CN204313806U - 光电传感器 - Google Patents

光电传感器 Download PDF

Info

Publication number
CN204313806U
CN204313806U CN201420531739.0U CN201420531739U CN204313806U CN 204313806 U CN204313806 U CN 204313806U CN 201420531739 U CN201420531739 U CN 201420531739U CN 204313806 U CN204313806 U CN 204313806U
Authority
CN
China
Prior art keywords
emitted light
utilizing emitted
light
pilot unit
optical receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201420531739.0U
Other languages
English (en)
Inventor
大卫·霍普
斯特凡·巴斯勒
雷霍德·穆奇勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sick Stegmann GmbH
Original Assignee
Sick Stegmann GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49303904&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN204313806(U) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sick Stegmann GmbH filed Critical Sick Stegmann GmbH
Application granted granted Critical
Publication of CN204313806U publication Critical patent/CN204313806U/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G01D5/345Polarising encoders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • B23K26/384Removing material by boring or cutting by boring of specially shaped holes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

本实用新型涉及一种光电传感器,特别是用于检测旋转角度的光电传感器,配有测量装置,在发射光方向上发射发射光的光发射器,以及具有光接收面的光接收器,其中光接收面被布置成使得其基本上位于测量装置和光发射器之间,并且光接收器接收被反射回的发射光作为接收光,并且还布置了发射光导向单元,将该单元设计成使得当发射光再次从发射光导向单元出射时,发射光在发射光方向上产生预先定义好的偏转角度,其中发射光导向单元布置在光接收器中,而且其中发射光导向单元由至少一个孔构成,该孔嵌入在光接收器中。该结构的传感器具有更好的照度。

