CN205655982U - Transmission rate test system of lens - Google Patents
Transmission rate test system of lens Download PDFInfo
- Publication number
- CN205655982U CN205655982U CN201620273998.7U CN201620273998U CN205655982U CN 205655982 U CN205655982 U CN 205655982U CN 201620273998 U CN201620273998 U CN 201620273998U CN 205655982 U CN205655982 U CN 205655982U
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- diaphragm
- light
- test
- lens
- spectrum
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- 238000012360 testing method Methods 0.000 title claims abstract description 145
- 230000005540 biological transmission Effects 0.000 title claims abstract description 8
- 238000001228 spectrum Methods 0.000 claims abstract description 38
- 238000010183 spectrum analysis Methods 0.000 claims abstract description 16
- 230000005611 electricity Effects 0.000 claims abstract 2
- 238000002835 absorbance Methods 0.000 claims description 55
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 10
- 239000004744 fabric Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004313 glare Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The utility model relates to an optics field specifically provides a transmission rate test system of lens, the system is including test light generating device, diaphragm, diaphragm controlling means, total mark ball, spectrum testing arrangement and spectrometer, test light generating device be used for providing test light, the diaphragm set up in test light generating device with between the total mark ball, the diaphragm with it is surveyed lens to be used for placing between the total mark ball, the income unthreaded hole of total mark ball is located survey the focus position of lens, diaphragm controlling means is used for control the removal of diaphragm so that the test light transmission the logical unthreaded hole of diaphragm arrives survey lens preset position, spectrum testing arrangement set up in the play unthreaded hole orientation of total mark ball, it is right to be used for the output light of total mark ball carries out the spectrum test, spectrometer with spectrum testing arrangement electricity is connected, and it is right to be used for the spectrum that spectrum testing arrangement obtained carries out spectral analysis.
Description
Technical field
This utility model relates to optical field, in particular to the absorbance of a kind of lens
Test system.
Background technology
Measured lens is a kind of element being widely used in all kinds of optical system, and its absorbance is divided
Cloth is related to image quality and the energy transfer efficiency of optical system.Existing measured lens is saturating
Penetrate the measurement system of rate, all can only test the absorbance at measured lens optical axis, it is impossible to know
The absorbance of each diverse location of measured lens, the most this absorbance cannot be the most anti-
Reflect the overall condition of the absorbance of measured lens.
Utility model content
In view of this, this utility model provides the absorbance test system of a kind of lens, with
Improve the problem that can only test the absorbance at measured lens optical axis in prior art.
For achieving the above object, the following technical scheme of this utility model offer:
A kind of lens absorbance test system, described system include test light generating apparatus,
Diaphragm, diaphragm control device, integrating sphere, spectrum test device and spectral analysis device,
Described test light generating apparatus is used for providing test light, described diaphragm to be arranged at described test light
Between generating means and described integrating sphere, it is used for placing between described diaphragm and described integrating sphere
Measured lens, the incidence hole of described integrating sphere is positioned at the focal position of described measured lens, institute
State diaphragm and control device for controlling the movement of described diaphragm so that described in described test light transmission
The light hole of diaphragm is to described measured lens precalculated position, and described spectrum test device is arranged at
The light hole direction of described integrating sphere, for carrying out spectrum survey to the output light of described integrating sphere
Examination, described spectral analysis device electrically connects with described spectrum test device, for described light
The spectrum that spectrum test device obtains carries out spectrum analysis.
Preferably, in the absorbance test system of said lens, described spectrum test device bag
Include the spectrophotometer of transmitance for testing described measured lens.This spectrophotometer can
The corresponding of this measured lens is obtained with the direct light according to test baseline and through measured lens
The absorbance in precalculated position, simple and convenient.
Preferably, in the absorbance test system of said lens, described diaphragm is rectangle, institute
The light hole stating diaphragm is rectangle.The light hole of rectangle is in moving process, it is ensured that move
The most closely linking between the precalculated position that dynamic each two is adjacent, so that this test system can
By mobile diaphragm, to test the absorbance in the different precalculated position of whole measured lens.
Preferably, in the absorbance test system of said lens, the minor face of described diaphragm is long
Twice more than the diameter of described measured lens.So that when the logical light sky of diaphragm corresponds to lens
Edge time do not have veiling glare and enter from this edge of lens another edge rightabout
Enter.
Preferably, in the absorbance test system of said lens, the light hole of described diaphragm is
Square, the side size range of described light hole is 0.1mm to 10mm.
Preferably, in the absorbance test system of said lens, described test light is many for including
The light of individual wavelength.Make this system can test measured lens absorbance at different wavelengths to divide
Cloth.
Preferably, in the absorbance test system of said lens, described test light is directional light.
Preferably, in the absorbance test system of said lens, the surface configuration of described diaphragm
There is black coating.Black coating can reduce the diffuse-reflectance impact on test result of light.
Preferably, in the absorbance test system of said lens, described diaphragm controls device bag
Including control unit and mobile unit, described control unit electrically connects with described mobile unit,
Described mobile unit is for described diaphragm mobile under the control of described control unit.
Preferably, in the absorbance test system of said lens, described mobile unit includes step
Entering motor and driving member, described motor is for driving described light by described driving member
Door screen is mobile.
The beneficial effect that this utility model realizes: the lens that this utility model embodiment provides
Absorbance test system, can control device by diaphragm and control the movement of diaphragm, so that surveying
Examination light arrives the precalculated position of measured lens, by the light that this precalculated position projects away
The analysis of spectrogram, can obtain the absorbance in this precalculated position.Due to precalculated position according to
Need to arrange, i.e. can move diaphragm as required so that test light arrives measured lens not
Co-located, therefore can test the absorbance of the diverse location of measured lens, such that it is able to very
Reflect the overall condition of the absorbance of this measured lens on the spot.
Accompanying drawing explanation
For clearer explanation this utility model embodiment or technical side of the prior art
Case, will make simple to the accompanying drawing used required in embodiment or description of the prior art below
Introduce, it should be apparent that, the accompanying drawing in describing below is only realities more of the present utility model
Execute example, for those of ordinary skill in the art, in the premise not paying creative work
Under, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 shows that this utility model first embodiment provides the absorbance test system of lens
The structural representation of a kind of embodiment；
Fig. 2 shows the structural representation of the diaphragm that this utility model first embodiment provides；
Fig. 3 shows the absorbance test system of the lens that this utility model first embodiment provides
The structural representation of the another embodiment of system.
Wherein, reference is summarized as follows:
Test light generating apparatus 110, diaphragm 120, diaphragm controls device 121, control unit
122, mobile unit 123, light hole 124, integrating sphere 130, integrating sphere 130 enter light
Hole 131, the light hole 132 of integrating sphere 130, spectrum test device 140, spectrum analysis fills
Put 150, measuring and calculation machine 160, measured lens 100.
Detailed description of the invention
The absorbance of measured lens is distributed in image quality and the energy transfer efficiency of optical system
Closely related, but the test system of the existing absorbance to measured lens, can only test
Absorbance at measured lens optical axis, it is impossible to test the absorbance of other different parts, thus
The absorbance distribution situation of whole measured lens can not be known.
In view of the foregoing, utility model people, through long-term research and substantial amounts of practice, carries
Supply the absorbance test system of a kind of lens to improve existing issue.The absorbance of these lens
In test system, test light arrives measured lens by the light hole of diaphragm, by controlling light
The position of the light hole correspondence measured lens of door screen, the transmission at the position that test measured lens is different
Rate, simple in construction, application is convenient.
Below in conjunction with accompanying drawing in this utility model embodiment, in this utility model embodiment
Technical scheme be clearly and completely described, it is clear that described embodiment be only
The a part of embodiment of this utility model rather than whole embodiments.Below in the accompanying drawings
The detailed description of the embodiment of the present utility model provided is not intended to limit claimed basis
The scope of utility model, but it is merely representative of selected embodiment of the present utility model.Based on this
The embodiment of utility model, those skilled in the art are not making the premise of creative work
Lower obtained every other embodiment, broadly falls into the scope of this utility model protection.
Fig. 1 shows the absorbance test system of the lens that this utility model embodiment provides,
This test system is used for testing the absorbance of measured lens, and, it is mainly used in testing convex lens
The absorbance of mirror.As it is shown in figure 1, this system includes testing light generating apparatus 110, diaphragm
120, diaphragm controls device 121, integrating sphere 130, spectrum test device 140 and spectrum
Analytical equipment 150.
Wherein, test light generating apparatus 110 is used for providing test light, concrete, this test
The test light that light generating apparatus 110 provides is directional light.Test light generating apparatus 110 is permissible
It is provided with light source, and is to meet the test light required by the optical processing that light source produces.
Diaphragm 120 is the device for confine optical beam outgoing, including the outgoing position of confine optical beam
Put.In the present embodiment, diaphragm 120 is arranged at test light generating apparatus 110 and integrating sphere
Between 130, the exit direction of the test light that test light generating apparatus 110 provides is towards diaphragm
120, i.e. the test light from test light generating apparatus 110 outgoing is irradiated to diaphragm 120, Fig. 1
In to be positioned at the dotted line of diaphragm 120 both sides be the schematic representations to test light.In the present embodiment,
Diaphragm 120 includes lightproof area and light hole 124, and partial test light is blocked region and hides
Gear, partial test light passes through light hole 124, i.e. the test light of light hole 124 correspondence
Light hole 124.Further, in this embodiment, it is used between diaphragm 120 and integrating sphere 130
Placing measured lens 100, the incidence hole 131 of integrating sphere 130 is positioned at measured lens 100
Focal position, arrives measured lens and through measured lens from the light hole 124 of diaphragm 120
Test light enter this integrating sphere 130.Test light generating apparatus 110, diaphragm 120, tested
Lens 100 and integrating sphere 130 set gradually in the same direction.
Further, in the present embodiment, the light hole 124 of this diaphragm 120 is rectangle,
It is, of course, preferable to, as in figure 2 it is shown, the light hole 124 of diaphragm 120 is square.And
And, the length of side of light hole 124, less than the diameter of measured lens, determines according to actual needs,
Preferably, the scope of length of side w of light hole 124 can be 0.1mm to 10mm.
It addition, the outward flange of the lightproof area of this diaphragm 120 is rectangle, it is preferred that such as figure
Shown in 2, the outward flange of the lightproof area of diaphragm 120 can be square, in fig. 2,
Dash area represents lightproof area.Further, further, the outward flange of this lightproof area
The long L of minor face more than the twice of diameter of measured lens 100, to avoid when light hole 124
There is veiling glare from other edges through measured lens during the marginal position of corresponding measured lens 100
100。
Further, in the present embodiment, the surface configuration of diaphragm 120 has black coating,
This black coating can reduce the diffuse-reflectance impact on measurement result of light.
In the absorbance test system of the lens of the present embodiment offer, diaphragm controls device
121 for controlling the movement of diaphragm 120, concrete, and diaphragm controls device 121 and can wrap
Include control unit 122 and mobile unit 123, control unit 122 and mobile unit 123
Having signal annexation, this signal annexation can be wired connection, it is also possible to be nothing
Line connects, and mobile unit 123 is for this diaphragm mobile under the control of control unit 122
120.The shift position of diaphragm 120 is mainly the measured lens according to light hole 124 correspondence
Position determines, i.e. by mobile diaphragm 120, can make the logical of test light transmission diaphragm 120
Unthreaded hole 124 is to the precalculated position of measured lens 100.
Further, in the present embodiment, mobile unit 123 can include motor with
And driving member, described motor is for driving described diaphragm to move by described driving member.
