CN102435775A - Strain type three-dimensional acceleration sensor - Google Patents
Strain type three-dimensional acceleration sensor Download PDFInfo
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- CN102435775A CN102435775A CN2011102830516A CN201110283051A CN102435775A CN 102435775 A CN102435775 A CN 102435775A CN 2011102830516 A CN2011102830516 A CN 2011102830516A CN 201110283051 A CN201110283051 A CN 201110283051A CN 102435775 A CN102435775 A CN 102435775A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 56
- 239000011888 foil Substances 0.000 claims abstract description 170
- 239000003292 glue Substances 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 claims description 31
- 230000003321 amplification Effects 0.000 claims description 16
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 16
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- 208000033707 Early-onset X-linked optic atrophy Diseases 0.000 claims description 9
- 208000025019 optic atrophy 2 Diseases 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 9
- 239000003381 stabilizer Substances 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 10
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- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
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- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 239000004744 fabric Substances 0.000 description 1
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- 238000003754 machining Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 238000010008 shearing Methods 0.000 description 1
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Abstract
The invention discloses a strain type three-dimensional acceleration sensor and belongs to the field of a three-dimensional sensor. The sensor comprises an elastic body, fixing glue, a mass block and eight strain foils, wherein an axial cross section of the elastic body is inverted T-shaped; the lower end of the elastic body is of a spoke structure; the lower end is of a cylinder structure and an upper end face of the elastic body is fixedly connected to the mass block through the fixing glue; four strain foils are symmetrically arranged on a same spoke bar of a spoke, particularly, a first strain foil and a third strain foil are arranged on the upper surface of the spoke bar and a second strain foil and a fourth strain foil are arranged on the lower surface of the spoke bar; and four strain foils, namely, a fifth strain foil, a sixth strain foil, a seventh strain foil and an eighth strain foil, are uniformly arranged on a cylinder of the elastic body along a circumferential direction. The strain type three-dimensional acceleration sensor can be used for simultaneously detecting the three-dimensional vibration states of an object.
Description
Technical field
The present invention relates to a kind of strain gauge transducer, especially a kind of strain-type three dimension acceleration sensor.
Background technology
Present three dimension acceleration sensor is to obtain through single inertial mass or many inertial mass to be divided into two kinds of versions according to three-dimensional information: synthesis type and integrated type.The former is through the mode of a plurality of unidirectional acceleration transducers employing quadratures is synthetic together, generally the respectively corresponding mass of each directional acceleration information; The latter accomplishes the measurement to three directional accelerations through single inertial mass.Three dimension acceleration sensor mainly is that a plurality of one-dimensional acceleration transducers are integrated realization obtaining three-dimensional information in a period of time of beginning; Because the existence of three masses; The inconsistent error of bringing the measurement aspect of barycenter; And because a plurality of single shafts are synthetic together to sensor, the volume of the whole sensor that is is relatively large.Therefore three dimension acceleration sensor develops towards integrated direction at present.
At present, the research history for the three dimension acceleration sensor of integral structure is not long.And in recent years, along with the development of semiconductor microactuator process technology, release one after another based on the three dimension acceleration sensor of different operating principle, be main mainly with piezoelectric type, pressure resistance type, condenser type.On structural design, cantilever beam type, twin beams type, four beam types, island type etc. are arranged.In the application facet of foil gauge, Japan has proposed the full shearing three-dimensional acceleration transducer of strain-type, but this kind sensor requirement on machining accuracy than higher, the manufacturing process cost is higher.
Summary of the invention
The purpose of this invention is to provide a kind of lower-cost strain-type three dimension acceleration sensor, it can realize simultaneously that the object dimensional vibrational state detects.