Description

光电传感器
技术领域
本实用新型涉及一种光电传感器。
背景技术
其中使用光学工作原理来检测例如轴的旋转角度。不管各自的光学原理是什么,相应的传感器由至少一个光源、测量装置和接收器所组成。测量装置以抗扭转方式连接至轴,该轴的运动是要检测的并通过到接收器的相对运动在接收器上产生信号强度调制,其被用作角度信号。光电传感器使用的两种基本结构类型为:透射式和反射式。因为发射器和接收器可布置在同一侧,例如可布置在同一电子卡上,所以特别是反射式结构具有特别的优点,在该结构中光路在测量装置处被反射。为此自动同步发送机(Drehgeber)和旋转的测量装置有可能真正去耦。发射器/接收器仅仅还能“看到”测量装置。
反射式光路的结构根据光学工作原理是一种挑战,因为各个组件,特别是发射器和接收器,不能沿单一的光轴取向并与所述光轴正交。但是对大多数的光学工作原理而言,主要是由于对称的原因而提供所有组件的中心取向。
在建立用于旋转角度传感器的反射光学工作原理时追求的是,使照明装置、测量装置以及接收器位于光轴中心。这要求光源位于中心位置。光源在中心位置又要求接收器放置在光轴外。只有当多个接收器环绕光源放置或当光偏转时,才会产生对称。但这需要分束器、反射镜***或类似物,且必须将它们校准。在所述***中各个组件布置在不同的彼此不平行的构造平面中。在具有多个构造平面的***中的光学元件的放置或校准不仅复杂而且成本很高。同样,照明光路的偏转也很复杂且通常会有很大的强度 损失。此外所述结构需要相当大的安装空间。
申请人一开始考虑将接收器同轴地布置在光源和测量装置之间,以此作为反射式旋转角度传感器可能的紧凑结构,其中光源发出的光通过接收器中孔形状的开口发射到测量装置。
一开始所构想的结构没有考虑到的是,孔的形状会影响光接收器的照度(Ausleuchtung)。
实用新型内容
基于这一点,本实用新型的任务在于,对前述类型的光电传感器进行改进,从而使得传感器被改进的分析成为可能。此外本实用新型的任务还在于,提出一种制造光电传感器的方法,用该方法制造的传感器具有更好的照度。
该任务通过根据本实用新型的光电传感器得以实现。
根据本实用新型的光电传感器,特别是用于检测旋转角度的光电传感器,配有测量装置,在发射光方向上发射发射光的光发射器,以及具有光接收面的光接收器,其中所述光接收面被布置成使得其基本上位于测量装置和光发射器之间且光接收器接收被反射回的发射光作为接收光,并且其中还布置了发射光导向单元,该单元被设计成使得发射光再次从发射光导向单元出射时,发射光在发射光方向上产生预先定义好的偏转角度,其中发射光导向单元布置在光接收器中,其中发射光导向单元由至少一个孔构成,该孔嵌入在光接收器中,特别是通过机械钻孔、激光钻孔、喷砂或化学蚀刻的方式嵌入在光接收器中,使得发射光导向单元优选具有的形状为圆柱形、圆锥状发散形、圆锥状收敛形、双圆锥形或椭圆形,而且其中发射光导向单元的反射发射光的侧壁优选构造成特别是以金属材料,特别是铝、钛、铜、银或金光反射地涂覆,而且还构造成光散射或光部分散射。
本实用新型的主要优点是主动影响发射光的光路,途径是借助光导单元通过光接收器来适当地构造光通道,所述光导单元在光接收面上形成接收光的分布和均匀性,使得分析得以改进。
在这种情况下可通过孔的几何形状来改变整个照明的特点,从而使发射光导向单元,特别是至少所述孔被用作光束整形的光学元件。有利地可将孔构造成具有矩形底面的金字塔形状。
根据另一个优选的实施形式,发射光导向单元由至少一个嵌在光接收器中的套筒组成。该套筒在这里根据需要可具有的形状为圆柱形、圆锥状发散形、圆锥状收敛形、双圆锥形或椭圆形。套筒的外部形状和内部形状可以不同,从而使套筒可用于与在生产工艺上甚至是不利的孔的几何形状相匹配。
特别地,可利用发射光导向单元,特别是孔或套筒的炫目效果,以便有针对性地分散发射光和/或有针对性地使发射光产生衍射效应。
可有目的地使用在反射时涂覆表面处产生的偏振或相移,例如用以改变和/或混合偏振状态。此外,还可实现在光接收器上感光的光接收面的遮光,由此可避免杂光的影响或至少减少杂光的影响。有利地,相对于反射涂层也可根据在发射光导向单元的侧壁上所使用材料的相应折光率来针对性地利用全反射性能。
在发射光导向单元中,该单元设置在光接收器和/或电路卡的凹槽中,光学元件可设置成具有光折射功能、光衍射功能和/或光偏振功能,和/或具有衍射结构用于使发射光衍射、偏转或散射。光学元件也可构造为滤光器,且该滤光器可以选择发射光的波长。这具有的优点是,光学透镜和/或滤光器功能可集成在光电传感器中,并因此可省去其它单独的光学元件。
