CN205317974U - Inclined to one side vibration -damping sheet of wiregrating and liquid crystal display panel - Google Patents

Inclined to one side vibration -damping sheet of wiregrating and liquid crystal display panel Download PDF

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Publication number
CN205317974U
CN205317974U CN201620061474.1U CN201620061474U CN205317974U CN 205317974 U CN205317974 U CN 205317974U CN 201620061474 U CN201620061474 U CN 201620061474U CN 205317974 U CN205317974 U CN 205317974U
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wire grid
grid polarizer
light
absorption layer
reflection bar
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何晓龙
王维
姚继开
黄华
周婷婷
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Abstract

The utility model provides an inclined to one side vibration -damping sheet of wiregrating and liquid crystal display panel belongs to the inclined to one side vibration -damping sheet technical field of wiregrating, and it can be solved the inclined to one side vibration -damping sheet of present wiregrating and go back the environment light reflex easily, influences the problem of display effect. The utility model discloses an inclined to one side vibration -damping sheet of wiregrating includes a plurality of being parallel to each other and the interval reflection strip of arranging, and locates the light -absorption layer of reflection strip one side.

Description

Wire grid polarizer and display panels
Technical field
This utility model belongs to wire grid polarizer technical field, is specifically related to a kind of wire grid polarizer and display panels.
Background technology
As shown in Figure 1 and Figure 2, wire grid polarizer (WGP, WireGridPolarizer) is a kind of type of polaroid. What wire grid polarizer included being located in substrate 9 multiple is parallel to each other and spaced reflection bar 1 (such as metal wire), and luminous reflectance parallel with reflection bar for polarization direction can be gone back by it, and allows the polarization direction light transmission vertical with reflection bar. The action principle of wire grid polarizer is likely to relevant with the electronics in reflection bar 1 and the effect between different polarization light, is not described in detail at this.
For impervious light, wire grid polarizer is to be reflected back towards rather than absorb. If therefore wire grid polarizer is used in display panels, then incorrect for polarization direction luminous reflectance can be returned in backlight by it, these light are likely to be changed into the polarized light that polarization direction is correct when again penetrating after reflection in the backlight, can pass through wire grid polarizer, thus improve the utilization rate to luminous energy.
But, the reflection of ambient light that part is injected display panels by the external world also can be gone back by above wire grid polarizer, therefore when environment light is stronger, display effect can be impacted by the environment light of reflection.
Utility model content
Reflection of ambient light is easily gone back by this utility model for existing wire grid polarizer, the problem affecting display effect, it is provided that a kind of wire grid polarizer avoiding reflection environment light and display panels.
Solving this utility model technical problem and be employed technical scheme comprise that a kind of wire grid polarizer, it includes multiple reflection bar being parallel to each other and being intervally arranged, and is located at the light-absorption layer of described reflection bar side.
Preferably, described light-absorption layer is made up of amorphous silicon material.
Preferably, the thickness of described light-absorption layer is at 100nm to 1000nm.
Preferably, described wire grid polarizer also includes the high refractive index layer being located at described light-absorption layer away from reflection bar side, and the refractive index of the material of described high refractive index layer is more than or equal to 1.5.
It may further be preferable that described high refractive index layer is made up of silicon nitride or silicon oxide.
It may further be preferable that the thickness of described high refractive index layer is at 50nm to 1000nm.
Preferably, described reflection bar is made up of metal material.
Preferably, the width of every described reflection bar distance between 50nm to 200nm, neighboring reflection bar is at 50nm to 200nm.
Preferably, described wire grid polarizer also includes transparent substrate, and described light-absorption layer is located at the described reflection bar side away from substrate.
Solve this utility model technical problem and be employed technical scheme comprise that a kind of display panels, comprising:
Above-mentioned wire grid polarizer, wherein the reflection bar of wire grid polarizer has the side exiting surface towards display panels of light-absorption layer.
In wire grid polarizer of the present utility model, being provided with light-absorption layer in reflection bar side, therefore the light major part being irradiated to from this side reflection bar can be absorbed by light-absorption layer, what reflect back is little, and is mapped to another sidelight of reflection bar and still can be reflected back or pass through; Thus when this wire grid polarizer for display panels, the luminous reflectance from backlight can be gone back to improve the efficiency of light energy utilization by it, and can reduce the reflection to environment light simultaneously, thus improving display effect.
Accompanying drawing explanation
Fig. 1 is the plan structure schematic diagram of existing wire grid polarizer;
Fig. 2 is the cross-sectional view of existing wire grid polarizer;
Fig. 3 is the plan structure schematic diagram of the another kind of wire grid polarizer of embodiment of the present utility model;
Fig. 4 is the cross-sectional view of the wire grid polarizer of Fig. 3;
Fig. 5 be embodiment of the present utility model another kind of wire grid polarizer preparation process in coating impressing glue after cross-sectional view;
