CN205635859U - A bleed valve for single crystal growing furnace - Google Patents
A bleed valve for single crystal growing furnace Download PDFInfo
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- CN205635859U CN205635859U CN201620204422.5U CN201620204422U CN205635859U CN 205635859 U CN205635859 U CN 205635859U CN 201620204422 U CN201620204422 U CN 201620204422U CN 205635859 U CN205635859 U CN 205635859U
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- valve
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- spool
- single crystal
- crystal growing
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Abstract
The utility model relates to a bleed valve for single crystal growing furnace, including valve cartridge, valve gap, disk seat, case and pretightning force adjusting device, the valve gap install on valve cartridge's left end, the disk seat install in valve cartridge's right -hand member, the center department of disk seat seted up the venthole, case swing joint in valve cartridge, the case be the hemisphere valve head, the spherical face of case just sit the valve, the case pass through spring and valve gap and link to each other, the case block up the venthole department at the disk seat under the effect of spring to realize sealed effect, pretightning force adjusting device set up between spring and valve gap. This design is adjusted the pretightning force of spring through pretightning force adjusting device to realize the level pressure gassing, increased its practicality.
Description
Technical field
This utility model relates to single crystal growing furnace technical field, a kind of vent valve for single crystal growing furnace.
Background technology
Single crystal growing furnace is a kind of in noble gas (nitrogen, helium are main) environment, will be many with graphite heater
The polycrystalline material fusings such as crystal silicon, with the equipment of Grown by CZ Method dislocation-free monocrystalline.That wherein produce and monocrystalline
Silicon is again the basic material in photovoltaic generation and semicon industry.Monocrystal silicon the most most important monocrystalline at present
One of material, the main material of its most still integrated circuit, especially solaode main material.Cause
The quality direct relation of this single crystal growing furnace the quality of crystal silicon.The means of deflation of existing monocrystal silicon is direct
After being sealed by sealing nut, directly being screwed off by nut and exit during venting, this means of deflation is susceptible to
The leakage of noble gas, the quality of impression noble gas.
Summary of the invention
This utility model technical issues that need to address be by spout hole is set and pressure valve come to single crystal growing furnace from
Body structure plays the effect of protection, prevents from, owing to external and internal pressure difference is excessive and cause the damage of self structure, subtracting
Lack unnecessary loss；A kind of vent valve for single crystal growing furnace is provided.
For solving above-mentioned technical problem, structure of the present utility model includes
Valve cylinder,
Valve gap, described valve gap is arranged on the left end of valve cylinder,
Valve seat, described valve seat is arranged in the right-hand member of valve cylinder, and the center of described valve seat offers gives vent to anger
Hole,
Spool, described spool is movably connected in valve cylinder, and described spool is hemispherical valve head, described
Valve is just sat by the spherical of spool, and described spool is connected with valve gap by spring, and described spool is at spring
Effect under be blocked at the venthole of valve seat, thus realize sealing function,
Pre-tightening force adjusting device, described pre-tightening force adjusting device is arranged between spring and valve gap.
Further: described pre-tightening force adjusting device includes the screwed hole being opened on valve gap, is arranged on valve cylinder
External connection screw outside left end and withstanding tight block, described valve cylinder is connected to valve gap by the external connection screw in outside
In screwed hole, one end of described withstanding tight block stretches in screwed hole, and described valve gap passes through withstanding tight block and bullet
Spring is connected.
Further: the center of described withstanding tight block offers pilot hole, in described pilot hole, activity connects
Being connected to guide post, described guide post is connected with spool.
Further: on described spool, offer spout hole, described spout hole just venthole to valve seat,
Described spout hole is provided with pressure valve.
After using said structure, this utility model ties single crystal growing furnace self by arranging spout hole and pressure valve
Structure plays the effect of protection, prevents from, owing to external and internal pressure difference is excessive and cause the damage of self structure, decreasing
Unnecessary loss；And the design also has simple in construction, the easily fabricated and advantage of practicality and high efficiency.
Accompanying drawing explanation
With detailed description of the invention, this utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is structural representation of the present utility model.
Detailed description of the invention
A kind of vent valve for single crystal growing furnace as shown in Figure 1, including valve cylinder 1, valve gap 2, valve seat 4, valve
Core 3 and pre-tightening force adjusting device, described valve gap 2 is arranged on the left end of valve cylinder 1, described valve seat 4
Being arranged in the right-hand member of valve cylinder 1, the center of described valve seat 4 offers venthole, described spool 3
Being movably connected in valve cylinder 1, described spool 3 is hemispherical valve head, and the spherical of described spool 3 is just
Valve is sat 4, and described spool 3 is connected with valve gap 2 by spring 10, and described spool 3 is at spring 10
It is blocked under effect at the venthole of valve seat 4, thus realizes sealing function, described pre-tightening force adjusting device
It is arranged between spring 10 and valve gap 2.During work, when the air pressure in single crystal growing furnace is excessive, high pressure gas is known from experience
Promote spool 3 extrusion spring 10, make spool 3 separate with valve seat 4, so that the gases at high pressure in single crystal growing furnace
Venthole from valve seat 4 is run out of, and reduces the air pressure in single crystal growing furnace, and it has simple in construction, easily fabricated
Advantage with practicality and high efficiency.And the design can also pass through the pre-tightening force adjusting device pretightning force to spring 10
It is adjusted, it is achieved thereby that level pressure air-bleed, adds its Practical Performance.
