CN102435582A - High precision laser absorptivity measuring device - Google Patents
High precision laser absorptivity measuring device Download PDFInfo
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- CN102435582A CN102435582A CN2011103117032A CN201110311703A CN102435582A CN 102435582 A CN102435582 A CN 102435582A CN 2011103117032 A CN2011103117032 A CN 2011103117032A CN 201110311703 A CN201110311703 A CN 201110311703A CN 102435582 A CN102435582 A CN 102435582A
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Abstract
The invention relates to the field of research on laser absorbing and scattering characteristics of materials, in particular to a high precision laser absorptivity measuring device. In the prior art, the absorbability of a material cannot be measured at high precision. In order to solve the problem in the prior art, the high precision laser absorptivity measuring device comprises an optical measuring assembly, wherein the optical measuring assembly comprises a laser light source, an acoustic optical modulator, a beam shaping component, a semitransparent mirror, a reflector and an integrating sphere; the laser light source, the acoustic optical modulator, the beam shaping component, the semitransparent mirror and the reflector are positioned in the same optical path; a plurality of openings are formed in the integrating sphere; a light guide pipe is arranged at the first opening; the light guide pipe is arranged along the line of centers of the first and second openings; and a first photoelectric detector is arranged at the third opening. The device accurately measures high absorptivity, and is high in accuracy, convenient to measure and wide in application range.
Description
Technical field:
the present invention relates to the laser absorption and the scattering properties research field of material, are specifically related to a kind of high-precision laser absorptivity measurement mechanism.
Background technology:
high-absorbility material has high using value in military and civilian fields such as laser camouflage and lasing safeties.Like high precision measurement system in the optical laboratory, all require its melanism to handle with the irrelevant surface of test, so that absorb parasitic light to greatest extent, prevent that its surperficial reflected light from influencing the precision of test macro.Melanism handle can be that oxidation melanism, spray are pitch-dark, sootiness, subsides black flannelette etc.At present the measuring method of absorption of sample rate mainly contains three types: the first kind is the angle from calorimetric, the temperature variation through measuring material and the corresponding calculation of thermodynamics of the carrying out rate that is absorbed.Main research work has; Utilizing lumped-parameter method to carry out absorptivity calculates, utilizes the unsteady-state heat transfer of the peacekeeping two dimension of method of finite difference to learn Model Calculation absorptivity (tribology National Key Laboratory of [1] Tsing-Hua University; Acta Physica Sinica, 2001,50 (5): 856～859).These class methods have the use precondition, have limited its usable range.Second class methods then be situation about changing according to laser action district materials behavior come indirectly research absorbing state (Shanghai ray machine institute of [2] Chinese Academy of Sciences, laser, 1981,3:26-31).The work of this respect mainly is to come absorptivity is evaluated indirectly through the physical dimension in Laser Measurement heat effect district, and these class methods generally can only be used for absorptivity is estimated qualitatively.The 3rd type is through measurement of reflectivity, deducts reflectivity by incident radiation again and obtains absorptivity ([3] aerospace journal, 1983,3:89～104).
are Changchun ray machine institute (solar energy journals with the most approaching prior art of the present invention wherein; 1992; 406～411) and Chinese Academy of Sciences's Changchun optical precision optical machinery and physics Institute's (utility model patent 13 (3):; 2004, the patent No.: two kinds of absorptivity measurement mechanisms CN03212220.9), like Fig. 1, shown in 2.And the measurement of document [3] solar spectrum absorptivity.
above 3 kinds of schemes are not all considered the influence that the scattering loss of dust granule causes measurement in the air under the conventional environment, exist inherent error because of surveying instrument equipment simultaneously, therefore can not realize the high-acruracy survey of absorbed rate.
in addition, scenarios also has following shortcoming.
The major defect of the measurement mechanism that
solar energy journal provides is: can not eliminate the influence of specular light to measuring from principle; The set-up mode of device causes specular light to reflect integrating sphere along input path, and the actual absorptivity that records is not deducted the influence of this part.
