CN205023841U - Micro -nano electron device based on hydrone intercalation coupling regulation and control - Google Patents
Micro -nano electron device based on hydrone intercalation coupling regulation and control Download PDFInfo
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- CN205023841U CN205023841U CN201520674761.5U CN201520674761U CN205023841U CN 205023841 U CN205023841 U CN 205023841U CN 201520674761 U CN201520674761 U CN 201520674761U CN 205023841 U CN205023841 U CN 205023841U
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Abstract
The utility model discloses a based on the micro -nano electron device of little nanostructured with basement coupling regulation and control, including a basement and a little nanostructured layer, wherein, include further that a hydrone intercalation is located between basement and the little nanostructured layer. Through control injected water molecule between little nanostructured and basement, can effectively regulate and control with electricity, the thermal behavior at basement interface to little nanostructured among the micro -nano electron device.
Description
Technical field
The utility model discloses a kind of micro-nano electronic device that there is micro nano structure and be coupled with substrate, belong to micro-nano field of electronic devices.
Background technology
A lot of two-dimentional micro nano structure and it is carried out to the derivative of physical chemistry modifying, because of its carrier concentration, thermal conductivity, adjustable metal or the characteristic such as semiconductive, structural stability, becomes basic structure important in micro-nano electronic device.
Along with the maturation of large area, high-quality micro Nano material technology of preparing, by this type of material direct growth or transfer in various substrate, realize basic components and parts and be practical gradually.The electricity that it should be noted that between substrate is coupled and can changes the electronic structure, transport property etc. of two-dimensional material to a certain extent.In addition, during electronic device work, power is higher, and the interface of its extraneous contact mostly is more weak interaction (such as Van der Waals interaction force etc.).
Therefore how to keep the electric insulation between micro nano structure and substrate, and the heat produced is run to device simultaneously and effectively dissipate, become the necessary condition of safeguard work efficiency and stability.
Utility model content
In sum, necessaryly provide a kind of and can keep the electric insulation between micro nano structure and substrate, can effectively to dissipate the micro-nano electronic device of the heat produced in running simultaneously.
To be coupled with substrate the micro-nano electronic device regulated and controled based on micro nano structure, to comprise a substrate and a micro nano structure layer, wherein, comprise a hydrone intercalation further between described substrate and micro nano structure layer.
Described hydrone intercalation is held between described substrate and micro nano structure layer.
Form an interface between described substrate and micro nano structure layer, described hydrone intercalation comprises multiple hydrone and is scattered in interface between described substrate and micro nano structure layer, forms one micro nano structure/hydrone/substrate interface.
Described micro nano structure layer is two-dimensional layer material, comprises multiple two-dimentional micro nano structure.
Described two-dimentional micro nano structure is the two-dimensional layer material of one or more compositions in Graphene, hexagonal boron nitride, Transition-metal dichalcogenide.
Form multiple space between described micro nano structure layer and substrate, the hydrone in the sub-intercalation of described water layer infiltrates through in described space.
Described hydrone intercalation weakens or eliminates the electronics coupled between micro nano structure layer and substrate, makes electric insulation between micro nano structure layer and substrate.
Hydrone in described hydrone intercalation is saturation state.
Relative to prior art, provided by the inventionly to be coupled with substrate the micro-nano electronic device regulated and controled based on micro nano structure, by hydrone intercalation, the interface between micro nano structure and substrate is regulated and controled, micro nano structure can be made to keep smooth, and the character had every conductance heat, namely effective guarantee electronic device and substrate interface heat dissipation efficiency can realize electric insulation simultaneously, have wide practical use in micro-nano field of electronic devices.
Accompanying drawing explanation
The structural representation of the micro-nano electronic device that Fig. 1 provides for the utility model embodiment.
Fig. 2 be in micro-nano electronic device hydrone intercalation to the regulation and control schematic diagram of two-dimentional micro nano structure and substrate electron density distribution, when figure (a) is not for injecting hydrone, Graphene/copper substrate differential charge Density Distribution; After figure (b) is injection hydrone, Graphene/hydrone/copper substrate differential charge Density Distribution.
Fig. 3 is for hydrone intercalation in electronic device micro-nano shown in Fig. 1 is to the regulation and control of interface thermal conductivity between two-dimentional micro nano structure and substrate.
Detailed description of the invention
Also in conjunction with specific embodiments the technical solution of the utility model is stated further in detail according to Figure of description below.
Refer to Fig. 1, what the utility model provided to be coupled with substrate the micro-nano electronic device 100 regulated and controled based on micro nano structure, comprise substrate 10, micro nano structure layer 20 and a hydrone intercalation 30, described hydrone intercalation 30 is between described substrate 10 and micro nano structure layer 20.
The material of described substrate 10 can be the metals such as nickel, copper, ruthenium, the metal oxide such as alloy, magnesia, the insulators such as silica, silicon, the semiconductors such as carborundum, can be silicon chip, transparent substrates glass, micro-grid and flexible and transparent macromolecular material (such as PETG) etc. simultaneously, can select as required.In the present embodiment, described substrate 10 material is copper.
Described micro nano structure layer 20 can be two-dimensional layer material, comprises multiple two-dimentional micro nano structure, and described two-dimentional micro nano structure can be the two-dimentional micro nano structures such as Graphene, hexagonal boron nitride, Transition-metal dichalcogenide (as molybdenum bisuphide).Described micro nano structure layer 20 can cover the surface of described substrate 10, and and form an interface between described substrate 10, and between described micro nano structure layer 20 and substrate 10, there is multiple space.In the present embodiment, the material of described micro nano structure layer 20 is Graphene.
Described hydrone intercalation 30 is between described micro nano structure layer 20 and substrate 10, concrete, and described hydrone intercalation 30 is held between described micro nano structure layer 20 and substrate 10, and is distributed in the interface between described micro nano structure layer 20 and substrate 10.Further, described hydrone intercalation 30 comprises multiple hydrone, and described hydrone is scattered in the interface between described micro nano structure layer 20 and described substrate 10, and infiltrates through in the space between described micro nano structure layer 20 and substrate 10.Described micro nano structure layer 20, hydrone intercalation 30 and substrate 10 form micro nano structure/hydrone/substrate interface.Described hydrone intercalation 30 can to the form of two-dimentional micro nano structure and between itself and substrate 10 interface electricity, thermal property regulation and control.The thickness of described hydrone intercalation 30 can be selected according to the needs of micro-nano electronic device 100.
Concrete, in two-dimentional micro nano structure/substrate interface, two-dimentional micro nano structure can containing fold in various degree or fluctuating, and the existence of fold or fluctuating can have a strong impact on the operating efficiency of micro-nano device.The existence of hydrone intercalation 30 can effectively reduce fold and fluctuating, and then ensures the flatness of two-dimentional micro nano structure on substrate interface.
In addition, see also Fig. 2, contact between the two-dimentional micro nano structure such as Graphene and substrate 10 can form the electricity coupled modes such as contact doping, thus causes the change of two-dimentional micro nano structure electronic structure, the movement of such as fermi level, is coupled with the hydridization of base material electron orbit.The existence of hydrone intercalation 30 can weaken the electronics coupled even eliminated between two-dimentional micro nano structure and substrate 10, reaches the effect of ' electric insulation ', thus ensures the electric property of two-dimentional micro nano structure.
In addition by changing the implantation concentration of hydrone, the electric property of the distribute all right interface of regulation and control further electricity coupling and device.
