CN204788657U - Laser power meter based on infrared measures - Google Patents
Laser power meter based on infrared measures Download PDFInfo
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- CN204788657U CN204788657U CN201520490887.7U CN201520490887U CN204788657U CN 204788657 U CN204788657 U CN 204788657U CN 201520490887 U CN201520490887 U CN 201520490887U CN 204788657 U CN204788657 U CN 204788657U
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Abstract
The utility model provides a laser power meter based on infrared measures, include: the infrared converter, assemble device, chopper, driver, first detector, second detector and control treater, wherein, the input of driver is connected with the first output of control treater, and the output and the chopper of driver are connected, and the first input end of control treater is connected with the output of first detector, and the second input of control treater is connected with the output of second detector. Assemble the unit bit between infrared converter and chopper for assemble the infrared line of infrared converter transmission to the photosensitive surface of first detector, the chopper is located the dead ahead of the photosensitive surface of photosensitive surface and the second detector of first detector. The utility model provides a laser power meter based on infrared measures can measure to the power of the laser of arbitrary wavelength of infrared spectrum within range far away the ultraviolet, has improved the suitability of laser power meter.
Description
Technical field
The utility model relates to laser power measurement technical field, particularly relates to a kind of laser powermeter based on infrared radiation measurement.
Background technology
In prior art, due to when producing, checking or keep in repair laser equipment and laser device, all need to measure the laser power of laser equipment and laser device, so laser powermeter becomes requisite instrument.Wherein, photoelectric type laser powermeter measures one of major equipment of using of laser power.
Above-mentioned photoelectric type laser powermeter is made up of photodetector and suitable circuit usually.Wherein, the testing laser detected for detecting testing laser, and is carried out opto-electronic conversion by photodetector, generates electric signal, makes photoelectric type laser powermeter can pass through to measure the laser power of electric signal determination testing laser.
But, because photodetector has spectral selectivity, that is, the responsiveness of photodetector to the testing laser in different wavelength range is different, photoelectric type laser powermeter can only be measured the laser power of the testing laser in particular range of wavelengths, the spectral range of its detection is narrower, and applicability is not high.
Utility model content
The utility model provides a kind of laser powermeter based on infrared radiation measurement, narrower in order to the spectral range solving photoelectric type laser powermeter detection in prior art, the technical matters that applicability is not high.
For achieving the above object, embodiment of the present utility model adopts following technical scheme:
First aspect, the utility model provides a kind of laser powermeter based on infrared radiation measurement, and the described laser powermeter based on infrared radiation measurement comprises: infrared radiation converter, convergence apparatus, chopper, driver, the first detector, the second detector and control processor; Wherein, the input end of described driver is connected with the first output terminal of described control processor, the output terminal of described driver is connected with described chopper, the first input end of described control processor is connected with the output terminal of described first detector, and the second input end of described control processor is connected with the output terminal of described second detector;
Described convergence apparatus is between described infrared radiation converter and described chopper, and the infrared radiation for the described infrared radiation converter emission that will receive assembles the photosurface to described first detector;
Described chopper is positioned at the dead ahead of the photosurface of described first detector and the photosurface of described second detector.
In conjunction with first aspect, in the first possible embodiment of first aspect, the described laser powermeter based on infrared radiation measurement also comprises: the logical optical filter of the first band and the logical optical filter of the second band;
The logical optical filter of described first band covers the photosurface of described first detector, and the logical optical filter of described second band covers the photosurface of described second detector.
In conjunction with the first possible embodiment of first aspect or first aspect, in the embodiment that the second of first aspect is possible, the described laser powermeter based on infrared radiation measurement also comprises: display;
The input end of described display is connected with the second output terminal of described control processor.
In conjunction with the embodiment that the second of first aspect is possible, in the third possible embodiment of first aspect, the light-sensitive area of described infrared radiation converter is provided with light-absorbing coating.
In conjunction with the third possible embodiment of first aspect, in the 4th kind of possible embodiment of first aspect, described convergence apparatus is transmission-type convergence apparatus, and described transmission-type convergence apparatus is used for the photosurface infrared radiation transmission of described infrared radiation converter emission assembled to described first detector.
In conjunction with the 4th kind of possible embodiment of first aspect, in the 5th kind of possible embodiment of first aspect, the plane of incidence of described transmission-type convergence apparatus and exit facet are all coated with the anti-reflection film for described infrared radiation wavelength.
In conjunction with the third possible embodiment of first aspect, in the 6th kind of possible embodiment of first aspect, described convergence apparatus is reflective convergence apparatus, and described reflective convergence apparatus is used for the photosurface infrared radiation line reflection of described infrared radiation converter emission assembled to described first detector.
In conjunction with the 6th kind of possible embodiment of first aspect, in the 7th kind of possible embodiment of first aspect, the reflecting surface of described reflective convergence apparatus is coated with the reflectance coating for described infrared radiation wavelength, and described reflectance coating is golden film, silverskin, copper film, aluminium film or high reverse--bias deielectric-coating; Wherein, described high reverse--bias deielectric-coating be the reflectivity of described infrared radiation is greater than 99.5% reflecting medium film.