Among
CN03212220.9; In order to overcome the influence of specular light to measuring; In front on the basis of measurement mechanism, specular light gone out outside the integrating sphere along the former pass of incident light measure again, though it is improved; But still do not handle, and make light path complicated from principle.
Described measurement in
document 3, need detector or absorbing material have been placed the center of integrating sphere the solar spectrum absorptivity, not easy to operate and change, impracticable.
Summary of the invention:
The technical matters that
the present invention will solve provides a kind of high-precision laser absorptivity measurement mechanism, to overcome the problem that can not realize high-precision absorptivity measurement that prior art exists.
In order to solve the problem that prior art exists, technical scheme provided by the invention is:
A kind of high-precision laser absorptiometry device comprises optical table 20, computing machine 21 and Control Component, on the said optical table 20 optical flat 19 is installed, and optical flat 19 is provided with the optical measurement assembly, it is characterized in that:
Said optical measurement assembly comprises LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, pass through anti-mirror 4, catoptron 5 and integrating sphere 7; Wherein LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, pass through anti-mirror 4 and catoptron 5 is positioned on the same light path; Integrating sphere 7 is provided with the perforate of 3 places; Be respectively first perforate 6, second perforate 9 and the 3rd perforate 11; First perforate, 6 places are provided with light pipe 8, and light pipe 8 is along the center line connecting direction setting of first perforate 6 and second perforate 9, and the 3rd perforate 11 places are provided with first photodetector 12; The incident light that said catoptron 5 provides is injected on the sample of placing at second perforate, 9 places 10 along light pipe 8; Normal between incident angle and the specular angle passes the centre of sphere of integrating sphere 7; The setting principle of incident angle is that specular light is in integrating sphere and away from the photosurface of first photodetector 12; The front end of first photodetector 12 is provided with protection baffle plate 13, and the surface of protection baffle plate 13 is identical with the integrating sphere inner surface treatment;
said Control Component comprises first lock-in amplifier 15, second lock-in amplifier 16, synchronous data collection unit 17 and waveform generator 18; Computing machine 21 control waveform generators 18 output square-wave signals; The modulation that this square-wave signal is used for acousto-optic modulator 2 drives, and this square-wave signal is sent in first lock-in amplifier 15 and second lock-in amplifier 16 simultaneously; The reflected light that passes through anti-mirror 4 converts electric signal to after by second photodetector 14 that is provided with on its light path; The voltage signal of this electric signal after output denoising behind second lock-in amplifier 16, this voltage signal signal is sent into computing machine 21 after synchronous data collection unit 17 is gathered; The voltage signal of said first photodetector, 12 output electric signal after output denoising behind first lock-in amplifier 15, this voltage signal is sent into computing machine 21 after synchronous data collection unit 17 is gathered.
The laser that
above-mentioned LASER Light Source 1 sends is injected acousto-optic modulator 2 with Bragg angle; The first-order diffraction light of acousto-optic modulator 2 is as measuring incident light; Computing machine 21 control waveform generators 18 output square-wave signals, the modulation that this square-wave signal is used for acousto-optic modulator 2 drives.
Between
above-mentioned acousto-optic modulator 2 and the beam shaping assembly 3 attenuator is set.So just can be used for the low absorptivity sample is measured.