Fig. 6 be embodiment of the present utility model another kind of wire grid polarizer preparation process in carry out cross-sectional view during nano impression;
Fig. 7 be embodiment of the present utility model another kind of wire grid polarizer preparation process in nano impression complete after cross-sectional view;
Fig. 8 be embodiment of the present utility model another kind of wire grid polarizer preparation process in aluminum metal layer has been etched after cross-sectional view;
Fig. 9 is the cross-sectional view of the another kind of wire grid polarizer of embodiment of the present utility model;
Figure 10 is the cross-sectional view of another wire grid polarizer of embodiment of the present utility model;
Figure 11 is the different wire grid polarizers reflectance curve figure to the light of different wave length of embodiment of the present utility model;
Figure 12 is the different wire grid polarizers reflectance curve figure to the light of different wave length with high refractive index layer of embodiment of the present utility model;
Wherein, accompanying drawing is labeled as: 1, reflection bar; 11, aluminum metal layer; 2, light-absorption layer; 21, amorphous silicon layer; 3, high refractive index layer; 31, silicon nitride layer; 5, protective layer; 8, impressing glue; 89, nano-imprint stamp; 9, substrate.
Detailed description of the invention
For making those skilled in the art be more fully understood that the technical solution of the utility model, below in conjunction with the drawings and specific embodiments, this utility model is described in further detail.
Embodiment 1:
As shown in Figures 3 to 12, the present embodiment provides a kind of wire grid polarizer, and it includes multiple reflection bar 1 being parallel to each other and being intervally arranged, and is located at the light-absorption layer 2 of reflection bar 1 side.
That is, the wire grid polarizer of the present embodiment includes the reflection bar 1 of routine, multiple reflection bars 1 arrange in the same direction, and between have interval, thus constituting " wiregrating " structure, the light that polarization direction is parallel with reflection bar 1 can be gone back by it, and allows the polarization direction light transmission vertical with reflection bar 1, can play the effect of " polaroid ". And in reflection bar 1 side, it is additionally provided with the light-absorption layer 2 that light can be played stronger Absorption, can sponge being mapped to light major part thereon.
In the wire grid polarizer of the present embodiment, it is additionally provided with light-absorption layer 2 in reflection bar 1 side, therefore be irradiated to the light major part reflection bar 1 from this side and can be absorbed by light-absorption layer 2, and reflect back little, the light being simultaneously mapped to reflection bar 1 opposite side still can be reflected back or pass through;Thus when this wire grid polarizer for display panels, the luminous reflectance from backlight both can be gone back to improve the efficiency of light energy utilization by it, and can reduce the reflection to environment light simultaneously, thus improving display effect.
Preferably, each reflection bar 1 is made up of metal material.
That is, available metal material (such as rate, copper etc.) manufactures reflection bar 1 so that it is become the form of " metal wire ", this is because namely metal material generally itself has higher reflectance, and cost is low, mature preparation process, it it is the material of most suitable reflection bar 1.
Preferably, the width of every reflection bar 1 distance between 50nm to 200nm, neighboring reflection bar 1 is at 50nm to 200nm.
The reflecting properties of wire grid polarizer is closely related with the dimensional parameters of wherein reflection bar 1, typically, should be at range above for the width and spacing processing the reflection bar 1 of visible ray.
Preferably, wire grid polarizer also includes transparent substrate 9, and light-absorption layer 2 is located at the reflection bar 1 side away from substrate 9.
It is to say, as shown in Figure 4, above reflection bar 1 can be located in transparent substrate 9, and in the case, light-absorption layer 2 is preferably farther from substrate 9 than reflection bar 1, and reflection bar 1 is located in substrate 9 in other words, and light-absorption layer 2 is located on reflection bar 1.
Wherein, this substrate 9 can be made up of glass, it is possible to is made up of flexible transparent polymer material.
Certainly, in wire grid polarizer, may also include other known structures, for instance, as shown in Figure 10, transparent protective layer 5 can be provided with, reflection bar 1, light-absorption layer 2 etc. is all enclosed in wherein to protect.
Preferably, light-absorption layer 2 is made up of amorphous silicon material.
That is, available amorphous silicon material (a-Si) forms above light-absorption layer 2, why such, it is because as it was previously stated, the size of reflection bar 1 is very tiny, therefore on it, size of light-absorption layer 2 is also very tiny, and energy light-absorbing organic material (such as black matrix) majority of routine is difficult to reach so high formed precision, it have been investigated that, amorphous silicon material both can be precisely formed above light-absorption layer 2, it is possible to plays higher extinction effect.
Preferably, the thickness of light-absorption layer 2 is at 100nm to 1000nm.
Obviously, if the thickness of light-absorption layer 2 is too thin, the effect of extinction can not be played, if and its thickness is too big, then the light passed through between reflection bar 1 can be produced impact (as being likely to also be sponged by the oblique light passed through) again, thus reducing the transmitance of wire grid polarizer. It has been investigated that, the light-absorption layer 2 of above thickness range is proper.