In conjunction with first aspect, in the 8th kind of possible embodiment of first aspect, described first detector and described second detector are indium antimonide InSb detector, or described first detector and described second detector are mercury cadmium telluride TgCdTe detector.
The laser powermeter based on infrared radiation measurement that the utility model provides, the function of the photothermal deformation had by infrared radiation converter, the testing laser of arbitrary wavelength in ultraviolet to far-infrared spectrum district can be converted to infrared radiation, and then the laser power of testing laser can be determined by measuring infrared radiation.Therefore, the laser powermeter based on infrared radiation measurement that the utility model provides, can measure the laser power of ultraviolet to the testing laser of the arbitrary wavelength in far red light spectral limit, improve the applicability of laser powermeter.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of the laser powermeter embodiment one based on infrared radiation measurement that Fig. 1 provides for the utility model;
The structural representation of the laser powermeter embodiment two based on infrared radiation measurement that Fig. 2 provides for the utility model;
The structural representation of the laser powermeter embodiment three based on infrared radiation measurement that Fig. 3 provides for the utility model;
The structural representation of the laser powermeter embodiment four based on infrared radiation measurement that Fig. 4 provides for the utility model.
Reference numeral:
101: infrared radiation converter; 102: convergence apparatus;
103: chopper; 104: driver;
105: the first detectors; 106: the second detectors;
107: control processor; 108: laser emitting source;
The logical optical filter of 109: the first band; The logical optical filter of 110: the second band;
111: display; 1041: the input end of driver;
1042: the output terminal of driver; The output terminal of 1051: the first detectors;
The photosurface of 1052: the first detectors; The output terminal of 1061: the second detectors;
The photosurface of 1062: the second detectors; 1071: the first input end of control processor;
1072: the second input end of control processor; 1073: the first output terminal of control processor;
1074: the second output terminal of control processor; 1111: the input end of display.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
The laser powermeter based on infrared radiation measurement that the utility model provides may be used for the laser power measuring testing laser.Wherein, the laser that this testing laser can be launched for arbitrary laser emitting source, such as: laser instrument, laser application apparatus etc.
The laser powermeter based on infrared radiation measurement that the utility model provides, the spectral range being intended to solve photoelectric type laser powermeter of the prior art detection is narrower, the technical matters that applicability is not high.
The laser powermeter based on infrared radiation measurement for the ease of providing the utility model is described, in the following embodiments, by the laser powermeter based on infrared radiation measurement referred to as laser powermeter, other light except testing laser and " infrared radiation of infrared radiation converter emission " are all called parasitic light.
With embodiment particularly, the technical solution of the utility model is described in detail below.These specific embodiments can be combined with each other below, may repeat no more for same or analogous concept or process in some embodiment.
The structural representation of the laser powermeter embodiment one based on infrared radiation measurement that Fig. 1 provides for the utility model, as shown in Figure 1, should comprise based on the laser powermeter of infrared radiation measurement: infrared radiation converter 101, convergence apparatus 102, chopper 103, driver 104, first detector 105, second detector 106 and control processor 107; Wherein, the input end 1041 of driver is connected with the first output terminal 1073 of control processor, the output terminal 1042 of driver is connected with chopper 103, the first input end 1071 of control processor is connected with the output terminal 1051 of the first detector, and the second input end 1072 of control processor is connected with the output terminal 1061 of the second detector; Convergence apparatus 102 is between infrared radiation converter 101 and chopper 103, and the infrared radiation for being launched by the infrared radiation received converter 101 assembles the photosurface 1052 to the first detector.Chopper 103 is positioned at the dead ahead of the photosurface 1052 of the first detector and the photosurface 1062 of the second detector.
Concrete, above-mentioned infrared radiation converter 101 can be arranged on can absorbing laser emissive source 108 any position of testing laser of launching, wherein, infrared radiation converter 101 is provided with light-sensitive area, this light-sensitive area is used for the testing laser that absorbing laser emissive source 108 is launched, and photothermal deformation is carried out to the testing laser absorbed, the temperature of light-sensitive area is raised and outside emitting infrared radiation line, this part infrared radiation is received by the convergence apparatus 102 be arranged in scope that infrared radiation that infrared radiation converter 101 launches covers, and the infrared radiation received is assembled the photosurface 1052 to the first detector.Because above-mentioned infrared radiation converter 101 has in ultraviolet to the smooth feature of far-infrared spectrum district response curve, therefore, above-mentioned infrared radiation converter 101 can carry out photothermal deformation to ultraviolet to the testing laser of the arbitrary wavelength in far-infrared spectrum district, and outside emitting infrared radiation line, that is, the wavelength of above-mentioned infrared radiation converter 101 to the testing laser that it absorbs does not limit, thus, the laser powermeter that the utility model provides, by infrared radiation converter 101, ultraviolet can be converted to infrared radiation to the testing laser of the arbitrary wavelength in far-infrared spectrum district, and the laser power of testing laser is determined by the power measuring this infrared radiation.Meanwhile, because the used time of infrared radiation converter 101 when testing laser being converted to infrared radiation is less, the response time of laser powermeter is therefore shortened.
The input end 1041 of above-mentioned driver is connected with the first output terminal 1073 of control processor, for receiving the steering order that control processor 107 sends.Wherein, this steering order is used to indicate driver 104 and sends driving instruction to chopper 103.Above-mentioned driver 104, after the steering order receiving control processor 107 transmission, sends driving instruction to chopper 103.All carry control signal in above-mentioned steering order and driving instruction, this control signal is a signal with fixed frequency f1, and the rotating speed of target n of this fixed frequency f1 and chopper 103 is proportional relation.
Above-mentioned chopper 103 is arranged on the dead ahead of the photosurface 1052 of the first detector and the photosurface 1062 of the second detector, for receiving the driving instruction that driver 104 sends, and the fixed frequency f1 of the control signal of carrying in driving instruction is converted to rotating speed of target n, and rotate with this rotating speed of target n, (namely light can be chopped off with fixed frequency f1 by chopper 103 to carry out copped wave to the light through chopper 103, therefore the light after this copped wave can be detected by the photosurface 1062 of the photosurface 1052 of the first detector and the second detector with fixed frequency f1, namely be not continuous print light by the light after chopper 103 copped wave, but with fixed frequency f1 for frequency interval appears at the photosurface 1052 of the first detector and the photosurface 1062 of the second detector).Above-mentioned chopper 103 can be the optical chopper of arbitrary type, and the copped wave function that above-mentioned chopper 103 has is all identical with the implementation of copped wave with the copped wave function had of optical chopper of the prior art with the implementation of copped wave.Above-mentioned " the fixed frequency f1 of the control signal of carrying in driving instruction is converted to rotating speed of target n " specifically can be obtained by the conversion mode of arbitrary frequency of prior art and rotating speed, and the utility model repeats no more this.
Above-mentioned first detector 105 assembles infrared radiation to the photosurface 1052 of the first detector and parasitic light for detecting convergence apparatus 102, and opto-electronic conversion is carried out to the infrared radiation detected and parasitic light, the first electric signal generated after opto-electronic conversion is sent to control processor 107.It should be noted that, because convergence apparatus 102 is between infrared radiation converter 101 and chopper 103, and chopper 103 is positioned at the dead ahead of the photosurface 1052 of the first detector, so chopper 103 is between convergence apparatus 102 and the photosurface 1052 of the first detector, that is, the infrared radiation assembled of above-mentioned convergence apparatus 102 is by the photosurface 1052 of above-mentioned chopper 103 copped wave post-concentration to the first detector, therefore, the light (light that the photosurface 1052 of the first detector detects is called the first light signal) that the photosurface 1052 of the first detector detects comprise with fixed frequency f1 be detected by the infrared radiation after chopper 103 copped wave, with fixed frequency f1 be detected by the parasitic light after chopper 103 copped wave, not by the parasitic light of chopper 103 copped wave.Because the first detector 105 can produce circuit noise in the process of the first light signal being carried out to opto-electronic conversion, so above-mentioned first electric signal comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the infrared radiation after chopper 103 copped wave, carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave after generate the electric signal with fixed frequency f1, do not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave after generate electric signal, circuit noise introduce electric signal.
Above-mentioned second detector 106 for detecting parasitic light, and carries out opto-electronic conversion to the parasitic light detected, and the second electric signal generated after opto-electronic conversion is sent to control processor 107.As above-mentioned said, be positioned at the dead ahead of the photosurface 1062 of the second detector due to chopper 103, thus the light that the photosurface 1062 of the second detector detects (light that the photosurface 1062 of the second detector detects is called the second light signal) comprise with fixed frequency f1 be detected by the parasitic light after chopper 103 copped wave, not by the parasitic light of chopper 103 copped wave.Because the second detector 106 can produce circuit noise in the process of the second light signal being carried out to opto-electronic conversion, so the second electric signal comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave, do not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave after the electric signal introduced of the electric signal that generates and circuit noise.In the present embodiment, above-mentioned first detector 105 and the second detector 106 can for having the photodetector of the same type of detection infrared radiation function.
The first input end 1071 of above-mentioned control processor is connected with the output terminal 1051 of the first detector, for receiving the first electric signal that the first detector 105 exports; Second input end 1072 of control processor is connected with the output terminal 1061 of the second detector, for receiving the second electric signal that the second detector 106 exports.Above-mentioned control processor 107, also for after the second electric signal of the first electric signal and the output of the second detector 106 that receive the first detector 105 output, first electric signal and the second electric signal are amplified and filtering, generate the first sub-electric signal and the second sub-electric signal respectively, and the amplitude of the first sub-electric signal and " amplitude of the second sub-electric signal and the product of weighting coefficient γ " are subtracted each other, to obtain the Magnitude Difference I of the first sub-electric signal and the second sub-electric signal
r, thus according to this Magnitude Difference I
rthe laser power of testing laser is determined with the corresponding relation of laser power P.