To achieve these goals; The invention provides a kind of strain-type three dimension acceleration sensor; It is characterized in that: comprise elastic body, fixing glue, mass and 8 foil gauges; Wherein said elastomeric axial cross section is " ┻ " shape, and this elastomeric lower end is a spoke architecture, and the upper end is that cylindrical structure and its upper surface are fixedly connected said mass by said fixing glue;
On the spoke of said spoke the same line, be symmetrically arranged with four foil gauges: first foil gauge and the 3rd foil gauge are arranged at the upper surface of said spoke; Second foil gauge and the 4th foil gauge are arranged at the lower surface of said spoke, are reflected the acceleration change of Z-direction by the resistance variations of these four foil gauges; On said elastomeric right cylinder, circumferentially evenly be provided with four foil gauges: the 5th foil gauge, the 6th foil gauge, the 7th foil gauge and the 8th foil gauge; Wherein the resistance variations by said the 5th foil gauge, the 6th foil gauge reflects the acceleration change of X-direction, reflects the acceleration change of Y direction by the resistance variations of said the 7th foil gauge, the 8th foil gauge.
Said first foil gauge, second foil gauge, the 3rd foil gauge and the 4th foil gauge constitute the full bridge measurement circuit; First voltage stabilizer connects the connected node of said first foil gauge and the 4th foil gauge; To said full bridge measurement circuit stabilized voltage supply is provided; First slide resistor connects the connected node of said second foil gauge and the 3rd foil gauge; Be used for balance and initially return to zero, and by the connected node of said first foil gauge and second foil gauge, the electric signal of the connected node of said the 3rd foil gauge and the 4th foil gauge output Z-direction acceleration;
Said the 5th foil gauge, the 6th foil gauge and first fixed value resistance, second fixed value resistance constitute the first half bridge measurement circuit; Second voltage stabilizer connects the connected node of said the 5th foil gauge and first fixed value resistance; To the said first half bridge measurement circuit stabilized voltage supply is provided; Second slide resistor connects the connected node of said the 6th foil gauge and second fixed value resistance; Be used for balance and initially return to zero, and export the electric signal of X-direction acceleration by the connected node of the connected node of said the 5th foil gauge and the 6th foil gauge, said first fixed value resistance and second fixed value resistance;
Said the 7th foil gauge, the 8th foil gauge and the 3rd fixed value resistance, the 4th fixed value resistance constitute the second half bridge measurement circuit; The 3rd voltage stabilizer connects the connected node of said the 7th foil gauge and the 3rd fixed value resistance; To the said second half bridge measurement circuit stabilized voltage supply is provided; The 3rd slide resistor connects the connected node of said the 8th foil gauge and the 4th fixed value resistance; Be used for balance and initially return to zero, and export the electric signal of Y axle acceleration by the connected node of the connected node of said the 7th foil gauge and the 8th foil gauge, said the 3rd fixed value resistance and the 4th fixed value resistance.
Said first foil gauge and the connected node of second foil gauge, said the 3rd foil gauge and the connected node of the 4th foil gauge are connected the positive-negative input end of first order operational amplifier A D1 respectively; The electric signal of Z-direction acceleration is amplified by the preposition difference of said first order operational amplifier A D1; After second level operational amplifier OPA1 amplification filtering is handled, be transferred to third level voltage follower OPB1 and carry out isolation processing again;
Said the 5th foil gauge and the connected node of the 6th foil gauge, said first fixed value resistance and the connected node of second fixed value resistance are connected the positive-negative input end of first order operational amplifier A D2 respectively; The electric signal of X-direction acceleration is amplified by the preposition difference of said first order operational amplifier A D2; After second level operational amplifier OPA2 amplification filtering is handled, be transferred to third level voltage follower OPB2 and carry out isolation processing again;
Said the 7th foil gauge and the connected node of the 8th foil gauge, said the 3rd fixed value resistance and the connected node of the 4th fixed value resistance are connected the positive-negative input end of first order operational amplifier A D3 respectively; The electric signal of Y direction acceleration is amplified by the preposition difference of said first order operational amplifier A D3; After second level operational amplifier OPA3 amplification filtering is handled, be transferred to third level voltage follower OPB3 and carry out isolation processing again;
And first power supply adaptor provides power supply to said first order operational amplifier A D1, second level operational amplifier OPA1 and third level voltage follower OPB1 respectively; The second source adapter provides power supply to said first order operational amplifier A D2, second level operational amplifier OPA2 and third level voltage follower OPB2 respectively; The 3rd power supply adaptor provides power supply to said first order operational amplifier A D3, second level operational amplifier OPA3 and third level voltage follower OPB3 respectively.
