CN205634214U - Solar energy piles up separator of silicon chip - Google Patents
Solar energy piles up separator of silicon chip Download PDFInfo
- Publication number
- CN205634214U CN205634214U CN201620422712.7U CN201620422712U CN205634214U CN 205634214 U CN205634214 U CN 205634214U CN 201620422712 U CN201620422712 U CN 201620422712U CN 205634214 U CN205634214 U CN 205634214U
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- CN
- China
- Prior art keywords
- air blowing
- silicon chip
- blowing frame
- described air
- work platforms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a solar energy piles up separator of silicon chip, including blowing the frame, the frame of blowing inner bottom portion is equipped with work platform, the last silicon chip box that is equipped with of work platform, it is provided with the room of blowing to blow rack side wall's upper end, blow the room and pass through pipeline intercommunication air compressor machine, be equipped with the solenoid valve on the pipeline, silicon chip box top is provided with the silicon chip sucking disc.
Description
Technical field
This utility model relates to the uniform segregation apparatus of solar silicon wafers, the segregation apparatus of a kind of solar stack silicon chip.
Background technology
The form stacking that silicon chip is generally 100, the silicon chip isolation technics of stacking is critical step in silicon chip produces, and silicon chip surface is smooth bright and clean, and the silicon chip of stacking such as vacuum is inhaled together, it is more difficult to separate.Existing artificial separation method, separation efficiency is low, easily causes the damage of personnel and the damage of silicon chip, is therefore badly in need of wanting a kind of advanced undamaged separation method of high efficiency.
Utility model content
Utility model purpose: technical problem to be solved in the utility model is for the deficiencies in the prior art, it is provided that the segregation apparatus of a kind of solar stack silicon chip.
In order to solve above-mentioned technical problem, the utility model discloses the segregation apparatus of a kind of solar stack silicon chip, including air blowing frame, described air blowing frame inner bottom part is provided with work platforms, work platforms is provided with silicon box, the upper end of described air blowing frame side wall is provided with air blowing chamber, and described air blowing chamber passes through pipeline communication air compressor machine, and described pipeline is provided with electromagnetic valve;Described silicon box is provided above silicon wafer sucking disc.
In this utility model, described air blowing chamber is two, is arranged oppositely respectively in air blowing frame.
In this utility model, below described air blowing frame, it is provided with the lift cylinder connecting work platforms, for controlling the height of silicon box above work platforms.
In this utility model, described air blowing frame side wall upper part is provided with Fibre Optical Sensor, for measuring the height of silicon box.
In this utility model, below described work platforms, it is provided with guide rail, bottom described air blowing frame, is provided with the track adaptive with described guide rail.
In this utility model, described air blowing frame is provided with the cylinder for driving described work platforms to move along track.For placing silicon chip.
This utility model device solves the problem that silicon chip heap poststack difficulty or ease uniformly separate, and causes backend process double silicon chip conveying, fragment, upper silicon chip equipment alarm occur, take silicon chip equipment alarm etc. unstable factor.The loss of this utility model air pressure reduces, and has saved cost, and equipment runs more stable, and fragment rate is reduced to 0.02%, and device efficiency improves more than 10%, and board mobility rises to more than 99.2%.
Accompanying drawing explanation
Doing this utility model with detailed description of the invention below in conjunction with the accompanying drawings and further illustrate, of the present utility model above-mentioned and/or otherwise advantage will become apparent.
Fig. 1 is this utility model structural representation.
Detailed description of the invention
As shown in Figure 1, the utility model discloses the segregation apparatus of a kind of solar stack silicon chip, including air blowing frame 1, described air blowing frame 1 inner bottom part is provided with work platforms 2, work platforms 2 is provided with silicon box 3, and the upper end of described air blowing frame 1 sidewall is provided with air blowing chamber 4, and described air blowing chamber 4 connects air compressor machine 6 by pipeline 5, described pipeline 5 is provided with electromagnetic valve 7, is controlled the air-flow of pipeline by electromagnetic valve 7;Described silicon box 3 is provided above silicon wafer sucking disc 8.Described air blowing chamber is two, and object is arranged in air blowing frame respectively.The lift cylinder 9 connecting work platforms 2 it is provided with, for controlling the height of silicon box above work platforms below described air blowing frame 1.Described air blowing frame 1 side wall upper part is provided with Fibre Optical Sensor 10, for measuring the height of silicon box.Be provided with guide rail 11 below described work platforms 2, described in blow afloat and be provided with bottom frame and track 12 that described guide rail is adaptive.Described air blowing frame 1 is provided with the cylinder 13 for driving described work platforms to move along track.
Air compressor machine introduces compressed air, is blown out by air blowing chamber, and the silicon chip stacking in silicon box is arranged, and rises to blow-out position, and air blowing chamber blows and uniformly separated by the silicon chip of stacking, silicon wafer sucking disc after drawing, transport is left.
This utility model provides thinking and the method for the segregation apparatus of a kind of solar stack silicon chip; the method and the approach that implement this technical scheme are a lot; the above is only preferred implementation of the present utility model; should be understood that; for those skilled in the art; on the premise of without departing from this utility model principle, it is also possible to make some improvements and modifications, these improvements and modifications also should be regarded as protection domain of the present utility model.Each ingredient the clearest and the most definite in the present embodiment all can use prior art to be realized.
Claims (6)
1. the segregation apparatus of a solar stack silicon chip, it is characterized in that, including air blowing frame, described air blowing frame inner bottom part is provided with work platforms, work platforms is provided with silicon box, the upper end of described air blowing frame side wall is provided with air blowing chamber, and described air blowing chamber passes through pipeline communication air compressor machine, and described pipeline is provided with electromagnetic valve;Described silicon box is provided above silicon wafer sucking disc.
The segregation apparatus of a kind of solar stack silicon chip the most according to claim 1, it is characterised in that described air blowing chamber is two, is arranged oppositely respectively in air blowing frame.
The segregation apparatus of a kind of solar stack silicon chip the most according to claim 1, it is characterised in that be provided with the lift cylinder connecting work platforms below described air blowing frame, for controlling the height of silicon box above work platforms.
The segregation apparatus of a kind of solar stack silicon chip the most according to claim 3, it is characterised in that described air blowing frame side wall upper part is provided with Fibre Optical Sensor, for measuring the height of silicon box.
5., according to the segregation apparatus of a kind of solar stack silicon chip described in claim 1 or 2 or 3, it is characterised in that be provided with guide rail below described work platforms, bottom described air blowing frame, it is provided with the track adaptive with described guide rail.
The segregation apparatus of a kind of solar stack silicon chip the most according to claim 5, it is characterised in that described air blowing frame is provided with the cylinder for driving described work platforms to move along track.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620422712.7U CN205634214U (en) | 2016-05-11 | 2016-05-11 | Solar energy piles up separator of silicon chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620422712.7U CN205634214U (en) | 2016-05-11 | 2016-05-11 | Solar energy piles up separator of silicon chip |
Publications (1)
Publication Number | Publication Date |
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CN205634214U true CN205634214U (en) | 2016-10-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201620422712.7U Expired - Fee Related CN205634214U (en) | 2016-05-11 | 2016-05-11 | Solar energy piles up separator of silicon chip |
Country Status (1)
Country | Link |
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CN (1) | CN205634214U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111453444A (en) * | 2020-04-10 | 2020-07-28 | 网易(杭州)网络有限公司 | Article separating device |
-
2016
- 2016-05-11 CN CN201620422712.7U patent/CN205634214U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111453444A (en) * | 2020-04-10 | 2020-07-28 | 网易(杭州)网络有限公司 | Article separating device |
CN111453444B (en) * | 2020-04-10 | 2022-01-11 | 网易(杭州)网络有限公司 | Article separating device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161012 |