I.e. driving member is connected with the rotating shaft of motor, and control unit 122 controls motor
Axis of rotation, the rotating shaft that motor rotates drives the action of driving member, so that diaphragm is sent out
Raw mobile.It should be understood that the quantity of motor is not intended as limiting, can effectively control
Diaphragm processed moves at the different directions meeting demand and is advisable.
Further, in the present embodiment, spectrum test device 140 is arranged at integrating sphere 130
The light direction of light hole 132, the light entered from the incidence hole 131 of integrating sphere 130 is amassing
Multiple reflections in bulb separation 130, forms uniform illumination, from going out of integrating sphere 130 on inwall
The light of unthreaded hole 132 output enters spectrum test device 140, as it is shown in figure 1, in FIG,
Arrow between integrating sphere 130 and spectrum test device 140 represents the direction of propagation of light.Should
Spectrum test device 140 carries out spectrum test to the output light of integrating sphere 130, and, light
Analysis of spectrum device 150 electrically connects with spectrum test device 140, for described spectrum test
The spectrum that device 140 obtains carries out spectrum analysis.Certainly, in the present system, place tested
Before lens, first pass through a branch of test light to integrating sphere from the light hole 124 of diaphragm 120
130, so that spectrum test device 140 is tested for the test light through measured lens 100,
Acquisition can be as the spectrogram of absorbance test baseline.
Concrete, this spectrum test device 140 can be general spectrogrph, to integrating sphere
The output light of 130 carries out test and obtains the corresponding spectrogram exporting light, spectral analysis device
150 pairs of spectrum are analyzed, according to test baseline and through measured lens 100 pre-determined bit
The spectrogram of the test light put, it is thus achieved that the absorbance of predetermined test position record.It addition,
In the present embodiment, it is provided that test light can be the monochromatic light of only one of which wavelength, it is possible to
To be the light including multiple wavelength.When testing the light that light is multiple wavelength, spectrum analysis fills
Put the 150 precalculated position absorbancies at different wavelengths simultaneously obtaining measured lens 100 to divide
Cloth also carries out record.
In the another embodiment that the present embodiment provides, spectrum test device 140 also may be used
To be the spectrophotometer that can be directly used for testing the transmitance of this measured lens 100.This point
Light photometer is after obtaining test baseline, according to test baseline and through measured lens 100
The light in precalculated position obtains the absorbance in this precalculated position.Spectral analysis device 150 is pre-to this
The absorbance that location is put carries out record, and, when test light is the light with multiple wavelength,
During such as white light, precalculated position absorbance at different wavelengths is divided by spectral analysis device 150
Cloth is analyzed and record.
It addition, in a kind of detailed description of the invention of this utility model embodiment, such as Fig. 3 institute
Showing, diaphragm control device 121 and spectral analysis device 150 can be integrated into one can be real
The control of existing diaphragm 120 and the measuring and calculation machine 160 of spectrum analysis, its detailed description of the invention
It is not intended as in the present embodiment limiting.
When the absorbance test system of the lens using this utility model embodiment to provide, first
First, putting into measured lens 100, diaphragm control device 121 moves diaphragm 120 makes test light
Integrating sphere 130 is entered, with from integrating sphere 130 by the light hole 124 of this diaphragm 120
Light hole 132 output not through measured lens 100 test light as spectrum test fill
Put the input light source of 140, it is thus achieved that spectrogram.Tested using this spectrogram as being used for obtaining
The test baseline of the absorbance of mirror 100.
After the test baseline obtaining test light, measured lens is placed into integrating sphere 130 with
The position for placing measured lens 100 between diaphragm 120, and regulate measured lens
The spatial attitude of 100, makes this measured lens 100 be exactly perpendicularly to test light, and, make
The focus of measured lens 100 is positioned at the incidence hole 131 of integrating sphere 130.Filled by control
Put mobile diaphragm 120, make the light hole 124 of diaphragm 120 correspond to measured lens 100
Precalculated position, so that the test light through light hole 124 is irradiated to the pre-of measured lens 100
Location is put, and enters integrating sphere 130 through precalculated position, thus at spectrum test device 140
Obtain the test spectral figure in this precalculated position.Certainly, precalculated position can include multiple, light
Door screen control device 121, according to actual testing requirement, moves diaphragm 120 successively, makes diaphragm 120
The different precalculated position of the corresponding measured lens of light hole 124, different predetermined to test
The absorbance of position.
Spectral analysis device is according to test baseline and the test spectral figure in precalculated position, it is thus achieved that
The absorbance of the measured position of measured lens.
It addition, when testing light and being the light including multiple wavelength, by analyzing, it is possible to obtain
The absorbance distribution of this measured lens 100 under each wavelength.
In sum, the absorbance test system of the lens that this utility model embodiment provides,
Determine that test light irradiates the position of measured lens by mobile diaphragm, lead to light testing light transmission
The position of the measured lens that hole is irradiated as the precalculated position of measured lens to test this pre-determined bit
The absorbance put, the position that diaphragm moves is different, the precalculated position change that light hole is corresponding,
Such that it is able to the absorbance of the diverse location of test measured lens.Further, tested by selection
The difference of light, can so that light that test light is Single wavelength or there is the light of multiple wavelength,
It is hereby achieved that the absorbance distribution that measured lens is at different wavelengths.This system can obtain
To the absorbance of the diverse location of measured lens, and simple in construction, easy to use, test standard
Really.
For making the purpose of this utility model embodiment, technical scheme and advantage clearer, on
Face combines the accompanying drawing in this utility model embodiment, to the technology in this utility model embodiment
Scheme has carried out clearly and completely describing, it is clear that described embodiment is that this practicality is new
The a part of embodiment of type rather than whole embodiments.Generally described in the accompanying drawing herein and
The assembly of this utility model embodiment illustrated can be arranged with various different configurations and set
Meter.
Therefore, the detailed description of the above embodiment of the present utility model to providing in the accompanying drawings
It is not intended to limit claimed scope of the present utility model, but is merely representative of this practicality
Novel selected embodiment.Based on the embodiment in this utility model, ordinary skill
The every other embodiment that personnel are obtained under not making creative work premise, all belongs to
Scope in this utility model protection.
It should also be noted that similar label and letter represent similar terms in following accompanying drawing, because of
This, be defined in the most a certain Xiang Yi accompanying drawing, then it is right to need not in accompanying drawing subsequently
It defines further and explains.
In description of the present utility model, it should be noted that term " " center ", " on ",
The orientation of the instruction such as D score, "left", "right", " vertically ", " level ", " interior ", " outward "
Or position relationship is based on orientation shown in the drawings or position relationship, or this utility model
The orientation usually put during product use or position relationship, be for only for ease of this practicality of description
Novel and simplification describes rather than indicates or imply that the device of indication or element must have spy
Fixed orientation, with specific azimuth configuration and operation, therefore it is not intended that new to this practicality
The restriction of type.Additionally, term " first ", " second ", " the 3rd " etc. are only used for differentiation and retouch
State, and it is not intended that indicate or hint relative importance.
In description of the present utility model, in addition it is also necessary to explanation, unless otherwise clear and definite rule
Fixed and limit, term " is arranged ", " installation ", " being connected ", " connection " should be interpreted broadly,
Connect for example, it may be fixing, it is also possible to be to removably connect, or be integrally connected；Can
To be mechanical connection, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible in by
Between medium be indirectly connected to, can be the connection of two element internals.Common for this area
For technical staff, concrete in this utility model of above-mentioned term can be understood with concrete condition
Implication.
