CN205412623U - A large -tonnage low temperature plasma generator for exhaust -gas treatment - Google Patents
A large -tonnage low temperature plasma generator for exhaust -gas treatment Download PDFInfo
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- CN205412623U CN205412623U CN201620266695.2U CN201620266695U CN205412623U CN 205412623 U CN205412623 U CN 205412623U CN 201620266695 U CN201620266695 U CN 201620266695U CN 205412623 U CN205412623 U CN 205412623U
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Abstract
The utility model discloses a large -tonnage low temperature plasma generator for exhaust -gas treatment, including a plurality of rows of parallel arrangement's positive electrode plasma generator tube group and negative electrode plasma generator tube group, just, each root in the negative electrode plasma generator tube group just, negative electrode plasma generator tube is connected with the generator tube positive electrode and the generator tube negative electrode that correspond respectively, the positive terminal that the generator tube positive electrode passes through the positive electrode connector of generator tube and positive electrode connecting wire and frequency conversion booster power is connected, the positive terminal that the generator tube negative electrode passes through generator tube burden electrode connector and positive electrode connecting wire and frequency conversion booster power is connected, just, negative electrode plasma generator tube both ends are fixed through insulating generator tube fixed plate, generator tube group is outside to surround the tip and the insulating generator tube fixed plate fixed connection of insulation board by the insulation board. The utility model discloses make simply, the electron energy is high, and plasma density is big, and the operation is reliable, is applicable to the inflammable and explosive industry organic waste gas of various non -s and handles.
Description
Technical field
This utility model relates to a kind of big yield low-temperature plasma generator for exhaust-gas treatment.
Background technology
At present, it is applied to double medium low-temperature plasma generators of exhaust-gas treatment, uses waste gas to flow through the plasma processing techniques in generator tube, and this treatment technology, because of the restriction of its machining area so that it is discharge power is little, plasma yields poorly, it is difficult to reach the requirement that industrial waste gas processes, can only multiple stage combine, bulky, consumptive material is many, production cost is high, processes the industrial waste gas of high concentration, atm number especially, it is difficult to adapt to the requirement that present air is administered.It addition, the restricted diameter of generator tube, diameter is excessive, certainly will raise by discharge voltage, causes power supply to make difficulty, and danger increases；For increase treatment effect, increase generator tube length, gas flow through pipe in, temperature raise, the glass tubing of opposite elongate because of gas be heated can impaired, even can explosion cause danger.
nullChinese patent application 2013100605372 discloses a kind of large-wind-volume low-concentration plasma emission-control equipment，Including plasma sheath，Set on it into、Gas outlet，Some plasma generators are installed in its inner chamber at least one cross section，It is connected with each other between the plasma generator of same cross section，Plasma generator vertical air inlet mouth，Plasma generator includes insulating base，Before pedestal、Connect airflow uniform distribution grid below，Pedestal inner chamber is left、If dried layer wire electrode and several battery lead plates are connected vertical from top to bottom between right panel，Between each battery lead plate and and each layer wire electrode between be parallel to each other，Each battery lead plate is crisscross arranged with each layer wire electrode，Each battery lead plate is equal with adjacent electrode silk spacing，Each layer wire electrode is uniform、Interval is arranged，Each battery lead plate、Wire electrode connects lead-out wire respectively，The two lead-out wire is connected with earth terminal and the high-pressure side of high-voltage ac power respectively.The technological deficiency of this patent application is: one is that unit are equivalent ionic strength is low.The generator of this patent application is owing to being electric discharge between battery lead plate and wire electrode, the diameter of wire electrode is only about 1mm, and it is two survey face electric discharges of wire electrode, machining area is minimum, power can add up, every peak power 10-30 watt the most by all means of actual test, industrial waste gas the most several ten thousand cubes to hundreds of thousands cube, when gas passes through, air quantity is big, flow velocity is fast, it is impossible to effectively process waste gas.
Two is that wire electrode is fragile.The generator of this patent application, its wire electrode is exposed, and direct and exhaust gas contact, containing moisture, impurity and corrosive material in waste gas.When electrode discharge, wire electrode temperature raises, and surface oxidation corrodes, and because the formation of oxide etch layer have impact on distributing and discharge effect of heat, equipment performance is gradually lowered, and long-play rear electrode silk just damages.
