CN205355022U - Integration wafer spool box module - Google Patents
Integration wafer spool box module Download PDFInfo
- Publication number
- CN205355022U CN205355022U CN201620112105.0U CN201620112105U CN205355022U CN 205355022 U CN205355022 U CN 205355022U CN 201620112105 U CN201620112105 U CN 201620112105U CN 205355022 U CN205355022 U CN 205355022U
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- wafer
- location
- integration
- cartridge module
- installation plate
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Abstract
The utility model discloses integration wafer spool box module relates to a semiconductor component strorage device. Its purpose is that an application scope is wide, small, simple structure's integration wafer spool box module in order to provide. The utility model discloses integration wafer spool box module includes the control box, and the location mounting panel is installed to the control box top, and processing has two lift spans on the mounting panel of location, installs standard wafer spool box above the mounting panel of location, the control box inboard is provided with elevating system, and elevating system drives two wafer scanners and carries out up -and -down motion, and the wafer scanner is worn out in can following the lift span, and two wafer scanners lie in the front and back both sides of standard wafer spool box respectively.
Description
Technical field
This utility model relates to a kind of semiconductor element storing unit, particularly relates to a kind of integrated wafer cartridge module for containing and scan semiconductor element state.
Background technology
In contemporary semiconductor equipment Market, wafer film magazine is of a great variety, and wherein most widely used and that consumption is maximum standard film magazine only has 2 inches, 4 inches, 6 inches, 8 English and 12 inches of several kinds.Although these several film magazines are standardized, but only have the part in the film magazine of 12 inches, just have the standardization position equipment of correspondence.And the standardization film magazine of 12 inches can only be placed on subscriber equipment in actual applications, bulky, it is impossible to the small size film magazine of compatible 2 inches, 4 inches or 6 inches, and price is relatively costly, a large amount of use cannot be born by domestic consumer.Such as a kind of film magazine wafer real-time detection device disclosed in Chinese utility model patent CN203134763U in prior art, including being arranged on the left mounting post in film magazine front and right mounting post, left and right mounting post is respectively provided with one group of light source emitter and light source receiver, left and right mounting post is additionally provided with position adjusting mechanism, it is possible to adjust the position of left and right mounting post vertical direction.This wafer detecting apparatus can only detect for the wafer of same size in use, and the left and right mounting post as detecting device is positioned at outside film magazine, and structure is complicated, and volume is bigger, it is impossible to be integrated into other device interiors.
Utility model content
The technical problems to be solved in the utility model be to provide a kind of applied widely, volume is little, the integrated wafer cartridge module of simple in construction.
This utility model integration wafer cartridge module, including control chamber, control chamber is arranged above location and installation plate, on location and installation plate, processing has two lift spans, location and installation plate is arranged above standard wafer film magazine, is provided with elevating mechanism inside described control chamber, and elevating mechanism drives two wafer-scanning devices to pump, wafer-scanning device can pass from lift span, and two wafer-scanning devices lay respectively at the both sides, front and back of standard wafer film magazine.
This utility model integration wafer cartridge module, wherein said location and installation prelaminar part is provided with sensor stand, sensor stand is provided with wafer and protrudes detection sensor, lower wafer protrusion detection sensor is arranged on the downside of location and installation plate, and lower wafer protrudes detection sensor can be relative with upper wafer protrusion detection sensor through lift span.
This utility model integration wafer cartridge module, wherein said control chamber is provided with adapter flange, is provided with several connecting columns between adapter flange and location and installation plate.
This utility model integration wafer cartridge module, wherein said elevating mechanism includes motor, motor is rotated by shaft coupling driven gear, gear is meshed with the tooth bar of vertical direction fixed placement, gear two ends are provided with bearing, bearing block is arranged on connecting plate, and connecting plate drives two wafer-scanning devices to be synchronized with the movement.
This utility model integration wafer cartridge module difference from prior art is in that wafer lamellar body is arranged in standard wafer film magazine by this utility model integration wafer cartridge module, standard wafer film magazine can dismount and replace with various sizes of standard wafer film magazine, to adapt to the wafer lamellar body of different size and model, and in order to adapt with various sizes of standard wafer film magazine, before and after standard wafer film magazine, it is each provided with a liftable wafer-scanning device.When wafer-scanning device lifts, wafer lamellar body is scanned, it is possible to determine quantity and the position of wafer lamellar body, and it was found that load mistake.Wafer lamellar body can also be scanned by this utility model integration wafer cartridge module while containing wafer lamellar body, it is not necessary to subscriber equipment is individually equipped with wafer scanning means again, saves operation hours, also improves production efficiency.And the compact of this utility model integration wafer cartridge module, whole height just corresponds to the height of 2.5 standard wafer film magazines, it is simple to be integrated into device interior, it is also possible to be installed to, by demand, the position that equipment arbitrarily allows to install, very easy to use, simple in construction.
Below in conjunction with accompanying drawing, integration wafer cartridge module of the present utility model is described further.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model integration wafer cartridge module；
Fig. 2 is the rearview of this utility model integration wafer cartridge module；
Fig. 3 is the structural representation of elevating mechanism in this utility model integration wafer cartridge module.
Detailed description of the invention
As it is shown in figure 1, this utility model integration wafer cartridge module includes control chamber 1, inside control chamber 1, it is provided with elevating mechanism.As shown in Figure 3, elevating mechanism includes motor 12, motor 12 is rotated by shaft coupling 13 driven gear 14, the tooth bar 11 that gear 14 is placed with vertical direction is meshed, it is internal that tooth bar 11 is fixed on control chamber 1, gear 14 two ends are provided with bearing, and bearing is arranged in bearing block 16, and bearing block 16 is arranged on connecting plate 15.As depicted in figs. 1 and 2, control chamber 1 being provided with adapter flange 2, adapter flange 2 surrounding is provided with four connecting columns set up 9, and connecting column 9 top is provided with location and installation plate 8.Location and installation plate 8 is arranged above standard wafer film magazine 6, and standard wafer film magazine 6 can be replaced with different size, and standard wafer film magazine 6 is internal is placed with wafer lamellar body.On location and installation plate 8, processing has two lift spans, and the position of lift span is corresponding with wafer-scanning device 3 (3`), and two wafer-scanning devices 3 (3`) lay respectively at the both sides, front and back of standard wafer film magazine 6.Wafer-scanning device 3 (3`) lower end is arranged on the connecting plate 15 of elevating mechanism, and wafer-scanning device 3 (3`) can pump with elevating mechanism.When wafer-scanning device 3 (3`) moves downward, it is possible to completely into below location and installation plate 8；When moving upward, it is possible to through lift span, standard wafer film magazine 6 is scanned.Location and installation plate 8 front portion is provided with sensor stand 4, sensor stand 4 is provided with wafer and protrudes detection sensor 5, lower wafer protrusion detection sensor 7 is arranged on the downside of location and installation plate 8, and lower wafer protrudes detection sensor 7 can be relative with upper wafer protrusion detection sensor 5 through lift span.Upper wafer protrudes detection sensor 5 and lower wafer protrudes detection sensor 7 as a kind of safety sensor, is used for determining whether wafer lamellar body protrudes into standard wafer film magazine 6 outside.
This utility model integration wafer cartridge module can be integrated into other device interiors in use.After wafer lamellar body corresponding with standard wafer film magazine 6 for size model is put into standard wafer film magazine 6, start elevating mechanism and wafer lamellar body is scanned.During scanning, former and later two wafer-scanning devices 3 (3`) are synchronized with the movement, and jointly wafer lamellar body are scanned, obtain the quantity of wafer lamellar body, position signalling, it is possible to check whether situation load mistake occur.Go up wafer protrusion detection sensor 5 simultaneously and lower wafer protrudes detection sensor 7 and wafer lamellar body detected in the vertical direction, it is prevented that have wafer lamellar body to protrude into standard wafer film magazine 6 outside.
Embodiment described above is only that preferred implementation of the present utility model is described; not scope of the present utility model is defined; under the premise designing spirit without departing from this utility model; various deformation that the technical solution of the utility model is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that this utility model claims are determined.
Claims (4)
1. an integrated wafer cartridge module, it is characterized in that: include control chamber, control chamber is arranged above location and installation plate, on location and installation plate, processing has two lift spans, location and installation plate is arranged above standard wafer film magazine, is provided with elevating mechanism inside described control chamber, and elevating mechanism drives two wafer-scanning devices to pump, wafer-scanning device can pass from lift span, and two wafer-scanning devices lay respectively at the both sides, front and back of standard wafer film magazine.
2. integration wafer cartridge module according to claim 1, it is characterized in that: described location and installation prelaminar part is provided with sensor stand, sensor stand is provided with wafer and protrudes detection sensor, lower wafer protrusion detection sensor is arranged on the downside of location and installation plate, and lower wafer protrudes detection sensor can be relative with upper wafer protrusion detection sensor through lift span.
3. integration wafer cartridge module according to claim 1, it is characterised in that: described control chamber is provided with adapter flange, several connecting columns are installed between adapter flange and location and installation plate.
4. integration wafer cartridge module according to claim 1, it is characterized in that: described elevating mechanism includes motor, motor is rotated by shaft coupling driven gear, gear is meshed with the tooth bar of vertical direction fixed placement, gear two ends are provided with bearing, bearing block is arranged on connecting plate, and connecting plate drives two wafer-scanning devices to be synchronized with the movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620112105.0U CN205355022U (en) | 2016-02-03 | 2016-02-03 | Integration wafer spool box module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620112105.0U CN205355022U (en) | 2016-02-03 | 2016-02-03 | Integration wafer spool box module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205355022U true CN205355022U (en) | 2016-06-29 |
Family
ID=56182434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620112105.0U Active CN205355022U (en) | 2016-02-03 | 2016-02-03 | Integration wafer spool box module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205355022U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022227350A1 (en) * | 2021-04-29 | 2022-11-03 | 长鑫存储技术有限公司 | Wafer cassette, wafer transfer system, and wafer transfer method |
-
2016
- 2016-02-03 CN CN201620112105.0U patent/CN205355022U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022227350A1 (en) * | 2021-04-29 | 2022-11-03 | 长鑫存储技术有限公司 | Wafer cassette, wafer transfer system, and wafer transfer method |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |