CN109238969A - A kind of low-temperature photoluminescence rapidly and efficiently test method - Google Patents
A kind of low-temperature photoluminescence rapidly and efficiently test method Download PDFInfo
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- CN109238969A CN109238969A CN201811240971.8A CN201811240971A CN109238969A CN 109238969 A CN109238969 A CN 109238969A CN 201811240971 A CN201811240971 A CN 201811240971A CN 109238969 A CN109238969 A CN 109238969A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract
The invention belongs to photoelectric device the field of test technology, it is related to a kind of low-temperature photoluminescence rapidly and efficiently test method, device involved in this method is by sample room, low temperature micro machine, sample to be tested, specimen holder, convex lens, optical filter, monochromator, incident laser, luminescence generated by light, reflection laser and detector composition, pass through the low temperature micro-motor power supply switch and velocity of rotation control circuit of connection, rotate the specimen holder in cryogenic sample room, incident laser is allowed to beat on any one sample to be tested, in this way, the luminescence generated by light optical path that can not only guarantee that each sample to be tested issues is identical, and multiple samples only can be tested by once cooling, measuring accuracy and test speed greatly improve.The present invention have the characteristics that structure it is simple, it is high-efficient, save the testing time.
Description
Technical field
The invention belongs to Experiments of Optics equipment, it is related to a kind of low-temperature photoluminescence rapidly and efficiently test method.
Background technique
Luminescence generated by light test is one of the important means of determining semiconductor material devices optical property, can provide material forbidden band
The important parameters such as width and component.Semiconductor material low-temperature photoluminescence spectra then provides sample more physical parameters.Therefore,
Low-temperature photoluminescence is the research common analysis method of semiconductor material.
Since system cooling and heating-up time are longer (general 3-4 hour), in order to improve testing efficiency, generally in sample
Multiple samples are put on frame, by adjusting the optical path of incident laser after system temperature is stablized, are tested at the same temperature different
Sample.However, since specimen holder is fixed in sample room multiple samples can only be tested by changing optical path.But incidence is swashed
Light is moved on another sample from a sample, changes entire optical path, difference sample tests can not obtained from
Than influencing the accuracy of experimental result.The conventional method for solving this problem is that one is once only put on specimen holder center
A sample carries out low-temperature test, has surveyed system heating replacement sample after a sample, then cool down and tested, has so recycled.In this way
Although can guarantee the consistency of the test condition of each sample, the testing time is elongated.If there are many test sample, need
Testing time is very very long, and experiment progress is very slow.
Summary of the invention
It is an object of the present invention to which providing has the characteristics that easy to operate, high-efficient one kind is low to solve existing issue
Warm luminescence generated by light rapidly and efficiently test method, device involved in this method is by sample room, low temperature micro machine, sample to be tested, sample
Product frame, convex lens, optical filter, monochromator, incident laser, luminescence generated by light, reflection laser and detector composition, pass through the low of connection
Warm micro-motor power supply switch and velocity of rotation control circuit, rotate the specimen holder in cryogenic sample room, incident laser are allowed to beat
On any one sample to be tested, in this way, the luminescence generated by light optical path that can not only guarantee that each sample to be tested issues is identical, and
And multiple samples only can be tested by once cooling, measuring accuracy and test speed greatly improve.The present invention has structure letter
It is single, high-efficient, save the testing time the features such as.
A kind of low-temperature photoluminescence of the present invention rapidly and efficiently test method, device involved in this method is by sample
Room, low temperature micro machine, motor base, sample to be tested, specimen holder, convex lens, optical filter, monochromator and detector composition, low temperature
Micro machine (1) is mounted on motor base (2), installs circular sample frame (3) in low temperature micro machine (1) shaft, specimen holder (3)
Surface fix several equidistant samples to be tested (4), then motor base (2) is mounted on cryostate systems sample room
(5) on the sample stage in, the bottom of sample room (5) is incident window (6), and the side of sample room (5) is exit window (7), low
The power supply line of warm micro machine (1) draws sample room (5) outside by vacuum feedthroughs, places in the inlet of monochromator (13)
Optical filter (12), the outlet of monochromator (13) are detector (14), set between sample room (5) and monochromator (13) there are two convex lens
Mirror (11), concrete operations follow these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested (4) are equidistant on specimen holder (3)；
C, adjustment optical path makes incident laser (8) and the reflection laser (9) through the reflection of a sample to be tested pass through low temperature perseverance
Sample room (5), incident window (6) and exit window (7) center line of transformer system, it is ensured that incident laser (8) and reflection laser
(9) beam heights are consistent with two convex lens (11) center lines and monochromator (13) entrance center height；
D, cryostate systems are carried out being cooled to 300K-70K, after reaching test temperature, waits make to reach within five minutes
Optical filter (12) are placed in stable state, monochromator (13) inlet；
E, beat incident laser (8) on a sample to be tested (4), the luminescence generated by light issued from sample to be tested (4)
(10) by focusing on monochromator (13) inlet after two convex lenses (11), enter monochromator (13) by optical filter (12),
And the detector (14) by being connected to monochromator (13) outlet receives；
F, after first sample test, beat incident laser (8) by low temperature micro machine (1) Rotary Specimen Rack (3)
On next sample to be tested (4), step e is repeated, until all samples to be tested (4) are completed.
A kind of low-temperature photoluminescence of the present invention rapidly and efficiently test method, the working principle in this method are as follows:
It is mounted in low temperature micro machine (1) shaft after fixing several samples to be tested (4) around specimen holder (3), low temperature micro machine (1) is solid
It is scheduled on motor base (2), then motor base (2) is mounted on the sample stage in cryostate systems sample room (5), sample
Ensure leakproofness in product room (5), then cool down, revolves specimen holder (3) by low temperature micro machine (1) after reaching test temperature
Turn, allows incident laser (8) just to beat on a sample to be tested (4), which is tested, is completed and rotates sample again
Frame (3) allows incident laser (8) to beat on next sample to be tested (4), tests the sample, so recycles, until having surveyed
All samples.In entire test process, the optical path of incident laser (8) does not change, so that it is guaranteed that the photic hair that sample issues
Light optical path is identical to each sample to be tested (4).
Detailed description of the invention
Fig. 1 is low temperature micro machine of the present invention and specimen holder main view；
Fig. 2 is low temperature micro machine of the present invention and specimen holder right side view；
Fig. 3 is low temperature micro machine of the present invention and specimen holder top view；
Fig. 4 is luminescence generated by light test method light path schematic diagram of the present invention.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings, and provides embodiment:
Embodiment 1
A kind of low-temperature photoluminescence of the present invention rapidly and efficiently test method, device involved in this method is by sample
Room, low temperature micro machine, motor base, sample to be tested, specimen holder, convex lens, optical filter, monochromator, incident laser, photic hair
As shown in attached drawing 1, Fig. 2, Fig. 3 and Fig. 4, low temperature micro machine 1 is mounted on motor base 2 for light, reflection laser and detector composition,
Circular sample frame 3 is installed in 1 shaft of low temperature micro machine, several equidistant samples to be tested 4 are fixed on the surface of specimen holder 3,
Motor base 2 is mounted on the sample stage in cryostate systems sample room 5 again, the bottom of sample room 5 is incident window
6, the side of sample room 5 is exit window 7, and the power supply line of low temperature micro machine 1 draws sample room 5 by vacuum feedthroughs
Outside, optical filter 12 is placed in the inlet of monochromator 13, the outlet of monochromator 13 is detector 14, sample room 5 and monochromator 13
Between set there are two convex lens 11, concrete operations follow these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 300K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 2
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 200K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 3
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 100K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 4
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 70K, after reaching test temperature, waits make to reach stable shape within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 5
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 250K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 6