Pre-tightening force adjusting device as shown in Figure 1 includes the screwed hole being opened on valve gap 2, is arranged on valve cylinder 1
External connection screw outside left end and withstanding tight block 5, described valve cylinder 1 is connected to valve gap by the external connection screw in outside
In the screwed hole of 2, one end of described withstanding tight block 5 stretches in screwed hole, and described valve gap 2 is by holding out against
Block 5 is connected with spring 10, and the center of described withstanding tight block 5 offers pilot hole 9, described pilot hole
Being connected with guide post 7 in 9, described guide post 7 is connected with spool 3.When needing spring 10
When pretightning force is adjusted, rotary valve cover 2 regulates the length that valve cylinder 1 stretches in screwed hole, thus by top
Tight block 5 regulates the decrement of spring 10, the regulation of complete paired springs 10 pretightning force.The design passes through pretension
The pretightning force of spring 10 is adjusted by apparatus for adjusting force, it is achieved that level pressure air-bleed, adds its practicality
Energy.
Spout hole 11, described spout hole 11 just going out valve seat 4 is offered on spool 3 as shown in Figure 1
Pore, described spout hole 11 is provided with pressure valve 12.When spool 3 occurs card after death with valve seat 4, this reality
With the novel effect that by arranging spout hole and pressure valve, single crystal growing furnace self structure is played protection, prevent by
Excessive and cause the damage of self structure in external and internal pressure difference, decrease unnecessary loss.
Claims (4)
1. the vent valve for single crystal growing furnace, it is characterised in that: include
Valve cylinder (1),
Valve gap (2), described valve gap (2) is arranged on the left end of valve cylinder (1),
Valve seat (4), described valve seat (4) is arranged in the right-hand member of valve cylinder (1), and the center of described valve seat (4) offers venthole,
Spool (3), described spool (3) is movably connected in valve cylinder (1), described spool (3) is hemispherical valve head, the spherical of described spool (3) is just to valve seat (4), described spool (3) is connected with valve gap (2) by spring (10), described spool (3) is blocked at the venthole of valve seat (4) under the effect of spring (10), thus realize sealing function
Pre-tightening force adjusting device, described pre-tightening force adjusting device is arranged between spring (10) and valve gap (2).
A kind of vent valve for single crystal growing furnace the most according to claim 1, it is characterized in that: described pre-tightening force adjusting device includes the screwed hole being opened on valve gap (2), is arranged on the external connection screw outside valve cylinder (1) left end and withstanding tight block (5), described valve cylinder (1) is connected in the screwed hole of valve gap (2) by the external connection screw in outside, one end of described withstanding tight block (5) stretches in screwed hole, and described valve gap (2) is connected with spring (10) by withstanding tight block (5).
A kind of vent valve for single crystal growing furnace the most according to claim 2, it is characterized in that: the center of described withstanding tight block (5) offers pilot hole (9), being connected with guide post (7) in described pilot hole (9), described guide post (7) is connected with spool (3).
A kind of vent valve for single crystal growing furnace the most according to claim 1, it is characterized in that: on described spool (3), offer spout hole (11), described spout hole (11) just venthole to valve seat (4), described spout hole (11) is provided with pressure valve (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620204422.5U CN205635859U (en) | 2016-03-16 | 2016-03-16 | A bleed valve for single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620204422.5U CN205635859U (en) | 2016-03-16 | 2016-03-16 | A bleed valve for single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205635859U true CN205635859U (en) | 2016-10-12 |
Family
ID=57077539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620204422.5U Active CN205635859U (en) | 2016-03-16 | 2016-03-16 | A bleed valve for single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205635859U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107878954A (en) * | 2017-10-21 | 2018-04-06 | 南京中鸿润宁新材料科技有限公司 | A kind of liquid storage tank in water filtering system |
| CN109252210A (en) * | 2018-10-15 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of vent valve for single crystal growing furnace |
| CN109252221A (en) * | 2018-10-16 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of water segregator for cooling system of single crystal furnace |
-
2016
- 2016-03-16 CN CN201620204422.5U patent/CN205635859U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107878954A (en) * | 2017-10-21 | 2018-04-06 | 南京中鸿润宁新材料科技有限公司 | A kind of liquid storage tank in water filtering system |
| CN109252210A (en) * | 2018-10-15 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of vent valve for single crystal growing furnace |
| CN109252221A (en) * | 2018-10-16 | 2019-01-22 | 徐州振丰原喷灌设备有限公司 | A kind of water segregator for cooling system of single crystal furnace |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |