiments.
Claims (5)
1. a new electronic control integration single crystal growing furnace, including single crystal growing furnace main body, it is characterised in that described single crystal growing furnace main body is arranged on
On underframe, being provided with crucible in described single crystal growing furnace main body, described crucible is arranged on stool, and stool lower end is provided with and turns
Axle, described rotating shaft connects crucible and rises rotating mechanism, and described crucible is arranged in heater, is provided with outside described heater
Insulating barrier, described single crystal growing furnace main body upper end is provided with deck, and described deck connects draw-in groove, and described draw-in groove is arranged under furnace chamber
End, side, described upper furnace chamber upper end is provided with inert gas interface, is provided with lifting rod, described lifting rod and upper stove in described upper furnace chamber
The rising rotating mechanism of top of chamber connects, and described rising rotating mechanism is arranged on and turns feed liquid cylinder pressure front end, described in turn feed liquid cylinder pressure
Being horizontally set in top base, be additionally provided with charging hydraulic cylinder in described top base, described charging hydraulic cylinder front end is provided with charging ladle,
Described charging ladle lower end connects discharging gate by discharging control valve, and described top base is arranged on lifting hydraulic cylinder upper end, described liter
Descending liquid cylinder pressure arranges lower end and arranges in rotating base, and described rotating base is arranged in base by thrust bearing, described rotation
Base lower end is provided with driven gear, and the engagement of described driven gear connects rotating driving device, on described rotating driving device equipped with
Driving motor, side, described single crystal growing furnace main body upper end is provided with diameter control sensor, and described single crystal growing furnace body side is provided with control
Case and distribution box, described control chamber connection diameter controls sensor, crucible rises rotating mechanism, rise rotating mechanism, discharging control
Valve processed, top base, lifting hydraulic cylinder, driving motor and distribution box, side, described single crystal growing furnace main body lower end is provided with air pump interface,
Described air pump interface is connected with the air pump on underframe.
New electronic control integration single crystal growing furnace the most according to claim 1, it is characterised in that described stool be provided with
The crucible groove that crucible matches.
New electronic control integration single crystal growing furnace the most according to claim 1, it is characterised in that described single crystal growing furnace main body lower end sets
There is rotating shaft passage.
New electronic control integration single crystal growing furnace the most according to claim 1, it is characterised in that described heater is electric heating dress
Putting, described heater is arranged on the electrode of lower end, and described electrode connects distribution box.
New electronic control integration single crystal growing furnace the most according to claim 1, it is characterised in that described control chamber is provided with control
Panel, described control panel is provided with control knob.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620538125.4U CN205839188U (en) | 2016-06-06 | 2016-06-06 | A kind of new electronic control integration single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620538125.4U CN205839188U (en) | 2016-06-06 | 2016-06-06 | A kind of new electronic control integration single crystal growing furnace |
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| Publication Number | Publication Date |
|---|---|
| CN205839188U true CN205839188U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620538125.4U Expired - Fee Related CN205839188U (en) | 2016-06-06 | 2016-06-06 | A kind of new electronic control integration single crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110685011A (en) * | 2019-10-21 | 2020-01-14 | 大同新成新材料股份有限公司 | Intelligent processing equipment for producing single-product silicon thermal field crucible and processing method thereof |
-
2016
- 2016-06-06 CN CN201620538125.4U patent/CN205839188U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110685011A (en) * | 2019-10-21 | 2020-01-14 | 大同新成新材料股份有限公司 | Intelligent processing equipment for producing single-product silicon thermal field crucible and processing method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20180606 |
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| CF01 | Termination of patent right due to non-payment of annual fee |