CN204897391U - Piezoelectricity micro -displacement based on flexible hinge enlargies - Google Patents
Piezoelectricity micro -displacement based on flexible hinge enlargies Download PDFInfo
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- CN204897391U CN204897391U CN201520473546.9U CN201520473546U CN204897391U CN 204897391 U CN204897391 U CN 204897391U CN 201520473546 U CN201520473546 U CN 201520473546U CN 204897391 U CN204897391 U CN 204897391U
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Abstract
Piezoelectricity micro -displacement based on flexible hinge enlargies is including frame and cargo platform, machine shelf location microdrive and mechanism of amplification, the mechanism of amplification is double -rocker mechanism, the one end that the connecting rod was kept away from to the initiative rocker of double -rocker mechanism is established and is extended the section, and the free end that the initiative rocker extends the section supports the microdrive, initiative rocker and extension section use the initiative rocker and the pin joint of frame to form enlarged lever as the fulcrum, the connecting rod is kept away from the one end of initiative rocker and is established the extension section, cargo platform and decoupling zero mechanism are connected, and decoupling zero mechanism comprises at least a pair of decoupling zero unit, and two decoupling zero units are about cargo platform central symmetry, every decoupling zero unit comprises linking arm and a pair of flexible arm, every flexible arm one end and hinged rack, and the other end is articulated with the linking arm, and the other end of linking arm is articulated with cargo platform, it is articulated with arbitrary decoupling zero unit that the connecting rod extends the section. The utility model has the advantages of can enlarge the drive displacement of microdrive.
Description
Technical field
The utility model relates to the micromotion platform that a kind of piezoelectric stack drives.
Technical background
As the key components of MEMS, micromotion platform is widely used in loading precision instrument or its critical component as common optical lens, the whole bar of accurate micro-behaviour and micro clamping device.Therefore, micromotion platform needs to have multi-dimensional movement and high resolution ratio.
Drive with static broach, electrothermal drive compare with marmem driving etc., piezoelectric stack drive have that resolution ratio is high, driving force is large, Hz-KHz is wide, fast response time and the advantage such as dynamic characteristic is good, be thus particularly suitable for driving micromotion platform.In micro assemby technical field, often need to use micromotion platform to drive micro clamping device to carry out micron level to other motion of grade, therefore, micromotion platform should have Long Distances, in addition, in order to better carry out high-precision assembling, needing to carry out on-line monitoring to the position of micromotion platform, and carrying out FEEDBACK CONTROL.
The existing detection about micromotion platform, adopt the methods such as the detection of vision-based detection, laser sensor or capacitance detecting to come the position of detection platform, testing cost is higher, is also difficult to be integrated in micro OS go more.
Utility model content
In order to the shortcoming that the micromotion platform stroke overcoming prior art existence is large not, the utility model provides a kind of piezoelectric micromotion platform amplified based on flexible hinge that can amplify the drive displacement of microdrive.
Based on the piezoelectric micromotion platform that flexible hinge amplifies, comprise frame and article carrying platform;
Frame is installed the enlarger of the drive displacement of microdrive and amplification microdrive;
Enlarger is the double rocker mechanism be installed in frame; The drive crank of double rocker mechanism establishes extension away from one end of connecting rod, and the free end of drive crank extension props up microdrive; Drive crank and extension thereof amplify lever with the pin joint of drive crank and frame for fulcrum is formed; Connecting rod establishes extension away from one end of drive crank;
Article carrying platform is connected with the decoupling mechanism making it along assigned direction translation, and decoupling mechanism is made up of at least one pair of decoupling unit, and two decoupling unit are about article carrying platform Central Symmetry; Each decoupling unit is made up of linking arm and pair of flexible arm, each flexible arm one end and frame hinged, the other end and linking arm hinged, the other end and the article carrying platform of linking arm are hinged;
Connecting rod extension and arbitrary decoupling unit hinged.
Further, microdrive is piezoelectricity fold stack driver, the corresponding displacement transducer of each flexible arm.
Further, displacement transducer is that foil gauge is detected in a pair position, a pair displacement detecting foil gauge is bonded and fixed on the two sides of flexible arm respectively, foil gauge composition bridgt circuit is detected in the position of often pair of decoupling unit, after bridgt circuit is amplified by strain amplifier, be transferred on industrial computer by A/D mouth by PCI board, industrial computer calculates the displacement obtaining platform
,
for the displacement of platform,
for the output voltage of bridgt circuit after strain amplifier amplifies,
for proportionality coefficient.
