CN204725247U - Become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine - Google Patents
Become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine Download PDFInfo
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- CN204725247U CN204725247U CN201520142224.6U CN201520142224U CN204725247U CN 204725247 U CN204725247 U CN 204725247U CN 201520142224 U CN201520142224 U CN 201520142224U CN 204725247 U CN204725247 U CN 204725247U
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Abstract
The utility model relates to a kind of track-ultrasonic elliptical vibratory that becomes and assists fixed grain polishing machine, and it comprises: power section, polishing part, running part and supersonic generator part.Power section drives the motion of running part and polishing part, polishing portion is divided and is comprised polishing station, rotary polishing tools, described power section comprises the power source of X-axis, Y-axis, Z-direction, the utility model working (machining) efficiency and precision high, polishing disk can realize complicated orbiting motion, and Polishing Motion speed roughly keeps identical, and make the roughness of polished surface each point basically identical.And finished surface not cracky, be especially applicable to the polishing of hard brittle material.
Description
Technical field
The utility model relates to a kind of ultrasonic elliptical vibratory auxiliary polishing device becoming track.
Background technology
The working (machining) efficiency of existing burnishing device is not high, and the machined surface roughness of workpiece is inconsistent, and especially the polished surface breakage rate of hard brittle material is larger.
Utility model content
Technical problem to be solved in the utility model to provide a kind of working (machining) efficiency high, workpiece machining surface roughness uniformity, the burnishing device that especially the polished surface breakage rate of hard brittle material is little, and the technical scheme realizing above-mentioned purpose is as follows:
Become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine, comprise power section, polishing part, running part, power section drives running part and polishing portion componental movement, polishing portion is divided and is comprised polishing station, rotary polishing tools, described power section comprises the power source of X-axis, Y-axis, Z-direction, rotary polishing tools comprises polishing tool, polishing tool electric rotating machine, and it is characterized in that: also comprise supersonic generator, rotary polishing tools also comprises carbon brush component, polishing tool arranges piezoelectric ceramics, and polished silicon wafer is installed in the bottom of polishing tool, wherein polishing tool electric rotating machine is electrically connected with carbon brush component, carbon brush component is electrically connected with piezoelectric ceramics or signal is connected, simultaneously carbon brush component is electrically connected with supersonic generator or signal is connected, the power supply of supersonic generator is applied on piezoelectric ceramics by carbon brush component, piezoelectric ceramics produces vibration under the effect of external supersonic generator power supply, the vibration passing that piezoelectric ceramics produces is to polishing tool, polishing tool will produce the vibration in vertical and horizontal two kinds of directions simultaneously, the vibration synthesize of both direction forms ultrasonic elliptical vibratory, and then drive polished silicon wafer to produce corresponding vibration.
Preferably, described polishing station comprises polishing disk, ring gear, base, ring gear is arranged on base by connector, polishing disk is placed on ring gear, the bottom of polishing disk arranges planetary gear device, planetary gear device comprises planetary wheel carrier, planetary wheel carrier has the support arm of several extension, the centre of planetary wheel carrier arranges driving wheel, the free end of each support arm arranges a driven pulley, driving wheel engages with the outer rim of each driven pulley, planetary gear device is positioned at ring gear, polishing disk drive motors drives driving wheel to rotate, thus make driving wheel drive planetary wheel carrier to rotate,
The inwall of described ring gear is dentalation, and the outer rim of each driven pulley engages with the inwall of ring gear, and polishing disk moves under the drive of planetary gear device.
Preferably, described planetary wheel carrier is substantially in a y-type structure, and extend support arm between angle equal, the driven pulley line of centres is made to form equilateral triangle, the free end of each support arm arranges one and protrudes axle, protrude the center of axle and arrange pin-and-hole one, axle is protruded accordingly through one in the axle center of each driven pulley, and driven pulley can rotate to protrude axle for axle center;
The bottom surface of described polishing disk arranges three connecting pins, and the external diameter of connecting pin and the internal diameter adaptation of pin-and-hole one, the corresponding connecting pin of each pin-and-hole one, connecting pin inserts in pin-and-hole one, and polishing disk is followed driven pulley and carried out revolving round the sun and/or rotation.Polishing disk is installed together with planetary wheel carrier with coordinating of pin-and-hole one by connecting pin.
Preferably, described each driven pulley is also provided with two pin-and-holes, be respectively pin-and-hole two, pin-and-hole three, and the center of the pin-and-hole two of same driven pulley, pin-and-hole three is unequal to the centre distance of driven pulley, wherein the coordinating separately with connecting pin of each pin-and-hole two or pin-and-hole three adaptation.
When connecting pin coordinates with pin-and-hole one, polishing disk only does the circular motion around driving wheel center; When connecting pin coordinates separately with pin-and-hole two or pin-and-hole three, polishing disk can do the compound movement of different tracks; When removing ring gear, when polishing disk coordinates separately with pin-and-hole two or pin-and-hole three, polishing disk only does translation.
Preferably, also comprise source power amplifier, source power amplifier is electrically connected with supersonic generator, and the power of supersonic generator amplifies by source power amplifier.
First workpiece to be machined is placed on polishing disk, starts afterwards and become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine, choose according to the processing request of workpiece the movement locus that polishing disk does.
The utility model working (machining) efficiency and machining accuracy high, polishing disk can realize complicated orbiting motion.And finished surface not cracky, be especially applicable to the polishing of hard brittle material.
Accompanying drawing explanation
Fig. 1 is the utility model schematic perspective view
Fig. 2 is polishing station overall schematic
Fig. 3 is polishing station schematic diagram
Schematic diagram when Fig. 4 is polishing station removal polishing disk
Fig. 5 is planetary wheel carrier schematic diagram
Fig. 6 is polishing disk schematic perspective view
Fig. 7 is another angle schematic diagram of polishing disk
Fig. 8 is polishing disk front view
Fig. 9 is the schematic diagram of polishing disk when removing a planetary gear
Figure number illustrates: X-axis servomotor 1, Y-axis servomotor 2, Z axis servomotor 3, polishing station 4, carbon brush component 5, polishing tool 6, polishing tool electric rotating machine 7, PZT8, polished silicon wafer 9, polishing disk 4.1, protrusion axle 4.2, planetary wheel carrier 11, support arm 11.1, driving wheel 12, driven pulley 13, protrusion axle 14, pin-and-hole 1, connecting pin 16, installation shaft 17, pin-and-hole 2 18, pin-and-hole 3 19, track-type facilities 20, polishing disk 4.1, ring gear 4.2, polishing disk drive motors 4.3, base 4.4
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in detail.
In figure, become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine, comprise supersonic generator, source power amplifier, power section, polishing part, running part, power section drives running part and polishing portion componental movement, described power section comprises the power source of X-axis, Y-axis, Z-direction, the preferred servomotor of power source, is respectively X-axis servomotor 1, Y-axis servomotor 2, Z axis servomotor 3, and polishing portion is divided and comprised polishing station 4, rotary polishing tools.Main utility model point in the utility model: one is in the CMP process of fixed grain, introduces ultrasonic elliptical vibratory; Two are polishing station 4, the structure of rotary polishing tools improves to some extent, remaining structure is same as the prior art, does not do too much repeating at this, the utility model point of the following detailed description the application.
Rotary polishing tools comprises carbon brush component 5, polishing tool 6, polishing tool electric rotating machine 7, polishing tool is arranged PZT (piezoelectric ceramics) 8, and polished silicon wafer 9 is installed in the bottom of polishing tool 6, wherein polishing tool electric rotating machine 7 is electrically connected with carbon brush component 5, carbon brush component 5 is connected with polishing tool 6, supersonic generator and source power amplifier are realized being electrically connected or signal is connected simultaneously, the ultrasonic power that source power amplifier exports is applied on the PZT (piezoelectric ceramics) 8 on rotary polishing tools 6 by carbon brush component 5, carbon brush component 5 can realize doing ultrasonic power that the source power amplifier that rotates exports and be applied to effect on rotary polishing tools 6.
PZT is under the excitation of external ultrasonic power, polishing tool will produce two kinds of vibrations in longitudinal direction (length direction) and horizontal (thickness direction) direction simultaneously, the synthesis of this both direction can realize ultrasonic elliptical vibratory, and then drives polishing tool 6 also to produce corresponding vibration.Such as CeO
2etc. chemical substance composition the polishing of fixed grain polished silicon wafer time and workpiece to be machined (workpiece is contained on polishing disk, such as workpiece can be bonded on polishing disk) there is chemical reaction, add the ultrasonic elliptical vibratory of polishing tool, thus the ultrasonic elliptical vibratory realizing workpiece assists the chemically mechanical polishing of fixed grain to process.
In Fig. 2, polishing station 4 comprises polishing disk 4.1, ring gear 4.2, polishing disk drive motors 4.3, base 4.4, ring gear 4.2 is fixed on base 4.4 by connectors such as bolts, polishing disk drive motors 4.3 is also arranged on base, the bottom installed rows star wheel device of polishing disk 4.1, planetary gear device is positioned at ring gear internal diameter and is surrounded by ring gear, planetary gear device coordinates with ring gear and drives polishing disk to move, the external diameter of polishing disk 4.1 is greater than or equal to the internal diameter of ring gear 4.2, polishing disk 4.1 covers on ring gear 4.2, and the upper surface of the bottom surface of polishing disk 4.1 and ring gear 4.2 is a little more than the upper surface of ring gear 4.2, facilitate the various compound movements of polishing disk, polishing disk drive motors 4.3 drives planetary gear device to rotate, workpiece to be machined is placed on the end face of polishing disk.
Described planetary gear device comprises planetary wheel carrier 11, driving wheel 12, a several driven pulley 13, planetary wheel carrier 11 is substantially in a y-type structure, there are three support arms 11.1 extended, and extend support arm between angle equal, the centre of planetary wheel carrier arranges driving wheel 12, each support arm is arranged a driven pulley 13, driving wheel 12 engages with the outer rim of each driven pulley 13;
Polishing disk drive motors 4.3 drives driving wheel 12 to rotate, the cooperation of the planetary wheel carrier of y-type structure and driving wheel 12, driven pulley 13 is just like solar structure, therefore driving wheel 12 is also referred to as sun gear, driven pulley 13 is referred to as planetary gear, the inwall of ring gear 4.2 is dentalation, the outer rim of each driven pulley 13 engages with ring gear, and polishing disk 4.1 can rotate under the drive of planetary gear device.Certainly, and star wheel frame also can be that other realize the shape of the utility model object, is not confined to y-type structure.
The conveniently installation of planetary gear device, arrange at the free end of each support arm 11.1 and protrude axle 14, and the axle center of each protrusion axle has pin-and-hole 1, corresponding being inserted in center of driven pulley 13 is protruded on axle 14, driven pulley 13 can to protrude axle 14 for axle center rotation, driving wheel 12 is installed together by installation shaft 17 and planetary wheel carrier, driving wheel 12 with installation shaft 17 for axle center rotate, the bottom surface of polishing disk arranges three connecting pins 16, a corresponding pin-and-hole 1 of connecting pin 16, the line of centres of three connecting pins forms an equilateral triangle, when installing, in the insertion pin-and-hole 1 of connecting pin 16 adaptation of polishing disk, when driven pulley time rotational drives polishing disk 4.1 also rotation by connecting pin 16.
Polishing disk drive motors 4.3 drives sun gear 12 rotary motion, sun gear 12 rotates in any case, its axis is fixed, because sun gear engages with three driving wheels respectively, three driving wheels engage with ring gear again respectively, therefore the drive being rotated through planetary wheel carrier 11 of sun gear, and namely the movement locus that driven pulley is formed has rotation, also has revolution around driving wheel, therefore driven pulley drives polishing disk rotation, and the polishing disk that rotarily drives of planetary wheel carrier revolves round the sun.Final movement locus is the revolution that the polishing disk making to be connected with planetary gear device had both had around sun gear, has again the compound movement of planet wheels rotation.
The utility model can also realize more complicated motion on this basis, namely several pin-and-hole is set respectively on each driven pulley 13, in order to simple and clear describes the problem, preferably two pin-and-holes are set on the driven wheel, be respectively pin-and-hole 2 18, pin-and-hole 3 19, wherein pin-and-hole 2 18, the center of pin-and-hole 3 19 is unequal to the distance at driven pulley center, and pin-and-hole 2 18, the internal diameter of pin-and-hole 3 19 and connecting pin 16 external diameter adaptation, specific practice inserts in pin-and-hole two by the connecting pin of polishing disk bottom surface, it is noted herein that when connecting pin coordinates with pin-and-hole two, just do not need to coordinate with pin-and-hole three, vice versa, due to pin-and-hole 2 18, the centre distance that driven pulley is departed from the position of pin-and-hole 3 19 is unequal, therefore connecting pin 16 and pin-and-hole 2 18, when any one pin-and-hole in pin-and-hole 3 19 connects, the center of driving wheel all can be departed from the center of polishing disk, therefore when planetary gear device rotates, the motion of polishing disk can realize the compound movement of different tracks according to the diverse location of pin-and-hole.
Certain connecting pin 16 with which pin-and-hole coordinates, the position of connecting pin 16 all answers connected pin-and-hole position corresponding, in the utility model, the line of centres of three driven pulleys forms equilateral triangle, if so use a polishing disk to realize different movement locus, so pin-and-hole two, the rule also will deferring to equilateral triangle is selected in the position of pin-and-hole three, the briefly line at three pin-and-hole one centers, three bicentric lines of pin-and-hole, the equilateral triangle that the line at three pin-and-hole three centers is formed is consistent, like this relatively-stationary connecting pin of polishing disk basal surface position just can adaptive different pin-and-hole, thus realize different movement locus.
Various motions above comprehensive, the utility model simplified summary is as follows: when connecting pin coordinates with pin-and-hole one, polishing disk only does the circular motion around driving wheel center;
When connecting pin coordinates separately with pin-and-hole two or pin-and-hole three, the compound movement that polishing disk can realize different tracks (thus ensures that on polished surface of the work, each point all has identical or close grinding track relative to polished silicon wafer, the Polishing Motion speed of each point roughly keeps identical, to obtain the thick velocity amplitude of uniformity polished surface as much as possible, and material removal amount);
If remove ring gear, when ring gear constraint, when polishing disk coordinates with pin-and-hole one, the number of degrees of freedom, of polishing part is too much, causes the motion that polishing disk is not determined; When polishing disk coordinates with pin-and-hole two or pin-and-hole three, polishing disk 13 only does translation.
The conveniently movement of polishing station, arranges track-type facilities under base, polishing station can be made to move more convenient, and X-axis servomotor 1 drives track-type facilities to move.
Coordinate the rectilinear motion of Y-axis driven by servomotor polishing station again, can polishing locus be changed again.If add Z axis driven by servomotor, also Three-dimension process can be realized.
In a word, this device can ensure that on the polished surface of the work of workpiece, each point all has identical or close grinding track relative to polished silicon wafer, the Polishing Motion speed of each point roughly keeps identical, to obtain uniformity polished surface roughness value as much as possible, and material removal amount.
These are only the preferred embodiment of the utility model embodiment; not in order to limit the utility model embodiment; within all spirit in the utility model embodiment and principle; any amendment of doing, equivalent replacement, improvement etc., all should be included in the protection domain of the utility model embodiment.
Claims (5)
1. become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine, comprise power section, polishing part, running part, power section drives running part and polishing portion componental movement, polishing portion is divided and is comprised polishing station, rotary polishing tools, described power section comprises the power source of X-axis, Y-axis, Z-direction, rotary polishing tools comprises polishing tool, polishing tool electric rotating machine, and it is characterized in that: also comprise supersonic generator, rotary polishing tools also comprises carbon brush component;
Polishing tool arranges piezoelectric ceramics, and polished silicon wafer is installed in the bottom of polishing tool, wherein polishing tool electric rotating machine is electrically connected with carbon brush component, carbon brush component is electrically connected with piezoelectric ceramics or signal is connected, simultaneously carbon brush component is electrically connected with supersonic generator or signal is connected, the power supply of supersonic generator is applied on piezoelectric ceramics by carbon brush component, piezoelectric ceramics produces vibration under the effect of external supersonic generator power supply, the vibration passing that piezoelectric ceramics produces is to polishing tool, polishing tool will produce the vibration in vertical and horizontal two kinds of directions simultaneously, the vibration synthesize of both direction forms ultrasonic elliptical vibratory, and then drive polished silicon wafer to produce corresponding vibration.
2. change track-ultrasonic elliptical vibratory according to claim 1 assists fixed grain polishing machine, it is characterized in that: described polishing station comprises polishing disk, ring gear, base, ring gear is arranged on base by bolt, polishing disk is positioned on ring gear, the bottom of polishing disk arranges planetary gear device, planetary gear device comprises planetary wheel carrier, planetary wheel carrier has the support arm of several extension, the centre of planetary wheel carrier arranges driving wheel, the free end of each support arm arranges a driven pulley, driving wheel engages with the outer rim of each driven pulley, planetary gear device is positioned at ring gear, polishing disk drive motors drives driving wheel to rotate, thus make driving wheel drive planetary wheel carrier to rotate, the inwall of described ring gear is dentalation, and the outer rim of each driven pulley engages with the inwall of ring gear, and polishing disk moves under the drive of planetary gear device.
3. change track-ultrasonic elliptical vibratory according to claim 2 assists fixed grain polishing machine, it is characterized in that: described planetary wheel carrier is substantially in a y-type structure, and extend support arm between angle equal, the driven pulley line of centres is made to form equilateral triangle, the free end of each support arm arranges one and protrudes axle, protrude the center of axle and arrange pin-and-hole one, axle is protruded accordingly through one in the axle center of each driven pulley, and driven pulley can rotate to protrude axle for axle center;
The bottom surface of described polishing disk arranges three connecting pins, and the external diameter of connecting pin and the internal diameter adaptation of pin-and-hole one, the corresponding connecting pin of each pin-and-hole one, connecting pin inserts in pin-and-hole one, and polishing disk is followed driven pulley and carried out revolving round the sun and/or rotation.
4. change track-ultrasonic elliptical vibratory according to claim 3 assists fixed grain polishing machine, it is characterized in that: described each driven pulley is also provided with two pin-and-holes, be respectively pin-and-hole two, pin-and-hole three, and the center of the pin-and-hole two of same driven pulley, pin-and-hole three is unequal to the centre distance of driven pulley, wherein the coordinating separately with connecting pin of each pin-and-hole two or pin-and-hole three adaptation.
5. change track-ultrasonic elliptical vibratory according to claim 1 assists fixed grain polishing machine, it is characterized in that: also comprise source power amplifier, source power amplifier is electrically connected with supersonic generator, and the power of supersonic generator amplifies by source power amplifier.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520142224.6U CN204725247U (en) | 2015-03-13 | 2015-03-13 | Become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine |
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| CN201520142224.6U CN204725247U (en) | 2015-03-13 | 2015-03-13 | Become track-ultrasonic elliptical vibratory and assist fixed grain polishing machine |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669074A (en) * | 2015-03-13 | 2015-06-03 | 江西农业大学 | Variable track-ultrasonic elliptic vibration type auxiliary consolidation abrasive polishing machine |
| CN110817058A (en) * | 2019-11-24 | 2020-02-21 | 卓志强 | Multi-coating rotary coating bucket |
-
2015
- 2015-03-13 CN CN201520142224.6U patent/CN204725247U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104669074A (en) * | 2015-03-13 | 2015-06-03 | 江西农业大学 | Variable track-ultrasonic elliptic vibration type auxiliary consolidation abrasive polishing machine |
| CN110817058A (en) * | 2019-11-24 | 2020-02-21 | 卓志强 | Multi-coating rotary coating bucket |
| CN110817058B (en) * | 2019-11-24 | 2021-11-12 | 抚州中润新材料科技有限公司 | Multi-coating rotary coating bucket |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151028 Termination date: 20170313 |
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| CF01 | Termination of patent right due to non-payment of annual fee |