The laser that
are penetrated in conventional environment or non-compliant dust free room can be seen tangible laser optical path; This is to the effect of the scattered light of laser because of dust granule in the air under the conventional environment; Measure or need under such as the hundred-grade super-clean room environmental, carry out for high-precision absorptivity, or need try every possible means to deduct under the conventional environment in the air dust granule the influence of the scattered light of laser.Compared with prior art, advantage of the present invention is:
1, realized the accurate measurement of high-absorbility, precision is high:
The source of error of measuring the absorbed rate based on integrating sphere mainly contains following 2 points: ([3] aerospace journal, 1983,3:89～104)
(1), the error of integrating sphere structure
(2), the error of surveying instrument equipment
for source of error (1), and from the data of consulting, forefathers' method all is the effects that utilize the basic function of integrating sphere promptly to collect light and even light, and light path does not process in integrating sphere.During measurement, incident light is very strong for the reflected light after being absorbed by high absorbing material, and the scattered light that produces owing to the ambient dust particle on the light path of incident light in integrating sphere all is integrated ball and has collected; This part is noise signal only, but traditional integrating sphere light path is not done any processing, causes this part noise light directly to be added on the flashlight; Produce very strong noise, and because the flowability of air self changes this part noise light signal at any time; Uncertain, can cause the fluctuation of measuring-signal, produce measuring error; Measure occasion at high-absorbility, more can sharply reduce signal to noise ratio (S/N ratio).
and the present invention designs in order to overcome this defective just; In integrating sphere, add light pipe, and the processing of inside pipe wall melanism, outer wall is handled identical with the integrating sphere inwall; Light incides on the sample through light pipe; The scattering overwhelming majority that laser produces on the input path in ball is absorbed, and can't scatter in the integrating sphere, can not exert an influence to measuring-signal; The present invention is provided with a light pipe 8 at first opening, 6 places; Incident light is mapped on the sample 10 through light pipe 8, the influence that being provided with of light pipe 8 avoided on the one hand the scattered light of particle on input path such as dusts in the integrating sphere 7 that measurement is caused, on the other hand also almost completely the resistance shelves from the emergent light of first opening 6.The present invention has overcome the inherent shortcoming of traditional quadrature ball light path, has greatly improved the signal to noise ratio (S/N ratio) of measuring.
are for source of error two; Mainly contain the error that light source fluctuation causes, the error that bias light produces, and the error of detector circuit zero point drift generation; The technology of traditional measurement absorptivity all is directly to measure; Do not handle to these source of errors, apparatus of the present invention have been taked light source fluctuation is monitored, light modulated utilized related detecting method to come background correction light and detector circuit zero point drift errors caused, realize high-acruracy survey.
The laser that
2, apparatus of the present invention are sent LASER Light Source earlier on the one hand carries out acoustooptic modulation; Acousto-optic modulator is modulated by the square-wave signal that receives computer-controlled waveform generator output; Laser goes into to inject acousto-optic modulator with Bragg angle; Utilize its 1 order diffraction light to use incident light, this design to avoid LASER Light Source being gone out the influence of luminous power along the light of input path reflected back LASER Light Source as measuring; On the other hand with passing through anti-mirror beam split, the one tunnel is used for to the monitoring of laser power fluctuation and as the measurement of reference light, and another road is as the incident light of test; Its three, cooperate modulation to laser, come processing signals with lock-in amplifier, can avoid The noise such as bias light, detector drift, improve the measuring accuracy of system.Its four, utilize the synchronous data collection function reference light and flashlight are carried out the synchro measure computing, deducted the influence of light source fluctuation to measuring.
3, applied widely: apparatus of the present invention not only are fit to accurately measuring fast of high-absorbility absorption of sample rate, also suit the low absorptivity sample is measured.
4, convenient test, easy and simple to handle: apparatus of the present invention can be used the different wavelength of laser light source as required instead; Simultaneously can convenient and swift detection by quantitative sample for the absorptivity of laser; Avoided the measuring error that the scattering of dust granule causes in the air; Do not receive the environment interference of stray light, repeated test is convenient in operation easily.
Light goes into to inject integrating sphere 7 from first opening 6 among
5, the present invention; Be mapped on the sample 10 that is positioned at second opening 9 through light pipe 8; One angle is set between incident light and the normal; Normal is through the centre of sphere of integrating sphere 7, like this specular light and diffusing all in integrating sphere.
Description of drawings:
The structural representation of Fig. 1 prior art;
Improved structural representation on Fig. 2 prior art;
Fig. 3 is a measurement mechanism structural representation of the present invention
Fig. 4 is the raw measurement data waveform when light pipe 8 not being installed;
Fig. 5 is the raw measurement data waveform when light pipe 8 is installed.
Description of reference numerals is following:
1-LASER Light Source; The 2-acousto-optic modulator; 3-beam shaping assembly; 4-passes through anti-mirror; The 5-catoptron; 6-first opening; The 7-integrating sphere; The 8-light pipe; 9-second opening; 10-sample 11-the 3rd opening; 12-first photodetector; 13-protects baffle plate; 14-second photodetector; 15-first lock-in amplifier; 16-second lock-in amplifier; 17-synchronous data collection unit; The 18-waveform generator; The 19-optical flat; The 20-optical table; The 21-computing machine.
Embodiment:
below will combine accompanying drawing and embodiment that the present invention is at length explained.
referring to Fig. 1 and Fig. 2, and they are respectively the devices that provides in the measurement mechanism that provides of solar energy journal and the Chinese patent " CN03212220.9 ".
are referring to Fig. 3; A kind of high-precision laser absorptivity measurement mechanism provided by the invention; Comprise optical table 20, computing machine 21 and Control Component, on the said optical table 20 optical flat 19 is installed, optical flat 19 is provided with the optical measurement assembly.
Said optical measurement assembly comprises LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, pass through anti-mirror 4, catoptron 5 and integrating sphere 7; Wherein LASER Light Source 1, acousto-optic modulator 2, beam shaping assembly 3, pass through anti-mirror 4 and catoptron 5 is positioned on the same light path; Integrating sphere 7 is provided with the perforate of 3 places; Be respectively first perforate 6, second perforate 9 and the 3rd perforate 11; First perforate, 6 places are provided with light pipe 8, and light pipe 8 is along the center line connecting direction setting of first perforate 6 and second perforate 9, and the 3rd perforate 11 places are provided with first photodetector 12; The incident light that said catoptron 5 provides is injected on the sample of placing at second perforate, 9 places 10 along light pipe 8; Normal between incident angle and the specular angle passes the centre of sphere of integrating sphere 7; The setting principle of incident angle is that specular light is in integrating sphere and away from the photosurface of first photodetector 12; The front end of first photodetector 12 is provided with protection baffle plate 13, and the surface of protection baffle plate 13 is identical with the integrating sphere inner surface treatment;
said Control Component comprises first lock-in amplifier 15, second lock-in amplifier 16, synchronous data collection unit 17 and waveform generator 18; Computing machine 21 control waveform generators 18 output square-wave signals; The modulation that this square-wave signal is used for acousto-optic modulator 2 drives, and this square-wave signal is sent in first lock-in amplifier 15 and second lock-in amplifier 16 simultaneously; The reflected light that passes through anti-mirror 4 converts electric signal to after by second photodetector 14 that is provided with on its light path; The voltage signal of this electric signal after output denoising behind second lock-in amplifier 16, this voltage signal signal is sent into computing machine 21 after synchronous data collection unit 17 is gathered; The voltage signal of said first photodetector, 12 output electric signal after output denoising behind first lock-in amplifier 15, this voltage signal is sent into computing machine 21 after synchronous data collection unit 17 is gathered.
The laser that
said LASER Light Source 1 sends is injected acousto-optic modulator 2 with Bragg angle; The first-order diffraction light of acousto-optic modulator 2 is as measuring incident light; Computer control waveform generator 18 output square-wave signals, the modulation that this square-wave signal is used for acousto-optic modulator 2 drives.
Measuring process is described below:
place integrating sphere second opening 9 places with the testing sample 10 (as: flat board of black flannelette is posted on the surface) of high-absorbility; Computer control waveform generator 18 sends square-wave signal; Incident light passes light pipe 8 and shines on the sample 10; Integrating sphere 7 is collected minute surface and is diffused; Send first lock-in amplifier 15 denoisings after converting electric signal into by first photodetector 12; While second photodetector 14 also will convert electric signal into by the beam split of passing through anti-mirror 4 and send second lock-in amplifier 16 denoisings, computer control synchronous data collection 17 synchronous acquisition signals, and the absorptivity that directly obtains sample is handled in the row operation of going forward side by side.