Bridgt circuit detects foil gauge by each flexible arm being chosen a position, and the bridgt circuit that foil gauge forms a full-bridge mode is detected in 4 positions on four flexible arms, and a pair decoupling unit forms the bridgt circuit of 2 full-bridge modes.Or the bridgt circuit that foil gauge forms half-bridge mode is detected in 1 position that bridgt circuit selects 1 position to detect foil gauge and another decoupling unit by each decoupling unit, and a pair decoupling unit forms the bridgt circuit of 4 half-bridge mode.
The utility model before use, needs first to calibrate acquisition proportionality coefficient
k.Specific practice is: the displacement first detecting current platform with laser sensor
, the output voltage of foil gauge is detected in position
, can obtain
.
Further, connecting rod extension size is greater than connecting rod not containing the size of extension part.Connecting rod is L-shaped.
Further, decoupling mechanism comprises a pair decoupling unit arranged along X axis and a pair decoupling unit arranged along Y-axis; Often pair of decoupling unit connects an enlarger respectively, and each enlarger is a corresponding microdrive respectively.
Further, in each decoupling unit, linking arm is made up of a pair parallel support arm; The connecting rod extension of linking arm, flexible arm and enlarger is all articulated with a connection piece.
Further, four decoupling unit are with the center of article carrying platform for center of circle array distribution, and adjacent flexible arm is articulated with the same hinge in frame, and all flexible arms surround a parallelogram.
Further, article carrying platform is in square, and decoupling unit lays respectively at the mid point on each limit of article carrying platform, and all flexible arms are isometric, and flexible arm surrounds a square.
Further, frame, double rocker mechanism and parallel-crank mechanism obtain through Linear cut, it is the first cutting gap between frame and drive crank, first cutting zone and piezoelectricity fold stack driver matched in clearance, have gap between drive crank extension and frame, piezoelectricity fold stack driver is contacted with drive crank extension by pre-loading screw; The region that frame, drive crank, passive rocking bar surround is the second cutting gap; The region that frame, passive rocking bar, connecting rod and flexible arm surround is the 3rd cutting gap; Region between flexible arm and hinge support arm is the 4th cutting gap; Hinge support arm, region between article carrying platform and connector are the 5th cutting gap; The hinge of the hinge of the hinge of the hinge of the hinge of passive rocking bar and frame, passive rocking bar and connecting rod, drive crank and connecting rod, drive crank and frame, connecting rod extension and connector is two incision flexible hinge, and hinge support arm and article carrying platform and the hinged of connector are single otch flexible hinge.
The utility model in use, voltage after power amplifier amplification is applied through to piezoelectricity fold stack driver, piezoelectricity fold stack driver extends, piezoelectricity fold stack driver is by drive crank extension to extrapolation, and drive crank is fulcrum with the hinge of itself and frame, the other end of drive crank is outwards swung; Under the effect of the hinge of connecting rod and drive crank, also outwards move in one end of connecting rod, and connecting rod is fulcrum with the hinge of itself and passive rocking bar, connecting rod extension is inwardly swung; Under the effect of the hinge of connecting rod and connector, decoupling mechanism with the hinge of flexible arm and frame for fulcrum, to
xdirection translational, thus drive article carrying platform edge
xdirection translational.
It can thus be appreciated that drive crank, as first lever, when drive crank extension size is less than drive crank containing the size of extension part, carries out first time amplification to the deformation quantity of piezoelectricity fold stack driver; Connecting rod, as second lever, when connecting rod extension size is greater than connecting rod containing the size of extension part, carries out second time amplification to the deformation quantity of piezoelectricity fold stack driver; Decoupling mechanism then carries out decoupling zero to the deformation quantity that displacement amplifying mechanism passes over, and makes it along a direction translational.Drive crank and connecting rod are rigid member, and therefore they are proportional amplifications to the deformation quantity of piezoelectricity fold stack driver, can obtain the proportionality coefficient between the deformation quantity of piezoelectricity fold stack driver output and the actual displacement of article carrying platform by initialization of calibration.Proportionality coefficient is pre-stored in industrial computer, examinations platform can be realized
xthe object of the displacement in direction.For
ythe displacement in direction, also in like manner can obtain.
When piezoelectricity fold stack driver loses voltage, drive crank, connecting rod and parallel-crank mechanism reset, and article carrying platform gets back to initial position.
The utility model has the advantage of:
1. realize amplification to the output displacement of piezoelectricity fold stack driver and decoupling zero by double rocker mechanism and parallel-crank mechanism, make micromotion platform have Long Distances on two dimension directions.
2. enlarger adopts flexible hinge, and is formed by linear cutter, and whole flexible hinge enlarger is as a whole, has that volume is little, mechanical friction, guiding accuracy are high, machining accuracy is easy to the advantage that ensures and do not need to assemble.
3. be integrated with position to detect, be convenient to carry out high-precision operation and control.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Fig. 2 is flexible hinge enlarger motion schematic diagram.
Fig. 3 is the utility model control structure schematic diagram.
Fig. 4 is flexible hinge enlarger structural representation.
Detailed description of the invention
As shown in Figure 1, based on the piezoelectric micromotion platform that flexible hinge amplifies, frame 1 and article carrying platform 16 is comprised; Frame 1 is installed the enlarger of the drive displacement of microdrive 5 and amplification microdrive 5.
As shown in Figure 2, enlarger is be installed on the double rocker mechanism in frame 1; The drive crank 12 of double rocker mechanism establishes extension away from one end of connecting rod 17, and the free end of drive crank extension 11 props up microdrive 5; Drive crank 12 and extension 11 thereof amplify lever with drive crank 12 and the pin joint of frame 1 for fulcrum is formed; The length of drive crank 12 extension is less than drive crank 12 not containing the length of extension, and therefore, drive crank 12 utilizes lever amplification effect first time to amplify the displacement of microdrive 5.Connecting rod 17 establishes extension away from one end of drive crank 12.Article carrying platform 16 is connected with the decoupling mechanism making it along assigned direction translation, and decoupling mechanism is made up of at least one pair of decoupling unit, and two decoupling unit are about article carrying platform 16 Central Symmetry; Each decoupling unit is made up of linking arm 13 and pair of flexible arm 14, each flexible arm 14 one end and frame 1 hinged, the other end and linking arm 13 hinged, the other end and the article carrying platform 16 of linking arm 13 are hinged; Connecting rod 17 extension and arbitrary decoupling unit hinged.
Drive microdrive 5 deformation, with microdrive 5 by drive crank 12 extension to being extrapolated for example, drive crank 12 is fulcrum with the hinge of itself and frame 1, the other end of drive crank 12 is outwards swung; Drive crank 12 carries out first time as first lever to the deformation quantity of microdrive 5 and amplifies; Under connecting rod 17 effect with the hinge of drive crank 12, also outwards move in one end of connecting rod 17, and connecting rod 17 is fulcrum with the hinge of itself and passive rocking bar 18, connecting rod 17 extension is inwardly swung; Under connecting rod 17 effect with the hinge of connector 15, parallel-crank mechanism with the hinge of itself and frame 1 for fulcrum, to
xdirection translational, thus drive article carrying platform 16 edge
xdirection translational.When microdrive 5 recovers deformation, drive crank 12, connecting rod 17 and decoupling mechanism reset, and article carrying platform 16 gets back to initial position.
Microdrive 5 is piezoelectricity fold stack driver, the corresponding displacement transducer of each flexible arm 14.There is deformation when piezoelectricity fold stack driver obtains electric, during piezoelectricity fold stack driver dead electricity, recover deformation.
As shown in Figure 3, displacement transducer is that foil gauge 2 is detected in a pair position, a pair displacement detecting foil gauge is bonded and fixed on the two sides of flexible arm 14, the position of often pair of decoupling unit is detected foil gauge 2 and is formed bridgt circuit respectively, after bridgt circuit is amplified by strain amplifier, be transferred on industrial computer by A/D mouth by PCI board, industrial computer calculates the displacement obtaining platform
,
for the displacement of platform,
for the output voltage of bridgt circuit after strain amplifier amplifies,
for proportionality coefficient.
Bridgt circuit is the bridgt circuit being made up of a full-bridge mode 4 the positions detection foil gauges 2 each flexible arm chosen on a position detection foil gauge 2, four flexible arms 14, and a pair decoupling unit forms the bridgt circuit of 2 full-bridge modes.Or the bridgt circuit that foil gauge 2 forms half-bridge mode is detected in 1 position that bridgt circuit selects 1 position to detect foil gauge 2 and another decoupling unit by each decoupling unit, and a pair decoupling unit forms the bridgt circuit of 4 half-bridge mode.