Above-mentioned laser powermeter obtains in the process of the laser power of testing laser, the control processor 107 related to is to " the first electric signal and second electric signal of reception amplify and filtering, generate the first sub-electric signal and the second sub-electric signal respectively ", be specifically as follows: control processor 107 will send to the control signal of carrying in the steering order of driver 104 as reference signal, first electric signal and the second electric signal are carried out computing cross-correlation with reference signal respectively, make the first electric signal identical with the fixed frequency f1 of control signal with the second electric signal medium frequency and the electric signal that the difference of the phase place of phase place and control signal is fixed value carries out lock-in amplify, and adopt filtering circuit to carry out filtering to the signal after lock-in amplify, frequency is only made to be that the electric signal of fixed frequency f1 can pass through filtering circuit.Wherein, in the first electric signal, be called the first sub-electric signal through amplification, filtered electric signal, in the second electric signal, be called the second sub-electric signal through amplification, filtered electric signal.Like this, by the way, just can make through to amplify and filtered first sub-electric signal and the second sub-electric signal only comprise and have fixed frequency f1 and the difference of the phase place of phase place and control signal is the electric signal of fixed value.
Because the first electric signal comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the infrared radiation after chopper 103 copped wave, the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave, the electric signal generated after not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave, the electric signal that circuit noise is introduced, then through above-mentioned amplification, filtered first sub-electric signal comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the infrared radiation after chopper 103 copped wave and the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave.Because the second electric signal comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave, do not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave after generate electric signal, circuit noise introduce electric signal, then the second sub-electric signal after above-mentioned amplification, filtering process mainly comprises: the electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave.
It should be noted that, carrying out above-mentioned amplification, in the process of filtering, due to the frequency of " electric signal generated after not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave " that the first electric signal and the second electric signal comprise, and the frequency of the electric signal of circuit noise introducing is all different from the fixed frequency f1 of control signal, so " the electric signal generated after not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave that the first electric signal and the second electric signal comprise, the electric signal that circuit noise is introduced " medium frequency can be cancelled close to the electric signal of fixed frequency f1 in lock-in amplify process, the electric signal of frequency departure fixed frequency f1 can filter out by filtered circuit.Therefore, by this amplification, filtering process, significantly can reduce the amplitude of " electric signal that the electric signal generated after not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave and circuit noise are introduced " that the first electric signal and the second electric signal comprise, reach the useful electric signal in amplification first electric signal and the second electric signal, suppress useless electric signal (namely above-mentioned do not carried out opto-electronic conversion by the parasitic light of chopper 103 copped wave after the electric signal that generates, circuit noise introduce electric signal) object, and then improve the signal to noise ratio (S/N ratio) of the first electric signal and the second electric signal, even if when the useful electric signal that the first electric signal and the second electric signal comprise is very faint, also can be amplified by control processor 107, and then improve the sensitivity of laser powermeter.
Be described in detail to the course of work of the laser powermeter that the utility model provides below, this course of work comprises calibration process and measuring process, specific as follows:
One, calibration process (this process is adjust the light path of laser powermeter according to the measurement environment of reality and determine the process of weighting coefficient γ)
Step S101: open laser emitting source 108, make laser emitting source 108 launch testing laser, and carry out light path adjustment according to this testing laser.
Concrete, above-mentioned light path adjustment comprises: the position of adjustment infrared radiation converter 101, makes the light-sensitive area of infrared radiation converter 101 can absorb above-mentioned testing laser; The position of adjustment convergence apparatus 102, makes convergence apparatus 102 can receive the infrared radiation of above-mentioned infrared radiation converter 101 transmitting, and the infrared radiation received can be assembled the photosurface 1052 to the first detector.
Step S102: close laser emitting source 108, and make infrared radiation converter 101 be cooled to normal temperature state.
Concrete, after above-mentioned infrared radiation converter 101 is cooled to normal temperature state, infrared radiation converter 101 would not outside emitting infrared radiation line, and then convergence apparatus 102 also would not receive infrared radiation.
Step S103: control processor 107 is to driver 104 sending controling instruction.Wherein, steering order is used to indicate driver 104 and sends driving instruction to chopper 103, carries control signal in this steering order, and control signal is a signal with fixed frequency f1.
Step S104: driver 104 sends driving instruction to chopper 103 after receiving the steering order of control processor 107 transmission.Wherein, the control signal identical with steering order is carried in driving instruction.
Step S105: chopper 103 is after the driving instruction receiving driver 104 transmission, the fixed frequency f1 of the control signal of carrying in driving instruction is converted to rotating speed of target n, and rotate with this rotating speed of target n, copped wave is carried out to the light through chopper 103.
Step S106: the first detector 105 detects parasitic light B, and the parasitic light detected (parasitic light that the first detector detects is B1) is carried out opto-electronic conversion generation electric signal A1, then generated electric signal A1 is sent to control processor 107.
Step S107: the second detector 106 detects parasitic light B, and the parasitic light detected (parasitic light that the second detector detects is B2) is carried out opto-electronic conversion generation electric signal A2, then generated electric signal A2 is sent to control processor 107.
Concrete, due in above-mentioned steps S102, laser emitting source 108 is closed, and infrared radiation converter 101 is also cooled to normal temperature state, so infrared radiation converter 101 would not outside emitting infrared radiation line, and then convergence apparatus 102 also would not receive infrared radiation, therefore, in step s 106, the photosurface 1052 of the first detector also would not detect the infrared radiation of convergence apparatus 102 convergence, then the light that the first detector 105 and the second detector 106 detect just is only parasitic light B.That is, by above-mentioned steps S102, make the first detector 105 and the second detector 106 be in identical measurement environment to detect identical parasitic light, when but two detectors detect same parasitic light B, the parasitic light detected is different (parasitic light that the first detector detects is B1, and the parasitic light that the second detector detects is B2).
Step S108: control processor 107, after receiving electric signal A1 and electric signal A2, amplifies electric signal A1 and electric signal A2, generates sub-electric signal A11 and sub-electric signal A21 after filtering, and by the amplitude E of electric signal A11
11with the amplitude E of sub-electric signal A21
21be divided by, obtain weighting coefficient γ.
Concrete, due in above-mentioned steps S106 and step S107, first detector 105 and the second detector 106 are in identical measurement environment to detect identical parasitic light, so in ideal conditions, the parasitic light that first detector 105 and the second detector 106 detect should be identical (namely B1 should equal B2), thus the electric signal obtained according to identical parasitic light also should be identical (namely A1 equals A2), but, due to the reason such as manufacture craft of the first detector 105 and the second detector 106, the performance parameter of the first detector 105 and the second detector 106 can't be completely the same, so in practical situations both, the light quantity of the parasitic light that the first detector 105 and the second detector 106 detect is different (namely under actual conditions, above-mentioned B1 is not equal to B2), thus the electric signal that two detectors obtain also is different (namely A1 is not equal to A2).Therefore, by above-mentioned steps S102, make in step S106 and step S107, first detector 105 and the second detector 106 can be in identical measurement environment and detect identical parasitic light, and then by this step S108 just can determine can by " the second detector 106 detect change by the parasitic light after chopper 103 copped wave the electric signal (i.e. sub-electric signal A21) of generation " with " and the first detector 105 detect change by the parasitic light after chopper 103 copped wave the electric signal of generation " (i.e. sub-electric signal A11) carry out equivalent weighting coefficient γ, thus in follow-up measuring process, this weighting coefficient γ just can be utilized to filter out " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave " in the first sub-electric signal of the first detector 105, thus make to only include in the first sub-electric signal " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the infrared radiation after chopper 103 copped wave ", the power of the testing laser that laser powermeter so just can be made to measure is more accurate.Wherein, this weighting coefficient γ can be determined by following formula (1):
After execution of step S108, just complete the calibration process of laser powermeter, namely can be measured by the above-mentioned light path adjusted and the laser power of the weighting coefficient γ determined to testing laser, concrete measuring process can see following step S201-step S209.It should be noted that, if above-mentioned measurement environment (as temperature, parasitic light intensity etc.) remains unchanged always, then laser powermeter is follow-up when measuring testing laser again, just only can perform the step of following measuring process, above-mentioned calibration process need not be performed again, namely need not perform step S101-step S108, directly perform step S201-S209.
Two, measuring process (this process is the process measured according to the laser power of measurement environment to testing laser of reality)
Step S201: open laser emitting source 108, make laser emitting source 108 launch testing laser to infrared radiation converter 101.
Step S202: photothermal deformation, after absorption testing laser, is carried out to testing laser in the light-sensitive area of infrared radiation converter 101, makes the temperature of light-sensitive area raise and outside emitting infrared radiation line.
Step S203: the infrared radiation that infrared radiation converter 101 is launched by convergence apparatus 102 assembles the photosurface 1052 to the first detector.
Step S204: control processor 107 is to driver 104 sending controling instruction.Wherein, steering order is used to indicate driver 104 and sends driving instruction to chopper 103, carries control signal in this steering order, and control signal is a signal with fixed frequency f1.
Step S205: driver 104 sends driving instruction to chopper 103 after receiving the steering order of control processor 107 transmission.Wherein, the control signal identical with steering order is carried in driving instruction.
Step S206: chopper 103 is after the driving instruction receiving driver 104 transmission, the fixed frequency f1 of the control signal of carrying in driving instruction is converted to rotating speed of target n, and rotate with this rotating speed of target n, copped wave is carried out to the light through chopper 103.
Step S207: the first detector 105 detects the first light signal, and the first light signal detected is carried out opto-electronic conversion generates the first electric signal, then by generate the first electric signal and send to control processor 107.
Step S208: the second detector 106 detects the second light signal, and the second light signal detected is carried out opto-electronic conversion generates the second electric signal, then the second generated electric signal is sent to control processor 107.
Step S209: control processor 107, after receiving the first electric signal and the second electric signal, amplifies the first electric signal and the second electric signal and generates the first sub-electric signal and the second sub-electric signal after filtering, and by the amplitude E of the first sub-electric signal
1with " the amplitude E of the second sub-electric signal
2with the product of weighting coefficient γ " subtract each other, to obtain the Magnitude Difference I of the first sub-electric signal and the second sub-electric signal
r, thus according to this Magnitude Difference I
rthe laser power of testing laser is determined with the corresponding relation of laser power P.
Concrete, first electric signal and the second electric signal carried out after amplification filtering generates the first sub-electric signal and the second sub-electric signal respectively at control processor 107, the weighting coefficient γ that just can determine according to above-mentioned calibration process, " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave " that comprised by second sub-electric signal is equivalent to " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave " that the first sub-electric signal comprises, and then " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the parasitic light after chopper 103 copped wave " that can be comprised by the first sub-electric signal accurately filters out, thus make only to comprise in the first sub-electric signal " electric signal with fixed frequency f1 generated after being carried out opto-electronic conversion by the infrared radiation after chopper 103 copped wave ", namely now there is not the electric signal after other parasitic light conversion in the first sub-electric signal, make laser powermeter just can determine the laser power of testing laser accurately according to the corresponding relation of the amplitude of this first sub-electric signal and laser power like this.Wherein, the Magnitude Difference I of above-mentioned first sub-electric signal and the second sub-electric signal
rfollowing formula (2) can be adopted to determine, this formula (2) is specially:
I
r＝E
1-γE
2(2)
The Magnitude Difference I of the first sub-electric signal and the second sub-electric signal is determined by above-mentioned formula (2)
rafter, just can according to this Magnitude Difference I
rthe laser power of testing laser is determined accurately with the corresponding relation of laser power P.Wherein, above-mentioned " according to this Magnitude Difference I
rwith the laser power of the corresponding relation determination testing laser of laser power P " specific implementation can adopt and well known to a person skilled in the art that arbitrary implementation realizes, the utility model repeats no more this.Weighting coefficient γ in above-mentioned formula (2) is determined weighting coefficient γ in above-mentioned calibration process.
After execution of step S209, laser powermeter just completes the measurement of the laser power to testing laser.Wherein, the execution sequence of above-mentioned steps S201 and step S204-step S206 can be in no particular order, such as: first can perform step S201 and perform step S204-step S206 again, also first can perform step S204-step S206 and perform step S201 again, also can perform step S201 and step S204-step S206 simultaneously.
The laser powermeter based on infrared radiation measurement that the utility model provides, the function of the photothermal deformation had by infrared radiation converter, the testing laser of arbitrary wavelength in ultraviolet to far-infrared spectrum district can be converted to infrared radiation, and then the laser power of testing laser can be determined by measuring infrared radiation.Therefore, the laser powermeter based on infrared radiation measurement that the utility model provides, can measure the laser power of ultraviolet to the testing laser of the arbitrary wavelength in far red light spectral limit, improve the applicability of laser powermeter.
Further, on the basis of above-described embodiment, the structural representation of the laser powermeter embodiment two based on infrared radiation measurement that Fig. 2 provides for the utility model.As shown in Figure 2, above-mentioned laser powermeter also comprises: the logical optical filter of the first band 109 and the logical optical filter 110 of the second band; The photosurface 1052, second that the logical optical filter 109 of first band covers the first detector is with logical optical filter 110 to cover the photosurface 1062 of the second detector.
Concrete, the logical optical filter of above-mentioned first band 109 and the logical optical filter 110 of the second band all can lead to optical filter for the band that only infrared radiation can be made to pass through.By the first bandpass filter 109 is covered on the photosurface 1052 of the first detector, the parasitic light do not led in scope at the band of the logical optical filter 109 of the first band can be filtered out, decrease the parasitic light that the first detector 105 detects, and then the useless electric signal in the first electric signal that the first detector 105 is exported reduces.In like manner, by the logical optical filter 110 of the second band is covered on the photosurface 1062 of the second detector, also can decrease the parasitic light that the second detector 106 detects equally, and then the useless electric signal in the second electric signal that the second detector 106 is exported reduces.
Like this, when control processor 107 above-mentioned first electric signal and the second electric signal are amplified, after filtering, the signal to noise ratio (S/N ratio) of the obtain first sub-electric signal and the second sub-electric signal is more excellent, and then improves the sensitivity of laser powermeter.
The laser powermeter based on infrared radiation measurement that the utility model provides, by on the photosurface of the first detector and the photosurface of the second detector respectively cover tape lead to optical filter, the amount of stray light of the first detector and the detection of the second detector can be reduced, and then improve the sensitivity of laser powermeter.
Further, on the basis of above-described embodiment, the structural representation of the laser powermeter embodiment three based on infrared radiation measurement that Fig. 3 provides for the utility model.As shown in Figure 3, this laser powermeter also comprises: display 111; The input end 1111 of display is connected with the second output terminal 1074 of control processor.
Concrete, in order to the laser power making user can get testing laser intuitively, can be connected with a display 111 with control processor 107, like this, after laser powermeter gets the laser power of testing laser by above-mentioned metering system, just display 111 can be sent to show the laser power of the testing laser of acquisition by control processor 107.Wherein, this display 111 can be arbitrary display with Presentation Function, and the mode that this display 111 shows the laser power of testing laser can be figure display or numerical monitor etc.
The laser powermeter based on infrared radiation measurement that the utility model provides, by arranging the display be connected with control processor, after making laser powermeter pass through to measure the laser power getting testing laser, user by display intuitively and get the laser power of testing laser easily, can improve the experience of user.
Further, on the basis of above-described embodiment, the ability of testing laser is absorbed in order to improve infrared radiation converter 101, further shortening infrared radiation converter 101 pairs of testing lasers carry out the time of photothermal deformation, can arrange light-absorbing coating in the light-sensitive area of above-mentioned infrared radiation converter 101, this light-absorbing coating is for increasing the laser absorption rate of infrared radiation converter 101.Like this, infrared radiation converter 101 can absorb the testing laser enough carrying out photothermal deformation in the short period of time, testing laser is converted to the time of infrared radiation by further shortening infrared radiation converter 101, and then further shorten the response time of laser powermeter, improve the measurement efficiency of laser powermeter.
Further, on the basis of above-described embodiment, above-mentioned convergence apparatus 102 can have for arbitrary the convergence apparatus receiving and assemble infrared radiation function.Optionally, above-mentioned convergence apparatus 102 can be transmission-type convergence apparatus, and wherein, the photosurface 1052 to the first detector is assembled in the infrared radiation transmission that transmission-type convergence apparatus is used for infrared radiation converter 101 to launch.Shown in above-mentioned Fig. 1 is take convergence apparatus 102 as the laser powermeter of transmission-type convergence apparatus, and as shown in Figure 1, this transmission-type convergence apparatus can be arbitrary convergence apparatus with transmission convergence function, such as: convex lens etc.Further alternative, in order to improve the transmissivity of transmission-type convergence apparatus to infrared radiation, the plane of incidence of above-mentioned transmission-type convergence apparatus and exit facet all can be coated with the anti-reflection film for infrared radiation wavelength.Like this, even if the situation that the infrared radiation received at transmission-type convergence apparatus is very faint, the photosurface 1052 to the first detector is assembled in most of infrared radiation transmission that transmission-type convergence apparatus still can be received, and further increases the sensitivity of laser powermeter.
Optionally, on the basis of above-described embodiment, the structural representation of the laser powermeter embodiment four based on infrared radiation measurement that Fig. 4 provides for the utility model.As shown in Figure 4, above-mentioned convergence apparatus 102 can also be reflective convergence apparatus, and wherein, the infrared radiation line reflection that reflective convergence apparatus is used for infrared radiation converter 101 to launch assembles the photosurface 1052 to the first detector.This reflective convergence apparatus can be arbitrary convergence apparatus with reflection convergence function, such as: catoptron etc.Further alternative, in order to improve the reflectivity of reflective convergence apparatus to infrared radiation, the reflecting surface of above-mentioned reflective convergence apparatus can be coated with the reflectance coating for infrared radiation wavelength, this reflectance coating can be golden film, silverskin, copper film, aluminium film or high reverse--bias deielectric-coating, wherein, high reverse--bias deielectric-coating be the reflectivity of infrared radiation is greater than 99.5% reflecting medium film.Like this, even if the situation that the infrared radiation received at reflective convergence apparatus is very faint, most of infrared radiation line reflection that reflective convergence apparatus still can be received assembles the photosurface 1052 to the first detector, further increases the sensitivity of laser powermeter.
Further, on the basis of above-described embodiment, in order to improve the accuracy of laser powermeter measurement result, above-mentioned first detector 105 and the second detector 106 can be set to the photodetector of same type.Such as: above-mentioned first detector 105 and the second detector 106 can be indium antimonide InSb detector, or the first detector 105 and the second detector 106 can be mercury cadmium telluride TgCdTe detector.
Further, on the basis of above-described embodiment, in order to improve the accuracy of the measurement result of laser powermeter, avoid infrared radiation converter 101 when carrying out photothermal deformation to current testing laser, it also remains heat that photothermal deformation produces is carried out to a front testing laser, above-mentioned infrared radiation converter 101 can adopt the heat exchange method of Conduction cooled, make infrared radiation converter 101 residual on it " carrying out the heat that photothermal deformation produces to a front testing laser " can be directly conducted to extraneous air, greatly, to reach the object cooled.Like this, when infrared radiation converter 101 carries out photothermal deformation to current testing laser, the infrared radiation that the infrared radiation that infrared radiation converter 101 is launched is launched after being just only and carrying out photothermal deformation to current testing laser, improve the cooling effectiveness of infrared radiation converter 101, improve the accuracy of the measurement result of laser powermeter simultaneously.Optionally, above-mentioned infrared radiation converter 101 can also be provided with heat sink, residual on it " carrying out the heat that photothermal deformation produces to a front testing laser " can be discharged by heat sink by infrared radiation converter 101 fast, improve the cooling effectiveness of infrared radiation converter 101.
The laser powermeter based on infrared radiation measurement that the utility model provides, the function of the photothermal deformation had by infrared radiation converter, the testing laser of arbitrary wavelength in ultraviolet to far-infrared spectrum district can be converted to infrared radiation, and then the laser power of testing laser can be determined by measuring infrared radiation.Therefore, the laser powermeter that the utility model provides, can measure the testing laser of ultraviolet to the arbitrary wavelength in far red light spectral limit, improve the applicability of laser powermeter.
Last it is noted that above each embodiment is only in order to illustrate the technical solution of the utility model, be not intended to limit; Although be described in detail the utility model with reference to foregoing embodiments, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein some or all of technical characteristic; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the scope of each embodiment technical scheme of the utility model.
Claims (9)
1. the laser powermeter based on infrared radiation measurement, it is characterized in that, the described laser powermeter based on infrared radiation measurement comprises: infrared radiation converter, convergence apparatus, chopper, driver, the first detector, the second detector and control processor; Wherein, the input end of described driver is connected with the first output terminal of described control processor, the output terminal of described driver is connected with described chopper, the first input end of described control processor is connected with the output terminal of described first detector, and the second input end of described control processor is connected with the output terminal of described second detector;
Described convergence apparatus is between described infrared radiation converter and described chopper, and the infrared radiation for the described infrared radiation converter emission that will receive assembles the photosurface to described first detector;
Described chopper is positioned at the dead ahead of the photosurface of described first detector and the photosurface of described second detector.
2. the laser powermeter based on infrared radiation measurement according to claim 1, is characterized in that, the described laser powermeter based on infrared radiation measurement also comprises: the logical optical filter of the first band and the logical optical filter of the second band;
The logical optical filter of described first band covers the photosurface of described first detector, and the logical optical filter of described second band covers the photosurface of described second detector.
3. the laser powermeter based on infrared radiation measurement according to claim 1 and 2, is characterized in that, the described laser powermeter based on infrared radiation measurement also comprises: display;
The input end of described display is connected with the second output terminal of described control processor.
4. the laser powermeter based on infrared radiation measurement according to claim 3, is characterized in that, the light-sensitive area of described infrared radiation converter is provided with light-absorbing coating.
5. the laser powermeter based on infrared radiation measurement according to claim 4, it is characterized in that, described convergence apparatus is transmission-type convergence apparatus, and described transmission-type convergence apparatus is used for the photosurface infrared radiation transmission of described infrared radiation converter emission assembled to described first detector.
6. the laser powermeter based on infrared radiation measurement according to claim 5, is characterized in that, the plane of incidence of described transmission-type convergence apparatus and exit facet are all coated with the anti-reflection film for described infrared radiation wavelength.
7. the laser powermeter based on infrared radiation measurement according to claim 4, it is characterized in that, described convergence apparatus is reflective convergence apparatus, and described reflective convergence apparatus is used for the photosurface infrared radiation line reflection of described infrared radiation converter emission assembled to described first detector.
8. the laser powermeter based on infrared radiation measurement according to claim 7, it is characterized in that, the reflecting surface of described reflective convergence apparatus is coated with the reflectance coating for described infrared radiation wavelength, and described reflectance coating is golden film, silverskin, copper film, aluminium film or high reverse--bias deielectric-coating; Wherein, described high reverse--bias deielectric-coating be the reflectivity of described infrared radiation is greater than 99.5% reflecting medium film.
9. the laser powermeter based on infrared radiation measurement according to claim 1, it is characterized in that, described first detector and described second detector are indium antimonide InSb detector, or described first detector and described second detector are mercury cadmium telluride TgCdTe detector.
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| CN201520490887.7U CN204788657U (en) | 2015-07-08 | 2015-07-08 | Laser power meter based on infrared measures |
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| CN201520490887.7U CN204788657U (en) | 2015-07-08 | 2015-07-08 | Laser power meter based on infrared measures |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157830A (en) * | 2015-07-08 | 2015-12-16 | 北京光电技术研究所 | Laser power meter based on infrared radiation measurement |
| CN111256845A (en) * | 2020-02-10 | 2020-06-09 | 绵阳天和机械制造有限公司 | High-light-efficiency laser power meter |
| CN112346381A (en) * | 2020-10-29 | 2021-02-09 | 中国石油化工集团有限公司 | Digital phase-sensitive detection method and system based on FPGA |
-
2015
- 2015-07-08 CN CN201520490887.7U patent/CN204788657U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157830A (en) * | 2015-07-08 | 2015-12-16 | 北京光电技术研究所 | Laser power meter based on infrared radiation measurement |
| CN105157830B (en) * | 2015-07-08 | 2017-07-04 | 北京光电技术研究所 | Laser power meter based on infrared radiation measurement |
| CN111256845A (en) * | 2020-02-10 | 2020-06-09 | 绵阳天和机械制造有限公司 | High-light-efficiency laser power meter |
| CN112346381A (en) * | 2020-10-29 | 2021-02-09 | 中国石油化工集团有限公司 | Digital phase-sensitive detection method and system based on FPGA |
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