Claims (10)
1. the absorbance test system of lens, it is characterised in that described system includes
Test light generating apparatus, diaphragm, diaphragm control device, integrating sphere, spectrum test device with
And spectral analysis device, described test light generating apparatus is used for providing test light, described diaphragm
Being arranged between described test light generating apparatus and described integrating sphere, described diaphragm is long-pending with described
Being used for placing measured lens between bulb separation, the incidence hole of described integrating sphere is positioned at described tested
The focal position of mirror, described diaphragm controls device for controlling the movement of described diaphragm so that institute
State the light hole of diaphragm described in test light transmission to described measured lens precalculated position, described light
Spectrum test device is arranged at the light hole direction of described integrating sphere, for described integrating sphere
Output light carries out spectrum test, and described spectral analysis device is electrically connected with described spectrum test device
Connect, carry out spectrum analysis for the spectrum that described spectrum test device is obtained.
System the most according to claim 1, it is characterised in that described spectrum test
Device includes the spectrophotometer of the transmitance for testing described measured lens.
System the most according to claim 1, it is characterised in that described diaphragm is square
Shape, the light hole of described diaphragm is rectangle.
System the most according to claim 3, it is characterised in that described diaphragm is
Minor face length is more than the twice of the diameter of described measured lens.
System the most according to claim 3, it is characterised in that leading to of described diaphragm
Unthreaded hole is square, and the side size range of described light hole is 0.1mm to 10mm.
System the most according to claim 1, it is characterised in that described test light is
Light including multiple wavelength.
System the most according to claim 1, it is characterised in that described test light is
Directional light.
System the most according to claim 1, it is characterised in that the table of described diaphragm
Face is provided with black coating.
System the most according to claim 1, it is characterised in that described diaphragm controls
Device includes control unit and mobile unit, described control unit and described mobile unit electricity
Connecting, described mobile unit is for described diaphragm mobile under the control of described control unit.
System the most according to claim 9, it is characterised in that described mobile unit
Including motor and driving member, described motor is for driving by described driving member
Described diaphragm moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620273998.7U CN205655982U (en) | 2016-04-05 | 2016-04-05 | Transmission rate test system of lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620273998.7U CN205655982U (en) | 2016-04-05 | 2016-04-05 | Transmission rate test system of lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205655982U true CN205655982U (en) | 2016-10-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620273998.7U Withdrawn - After Issue CN205655982U (en) | 2016-04-05 | 2016-04-05 | Transmission rate test system of lens |
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| CN (1) | CN205655982U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628346A (en) * | 2016-04-05 | 2016-06-01 | 中国工程物理研究院激光聚变研究中心 | Lens transmittance test system and method |
| CN109856071A (en) * | 2019-03-11 | 2019-06-07 | 西北核技术研究所 | A kind of spectrum on line diagnostic method and device |
| CN109781671B (en) * | 2019-03-11 | 2021-11-05 | 西北核技术研究所 | Transmission rate on-line test method and device |
| CN114355616A (en) * | 2022-01-14 | 2022-04-15 | 中国工程物理研究院激光聚变研究中心 | Shape-preserving sharp-edge flat-top femtosecond laser shaping method and device for deep groove micromachining |
-
2016
- 2016-04-05 CN CN201620273998.7U patent/CN205655982U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628346A (en) * | 2016-04-05 | 2016-06-01 | 中国工程物理研究院激光聚变研究中心 | Lens transmittance test system and method |
| CN105628346B (en) * | 2016-04-05 | 2019-05-21 | 中国工程物理研究院激光聚变研究中心 | The transmissivity test macro and method of lens |
| CN109856071A (en) * | 2019-03-11 | 2019-06-07 | 西北核技术研究所 | A kind of spectrum on line diagnostic method and device |
| CN109781671B (en) * | 2019-03-11 | 2021-11-05 | 西北核技术研究所 | Transmission rate on-line test method and device |
| CN114355616A (en) * | 2022-01-14 | 2022-04-15 | 中国工程物理研究院激光聚变研究中心 | Shape-preserving sharp-edge flat-top femtosecond laser shaping method and device for deep groove micromachining |
| CN114355616B (en) * | 2022-01-14 | 2023-09-19 | 中国工程物理研究院激光聚变研究中心 | Shape-preserving sharp edge flat top femtosecond laser shaping method and device for deep groove micromachining |
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