See also Fig. 3, the concentration of hydrone intercalation, the thermal property such as heat dissipation distributed for interface have important impact.When hydrone intercalation concentration is less, as being less than 4/nm
2, interface thermal conductivity meeting decrease to some degree; And when hydrone intercalation concentration increases gradually, interface thermal conductivity increases gradually, and approach the interface thermal conductivity not containing hydrone intercalation.Therefore the existence of hydrone intercalation is very little for the impact of interface thermal conductivity, especially after hydrone intercalation is saturated, as being greater than 10/nm
2, interface thermal conductivity only has very little change relative to not having during intercalation, reaches the effect of ' thermal conductance is led to '.
Further, the invention provides a kind of preparation method of the micro-nano electronic device regulated and controled that is coupled with substrate based on micro nano structure, comprise the steps:
Step S10, provides a substrate 10;
Step S20, arranges a two-dimentional micro nano structure layer 20 on the surface of described substrate 10; And
Step S30, forms a hydrone intercalation 30 between described substrate 10 and two-dimentional micro nano structure layer 20.
In step S20, described two-dimentional micro nano structure layer 20 can be grown on the surface of described substrate 10, also after the growth of other substrate (not shown), can be transferred to the surface of described substrate 10.
Concrete, by methods such as chemical vapour deposition (CVD)s, Graphene can grow in multiple growth substrate, and growth substrate mainly comprises: the insulators such as metal oxide, silica such as the metals such as nickel, copper, ruthenium, alloy, magnesia.The difference of growth according to carbon source (mainly the hydrocarbon gas such as methane, ethene, acetylene) of Graphene and the difference of growth substrate, required air pressure and temperature are not identical yet.Further, available reducibility gas (hydrogen) or inert gas (argon gas, helium) or the mist of the two provide dividing potential drop to reach required pressure for carrier gas.In graphene growth process, because lattice mismatch Graphene can form fold, the Graphene/metal containing fold or interface at this moment will be formed.Other two-dimensional layer material, such as molybdenum bisuphide, hexagonal boron nitride etc. also have similar feature, and then form the interface between molybdenum bisuphide, boron nitride etc. and growth substrate.
Further, two-dimentional micro nano structure, after growth completes, can be transferred to other substrate surface by diverse ways and then be formed new interface.Such as can adopt corrosion substrate method, corrosion substrate method is owing to employing transfer medium (such as polymethyl methacrylate film), ensure that in transfer process and can not destroy corresponding micro nano structure and have good reliability, so be widely used in the micro nano structure shifting chemical vapour deposition technique generation.Much different structures can be formed by transfer.Graphene can be transferred in the substrates such as silicon chip, transparent substrates glass, micro-grid and flexible and transparent macromolecular material (such as PETG) and then form multiple interface.In transfer process, due to the impact of the interaction between Graphene and substrate and extraneous factor, two-dimentional micro nano structure can produce fold, now can form the Graphene/substrate interface containing fold.Other two-dimensional layer material, such as molybdenum bisuphide, hexagonal boron nitride etc. also have similar feature, and then form the interface between molybdenum bisuphide, boron nitride etc. and transfer substrate.
In step s 30, after two-dimentional micro nano structure and substrate interface are formed, can be placed in the water vapor under certain pressure intensity by two-dimentional micro nano structure and substrate, according to polymolecular adsorption theory, hydrone can enter between two-dimentional micro nano structure and substrate.After system reaches balance, two-dimentional micro nano structure and substrate are taken out, now hydrone will stable existence and between micro nano structure and substrate, forms the structure of hydrone intercalation 30.By changing the pressure of water vapour in initial environment, micro nano structure/hydrone/substrate interface that the density of hydrone intercalation and then formation have variable concentrations hydrone intercalation can be controlled.
In addition, the numbers of plies of two-dimentional micro nano structure in micro-nano electronic device such as Graphene, hexagonal boron nitride and molybdenum bisuphide have important impact for interface thermal property, and the change of the number of plies can change interface for the impact of overall performance and then the thermal property regulating and controlling interface.
