CN106959074A - It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement - Google Patents
It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement Download PDFInfo
- Publication number
- CN106959074A CN106959074A CN201710167529.6A CN201710167529A CN106959074A CN 106959074 A CN106959074 A CN 106959074A CN 201710167529 A CN201710167529 A CN 201710167529A CN 106959074 A CN106959074 A CN 106959074A
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- angle
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- glasses
- prism
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
It is used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement the invention discloses a kind of, belong to photoelectric field and micro-nano detection field, the present invention includes the right-angle prism of four plated films, the right-angle surface of four right-angle prisms is overlapped two-by-two, the right-angled edge of four right-angle prisms coincides, and four right-angle prisms constitute cube prism.The present invention can solve the problems, such as the optical path difference measurement centered with the non-rotation that centers, ensure that the optical path difference that rotation optical path difference and displacement optical path difference are measured is not coupled mutually.
Description
Technical field
Move and revolve the present invention relates to the technical field of laser detection of micro-nano operating platform, more particularly to a kind of micro-nano that is used for
Four prism glasses-selecting equipments of gyration measurement.
Background technology
With the development and application of micro-nano operating technology, multiple degrees of freedom especially realizes that the micro-nano operation of rotary freedom is flat
Platform is increasingly paid close attention to, and the synchro measure problem of the current non-Rotation centered, angular displacement and displacement of the lines is not all obtained
Solve well.
Laser interferometer because high resolution, noncontact, it is affected by environment it is small, be quick on the draw the advantages of be widely used in it is various
In precision measurement system.Current multiple laser interferometer are complete in use, the symmetry of its light path cannot be guaranteed, longitudinal light path
With lateral light paths it is impossible to ensure that it is mutually perpendicular to, when determinand is synchronously subjected to displacement and rotated, it is impossible to measure displacement
With the independent optical path difference of rotation.
Due to the characteristic that right-angle prism has outgoing beam parallel with incident beam, so being widely used in precision
In optical measurement.When micro-nano platform rotates, it laser interferometer is captured reflected light and carry out interferometry.But work as
During horizontal and vertical paired placement right-angle prism, it is impossible to ensure the Relative vertical of horizontal and vertical prism square, therefore, how
Design is a kind of can to differentiate the glasses-selecting equipment in optical path difference source, be those skilled in the art's urgent need to resolve.
Patent accompanying drawing
Fig. 1 is right-angle prism；
Fig. 2 is the cube that right-angle prism is constituted；
1 and 2 in wherein Fig. 1 be the coated surface of right-angle prism；1,2,3 and 4 in Fig. 2 be right-angle prism.
The content of the invention
For the straight-line displacement of current multiple degrees of freedom micro-nano operating platform and asking in the presence of swing offset measuring method
Topic, present invention offer is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement, high with Measurement Resolution, structure
Simple the advantages of.
The technical solution adopted by the present invention is：
A kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement, its structure includes：By four right-angle prisms
Reflectance coating, the top surface plating of the cube prism are coated with the cube prism of composition, two right-angle surfaces of the right-angle prism
There is reflectance coating.
Described cube prism, when a pair of laser interferometer launch laser from the incidence of former and later two directions, is formed
Light path is on cubical central point；When a pair of laser interferometer launch laser from the incidence of left and right both direction, formed
Light path on cubical central point；
Described cube prism, equidistant point and former and later two right-angle prisms of the right-angle prism of left and right both direction
Equidistant point is mutually perpendicular to.
The right-angle side of four described right-angle prisms is overlapped two-by-two, and the right-angled edge of four right-angle prisms coincides.
The top surface of the cube prism and bottom surface are all square, the intersection and four right angles of two diagonal planes of cube
The right-angled edge of prism coincides.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
Embodiment one：The right-angle prism glasses-selecting equipment of the micro-nano operating platform, structure includes：Four right-angle surfaces
The right-angle prism of plated film, the right-angle side of four right-angle prisms is overlapped two-by-two, and the right-angled edge of four right-angle prisms coincides, Mei Gezhi
Reflective membrane is plated in the right-angle surface of angle prism, coated surface is overlapped two-by-two with coated surface；
When a pair of laser interferometer, to launch laser incident from former and later two directions, and the light path formed is in cubical
Heart point symmetry；When a pair of laser interferometer are launched, laser is incident from left and right both direction, and the light path formed is on cubical
Central point.
Due to the Striking symmetry of described glasses-selecting equipment, i.e., laser interferometer can be made vertical at conplane two
Side is worked up, and can be very good to solve the rotation optical path difference in the displacement optical path difference and plane in decoupling vertical direction, for micro-
Receive platform movement and rotation angular measurement provide a kind of good measurement apparatus.
Embodiment two：Four plated film right-angled edges in embodiment one are substituted using four plated film pyramid mirrors
Mirror, the central axis of four pyramid mirrors constitutes cross.
When a pair of laser interferometer are launched, laser is incident from former and later two directions, and the light path formed is on cruciform central
Point symmetry；When a pair of laser interferometer are launched, laser is incident from left and right both direction, and the light path formed is on cruciform central
Point symmetry.