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 150K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
Embodiment 7
Device involved in the present embodiment carries out concrete operations according to embodiment 1 and follows these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested 4 are equidistant on specimen holder 3；
C, adjustment optical path makes incident laser 8 and the reflection laser 9 reflected through a sample to be tested pass through cryostat
7 center line of sample room 5, incident window 6 and exit window of system, it is ensured that incident laser 8 and 9 beam heights of reflection laser and two
A 11 center line of convex lens and monochromator 13 entrance center height are consistent；
D, cryostate systems are carried out being cooled to 80K, after reaching test temperature, waits make to reach stable shape within five minutes
Optical filter 12 is placed in state, 13 inlet of monochromator；
E, beat incident laser 8 on a sample to be tested 4, the luminescence generated by light 10 issued from sample to be tested 4 passes through two
13 inlet of monochromator is focused on after a convex lens 11, enters monochromator 13 by optical filter 12, and by being connected to monochromator 13
The detector 14 of outlet receives；
F, after first sample test, beat incident laser 8 next by 1 Rotary Specimen Rack 3 of low temperature micro machine
On a sample to be tested 4, step e is repeated, until all samples to be tested 4 are completed；
As shown in Figure 4: the power supply line of low temperature micro machine 1 draws 5 outside of sample room by vacuum feedthroughs, by outer
1 power switch of low temperature micro machine and velocity of rotation control circuit of portion's connection, rotate the specimen holder 3 in low temperature sample room 5, allow
Incident laser 8 is beaten on any one sample to be tested 4, in this way, it is photic not only to guarantee that each sample to be tested 4 issues
The optical path that shines is identical, and only can test multiple samples by once cooling, and measuring accuracy and test speed greatly improve, filter
Mating plate 12 is long pass filter, and filter wavelength has to be larger than 8 wavelength of incident laser, and 14 operating wavelength range of detector is by photic
10 wavelength that shine determine.
When using this method, the temperature range of low-temperature photoluminescence test depends on the operating temperature model of low temperature micro machine 1
It encloses.1 minimum operating temperature of low temperature electric machine that can be bought currently on the market is at minus 200 degree or so, therefore low-temperature photoluminescence is tested
Middle can be about 70K using the minimum temperature of this method.
Claims (1)
1. a kind of low-temperature photoluminescence rapidly and efficiently test method, it is characterised in that: device involved in this method be by sample room,
It is low temperature micro machine, motor base, sample to be tested, specimen holder, convex lens, optical filter, monochromator, incident laser, luminescence generated by light, anti-
Laser and detector composition are penetrated, low temperature micro machine (1) is mounted on motor base (2), installs in low temperature micro machine (1) shaft
Circular sample frame (3), several equidistant samples to be tested (4) are fixed on the surface of specimen holder (3), then motor base (2) are pacified
On the sample stage in cryostate systems sample room (5), the bottom of sample room (5) is incident window (6), sample room
(5) side is exit window (7), and the power supply line of low temperature micro machine (1) draws sample room (5) by vacuum feedthroughs
Outside, optical filter (12) are placed in the inlet of monochromator (13), the outlet of monochromator (13) is detector (14), sample room (5)
It is set between monochromator (13) there are two convex lens (11), concrete operations follow these steps to carry out:
A, using normalized optical luminescence generated by light test macro；
B, it is fixed on several samples to be tested (4) are equidistant on specimen holder (3)；
C, adjustment optical path makes incident laser (8) and the reflection laser (9) reflected through a sample to be tested pass through cryostat
Sample room (5), incident window (6) and exit window (7) center line of system, it is ensured that incident laser (8) and reflection laser (9) light
Shu Gaodu is consistent with two convex lens (11) center lines and monochromator (13) entrance center height；
D, cryostate systems are carried out being cooled to 300K-70K, after reaching test temperature, waits make to reach stable within five minutes
Optical filter (12) are placed in state, monochromator (13) inlet；
E, beat incident laser (8) on a sample to be tested (4), the luminescence generated by light (10) issued from sample to be tested (4) is logical
Monochromator (13) inlet is focused on after crossing two convex lenses (11), enters monochromator (13) by optical filter (12), and by even
The detector (14) in monochromator (13) outlet is connect to receive；
F, after first sample test, beat incident laser (8) under by low temperature micro machine (1) Rotary Specimen Rack (3)
On one sample to be tested (4), step e is repeated, until all samples to be tested (4) are completed.
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| CN112014359A (en) * | 2020-08-27 | 2020-12-01 | 中国电子科技集团公司第十一研究所 | Indium-arsenic-antimony component determination method and device |
| CN115452217A (en) * | 2022-10-19 | 2022-12-09 | 江苏华兴激光科技有限公司 | Semiconductor surface stress distribution detection device and detection method thereof |
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