The utility model before use, needs first to calibrate acquisition proportionality coefficient
k.Specific practice is: the displacement first detecting current platform with laser sensor
, the output voltage of foil gauge 2 is detected in position
, can obtain
.Drive crank 12 and connecting rod 17 are rigid member, and therefore they are proportional amplifications to the deformation quantity of microdrive 5, can obtain the proportionality coefficient between the deformation quantity of microdrive 5 output and the actual displacement of article carrying platform 16 by initialization of calibration.Proportionality coefficient is pre-stored in industrial computer, examinations platform can be realized
xthe object of the displacement in direction.For the displacement in y direction, also in like manner can obtain.
Connecting rod 17 extension size is greater than connecting rod 17 not containing the size of extension part.Now, connecting rod 17, as second lever, when connecting rod 17 extension size is greater than connecting rod 17 containing the size of extension part, carries out second time amplification to the deformation quantity of microdrive 5.Connecting rod 17 is L-shaped.
As shown in Figure 1, decoupling mechanism comprises a pair decoupling unit arranged along X axis and a pair decoupling unit arranged along Y-axis; Often pair of decoupling unit connects an enlarger respectively, and each enlarger is a corresponding microdrive 5 respectively.During microdrive 5 deformation of X axis, the enlarger of X axis pulls decoupling mechanism towards X axis translation.During microdrive 5 deformation of Y-axis, the enlarger of Y-axis pulls decoupling mechanism towards Y-axis translation.
In each decoupling unit, linking arm 13 is made up of a pair parallel support arm; Connecting rod 17 extension of linking arm 13, flexible arm 14 and enlarger is all articulated with a connection piece 15.
Four decoupling unit are with the center of article carrying platform 16 for center of circle array distribution, and adjacent flexible arm 14 is articulated with the same hinge in frame 1, and all flexible arms 14 surround a parallelogram.Parallel-crank mechanism then carries out decoupling zero to the deformation quantity that displacement amplifying mechanism passes over, and makes it along a direction translational.
Article carrying platform 16 is in square, and decoupling unit lays respectively at the mid point on each limit of article carrying platform 16, and all flexible arms 14 are isometric, and flexible arm 14 surrounds a square.
As shown in Figure 4, frame 1, double rocker mechanism and parallel-crank mechanism obtain through Linear cut, it is the first cutting gap 101 between frame 1 and drive crank 12, first cutting zone and piezoelectricity fold stack driver matched in clearance, have gap between drive crank 12 extension and frame 1, piezoelectricity fold stack driver is contacted with drive crank 12 extension by pre-loading screw; The region that frame 1, drive crank 12, passive rocking bar 18 surround is the second cutting gap 102; The region that frame 1, passive rocking bar 18, connecting rod 17 and flexible arm 14 surround is the 3rd cutting gap 103; Region between flexible arm 14 and hinge support arm is the 4th cutting gap 104; Two support arms of linking arm 13, the region between article carrying platform 16 and connector 15 are the 5th cutting gap 105; The hinge of the hinge of the hinge of the hinge of passive rocking bar 18 and the hinge of frame 1, passive rocking bar 18 and connecting rod 17, drive crank 12 and connecting rod 17, drive crank 12 and frame 1, connecting rod extension 17A and connector 15 is two incision flexible hinge, and hinge support arm and article carrying platform 16 and the hinged of connector 15 are single otch flexible hinge.
The utility model has the advantage of: 1. realize amplification to the output displacement of piezoelectricity fold stack driver 5 and decoupling zero by double rocker mechanism and parallel-crank mechanism, make micromotion platform have Long Distances on two dimension directions.
2. enlarger adopts flexible hinge, and is formed by linear cutter, and whole flexible hinge enlarger is as a whole, has that volume is little, mechanical friction, guiding accuracy are high, machining accuracy is easy to the advantage that ensures and do not need to assemble.
3. be integrated with position to detect, be convenient to carry out high-precision operation and control.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Content described in this description embodiment is only enumerating the way of realization that utility model is conceived; protection domain of the present utility model should not be regarded as being only limitted to the concrete form that embodiment is stated, protection domain of the present utility model also and conceive the equivalent technologies means that can expect according to the utility model in those skilled in the art.
Claims (9)
1., based on the piezoelectric micromotion platform that flexible hinge amplifies, comprise frame and article carrying platform; It is characterized in that: enlarger frame being installed the drive displacement of microdrive and amplification microdrive; Enlarger is the double rocker mechanism be installed in frame; The drive crank of double rocker mechanism establishes extension away from one end of connecting rod, and the free end of drive crank extension props up microdrive; Drive crank and extension thereof amplify lever with the pin joint of drive crank and frame for fulcrum is formed; Connecting rod establishes extension away from one end of drive crank; Article carrying platform is connected with the decoupling mechanism making it along assigned direction translation, and decoupling mechanism is made up of at least one pair of decoupling unit, and two decoupling unit are about article carrying platform Central Symmetry; Each decoupling unit is made up of linking arm and pair of flexible arm, each flexible arm one end and frame hinged, the other end and linking arm hinged, the other end and the article carrying platform of linking arm are hinged; Connecting rod extension and arbitrary decoupling unit hinged.