When
utilize apparatus of the present invention to compare not install light pipe 8 and light pipe 8 is installed black flannelette dull and stereotyped original waveform such as Fig. 4 and shown in Figure 5 to the measurement data of He-Ne Lasers absorptivity are posted in the surface.
are visible from Fig. 4 and Fig. 5; Under the same test condition; Light pipe 8 measurement data are not installed obviously to be increased; Fluctuation also strengthens, and the design and installation of visible light pipe 8 has greatly reduced in the integrating sphere 7 in the air on the light paths influences of particle scattering laser to measuring such as dust, and this also is the major reason that apparatus of the present invention improve measuring accuracy.
can realize the low absorptivity sample is measured if between the acousto-optic modulator 2 of input path and beam shaping assembly 3, attenuator is set.
Claims (3)
1. high-precision laser absorptiometry device; Comprise optical table (20), computing machine (21) and Control Component; Optical flat (19) is installed on the said optical table (20); Optical flat (19) is provided with the optical measurement assembly; It is characterized in that: said optical measurement assembly comprises LASER Light Source (1), acousto-optic modulator (2), beam shaping assembly (3), passes through anti-mirror (4), catoptron (5) and integrating sphere (7); Wherein LASER Light Source (1), acousto-optic modulator (2), beam shaping assembly (3), pass through anti-mirror (4) and catoptron (5) is positioned on the same light path, integrating sphere (7) is provided with the perforate of 3 places, is respectively first perforate (6), second perforate (9) and the 3rd perforate (11); First perforate (6) locates to be provided with light pipe (8); Light pipe (8) is along first perforate (6) and the center line connecting direction setting of second perforate (9), and the 3rd perforate (11) locates to be provided with first photodetector (12), and the incident light that said catoptron (5) provides is injected on the sample (10) that second perforate (9) locates to place along light pipe (8); Normal between incident angle and the specular angle passes the centre of sphere of integrating sphere (7); The setting principle of incident angle be specular light in integrating sphere and away from the photosurface of first photodetector (12), the front end of first photodetector (12) is provided with protection baffle plate (13), the surface of protection baffle plate (13) is identical with the integrating sphere inner surface treatment;
Said Control Component comprises first lock-in amplifier (15), second lock-in amplifier (16), synchronous data collection unit (17) and waveform generator (18); Computing machine (21) control waveform generator (18) output square-wave signal; The modulation that this square-wave signal is used for acousto-optic modulator (2) drives, and this square-wave signal is sent in first lock-in amplifier (15) and second lock-in amplifier (16) simultaneously; The reflected light that passes through anti-mirror (4) converts electric signal to after by second photodetector (14) that is provided with on its light path; The voltage signal of this electric signal after output denoising behind first lock-in amplifier (15), this voltage signal is sent into computing machine (21) after gather synchronous data collection unit (17); The voltage signal of said first photodetector (12) output electric signal after output denoising behind first lock-in amplifier (15), this voltage signal is sent into computing machine (21) after gather synchronous data collection unit (17).
2. according to the said a kind of high-precision laser absorptivity measurement mechanism of claim 1; It is characterized in that: the laser that said LASER Light Source (1) sends is injected acousto-optic modulator (2) with Bragg angle; The first-order diffraction light of acousto-optic modulator (2) is as measuring incident light; Computing machine (21) control waveform generator (18) output square-wave signal, the modulation that this square-wave signal is used for acousto-optic modulator (2) drives.
3. according to claim 1 or 2 said a kind of high-precision laser absorptiometry devices, it is characterized in that: be provided with attenuator between said acousto-optic modulator (2) and the beam shaping assembly (3).