Claims (4)
1. a kind of be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement, its apparatus structure includes：By four right-angle prisms
Reflectance coating, the top surface plating of the cube prism are coated with the cube prism of composition, two right-angle surfaces of the right-angle prism
There is reflective membrane.
2. it is according to claim 1 it is a kind of for micro-nano move and rotation angle measurement glasses-selecting equipment, it is characterised in that
The right-angle side of four right-angle prisms is overlapped two-by-two, and the right-angled edge of four right-angle prisms coincides, the reflective membrane plated in right-angle surface,
Characterized in that, eight right-angle surfaces of four right-angle prisms are plated with reflective membrane.
3. it is according to claim 1 it is a kind of for micro-nano move and rotation angle measurement glasses-selecting equipment, it is characterised in that
The top surface of cube prism and bottom surface are all square, the intersection of two diagonal planes of cube and the right-angled edge of four right-angle prisms
Coincide.
4. it is according to claim 1 it is a kind of for micro-nano move and rotation angle measurement glasses-selecting equipment, it is characterised in that
Described cube prism, the equidistant point of the right-angle prism of left and right both direction and the equidistant point of former and later two right-angle prisms
It is mutually perpendicular to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710167529.6A CN106959074A (en) | 2017-03-21 | 2017-03-21 | It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710167529.6A CN106959074A (en) | 2017-03-21 | 2017-03-21 | It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106959074A true CN106959074A (en) | 2017-07-18 |
Family
ID=59471278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710167529.6A Pending CN106959074A (en) | 2017-03-21 | 2017-03-21 | It is a kind of to be used for the glasses-selecting equipment of micro-nano movement and rotation angle measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106959074A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113517928A (en) * | 2021-04-26 | 2021-10-19 | 长春理工大学 | All-optical capturing method and device applied to space laser communication |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101376A (en) * | 2007-08-03 | 2008-01-09 | 马仁勇 | Color-combination prism manufacturing method |
| CN101373274A (en) * | 2007-08-22 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Light-combining prism and mounting contraposition method thereof |
| CN101650166A (en) * | 2008-08-15 | 2010-02-17 | 上海理工大学 | Laser interference system used for measuring micro roll angle |
| CN102042804A (en) * | 2009-10-13 | 2011-05-04 | 上海微电子装备有限公司 | Measuring device and method of laser interferometer |
| US20110102778A1 (en) * | 2009-11-04 | 2011-05-05 | National Formosa University | Geometric Error Measuring Device |
| CN102445854A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Workpiece stage vertical position measuring system |
| CN102506764A (en) * | 2011-10-14 | 2012-06-20 | 上海理工大学 | Laser interference system for displacement linearity measurement |
| CN102736423A (en) * | 2011-04-02 | 2012-10-17 | 上海微电子装备有限公司 | Object holding platform, error compensated measurement apparatus and error compensated method |
| CN105157560A (en) * | 2015-05-29 | 2015-12-16 | 山东大学 | Three-DOF (degree of freedom) precision laser detection device |
| CN205383991U (en) * | 2016-01-27 | 2016-07-13 | 广西科技大学鹿山学院 | High accuracy wide range laser displacement measurement device |
-
2017
- 2017-03-21 CN CN201710167529.6A patent/CN106959074A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101376A (en) * | 2007-08-03 | 2008-01-09 | 马仁勇 | Color-combination prism manufacturing method |
| CN101373274A (en) * | 2007-08-22 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Light-combining prism and mounting contraposition method thereof |
| CN101650166A (en) * | 2008-08-15 | 2010-02-17 | 上海理工大学 | Laser interference system used for measuring micro roll angle |
| CN102042804A (en) * | 2009-10-13 | 2011-05-04 | 上海微电子装备有限公司 | Measuring device and method of laser interferometer |
| US20110102778A1 (en) * | 2009-11-04 | 2011-05-05 | National Formosa University | Geometric Error Measuring Device |
| CN102445854A (en) * | 2010-10-15 | 2012-05-09 | 上海微电子装备有限公司 | Workpiece stage vertical position measuring system |
| CN102736423A (en) * | 2011-04-02 | 2012-10-17 | 上海微电子装备有限公司 | Object holding platform, error compensated measurement apparatus and error compensated method |
| CN102506764A (en) * | 2011-10-14 | 2012-06-20 | 上海理工大学 | Laser interference system for displacement linearity measurement |
| CN105157560A (en) * | 2015-05-29 | 2015-12-16 | 山东大学 | Three-DOF (degree of freedom) precision laser detection device |
| CN205383991U (en) * | 2016-01-27 | 2016-07-13 | 广西科技大学鹿山学院 | High accuracy wide range laser displacement measurement device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113517928A (en) * | 2021-04-26 | 2021-10-19 | 长春理工大学 | All-optical capturing method and device applied to space laser communication |
| CN113517928B (en) * | 2021-04-26 | 2022-03-25 | 长春理工大学 | All-optical capturing method and device applied to space laser communication |
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Application publication date: 20170718 |