In sum, owing to adopted technique scheme, the invention has the beneficial effects as follows:
1, the present invention is provided with foil gauge respectively at three-dimensional, adopt integral sensor can realize that the object dimensional vibrational state detects, and owing to adopt foil gauge to realize measuring, cost is lower;
2, because the resistance variations of foil gauge is very faint; The present invention is transformed into electric signal with resistance variations information, is easy to practical application more, and faint electric signal is carried out processing such as amplification filtering; Even the foil gauge resistance variations is very little; Also can detect, improve the sensitivity of sensor, reduce range;
3, only need corresponding foil gauge be arranged on corresponding position in this sensor and get final product, not require higher processing precision, reduce the manufacturing process cost.
Description of drawings
The present invention will explain through example and with reference to the mode of accompanying drawing, wherein:
Fig. 1 is a front elevation of the present invention;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is the circuit diagram that is used to adjust the Z-direction acceleration signal;
Fig. 4 is the circuit diagram that is used to adjust the X-direction acceleration signal;
Fig. 5 is the circuit diagram that is used to adjust the Y direction acceleration signal.
Embodiment
Disclosed all characteristics in this instructions, or the step in disclosed all methods or the process except mutually exclusive characteristic and/or the step, all can make up by any way.
Disclosed arbitrary characteristic in this instructions (comprising any accessory claim, summary and accompanying drawing) is only if special narration all can be replaced by other equivalences or the alternative features with similar purpose.That is, only if special narration, each characteristic is an example in a series of equivalences or the similar characteristics.
This strain-type three dimension acceleration sensor comprises elastic body 1, fixing glue 3, mass 4 and 8 foil gauges.As shown in Figure 1, elastic body 1 axial cross section be " ┻ " shape, the lower end of this elastic body 1 is the structure of spoke 5, the upper end is that structure and its upper surface of right cylinder 6 is fixedly connected masses 4 by fixing glue 3; On the spoke of a line of spoke 5, be symmetrically arranged with four foil gauges (promptly four foil gauges equate with the distance of elastic body 1): the first foil gauge R1, the 3rd foil gauge R3 are arranged on the upper surface of spoke; The second foil gauge R2, the 4th foil gauge R4 are arranged on the lower surface of spoke; And circumferentially evenly be provided with four foil gauges (promptly these four foil gauges equate with spoke 5 distances) on the right cylinder of elastic body 1 on same circumference: the 5th foil gauge R5, the 6th foil gauge R6, the 7th foil gauge R7 and the 8th foil gauge R8.Be attached to the foil gauge on the determinand, along with the strain of determinand is flexible together, the resistance of foil gauge also changes thereupon, therefore can reflect three-dimensional acceleration change by the foil gauge changes in resistance.The resistance variations of the first foil gauge R1, the second foil gauge R2, the 3rd foil gauge R3 and the 4th foil gauge R4 reflects the acceleration change of Z-direction in the present embodiment; The variation of the 5th foil gauge R5 and the 6th foil gauge R6 reflects the acceleration change of X-direction, and the resistance variations of the 7th foil gauge R7 and the 8th foil gauge R8 reflects the acceleration change of Y direction.
Because in measuring process; The strain of foil gauge impression is very faint, and its resistance relative change rate △ R/R is very little, and resistance variations information is unfavorable for the application in reality; Therefore need be electric signal with the resistance variations information translation, and this electric signal is carried out processing and amplifying.
As shown in Figure 3; In Z-direction; The first foil gauge R1, the second foil gauge R2, the 3rd foil gauge R3 and the 4th foil gauge R4 constitute the full bridge measurement circuit, and the first voltage stabilizer TL43-1 connects the connected node a of the first foil gauge R1 and the 4th foil gauge R4, and it provides the stabilized voltage supply of 5V to this full bridge measurement circuit; The first slide resistor RP1 connects the connected node of the second foil gauge R2 and the 3rd foil gauge R3, realizes this full bridge measurement circuit balancing is initially returned to zero.This full bridge measurement circuit becomes the resistance variations information translation of Z-direction foil gauge the electric signal of Z-direction acceleration; Export to the positive and negative input end of first order operational amplifier A D1 by the connected node of connected node, the 3rd foil gauge R3 and the 4th foil gauge R4 of the first foil gauge R1 and the second foil gauge R2; Electric signal is carried out difference to be amplified; Remove effectively and disturb; Wherein this first order operational amplifier A D1 outer meeting resistance R3-1 accurately is amplified to definite multiple with the signal with the output of full bridge measurement circuit, realizes the preposition amplification of first order circuit.
The output terminal of first order operational amplifier A D1 connects the positive input terminal of second level operational amplifier OPA1 through resistance R 4-1; The negative input end of this second level operational amplifier OPA1 is connected with the resistance R 5 of ground connection; And second level operational amplifier OPA1 and resistance R 6-1, capacitor C 3-1 are parallelly connected; Wherein the electric signal after preposition amplification accurately is amplified to definite multiple through resistance R 4-1; And realize LPF, thereby realized the amplification filtering of second level circuit through parallel resistor R6-1, capacitor C 3-1.
The output terminal of second level operational amplifier OPA1 connects resistance R 7-1, capacitor C 6-1 successively; And capacitor C 6-1 ground connection; The connected node of resistance R 7-1 and capacitor C 6-1 is connected with the 3rd follower OPB1, and wherein resistance R 7-1 and capacitor C 6-1 configuration low-pass cut-off frequencies is consistent with the higher level, the 3rd follower OPB1 to electric signal isolate, buffered; Improve output impedance, reduce the decay of signal.Electric signal by the 3rd follower OPB1 output can directly adopt AD converter to carry out analog-to-digital conversion process.
Above-mentioned first order operational amplifier A D1, second level operational amplifier OPA1 and the 3rd follower OPB1 all adopt the dual power supply mode; By first power supply adaptor 220V voltage transitions is offered the three for 15V voltage; Wherein NE555-1 can convert positive voltage to negative voltage, improves output accuracy.
As shown in Figure 4; In X-direction; The 5th foil gauge R5, the 6th foil gauge R6, the first fixed value resistance F1 and the second fixed value resistance F2 constitute the first half bridge measurement circuit, and the second voltage stabilizer TL43-2 connects the connected node a of the 5th foil gauge R5 and the first fixed value resistance F1, and it provides the stabilized voltage supply of 5V to this first half bridge measurement circuit; The second slide resistor RP2 connects the connected node b of the 6th foil gauge R6 and the second fixed value resistance F2, realizes this first half bridge measurement circuit balancing is initially returned to zero.This first half bridge measurement circuit becomes the resistance variations information translation of X-direction foil gauge the electric signal of X-direction acceleration; Export to the positive and negative input end of first order operational amplifier A D2 by the connected node d of connected node c, the first fixed value resistance F1 and the second fixed value resistance F2 of the 5th foil gauge R5 and the 6th foil gauge R6; Electric signal is carried out difference to be amplified; Remove effectively and disturb; Wherein this first order operational amplifier A D2 outer meeting resistance R3-2 accurately is amplified to definite multiple with the signal with the output of full bridge measurement circuit, realizes the preposition amplification of first order circuit.
The output terminal of first order operational amplifier A D2 connects the positive input terminal of second level operational amplifier OPA2 through resistance R 4-2; The negative input end of this second level operational amplifier OPA2 is connected with the resistance R 5 of ground connection; And second level operational amplifier OPA2 and resistance R 6-2, capacitor C 3-2 are parallelly connected; Wherein the electric signal after preposition amplification accurately is amplified to definite multiple through resistance R 4-2; And realize LPF, thereby realized the amplification filtering of second level circuit through parallel resistor R6-2, capacitor C 3-2.
The output terminal of second level operational amplifier OPA2 connects resistance R 7-2, capacitor C 6-2 successively; And capacitor C 6-2 ground connection; The connected node of resistance R 7-2 and capacitor C 6-2 is connected with the 3rd follower OPB2, and wherein resistance R 7-2 and capacitor C 6-2 configuration low-pass cut-off frequencies is consistent with the higher level, the 3rd follower OPB2 to electric signal isolate, buffered; Improve output impedance, reduce the decay of signal.Electric signal by the 3rd follower OPB2 output can directly adopt AD converter to carry out analog-to-digital conversion process.
Above-mentioned first order operational amplifier A D2, second level operational amplifier OPA2 and the 3rd follower OPB2 all adopt the dual power supply mode; By the second source adapter 220V voltage transitions is offered the three for 15V voltage; Wherein NE555-1 can convert positive voltage to negative voltage, improves output accuracy.
As shown in Figure 5; In Y direction; The 7th foil gauge R7, the 8th foil gauge R8, the 3rd fixed value resistance F3 and the 4th fixed value resistance F4 constitute the second half bridge measurement circuit, and the second voltage stabilizer TL43-3 connects the connected node a of the 7th foil gauge R7 and the 3rd fixed value resistance F3, and it provides the stabilized voltage supply of 5V to this second half bridge measurement circuit; The 3rd slide resistor RP3 connects the connected node b of the 8th foil gauge R8 and the 4th fixed value resistance F4, realizes this second half bridge measurement circuit balancing is initially returned to zero.This second half bridge measurement circuit becomes the resistance variations information translation of Y direction foil gauge the electric signal of Y direction acceleration; Export to the positive and negative input end of first order operational amplifier A D3 by the connected node d of connected node c, the 3rd fixed value resistance F3 and the 4th fixed value resistance F4 of the 7th foil gauge R7 and the 8th foil gauge R8; Electric signal is carried out difference to be amplified; Remove effectively and disturb; Wherein this first order operational amplifier A D3 outer meeting resistance R3-3 accurately is amplified to definite multiple with the signal with the output of full bridge measurement circuit, realizes the preposition amplification of first order circuit.
The output terminal of first order operational amplifier A D3 connects the positive input terminal of second level operational amplifier OPA3 through resistance R 4-3; The negative input end of this second level operational amplifier OPA3 is connected with the resistance R 5 of ground connection; And second level operational amplifier OPA3 and resistance R 6-3, capacitor C 3-3 are parallelly connected; Wherein the electric signal after preposition amplification accurately is amplified to definite multiple through resistance R 4-3; And realize LPF, thereby realized the amplification filtering of second level circuit through parallel resistor R6-3, capacitor C 3-3.
The output terminal of second level operational amplifier OPA3 connects resistance R 7-3, capacitor C 6-3 successively; And capacitor C 6-3 ground connection; The connected node of resistance R 7-3 and capacitor C 6-3 is connected with the 3rd follower OPB3, and wherein resistance R 7-3 and capacitor C 6-3 configuration low-pass cut-off frequencies is consistent with the higher level, the 3rd follower OPB3 to electric signal isolate, buffered; Improve output impedance, reduce the decay of signal.Electric signal by the 3rd follower OPB3 output can directly adopt AD converter to carry out analog-to-digital conversion process.
Above-mentioned first order operational amplifier A D3, second level operational amplifier OPA3 and the 3rd follower OPB3 all adopt the dual power supply mode; By the second source adapter 220V voltage transitions is offered the three for 15V voltage; Wherein NE555-1 can convert positive voltage to negative voltage, improves output accuracy.
The principle of work of strain-type three dimension acceleration sensor is among the present invention:
When testee during with acceleration movement, mass receives an inertial force effect in the opposite direction with acceleration, makes elastic body produce distortion, and strain takes place the foil gauge that sticks on the elastic body thereupon, thereby the resistance of foil gauge is changed.Changes in resistance causes that imbalance appears in the bridge circuit that foil gauge is formed, thus output voltage.The foil gauge bridge circuit is uneven and the acceleration output voltage that produces and testee is linear, can record the size of testee acceleration.
These strain-type three positioner acceleration sensors are formed three measurement bridge circuits through the cloth sheet position of selected foil gauge, through the acceleration on can three orthogonal directions of measurement space after the decoupling zero.
The present invention is not limited to aforesaid embodiment.The present invention expands to any new feature or any new combination that discloses in this manual, and the arbitrary new method that discloses or step or any new combination of process.
Claims (3)
1. strain-type three dimension acceleration sensor; It is characterized in that: comprise elastic body (1), fixing glue (3), mass (4) and 8 foil gauges; The axial cross section of wherein said elastic body (1) is " ┻ " shape; The lower end of this elastic body (1) is spoke (a 5) structure, and the upper end is that right cylinder (6) structure and its upper surface are fixedly connected said mass (4) by said fixing glue (3);
On the spoke of said spoke (5) the same line, be symmetrically arranged with four foil gauges: first foil gauge (R1) and the 3rd foil gauge (R3) are arranged at the upper surface of said spoke; Second foil gauge (R2) and the 4th foil gauge (R4) are arranged at the lower surface of said spoke, are reflected the acceleration change of Z-direction by the resistance variations of these four foil gauges; On the right cylinder of said elastic body (1), circumferentially evenly be provided with four foil gauges: the 5th foil gauge (R5), the 6th foil gauge (R6), the 7th foil gauge (R7) and the 8th foil gauge (R8); Wherein the resistance variations by said the 5th foil gauge (R5), the 6th foil gauge (R6) reflects the acceleration change of X-direction, reflects the acceleration change of Y direction by the resistance variations of said the 7th foil gauge (R7), the 8th foil gauge (R8).
2. strain-type three dimension acceleration sensor according to claim 1; It is characterized in that: said first foil gauge (R1), second foil gauge (R2), the 3rd foil gauge (R3) and the 4th foil gauge (R4) constitute the full bridge measurement circuit; First voltage stabilizer connects the connected node of said first foil gauge (R1) and the 4th foil gauge (R4); To said full bridge measurement circuit stabilized voltage supply is provided; First slide resistor (RP1) connects the connected node of said second foil gauge (R2) and the 3rd foil gauge (R3); Be used for balance and initially return to zero, and by the connected node of said first foil gauge (R1) with second foil gauge (R2), the electric signal of the connected node output Z-direction acceleration of said the 3rd foil gauge (R3) and the 4th foil gauge (R4);
Said the 5th foil gauge (R5), the 6th foil gauge (R6) constitute the first half bridge measurement circuit with first fixed value resistance (F1), second fixed value resistance (F2); Second voltage stabilizer connects the connected node of said the 5th foil gauge (R5) and first fixed value resistance (F1); To the said first half bridge measurement circuit stabilized voltage supply is provided; Second slide resistor (RP2) connects the connected node of said the 6th foil gauge (R6) and second fixed value resistance (F2); Be used for balance and initially return to zero, and by the electric signal of said the 5th foil gauge (R5) with the connected node output X-direction acceleration of connected node, said first fixed value resistance (F1) and second fixed value resistance (F2) of the 6th foil gauge (R6);
Said the 7th foil gauge (R7), the 8th foil gauge (R8) constitute the second half bridge measurement circuit with the 3rd fixed value resistance (F3), the 4th fixed value resistance (F4); The 3rd voltage stabilizer connects the connected node of said the 7th foil gauge (R7) and the 3rd fixed value resistance (F3); To the said second half bridge measurement circuit stabilized voltage supply is provided; The 3rd slide resistor (RP3) connects the connected node of said the 8th foil gauge (R8) and the 4th fixed value resistance (F4); Be used for balance and initially return to zero, and by the electric signal of said the 7th foil gauge (R7) with the connected node output Y axle acceleration of connected node, said the 3rd fixed value resistance (F3) and the 4th fixed value resistance (F4) of the 8th foil gauge (R8).
3. strain-type three dimension acceleration sensor according to claim 2; It is characterized in that: the connected node of said first foil gauge (R1) and second foil gauge (R2), said the 3rd foil gauge (R3) and the connected node of the 4th foil gauge (R4) are connected the positive-negative input end of first order operational amplifier A D1 respectively; The electric signal of Z-direction acceleration is amplified by the preposition difference of said first order operational amplifier A D1; After second level operational amplifier OPA1 amplification filtering is handled, be transferred to third level voltage follower OPB1 and carry out isolation processing again;
The connected node of said the 5th foil gauge (R5) and the 6th foil gauge (R6), said first fixed value resistance (F1) and the connected node of second fixed value resistance (F2) are connected the positive-negative input end of first order operational amplifier A D2 respectively; The electric signal of X-direction acceleration is amplified by the preposition difference of said first order operational amplifier A D2; After second level operational amplifier OPA2 amplification filtering is handled, be transferred to third level voltage follower OPB2 and carry out isolation processing again;
The connected node of said the 7th foil gauge (R7) and the 8th foil gauge (R8), said the 3rd fixed value resistance (F3) and the connected node of the 4th fixed value resistance (F4) are connected the positive-negative input end of first order operational amplifier A D3 respectively; The electric signal of Y direction acceleration is amplified by the preposition difference of said first order operational amplifier A D3; After second level operational amplifier OPA3 amplification filtering is handled, be transferred to third level voltage follower OPB3 and carry out isolation processing again;
And first power supply adaptor provides power supply to said first order operational amplifier A D1, second level operational amplifier OPA1 and third level voltage follower OPB1 respectively; The second source adapter provides power supply to said first order operational amplifier A D2, second level operational amplifier OPA2 and third level voltage follower OPB2 respectively; The 3rd power supply adaptor provides power supply to said first order operational amplifier A D3, second level operational amplifier OPA3 and third level voltage follower OPB3 respectively.
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| CN 201110283051 CN102435775B (en) | 2011-09-22 | 2011-09-22 | Strain type three-dimensional acceleration sensor |
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| CN 201110283051 CN102435775B (en) | 2011-09-22 | 2011-09-22 | Strain type three-dimensional acceleration sensor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018488A (en) * | 2012-12-06 | 2013-04-03 | 重庆大学 | Differential piezoelectric type three-dimensional acceleration sensor |
| CN103292939A (en) * | 2013-05-19 | 2013-09-11 | 吉林大学 | Spoke and central pin column combined type three-dimensional force sensor |
| CN103398807A (en) * | 2013-08-12 | 2013-11-20 | 中交第一公路工程局有限公司土木技术研究院 | Novel three dimensional stress measuring sensor |
| CN104970803A (en) * | 2015-07-08 | 2015-10-14 | 中国医学科学院生物医学工程研究所 | Probe with pulse blood oxygen detection and muscle relaxation detection function at same time |
| CN105891544A (en) * | 2016-04-27 | 2016-08-24 | 扬州大学 | Linear acceleration sensor for bionic-ear stone implement structure |
| CN106526233A (en) * | 2016-11-30 | 2017-03-22 | 中山市晶威电子科技有限公司 | Acceleration sensor |
| CN107807255A (en) * | 2017-10-19 | 2018-03-16 | 东南大学 | A kind of tunnel magnetoresistive formula accelerometer device based on micro hydraulic amplification |
| CN110006561A (en) * | 2019-05-10 | 2019-07-12 | 南京工程学院 | A kind of device of roller bolt stress in the around-France measurement feed screw nut of stress |
| CN113124747A (en) * | 2021-04-21 | 2021-07-16 | 齐鲁工业大学 | Three-dimensional sensor for online safety monitoring of asphalt pavement and preparation method thereof |
| JP7422114B2 (en) | 2021-09-07 | 2024-01-25 | 株式会社共和電業 | acceleration converter |
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| US4372520A (en) * | 1981-08-13 | 1983-02-08 | Rockwell International Corporation | Suspension for three-axis accelerometer |
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