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103063702A (en) * | 2013-01-05 | 2013-04-24 | 江苏大学 | Method and device for testing laser absorptivity of powdery material |
| CN105259115A (en) * | 2015-09-29 | 2016-01-20 | 北京卫星制造厂 | Portable solar absorptance testing instrument |
| WO2016029321A1 (en) | 2014-08-29 | 2016-03-03 | Aurora Control Technologies Inc. | System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof |
| CN107843562A (en) * | 2017-12-08 | 2018-03-27 | 湖南文理学院 | A kind of integrating sphere device and integration sphere light source system |
| CN108061707A (en) * | 2017-12-08 | 2018-05-22 | 湖南文理学院 | A kind of integration sphere light source system and test method |
| CN108982392A (en) * | 2018-09-28 | 2018-12-11 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser absorption rate measuring device and laser absorption rate measurement method |
| CN109520929A (en) * | 2018-12-03 | 2019-03-26 | 东北石油大学 | A kind of stray light suppression device for oil vapour pollution object laser detection |
| CN112255193A (en) * | 2020-10-10 | 2021-01-22 | 桂林电子科技大学 | Laser absorption rate measuring device for spherical metal material changing along with temperature |
| CN114235756A (en) * | 2021-11-15 | 2022-03-25 | 西安工业大学 | High-precision laser scanning type transmissivity distribution measuring device and method |
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|---|---|---|---|---|
| CN103063702A (en) * | 2013-01-05 | 2013-04-24 | 江苏大学 | Method and device for testing laser absorptivity of powdery material |
| US10386310B2 (en) | 2014-08-29 | 2019-08-20 | Aurora Solar Technologies (Canada) Inc. | System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof |
| CN107112255B (en) * | 2014-08-29 | 2021-05-14 | 奥罗拉太阳能科技（加拿大）公司 | System for measuring the level of radiation reflected from a semiconductor material for measuring the dopant content of the semiconductor material |
| CN107112255A (en) * | 2014-08-29 | 2017-08-29 | 奥罗拉太阳能科技（加拿大）公司 | For measuring the level for the radiation reflected from semi-conducting material for the system for the dopant content for measuring semi-conducting material |
| WO2016029321A1 (en) | 2014-08-29 | 2016-03-03 | Aurora Control Technologies Inc. | System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof |
| CN105259115B (en) * | 2015-09-29 | 2018-04-10 | 北京卫星制造厂 | A kind of portable solar absorptance detector |
| CN105259115A (en) * | 2015-09-29 | 2016-01-20 | 北京卫星制造厂 | Portable solar absorptance testing instrument |
| CN107843562A (en) * | 2017-12-08 | 2018-03-27 | 湖南文理学院 | A kind of integrating sphere device and integration sphere light source system |
| CN108061707A (en) * | 2017-12-08 | 2018-05-22 | 湖南文理学院 | A kind of integration sphere light source system and test method |
| CN108982392A (en) * | 2018-09-28 | 2018-12-11 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser absorption rate measuring device and laser absorption rate measurement method |
| CN109520929A (en) * | 2018-12-03 | 2019-03-26 | 东北石油大学 | A kind of stray light suppression device for oil vapour pollution object laser detection |
| CN109520929B (en) * | 2018-12-03 | 2021-04-27 | 东北石油大学 | Stray light suppression device for laser detection of oil and gas pollutants |
| CN112255193A (en) * | 2020-10-10 | 2021-01-22 | 桂林电子科技大学 | Laser absorption rate measuring device for spherical metal material changing along with temperature |
| CN114235756A (en) * | 2021-11-15 | 2022-03-25 | 西安工业大学 | High-precision laser scanning type transmissivity distribution measuring device and method |
| CN114235756B (en) * | 2021-11-15 | 2024-02-23 | 西安工业大学 | High-precision laser scanning type transmissivity distribution measuring device and measuring method |
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