By FDTD algorithm, to structure, (wherein reflection bar 1 material is aluminum as shown in Figure 4, reflection bar 1 width is 100nm, be spaced apart 100nm) wire grid polarizer to the reflectance of different wavelengths of light (course refer to light from have light-absorption layer 2 side irradiate time) be simulated, obtain the reflectance curve of the wire grid polarizer with different-thickness non-crystalline silicon light-absorption layer 2 as shown in figure 11. Visible, compared with the wire grid polarizer not having light-absorption layer 2, respectively having the wire grid polarizer of light-absorption layer 2 reflectance in visible wavelength (400nm to 760nm) scope all substantially to reduce, this shows that the wire grid polarizer of the present embodiment can play the effect reducing reflection of ambient light really.
Preferably, wire grid polarizer also includes the high refractive index layer 3 being located at light-absorption layer 2 away from reflection bar 1 side, and the refractive index of the material of high refractive index layer 3 is more than or equal to 1.5, it is furthermore preferred that high refractive index layer 3 is made up of silicon nitride or silicon oxide.
As shown in Figure 9, for further improving extinction effect, therefore also can set up the high refractive index layer 3 with high index at light-absorption layer 2 away from the side (as on light-absorption layer 2) of reflection bar 1, thus by light collection in light-absorption layer 2 surface, improving its absorption to light. Concrete, the refractive index of the material of this high refractive index layer 3 should be greater than or equal to 1.5, more preferably in 1.5 to 3, and its concrete material can be silicon nitride or silicon oxide, and both materials had both met above refractive index condition, it is also possible to forms enough fine structure.
Preferably, the thickness of high refractive index layer 3 is at 50nm to 1000nm.
Obviously, high refractive index layer 3 also has certain preferred thickness range, crosses thin, and not having should be effective, blocked up, can structural stability etc. be impacted. It has been investigated that, above thickness range is preferred.
By FDTD algorithm, to structure as shown in Figure 9 (it is that the non-crystalline silicon light-absorption layer 2 thick for 300nm that has as shown in Figure 4 adds high refractive index layer 3) wire grid polarizer to the reflectance of different wavelengths of light (course refer to light from have light-absorption layer 2 side irradiate time) be simulated, obtain as shown in figure 12 there is different-thickness silicon nitride (Si3N4) reflectance curve of wire grid polarizer of high refractive index layer 3. Visible, after adding high refractive index layer 3, it is possible to reduce wire grid polarizer reflectance in visible-range further.
Concrete, owing to the structure in above wire grid polarizer is very tiny, therefore it is difficult to be prepared by conventional photoetching process, and can be formed by nano impression mode, and its preparation method specifically comprises the steps that
S01, in substrate 9, sequentially form aluminum metal layer 11 (if thickness is at 100nm to 200nm), amorphous silicon layer 21 (if thickness is at 100nm to 300nm), silicon nitride layer 31 (if thickness is at 100nm to 300nm), last coating impressing glue 8 (such as thickness 0.2 μm to 1 μm) thereon, obtains structure as shown in Figure 5.
S02, as shown in Figure 6, with nano-imprint stamp 89 extrusion line gate figure in impressing glue 8, will remain in impressing glue 8 ashing of recess with oxygen plasma afterwards and remove, obtain structure as shown in Figure 7.
S03, successively with sulfur hexafluoride/oxygen etch nitride silicon layer 31, with chlorine/sulfur hexafluoride/helium etching amorphous silicon layer 21, with chlorine/boron chloride etch aluminum metal level 11, obtain the structure including reflection bar 1, light-absorption layer 2, high refractive index layer 3 as shown in Figure 8.
S04, by residual photoresist 8 ashing remove, obtain wire grid polarizer as shown in Figure 9.
S05, optional, can also continue to protective layer 5, reflection bar 1, light-absorption layer 2, high refractive index layer 3 are closed, obtain another kind of wire grid polarizer as shown in Figure 10.
Embodiment 2:
The present embodiment provides a kind of display panels, and it includes above-mentioned wire grid polarizer, and the reflection bar of wire grid polarizer has the side exiting surface towards display panels of light-absorption layer.
It is to say, above wire grid polarizer can be used in conventional display panels, thus reducing its reflection to environment light, improve display effect.
Wherein, in display panels, the polaroid (or deserving to be called polaroid and lower polaroid) of light emission side and incident side can all adopt above wire grid polarizer, it is possible to only one of which is above wire grid polarizer, and another is still the polaroid of routine. No matter but where wire grid polarizer is positioned at, it should be all light-absorption layer than the reflection bar light emission side closer to display panels, so that it both can reduce the reflection to environment light, improves display effect, luminous reflectance from backlight can be gone back again, improve the efficiency of light energy utilization.
Wherein, display panels can include the substrate such as array base palte, color membrane substrates, and these substrates are respectively provided with respective substrate.Now, above wire grid polarizer can have oneself independent substrate and be attached to outside these substrates; Or, the substrate of wire grid polarizer also can with the substrate of these substrates " public ", and namely above reflection bar, light-absorption layer, high refractive index layer, protective layer etc. also can be formed directly in the Basolateral of these substrates.
Concrete, this display panels can be any product with display function or the parts such as Electronic Paper, mobile phone, panel computer, television set, display, notebook computer, DPF, navigator.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and the illustrative embodiments that adopts, but this utility model is not limited thereto. For those skilled in the art, when without departing from spirit of the present utility model and essence, it is possible to make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.

Claims (10)

1. a wire grid polarizer, including multiple reflection bars being parallel to each other and being intervally arranged, it is characterised in that described wire grid polarizer also includes:
It is located at the light-absorption layer of described reflection bar side.
2. wire grid polarizer according to claim 1, it is characterised in that
Described light-absorption layer is made up of amorphous silicon material.
3. wire grid polarizer according to claim 1, it is characterised in that
The thickness of described light-absorption layer is at 100nm to 1000nm.
4. wire grid polarizer according to claim 1, it is characterised in that also include:
Being located at the described light-absorption layer high refractive index layer away from reflection bar side, the refractive index of the material of described high refractive index layer is more than or equal to 1.5.
5. wire grid polarizer according to claim 4, it is characterised in that
Described high refractive index layer is made up of silicon nitride or silicon oxide.
6. wire grid polarizer according to claim 4, it is characterised in that
The thickness of described high refractive index layer is at 50nm to 1000nm.
7. wire grid polarizer as claimed in any of claims 1 to 6, it is characterised in that
Described reflection bar is made up of metal material.
8. wire grid polarizer as claimed in any of claims 1 to 6, it is characterised in that
The width of every described reflection bar distance between 50nm to 200nm, neighboring reflection bar is at 50nm to 200nm.
9. wire grid polarizer as claimed in any of claims 1 to 6, it is characterised in that also include:
Transparent substrate, described light-absorption layer is located at the described reflection bar side away from substrate.
10. a display panels, it is characterised in that including:
Wire grid polarizer described in any one in claim 1 to 9, wherein the reflection bar of wire grid polarizer has the side exiting surface towards display panels of light-absorption layer.
CN201620061474.1U 2016-01-21 2016-01-21 Inclined to one side vibration -damping sheet of wiregrating and liquid crystal display panel Active CN205317974U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105938214A (en) * 2016-07-04 2016-09-14 深圳市华星光电技术有限公司 Subwavelength grating polarizer and manufacturing method thereof
CN107991730A (en) * 2018-01-18 2018-05-04 深圳市华星光电技术有限公司 Polaroid and preparation method thereof, display panel
WO2018161432A1 (en) * 2017-03-09 2018-09-13 深圳市华星光电技术有限公司 Manufacturing method of display panel, and wire grid polarizer and manufacturing method thereof
CN110082852A (en) * 2018-10-01 2019-08-02 友达光电股份有限公司 Polarisation substrate and its manufacturing method
CN110308507A (en) * 2018-03-20 2019-10-08 青岛海信电器股份有限公司 A kind of wire grating polarizing film and its manufacturing method, display panel and display device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105938214A (en) * 2016-07-04 2016-09-14 深圳市华星光电技术有限公司 Subwavelength grating polarizer and manufacturing method thereof
WO2018161432A1 (en) * 2017-03-09 2018-09-13 深圳市华星光电技术有限公司 Manufacturing method of display panel, and wire grid polarizer and manufacturing method thereof
US10509258B2 (en) 2017-03-09 2019-12-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Manufacturing method of display panel and wire-grating polarizer and manufacturing method thereof
CN107991730A (en) * 2018-01-18 2018-05-04 深圳市华星光电技术有限公司 Polaroid and preparation method thereof, display panel
CN110308507A (en) * 2018-03-20 2019-10-08 青岛海信电器股份有限公司 A kind of wire grating polarizing film and its manufacturing method, display panel and display device
CN110308507B (en) * 2018-03-20 2021-12-03 海信视像科技股份有限公司 Metal wire grid polarizer, manufacturing method thereof, display panel and display device
CN110082852A (en) * 2018-10-01 2019-08-02 友达光电股份有限公司 Polarisation substrate and its manufacturing method

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