CN204481013U - The support feet that a kind of position is adjustable - Google Patents
The support feet that a kind of position is adjustable Download PDFInfo
- Publication number
- CN204481013U CN204481013U CN201520181786.1U CN201520181786U CN204481013U CN 204481013 U CN204481013 U CN 204481013U CN 201520181786 U CN201520181786 U CN 201520181786U CN 204481013 U CN204481013 U CN 204481013U
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- Prior art keywords
- magnetic
- feet
- support ring
- chute
- support
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- Withdrawn - After Issue
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The utility model discloses the support feet that a kind of position is adjustable, the some feet bodies comprising support ring and install along chute above support ring circumference, feet body forms soft connection with between support ring by magnetic contact mode, can installation site be regulated arbitrarily along support ring circumference and to heart distance, avoid manipulator to cause damage when touching; Adopt annular support surface structure, supporting surface is moved relatively afterwards, support ring diameter can be reduced, avoid wafer to fall from the inner radius of support ring, and 360 degree of automatic centerings can be realized.The utility model has the remarkable advantage that structure is simple, easily realize, can not limit, save by device structure the device space.
Description
Technical field
The utility model relates to semiconductor wafer process equipment technical field, particularly relates to the support feet of a kind of adjustable position and automatic centering.
Background technology
Support feet is used for putting wafer, gets sheet to facilitate manipulator to wafer.Some feets that support feet generally comprises annular support ring and installs along support ring circumference.Disc shaped wafer horizontal pendulum is placed on the supporting surface of each feet, and manipulator can pick up wafer between two feets.
Existing support feet is all semi open model usually, and feet can only be regulated to the longitudinal separation in the center of circle.This support feet only need be offered and can realize adjusting the heart and position of feet to heart groove accordingly on support ring, but still has some limitations in actual applications.Such as, at semicon industry, according to the structure of equipment itself, the activity space of manipulator can be subject to certain restrictions, may be improper due to the installation site of feet when getting sheet, or due to the misoperation to manipulator in debugging, cause manipulator to occur the situation of collision (namely touching feet), time serious, also will cause the damage of manipulator.
Notification number is that the Chinese utility model patent of CN 102840425 B discloses a kind of support feet, and it, by can regulate some feet bodies of installation site along support ring circumference, supports the wafer be placed on it.Although the design form of this device can conveniently by adjustment feet body in the position of support ring circumference, what meet manipulator enters hand space, so that Robot actions, also there is obvious problem simultaneously:
1) feet body (passes through securing member) after mounting, and namely position is fixed and can not moves, once there is the situation of manipulator collision in debugging, very easily damages manipulator;
2) because wafer support surface is positioned at the front end of feet body, and be positioned at the rear end of feet body with the rigging position of support ring, make the internal diameter of support ring be greater than the outside dimension of wafer, this can increase the space of equipment.Further, in robotic failure or debugging, when occur manipulator capture wafer loosely or deviation time, wafer also can be caused to skid off supporting surface and land fragmentation from the inner radius of support ring;
3) in addition, the structure of each parts of this device is also more complicated, causes difficulty of processing greatly to improve, and can bring the increase of device fabrication cost.
In these cases, if manipulator is once touch feet, feet along the support ring at place relative to freely sliding or moving, even if so there is the situation of colliding, also can not damage manipulator; Meanwhile, if will move behind the Support Position of feet and simplify the structure of each parts, space and the manufacturing cost of equipment itself can also be saved.
Therefore, for the above-mentioned defect of the feet unicity mounting means that prior art exists, be necessary to design a kind of novel support feet.
Utility model content
The purpose of this utility model is the above-mentioned defect overcoming prior art existence, provides the support feet that a kind of novel position is adjustable, can overcome the defect of feet unicity mounting means in prior art.
For achieving the above object, the technical solution of the utility model is as follows:
The support feet that position is adjustable, comprising:
Support ring, is provided with the annular groove of upward opening along its circumference, set firmly the first magnetic in described chute, and described first magnetic is lower than described chute notch;
Some feet bodies, arrange along described support ring circumference, described feet body is cylinder, its upper surface has annular wafer support surface, affixed second magnetic of its lower surface, described second magnetic lower end is stretched in described chute, and contacts described first magnetic formation magnetic connection, and the center of described supporting surface is provided with the frustum of a cone;
Wherein, polarity between first, second magnetic described is contrary, described feet body moves along described chute by described second magnetic, gap is left in groove width direction between described second magnetic and described chute, to be adjusted the contact position between itself and described first magnetic in the Width of described chute by described second magnetic, adjust the centre distance between described supporting surface and described support ring.
Preferably, described first magnetic is continuous print annular in described chute.
Preferably, the annular of described first magnetic for being interrupted in described chute.
Preferably, described second magnetic is cylindrical or has the arc matched with described chute.
Preferably, the lower surface of described feet body is provided with slotted eye, and the upper end of described second magnetic is fixed in described slotted eye by mosaic mode or screw connecting mode.
Preferably, the clearance distance left in groove width direction between described second magnetic and described chute is greater than described second magnetic lower end and stretches into height distance in described chute.
Preferably, the lower end periphery of described second magnetic has chamfering.
Preferably, described magnetic is magnet.
Preferably, described supporting surface is plane or inclined-plane.
Preferably, the quantity of described feet body is at least three.
As can be seen from technique scheme, the utility model forms feet body by magnetic contact mode and is connected with soft between support ring, both installation site can be regulated arbitrarily and to heart distance along support ring circumference easily as required, feet body can be made again to produce along chute when being subject to manipulator touching slide or depart from chute, thus avoid the damage of manipulator; Adopt annular support surface structure, supporting surface is moved relatively afterwards, the diameter of support ring can be reduced, avoid wafer to fall from the inner radius of support ring, and 360 degree of automatic centerings can be realized.Therefore, the utility model overcomes the defect of feet unicity mounting means in prior art, has the remarkable advantage that structure is simple, easily realize, can not limit, save by device structure the device space.
Accompanying drawing explanation
Fig. 1 is the assembling effective structure schematic diagram of the adjustable support feet in a kind of position of the utility model one embodiment;
Fig. 2 is that the assembling effect of the adjustable support feet in a kind of position of the utility model one embodiment disconnects cross-sectional view;
Fig. 3 is the support ring contour structures schematic diagram of the utility model one embodiment;
Fig. 4 is that the support ring of the utility model one embodiment disconnects cross-sectional view;
Fig. 5 is the feet body contour structures schematic diagram of the utility model one embodiment;
Fig. 6 is the feet body cross-sectional view of the utility model one embodiment.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
It should be noted that, in following embodiment, when describing execution mode of the present utility model in detail, in order to clearly represent structure of the present utility model so that explanation, special to the structure in accompanying drawing not according to general scale, and carried out partial enlargement, distortion and simplify processes, therefore, should avoid being understood in this, as to restriction of the present utility model.
In following embodiment of the present utility model, refer to Fig. 1, Fig. 1 is the assembling effective structure schematic diagram of the adjustable support feet in a kind of position of the utility model one embodiment.As shown in Figure 1, support feet of the present utility model some feet bodies 100 of comprising support ring 200 and installing above support ring 200 circumference.The edge of Circular wafer 300 is held in place on the supporting surface of feet body 100 upper end between each feet body 100.Manipulator can carry out getting sheet from the file location of opening between the larger feet body 100 of two spacing.Steady during in order to ensure bearing wafer 300, as different Alternate embodiments, the quantity of described feet body 100 is at least three, and installs along spacing above the circumference of support ring 200.Consider and need enough to enter hand space for manipulator retains, in the present embodiment, preferably adopt three feet bodies 100 that spacing is installed.The concrete installation site of each feet body 100, can enter hand space requirement according to manipulator, determine in equipment debugging process.
Refer to Fig. 3, Fig. 3 is the support ring contour structures schematic diagram of the utility model one embodiment.As shown in Figure 3, support ring 200 is annular, and the circumferencial direction along support ring 200 is processed with the annular groove 2001 of upward opening.A purposes of described chute 2001 places the first magnetic therein.Further, the first magnetic carries out placing along the annular circumferential of chute 2001.As optional execution mode, described first magnetic can be annular that is continuous or that be interrupted in described chute 2001.That is, annular first magnetic that is matched with chute 2001 can be adopted, and place it in chute 2001; Also can adopt the first magnetic of some arc bulks matched with chute 2001, put into chute 2001 (can contacting or not contact each other) successively, form annular first magnetic be interrupted.Described first magnetic can adopt the mode such as to inlay, gluing to be fixedly mounted in chute 2001.
Refer to Fig. 4, Fig. 4 is that the support ring of the utility model one embodiment disconnects cross-sectional view.As shown in Figure 4, the first magnetic 201 is fixed on bottom the chute 2001 of support ring 200, and the upper surface of the first magnetic 201 is lower than the notch end face of described chute 2001.Namely the first magnetic 201 has a vertical height distance t with the notch of chute 2001, and the space of this height t is for installing (referring to follow-up explanation) with carrying out between feet body 100 coordinating.As optional execution mode, the groove width being positioned at the first magnetic 201 upper section chute 2001 can suitably be widened, and such as illustrated chute 2001 has and is greater than the wide compared with sipes of the first magnetic 201 width above the first magnetic 201.This groove width position widened, regulates the centre distance between feet body 100 and support ring 200 (referring to follow-up explanation) by being used for.
Refer to Fig. 5, Fig. 5 is the feet body contour structures schematic diagram of the utility model one embodiment.As shown in Figure 5, feet body 100 is cylinder, and its upper surface is processed with the wafer support surface 1001 of annular, processes the bossed frustum of a cone 1002 at the center of supporting surface 1001.Wafer support surface of the prior art is arranged on the front end of feet body usually, thus when installing feet body, the center line of wafer support surface must be made to point to and support Ring current distribution (namely to the heart).Conveniently to the heart, need to offer on support ring accordingly to heart groove, or design core structure on feet body.So inevitably the complexity of project organization and the highly difficult of processing and fabricating will be brought.Therefore, the utility model has carried out specific aim Optimal improvements, and wafer support surface 1001 is designed to loop configuration, can the cylinder axis of feet body 100 be vertical symmetrical centre, be formed in 360 degree comprehensive on all can the supporting surface 1001 of bearing wafer.The frustum of a cone 1002 being positioned at supporting surface 1001 center has the sidewall of inclination, for wafer provide there is guide effect slide inclined-plane.The height of the frustum of a cone 1002 and tapering can design as required to be determined.Described supporting surface 1001 can be processed into plane, to obtain stability during bearing wafer; Also can be processed into the inclined-plane had a down dip, reduce the contact area with Waffer edge, to improve the utilance of wafer and to reduce because of the probability producing particle that rubs.
Refer to Fig. 6, Fig. 6 is the feet body cross-sectional view of the utility model one embodiment.As shown in Figure 6, the second magnetic 101 is installed with at the lower surface of feet body 100.When feet body 100 is assembled with support ring 200 (please refer to Fig. 1), the lower end of described second magnetic 101 can be extend in the chute 2001 of support ring 200, and the first magnetic 201 can be touched form magnetic and connect.In order to make the second magnetic 101 can slide in chute 2001, as optional execution mode, the shape of described second magnetic 101 can be processed as cylindrical or have the arc matched with described chute 2001.Like this, namely feet body moves along described chute by the second magnetic, and both adjustable support script body was in support ring position circumferentially, can be dodged again being subject to manipulator side to during touching by shift position.The present embodiment selects columniform second magnetic 101 to be arranged on the lower surface of feet body 100.A kind of preferred mounting means is process a slotted eye 1003 at the lower surface of feet body 100, such as, be positioned at the centre of feet body 100 lower surface; Then, the upper end of the second magnetic 101 is fixed in described slotted eye 1003 by mosaic mode or screw connecting mode completes installation.The lower end of the second magnetic 101 must be made to protrude from the lower surface of feet body 100, for extend into support ring 200 chute 2001 in assemble.
Refer to Fig. 2, Fig. 2 is that the assembling effect of the adjustable support feet in a kind of position of the utility model one embodiment disconnects cross-sectional view.As shown in Figure 2, when the feet body 100 being provided with the second magnetic 101 is assembled with the support ring 200 being provided with the first magnetic 201, need first to make the polarity between first, second magnetic 201,101 described contrary, object utilizes the principle that between magnetic, there is a natural attraction between the sexes, make to produce between first, second magnetic 201,101 to attract each other, and be pulled together by contact and form soft connection when stressed (namely can separate).Then, the second magnetic 101 lower end of feet body 100 is put into the chute 2001 of support ring 200, contact with the first magnetic 201 and be pulled together.During assembling, can enter according to manipulator the mutual installation site determining between each feet body 100 on support ring 200 in hand space.Further feet body 100, because feet body 100 have employed cylinder form, and there is the supporting surface 1001 of circular symmetric, so can arbitrarily angledly coordinate with support ring 200, can form automatic centering state.Thus when installing the second magnetic 101 to feet body 100, need not consider to be mounted opposite angle, make installation very convenient and be easy to processing.
Please continue to refer to Fig. 2.In order to can regulate centre distance between the supporting surface 1001 of feet body 100 and support ring 200 (namely supporting surface 1001 center, also namely the frustum of a cone 1002 center to the projector distance in support ring 200 center of circle), to adjust the placement gap between each feet body 100 and wafer 300 exactly, can make to leave suitable gap s in groove width direction between described second magnetic 101 (being at least that it stretches into the end portion of chute 2001) and described chute 2001.Like this, in the Width of described chute 2001, the contact position between itself and described first magnetic 201 is adjusted by described second magnetic 101, the centre distance namely described in adjustable between supporting surface 1001 and described support ring 200.When adopt same widths first, second magnetic 201,101 time, the groove width being positioned at the first magnetic 201 upper section chute 2001 suitably can be widened, such as illustrated chute 2001 has and is greater than the wide compared with sipes of first, second magnetic 201,101 width above the first magnetic 201, namely processes a step (consistent with chute 2001 structure shown in Fig. 4).
Please continue to refer to Fig. 2.Feet body of the prior art (passes through securing member) after mounting, and namely position is fixed and can not moves.Once there is the situation of manipulator collision in debugging, very easily damage manipulator.In order to solve this problem, the clearance distance s left in groove width direction between described second magnetic 101 (being at least that it stretches into the end portion of chute 2001) and described chute 2001 is designed to be greater than described second magnetic 101 lower end and stretches into height distance t (the vertical height distance t namely in Fig. 4 between the first magnetic 201 and chute 2001 notch) in described chute 2001 by the utility model.Due to t < s, when manipulator is collided because of misoperation and feet body 100, that magnetic is flexible coupling mode due to what adopt between first, second magnetic 201,101, when being subject to manipulator touching, the phenomenon of sliding along chute 2001 or lodging can be there is in feet body 100, by the power of manipulator removal in addition, thus damage that manipulator is caused can be avoided.
As shown in Figure 6, as further preferred embodiment, a certain size chamfering 1011 can be processed at the lower end periphery of the second magnetic 101, be more prone to make feet body 100 lodge when stressed, improve the protective capability to manipulator further.
As optional embodiment, first, second above-mentioned magnetic 201,101 can adopt magnet to process.Certainly, other existing applicable all kinds of magnetics can also be selected.
Can see from the Figure of description of notification number support feet disclosed in the Chinese utility model patent of CN 102840425 B, because its wafer support surface is positioned at the front end of feet body, and be positioned at the rear end of feet body with the rigging position of support ring, make the internal diameter of support ring be greater than the outside dimension of wafer, this can increase the space of equipment; Further, in robotic failure or debugging, when occur manipulator capture wafer loosely or deviation time, wafer also can be caused to skid off supporting surface and land fragmentation from the inner radius of support ring.And adopt annular support surface 1001 structure of the present utility model, the actual bearer position of supporting surface 1001 pairs of wafers can be made to move relatively afterwards, thus the internal diameter of support ring 200 can be reduced, and the diameter of wafer 300 can be less than, thus wafer 300 can be avoided to fall (please refer to Fig. 1 to be understood) from the inner radius of support ring 200.Therefore the space of equipment also obtains saving.
In sum, to be formed between feet body 100 with support ring 200 soft is connected by magnetic contact mode for the utility model, both installation site can be regulated arbitrarily and to heart distance along support ring 200 circumference easily as required, feet body 100 can be made again to produce along chute 2001 when being subject to manipulator touching slide or depart from chute 2001, thus avoid the damage of manipulator; Adopt annular support surface 1001 structure, supporting surface 1001 is moved relatively afterwards, the diameter of support ring 200 can be reduced, avoid wafer 300 to fall from the inner radius of support ring 200, and 360 degree of automatic centerings can be realized.Therefore, the utility model overcomes the defect of feet unicity mounting means in prior art, has the remarkable advantage that structure is simple, easily realize, can not limit, save by device structure the device space.
Above-describedly be only preferred embodiment of the present utility model; described embodiment is also not used to limit scope of patent protection of the present utility model; therefore the equivalent structure that every utilization specification of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in protection range of the present utility model.
Claims (10)
1. the support feet that position is adjustable, is characterized in that, comprising:
Support ring, is provided with the annular groove of upward opening along its circumference, set firmly the first magnetic in described chute, and described first magnetic is lower than described chute notch;
Some feet bodies, arrange along described support ring circumference, described feet body is cylinder, its upper surface has annular wafer support surface, affixed second magnetic of its lower surface, described second magnetic lower end is stretched in described chute, and contacts described first magnetic formation magnetic connection, and the center of described supporting surface is provided with the frustum of a cone;
Wherein, polarity between first, second magnetic described is contrary, described feet body moves along described chute by described second magnetic, gap is left in groove width direction between described second magnetic and described chute, to be adjusted the contact position between itself and described first magnetic in the Width of described chute by described second magnetic, adjust the centre distance between described supporting surface and described support ring.
2. support feet according to claim 1, is characterized in that, described first magnetic is continuous print annular in described chute.
3. support feet according to claim 1, is characterized in that, the annular of described first magnetic for being interrupted in described chute.
4. support feet according to claim 1, is characterized in that, described second magnetic is cylindrical or has the arc matched with described chute.
5. support feet according to claim 1, is characterized in that, the lower surface of described feet body is provided with slotted eye, and the upper end of described second magnetic is fixed in described slotted eye by mosaic mode or screw connecting mode.
6. support feet according to claim 1, is characterized in that, the clearance distance left in groove width direction between described second magnetic and described chute is greater than described second magnetic lower end and stretches into height distance in described chute.
7. support feet according to claim 6, is characterized in that, the lower end periphery of described second magnetic has chamfering.
8. the support feet according to claim 1 ~ 7 any one, is characterized in that, described magnetic is magnet.
9. support feet according to claim 1, is characterized in that, described supporting surface is plane or inclined-plane.
10. support feet according to claim 1, is characterized in that, the quantity of described feet body is at least three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520181786.1U CN204481013U (en) | 2015-03-27 | 2015-03-27 | The support feet that a kind of position is adjustable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520181786.1U CN204481013U (en) | 2015-03-27 | 2015-03-27 | The support feet that a kind of position is adjustable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204481013U true CN204481013U (en) | 2015-07-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520181786.1U Withdrawn - After Issue CN204481013U (en) | 2015-03-27 | 2015-03-27 | The support feet that a kind of position is adjustable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204481013U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104733366A (en) * | 2015-03-27 | 2015-06-24 | 北京七星华创电子股份有限公司 | Supporting leg device |
-
2015
- 2015-03-27 CN CN201520181786.1U patent/CN204481013U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104733366A (en) * | 2015-03-27 | 2015-06-24 | 北京七星华创电子股份有限公司 | Supporting leg device |
| CN104733366B (en) * | 2015-03-27 | 2017-07-25 | 北京七星华创电子股份有限公司 | A kind of support feet |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150715 Effective date of abandoning: 20170725 |
|
| AV01 | Patent right actively abandoned |