Chinese patent ZL2015201113257 discloses a kind of Combined type low-temperature plasma generator for processing organic exhaust gas, including cube frame, the described cube combination frame left and right sides is provided with electrode installing plate, on two described electrode installing plates, insulation rubber sleeve is provided with two parallel positive poles and fixes bar, two described positive poles are fixed and equally spaced on bar are provided with multiple positive discharge block, it is provided with four negative poles on four angles of described electrode installing plate and fixes bar, negative pole is fixed bar two ends and is bolted on electrode installing plate, negative pole is fixed and equally spaced on bar is provided with multi-disc negative plate, described negative plate and positive discharge block interlaced arrangement.This patent, as aforementioned patent applications 2013100605372, has equally existed unit are equivalent ionic strength low and be the flimsy technical deficiency of electrode slice.The additionally generator of this patent, uses multiple discharge block, and so, the frequency of electric discharge and voltage are fixing, when processing the material of waste gas, concentration, flow, pressure change, needs to adjust in time the frequency of power supply, voltage, thus also adjusts discharge power.
Utility model content
The purpose of this utility model is for overcoming above-mentioned the deficiencies in the prior art, it is provided that a kind of big yield low-temperature plasma generator for exhaust-gas treatment, and it uses double-dielectric barrier discharge technology, using high frequency, high voltage inverting power source, high friend osmanthus glass is medium, is simple to manufacture, electron energy is high, and density is big.
For achieving the above object, this utility model employing following technical proposals:
A kind of big yield low-temperature plasma generator for exhaust-gas treatment, the anelectrode plasma generator tube group be arrangeding in parallel including some rows and negative electrode plasma generator tube group, just, each in negative electrode plasma generator tube group just, negative electrode plasma generator tube connects with corresponding generator tube anelectrode and generator tube negative electrode respectively, generator tube anelectrode connects sheet by generator tube anelectrode and anelectrode connecting line is connected with the positive terminal of frequency conversion booster power, generator tube negative electrode connects sheet by generator tube negative electrode and anelectrode connecting line is connected with the positive terminal of frequency conversion booster power；The two ends of some positive and negative electrode plasma generator tubes be arrangeding in parallel are fixed by insulation generator tube fixed plate, surrounded by insulation board outside the generator tube group of some positive and negative electrode plasma generator tubes composition, and the end of insulation board is fixed with insulation generator tube fixed plate respectively and is connected；
Positive and negative electrode plasma generator tube Heterogeneous Permutation in adjacent row positive and negative electrode plasma generator tube group；
Described positive and negative electrode plasma generator tube is formed by medium glass pipe, conductive metal powder and insulating plug, medium glass pipe is built with conductive metal powder, two ends insulating plug blocks, and is wherein inserted with powered electrode in the insulating plug of one end, and powered electrode extend in conductive metal powder.
The surrounding of each the plus or minus electrode plasma generator tube being in non-edge has been equidistantly positioned four negative or positive electrode plasma generator tubes；Making adjacent equidistant 4 the negative or positive electrode plasma generator tubes of plus or minus electrode plasma generator tube periphery form electric discharge, such machining area is evenly stable, thus plasma luminous efficiency is high.
Forming double-dielectric barrier discharge between positive and negative electrode plasma generator tube, gas passes through in the gap between medium glass pipe, is taken away by produced for the electric discharge of described generator tube heat, enables described generator tube to run without interruption for a long time.Double media refer to the discharge medium having bilayer between positive and negative sparking electrode, and ionized gas passes through in the space between two media, and plasma produces in this space, and the metal powder in glass tubing is electrode, form double medium side by side between two glass tubings.Dielectric barrier discharge (DielectricBarrierDischarge, DBD) it is to have dielectric to insert a kind of nonequilibrium state gas discharge of discharge space also known as dielectric impedance corona discharge or voltolising, as there is no dielectric impedance, or do not discharge, or by voltage breakdown.
Described positive and negative electrode plasma generator tube length is 1000mm-2000mm, a diameter of 10mm-15mm.
Described generator tube positive and negative electrode is the stainless steel bar of diameter 4-6mm and TOE, threaded one end connects sheet with corresponding generator tube positive and negative electrode respectively and connects, and the other end inserts in the conductive metal powder in corresponding positive and negative electrode plasma generator tube.
It is stainless steel substrates that described generator tube positive and negative electrode connects sheet, and thickness is 1-1.5mm, width 10-15mm.
Described insulation generator tube fixed plate is politef or the epoxy resin board of thickness 15mm-25mm, according to diameter drilled on insulation fixing plate of medium glass pipe, inserts medium glass pipe thus is fixed up, and make to be dielectrically separated between each described generator tube.Each electrode plasma generator tube is arranged mutually by insulation generator tube fixed plate by certain geometric figure.
Described insulation board is politef or the epoxy resin board of thickness 2mm-4mm, is fenced up by described plasma generator tube.
Described insulation board is encircled a city a square body, wherein has air inlet and venthole on opposite sides face.
The a length of 1000mm-2000mm of described medium glass pipe, a diameter of 10mm-15mm, the glass tubing of wall thickness 1mm-2mm, material is high-boron-silicon glass or quartz glass, and medium glass pipe is discharge tube during plasma generation, and glass is discharge medium.
Described insulating plug material is politef, and plug is at medium glass pipe two ends, the conductive metal powder in sealing medium glass tubing.
Described conductive metal powder is to be seated in stainless steel powder or aluminium powder in discharge glass tube, plays the effect of discharge metal rod.
Described booster transformer is the power supply that the power supply of power supply grid 380V/50HZ carries out boosting frequency conversion, variable-frequency power sources is power 5-100kVA, voltage 3kV-9kV, frequency 1kHZ-6kHZ, power, voltage, frequency are the most adjustable, meet electric discharge requirement when plasma occurs.
During this utility model application, pending raw-gas, after plasma generator side enters plasma generator, enters many discharge tubes of region of discharge immediately and forms an overall region of discharge.Single group anelectrode generator tube and single group negative electrode generator tube Heterogeneous Permutation, adjacent equidistant 4 the negative electrode generator tubes (or anelectrode generator tube) of an anelectrode generator tube (or negative electrode generator tube) periphery are made to form electric discharge, so machining area is evenly stable, thus plasma luminous efficiency is high.Forming double-dielectric barrier discharge between generator tube, gas passes through in the gap between glass tubing, is taken away by produced for generator tube electric discharge heat, enables generator tube to run without interruption for a long time.Due to discharge medium glass protection, the electrode of electric discharge, makes the electrode corrosivity from gas or the impact of impurity moisture, substantially prolongs the service life of generator tube.
The generator of the present invention, electrode is inside quartz glass tube, completely isolated with waste gas and the external world, and electrode will not be by oxidative damage.There is extremely low thermal coefficient of expansion, high temperature tolerance, fabulous chemical stability, excellent electrical insulating property, low and stable ultrasonic delay performance, optimal saturating ultraviolet spectra performance, the erosion of various waste gas can be resisted, make plasma occur reliable and stable.It addition, the metal powder in glass tubing is uniformly attached on quartz ampoule inwall as electrode, tiny metal powder granule so that plasma occurs evenly.
Compared with existing plasma generator, this utility model has a following clear superiority:
1) the big yield of plasma generating capacity, is realized.Existing plasma generator commonly used single tube single supply, increases cumulative power supply and generator tube for realizing yield, causes bulky being difficult to control, cause single set plasma generator generating capacity more difficult do big, it is difficult to meet and be actually needed.The power supply of this utility model uses converter and extraordinary booster transformer composition, and power supply capacity 1-100kVA, the generator tube 10-1000 of the coupling in single casing prop up；The generator electrode diameter 10-15mm of the present invention, each electrode and adjacent 4 electrode discharges, peak power 10-1000 watt is adjustable the most by all means, and can be layering, and takies the least area.
2) plasma luminous efficiency is high.Single group anelectrode generator tube and single group negative electrode generator tube Heterogeneous Permutation, make adjacent equidistant 4 negative electrodes (or anelectrode) of anelectrode (or negative electrode) periphery, and such machining area is the most all with stable, thus plasma luminous efficiency is high, can improve 25-30%.
3) compact conformation, plasma density is big.All plasma generator tubes are evenly distributed in a casing, are allowed to form an electric discharge entirety, can produce the plasma of big density, meet various actual demand.