2. as claimed in claim 1 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: microdrive is piezoelectricity fold stack driver, the corresponding displacement transducer of each flexible arm.
3. as claimed in claim 2 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: displacement transducer is that foil gauge is detected in a pair position, a pair displacement detecting foil gauge is bonded and fixed on the two sides of flexible arm respectively, foil gauge composition bridgt circuit is detected in the position of often pair of decoupling unit, after bridgt circuit is amplified by strain amplifier, is transferred on industrial computer by PCI board by A/D mouth.
4. as claimed in claim 3 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: connecting rod extension size is greater than connecting rod not containing the size of extension part.
5. the piezoelectric micromotion platform amplified based on flexible hinge as described in one of claim 1-4, is characterized in that: decoupling mechanism comprises a pair decoupling unit arranged along X axis and a pair decoupling unit arranged along Y-axis; Often pair of decoupling unit connects an enlarger respectively, and each enlarger is a corresponding microdrive respectively.
6., as claimed in claim 5 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: in each decoupling unit, linking arm is made up of a pair parallel support arm; The connecting rod extension of linking arm, flexible arm and enlarger is all articulated with a connection piece.
7. as claimed in claim 6 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: four decoupling unit with the center of article carrying platform for center of circle array distribution, adjacent flexible arm is articulated with the same hinge in frame, and all flexible arms surround a parallelogram.
8. as claimed in claim 7 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: article carrying platform is in square, and decoupling unit lays respectively at the mid point on each limit of article carrying platform, and all flexible arms are isometric, and flexible arm surrounds a square.
9. as claimed in claim 8 based on the piezoelectric micromotion platform that flexible hinge amplifies, it is characterized in that: frame, double rocker mechanism and parallel-crank mechanism obtain through Linear cut, it is the first cutting gap between frame and drive crank, first cutting zone and piezoelectricity fold stack driver matched in clearance, have gap between drive crank extension and frame, piezoelectricity fold stack driver is contacted with drive crank extension by pre-loading screw; The region that frame, drive crank, passive rocking bar surround is the second cutting gap; The region that frame, passive rocking bar, connecting rod and flexible arm surround is the 3rd cutting gap; Region between flexible arm and hinge support arm is the 4th cutting gap; Hinge support arm, region between article carrying platform and connector are the 5th cutting gap; The hinge of the hinge of the hinge of the hinge of the hinge of passive rocking bar and frame, passive rocking bar and connecting rod, drive crank and connecting rod, drive crank and frame, connecting rod extension and connector is two incision flexible hinge, and hinge support arm and article carrying platform and the hinged of connector are single otch flexible hinge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520473546.9U CN204897391U (en) | 2015-06-30 | 2015-06-30 | Piezoelectricity micro -displacement based on flexible hinge enlargies |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520473546.9U CN204897391U (en) | 2015-06-30 | 2015-06-30 | Piezoelectricity micro -displacement based on flexible hinge enlargies |
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|---|---|
| CN204897391U true CN204897391U (en) | 2015-12-23 |
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|---|---|---|---|
| CN201520473546.9U Withdrawn - After Issue CN204897391U (en) | 2015-06-30 | 2015-06-30 | Piezoelectricity micro -displacement based on flexible hinge enlargies |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104925738A (en) * | 2015-06-30 | 2015-09-23 | 宁波大学 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
| CN108577926A (en) * | 2018-05-17 | 2018-09-28 | 杭州电子科技大学 | A kind of biological tissue's saw cutting device and its sawing method |
| CN109872768A (en) * | 2019-01-18 | 2019-06-11 | 宁波大学 | The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing |
-
2015
- 2015-06-30 CN CN201520473546.9U patent/CN204897391U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104925738A (en) * | 2015-06-30 | 2015-09-23 | 宁波大学 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
| CN108577926A (en) * | 2018-05-17 | 2018-09-28 | 杭州电子科技大学 | A kind of biological tissue's saw cutting device and its sawing method |
| CN109872768A (en) * | 2019-01-18 | 2019-06-11 | 宁波大学 | The submissive micromanipulator of multiple degrees of freedom based on bionic flapping-wing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151223 Effective date of abandoning: 20170412 |