Of the present utility modelly to be coupled with substrate the micro-nano electronic device that regulates and controls and preparation method based on micro nano structure, by hydrone intercalation, the interface between micro nano structure and substrate to be processed, there is following beneficial effect.
First, the intercalation of hydrone can affect the interaction between micro nano structure/substrate, frictional force between two-dimentional micro nano structure and base is weakened, and then the fold in micro nano structure can be reduced due to the existence of hydrone intercalation even disappear, keep micro nano structure in suprabasil flatness, and then ensure the high efficiency work of micro-nano electronic device.
Secondly, the intercalation of hydrone makes the impact of substrate on two-dimentional micro nano structure characteristic electron in micro nano structure/substrate interface weaken, and even realizes the electrical insulation at interface.In addition, by the density that changes hydrone intercalation with distribute and can be coupled the regulation and control carried out to a certain degree for its electricity.
Again, the thermal property (available interface thermal conductivity characterizes) at the interface between two-dimentional micro nano structure and substrate effectively can be regulated and controled by the insertion of hydrone.When the hydrone concentration inserted is lower, interface thermal conductivity has certain reduction, but along with the increase of hydrone implantation concentration, interface thermal conductivity can increase gradually, and close to the interface thermal conductivity not having gas molecule to inject, and effective guaranteed heat consumption is fallen apart efficiency.In addition, by changing the regulation and control that the parameters such as density at interface of hydrone intercalation and distribution also can be carried out to a certain degree for heat dissipation.
As can be seen here, two-dimentional micro nano structure can be made to keep smooth based on the micro nano structure micro-nano electronic device regulated and controled that to be coupled with substrate, and the character had every conductance heat, namely effective guarantee electronic device and substrate interface heat dissipation efficiency can realize electric insulation simultaneously, have wide practical use in micro-nano field of electronic devices.
In addition, those skilled in the art also can do other change in the utility model spirit, and these changes done according to the utility model spirit, all should be included in the utility model scope required for protection certainly.
Claims (8)
1., based on a micro-nano electronic device for hydrone intercalation coupling regulation and control, comprise a substrate and a micro nano structure layer, it is characterized in that, comprise a hydrone intercalation further between described substrate and micro nano structure layer.
2. micro-nano electronic device as claimed in claim 1, is characterized in that, described hydrone intercalation is held between described substrate and micro nano structure layer.
3. micro-nano electronic device as claimed in claim 1, it is characterized in that, an interface is formed between described substrate and micro nano structure layer, described hydrone intercalation comprises multiple hydrone and is scattered in interface between described substrate and micro nano structure layer, forms one micro nano structure/hydrone/substrate interface.
4. micro-nano electronic device as claimed in claim 1, is characterized in that, described micro nano structure layer is two-dimensional layer material, comprises multiple two-dimentional micro nano structure.
5. micro-nano electronic device as claimed in claim 4, is characterized in that, described two-dimentional micro nano structure is the two-dimensional layer material of one or more compositions in Graphene, hexagonal boron nitride, Transition-metal dichalcogenide.
6. micro-nano electronic device as claimed in claim 4, is characterized in that, forms multiple space between described micro nano structure layer and substrate, and the hydrone in the sub-intercalation of described water layer infiltrates through in described space.
7. micro-nano electronic device as claimed in claim 6, is characterized in that, described hydrone intercalation weakens or eliminates the electronics coupled between micro nano structure layer and substrate, makes electric insulation between micro nano structure layer and substrate.
8. micro-nano electronic device as claimed in claim 6, is characterized in that, the hydrone in described hydrone intercalation is saturation state.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111517314A (en) * | 2020-04-26 | 2020-08-11 | 中国科学院重庆绿色智能技术研究院 | Graphene testing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111517314A (en) * | 2020-04-26 | 2020-08-11 | 中国科学院重庆绿色智能技术研究院 | Graphene testing method |
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Granted publication date: 20160210 Termination date: 20180902 |