4) realize energy-conservation.Discharge frequency is adjustable, and discharge voltage is adjustable, power adjustable, makes the circuit of generator be in resonance point, the energy-conservation energy.The present invention is different with composition according to the tolerance processing waste gas, and the quantity of discharge tube can be increased or decreased, and adjusts power and frequency thereof, it is adaptable to the various industrial organic exhaust gas process that various non-flammable are explosive.Emission compliance after strong adaptability of the present invention, different exhaust-gas treatments, product is more energy efficient..
5) reliable and stable.Using double medium discharge, glass tubing protection sparking electrode, 4 the most above-mentioned features, stable equipment operation is reliable, substantially prolongs service life of equipment.
6) manufacturing process is simple, and selection is easy, low cost.Generator uses insulation board, glass tubing, metal powder, stainless steel substrates, stainless steel bar etc., and manufacturing process is simple, produces material and easily selects, it is easy to processing, production cost is low.
The simple method of this utility model technique manufactures the big yield of separate unit, highdensity plasma generation body, and production cost is low, and reliable energy-conservation.Product is easily produced in batches, it is adaptable to the various industrial organic exhaust gas process that various non-flammable are explosive.This utility model has bigger market popularization value and market practical value.
Accompanying drawing explanation
Fig. 1 is the generator architecture schematic diagram removing external box of microvave；
Fig. 2 is generator architecture schematic diagram；
Fig. 3 is generator tube fixed structure schematic diagram；
Fig. 4 is that the A-A of Fig. 3 is to profile；
Fig. 5 is generator tube electric discharge schematic diagram；
Fig. 6 is generator tube electric discharge partial schematic diagram；
Fig. 7 is generator tube structural representation；
Wherein, 1, plasma generator tube；2, generator tube negative electrode；3, generator tube anelectrode；4, generator tube anelectrode connects sheet；5, generator tube negative electrode connects sheet；6, anelectrode connecting line；7, negative electrode connecting line；8, frequency conversion booster power；9, generator tube insulation fixing plate；10, insulation barrier；11, medium glass pipe；12, electroded insulating plug；13, conductive metal powder；14, insulating plug.
Detailed description of the invention
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
As shown in Fig. 1-Fig. 7, big yield low-temperature plasma generator for exhaust-gas treatment, the plasma generator tube negative electrode 2 including plasma generator tube 1 and being connected on plasma generator tube 1 and plasma generator tube anelectrode 3, generator tube anelectrode 3 connects sheet 4 with generator tube anelectrode and connects, and generator tube negative electrode 2 connects sheet 5 with generator tube negative electrode and connects.The positive terminal that generator tube anelectrode connects sheet 4 and frequency conversion booster power 8 is coupled together by anelectrode connecting line 6, and the negative terminal that generator tube negative electrode connects sheet 5 and frequency conversion booster power 8 is coupled together by negative electrode connecting line 7.Insulation generator tube fixed plate 9 fixes plasma generator tube two ends.Plasma generator tube is made up of medium glass pipe 11, electroded insulating plug 12, conductive metal powder 13 and insulating plug 14, and generator tube periphery insulation board 10 impales.
Booster transformer 8 is the power supply that the power supply of power supply grid 380V/50HZ carries out boosting frequency conversion, and variable-frequency power sources is power 5-100kVA, voltage 3kV-9kV, frequency 1kHZ-6kHZ, and power, voltage, frequency are the most adjustable.
The positive terminal that generator tube anelectrode connects sheet 4 and frequency conversion booster power 8 is coupled together by anelectrode connecting line 6, and the negative terminal that generator tube negative electrode connects sheet 5 and frequency conversion booster power 8 is coupled together by negative electrode connecting line 7.
It is the 316L stainless steel substrates being connected in series by the anelectrode of each generator tube that generator tube anelectrode connects sheet 4, and thickness is 1-1.5mm, width 10-15mm.
It is the 316L stainless steel substrates being connected in series by the negative electrode of each generator tube that generator tube negative electrode connects sheet 5, and thickness is 1-1.5mm, width 10-15mm.
Generator tube anelectrode 3 is the 316L stainless steel bar of φ 4-6mmL and TOE；Threaded one end is connected sheet and connects with anelectrode, and the other end inserts the conductive metal powder in generator tube.
Generator tube negative electrode 2 is the 316L stainless steel bar of φ 4-6mm and TOE；Threaded one end is connected sheet and connects with negative electrode, and the other end inserts the conductive metal powder in generator tube.
Plasma generator tube 1 is made up of medium glass pipe 11, electroded insulating plug 12, conductive metal powder 13 and insulating plug 14；Medium glass pipe is length L1000-2000mm, diameter phi 10-15mm, the glass tubing of wall thickness 1-2mm, and material is high-boron-silicon glass or quartz glass；Insulating plug material is politef；Conductive metal powder is stainless steel powder or aluminium powder.
Generator tube insulation fixing plate 9 is politef or the epoxy resin board of thickness 15-25mm, according to diameter drilled on insulation fixing plate of medium glass pipe, inserts medium glass pipe thus is fixed up.
Insulation board 10 is politef or the epoxy resin board of thickness 2-4mm, is fenced up by generator tube.
As shown in Figure 1 and Figure 2, after pending raw-gas enters plasma generator on the left of plasma generator, enter many discharge tubes of region of discharge immediately and form an overall region of discharge.Single group anelectrode generator tube and single group negative electrode generator tube Heterogeneous Permutation, the surrounding of each the plus or minus electrode plasma generator tube being in non-edge has been equidistantly positioned four negative or positive electrode plasma generator tubes；Making adjacent equidistant 4 the negative electrode generator tubes (or anelectrode generator tube) of an anelectrode generator tube (or negative electrode generator tube) periphery form electric discharge, as shown in Figure 5, Figure 6, C negative electrode generator tube and adjacent A, B, D, E anelectrode generator tube form electric discharge.Equally, E negative electrode generator tube and adjacent C, F, H, G anelectrode generator tube form electric discharge.So machining area is the most all with stable, thus plasma luminous efficiency is high.
Forming double-dielectric barrier discharge between generator tube, gas passes through in the gap between glass tubing, is taken away by produced for generator tube electric discharge heat, enables generator tube to run without interruption for a long time.As shown in Figure 1 and Figure 2, the gas after process is discharged by the right side of plasma generator.Due to discharge medium glass protection, the electrode of electric discharge, makes the electrode corrosivity from gas or the impact of impurity moisture, substantially prolongs the service life of generator tube.
Discharge frequency is adjustable, and discharge voltage is adjustable, power adjustable, makes the circuit of generator be in resonance point, the energy-conservation energy.
Different with composition according to the tolerance processing waste gas, the quantity of discharge tube can be increased or decreased, adjust power and frequency thereof, it is adaptable to the various industrial organic exhaust gas process that various non-flammable are explosive.
Although detailed description of the invention of the present utility model is described by the above-mentioned accompanying drawing that combines; but the not restriction to this utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art need not pay creative work can make various amendment or deformation still within this utility model protection domain.
Claims (10)
1. the big yield low-temperature plasma generator for exhaust-gas treatment, it is characterized in that, the anelectrode plasma generator tube group be arrangeding in parallel including some rows and negative electrode plasma generator tube group, just, each in negative electrode plasma generator tube group just, negative electrode plasma generator tube connects with corresponding generator tube anelectrode and generator tube negative electrode respectively, generator tube anelectrode connects sheet by generator tube anelectrode and anelectrode connecting line is connected with the positive terminal of frequency conversion booster power, generator tube negative electrode connects sheet by generator tube negative electrode and anelectrode connecting line is connected with the positive terminal of frequency conversion booster power；The two ends of some positive and negative electrode plasma generator tubes be arrangeding in parallel are fixed by insulation generator tube fixed plate, surrounded by insulation board outside the generator tube group of some positive and negative electrode plasma generator tubes composition, and the end of insulation board is fixed with insulation generator tube fixed plate respectively and is connected；Positive and negative electrode plasma generator tube Heterogeneous Permutation in adjacent row positive and negative electrode plasma generator tube group；
Described positive and negative electrode plasma generator tube is formed by medium glass pipe, conductive metal powder and insulating plug, medium glass pipe is built with conductive metal powder, two ends insulating plug blocks, and is wherein inserted with powered electrode in the insulating plug of one end, and powered electrode extend in conductive metal powder.
2. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, is characterized in that, the surrounding of each the plus or minus electrode plasma generator tube being in non-edge has been equidistantly positioned four negative or positive electrode plasma generator tubes；Adjacent equidistant 4 the negative or positive electrode plasma generator tubes of plus or minus electrode plasma generator tube periphery are made to form electric discharge.
3. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, it is characterized in that, double-dielectric barrier discharge is formed between positive and negative electrode plasma generator tube, gas passes through in the gap between medium glass pipe, produced for the electric discharge of described generator tube heat is taken away, enables described generator tube to run without interruption for a long time.
4. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, is characterized in that, described positive and negative electrode plasma generator tube length is 1000mm-2000mm, a diameter of 10mm-15mm.
5. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, it is characterized in that, described generator tube positive and negative electrode is the stainless steel bar of diameter 4-6mm and TOE, threaded one end connects sheet with corresponding generator tube positive and negative electrode respectively and connects, and the other end inserts in the conductive metal powder in corresponding positive and negative electrode plasma generator tube.
6. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, is characterized in that, it is stainless steel substrates that described generator tube positive and negative electrode connects sheet, and thickness is 1-1.5mm, width 10-15mm.
7. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, it is characterized in that, described insulation generator tube fixed plate is politef or the epoxy resin board of thickness 15mm-25mm, diameter drilled on insulation fixing plate according to medium glass pipe, insert medium glass pipe thus be fixed up, and make to be dielectrically separated between each described generator tube.
8. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, is characterized in that, described insulation board is politef or the epoxy resin board of thickness 2-4mm, is fenced up by described plasma generator tube；Described insulation board is encircled a city a square body, wherein has air inlet and venthole on opposite sides face.
9. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, it is characterized in that, the a length of 1000-2000mm of described medium glass pipe, a diameter of 10-15mm, the glass tubing of wall thickness 1-2mm, material is high-boron-silicon glass or quartz glass, medium glass pipe is discharge tube during plasma generation, and glass is discharge medium；
Described insulating plug material is politef, and plug is at medium glass pipe two ends, the conductive metal powder in sealing medium glass tubing；
Described conductive metal powder is to be seated in stainless steel powder or aluminium powder in discharge glass tube.
10. the big yield low-temperature plasma generator for exhaust-gas treatment as claimed in claim 1, it is characterized in that, described booster transformer is the power supply that the power supply of power supply grid 380V/50HZ carries out boosting frequency conversion, variable-frequency power sources is power 5-100kVA, voltage 3kV-9kV, frequency 1kHZ-6kHZ, power, voltage, frequency are the most adjustable, meet electric discharge requirement when plasma occurs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620266695.2U CN205412623U (en) | 2016-04-01 | 2016-04-01 | A large -tonnage low temperature plasma generator for exhaust -gas treatment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620266695.2U CN205412623U (en) | 2016-04-01 | 2016-04-01 | A large -tonnage low temperature plasma generator for exhaust -gas treatment |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105817124A (en) * | 2016-04-01 | 2016-08-03 | 赵凤明 | High-yield low-temperature plasma generator for waste gas treatment |
| CN107124811A (en) * | 2017-06-22 | 2017-09-01 | 亚洲硅业（青海）有限公司 | A kind of plasma generator and its method of generating plasma |
| CN107770940A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Multi-grid plasma generator |
| CN108770170A (en) * | 2018-08-21 | 2018-11-06 | 仰宝真 | A kind of non-equilibrium low temperature plasma generating means |
| CN110505772A (en) * | 2018-05-18 | 2019-11-26 | 蒋亮健 | Box electrostatic field generator device |
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2016
- 2016-04-01 CN CN201620266695.2U patent/CN205412623U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105817124A (en) * | 2016-04-01 | 2016-08-03 | 赵凤明 | High-yield low-temperature plasma generator for waste gas treatment |
| CN107770940A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Multi-grid plasma generator |
| CN107124811A (en) * | 2017-06-22 | 2017-09-01 | 亚洲硅业（青海）有限公司 | A kind of plasma generator and its method of generating plasma |
| CN107124811B (en) * | 2017-06-22 | 2018-05-04 | 亚洲硅业（青海）有限公司 | A kind of plasma generator and its method of generating plasma |
| CN110505772A (en) * | 2018-05-18 | 2019-11-26 | 蒋亮健 | Box electrostatic field generator device |
| CN108770170A (en) * | 2018-08-21 | 2018-11-06 | 仰宝真 | A kind of non-equilibrium low temperature plasma generating means |
| CN108770170B (en) * | 2018-08-21 | 2024-04-26 | 仰宝真 | Unbalanced low-temperature plasma generating device |
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