有利地将光发射器构造为LED或激光二极管。光接收器可构造为CCD或CMOS结构形式的接收器阵列或构造为半导体芯片上的光电二极管簇。
特别有利的是,可将本实用新型用于旋转角度传感器中,所述传感器根据偏振光学原理来确定旋转角度,而且在该传感器中光路被设计成反射式光路。为此,自动同步发送机具有偏振器,该偏振器相对于光源旋转并构成测量装置。发射光在偏振器上反射并通过一个或多个线性偏振分析器,所述分析器分别布置在接收元件之前。接收器具有至少两个可分开分 析的接收区域,所述接收区域具有分析器,其中分析器的偏振方向彼此成一定角度偏移。接收器优选构造为光接收器阵列。通过分析由两个接收区域接收到的信号可确定增量旋转角度和旋转方向。
为了达到360°以上的清晰度,可将偏振器构造成具有垂线的圆盘,其中垂线与旋转轴构成的角度不为零。
附图说明
下面借助实施例并且参考附图来详细描述本实用新型。图中显示:
图1为设想的光电传感器的示意图;
图2-2A为光电传感器的、根据本实用新型的实施形式的示意图,所述传感器具有发射光导向单元;
图3-6为发射光导向单元的、根据本实用新型的实施形式;
图7为作为套筒的发射光导向单元的、另一种根据本实用新型的实施形式;以及
图8为使用了额外的光束整形(Strahlformung)元件的另一种实施形式。
图1示出了申请人一开始构想的光电传感器10,该传感器用于检测轴14的旋转角度,所述轴在所示箭头方向18上围绕旋转轴16旋转。传感器10以抗扭转方式布置且在所示实施例中可根据光学原理来确定轴14的旋转。
具体实施方式
借助该实施例来描述光电传感器10,特别是自动同步发送机的运行方式,其根据偏振原理,即通过检测偏振方向来确定旋转角度。
光发射器20的发射光32呈略微发散的锥形发射,如果是LED的情况则发射光不偏振,并且发射光会遇到通过轴14旋转的测量装置34,所述测量装置在这里被构造成线性偏振器。因此,由测量装置34或偏振器所 反射的光(接收光36)具有线性偏振,其方向对应于轴14的实际旋转角度。接收光36穿过分析器或光敏检测器44,所述检测器是线性偏振器,且所述接收光由分析器44下方的光接收器22的接收区域来检测。有利地,将光接收器22构造为接收器阵列或类似物,其中在每个接收元件前面都布置了分析器44并且所述分析器44具有不同的偏振方向。通过接收元件测得的光的强度取决于旋转角度的cos2值。通过布置在分析器后面的接收元件的cos2信号,其偏振方向彼此具有角度偏移,可用已知的方式来确定相对扭转角度和旋转方向。
因此传感器10具有光发射器20和光接收器22。光发射器20和光接收器22对称布置,这在所述结构中意味着,它们关于旋转轴16对称且它们各自的光轴与旋转轴16一致。
光发射器20布置在电子卡24的背侧26,同时所述电子卡被设计成光接收器22的电路载体,光发射器固定也就是用如下方式固定的,即将光朝背侧26对准光发射器20的发射光的面28。为了使光也可以从发射器20中射出,电子卡24具有孔30,该孔与发射光的面28对齐,并因此发射光32可沿着光轴16在朝着测量装置34的方向上发射。
发射光32被测量装置34反射,并作为接收光36落在光接收器22的光接收面38上。所述光接收面38面向测量装置34,其中光接收器22的光轴与光发射器20的光轴同轴地布置。优选将光接收器22构造为多个光电二极管的排布并且特别优选构造为具有多个CCD或CMOS结构形式的接收元件的光接收器阵列。
因此提出一种布置,其中发射光32在发射光方向上发射,其从光发射器20发出通过光接收面38在朝着测量装置34的方向上发射,并因此光发射器20和光接收器22在一定程度上看是在“同一方向”上的。布置在光接收器22的、远离光接收面38一侧上的发射器20的发射光32在中心处通过光接收器22,从而使得通过在测量装置34处反射产生的接收光36可环绕孔30落在光接收面38上并因此被光接收器22检测。
电子卡24可具有其它未被示出的电子元件,例如用于操纵光发射器20的和/或用于分析光接收器22的信号的和/或用于处理信号并输出输出信 号(例如以角度值形式输出)的电子元件。
光发射器20可以是LED、LED芯片、激光二极管或激光芯片。
图2示出了根据本实用新型的传感器10的示意性结构,其中布置了发射光导向单元,特别是以圆柱形的孔30形式的发射光导向单元,在其中布置了光接收器22。发射光导向单元通过机械钻孔、激光钻孔、喷砂或化学蚀刻的方式嵌入,致使其同轴地布置在光发射器20和测量装置34之间。
光发射器20将发射光32在发射光导向单元的方向上发出,从而使得发射光导向单元中的发射光32在其侧壁以预定角度反射,所述侧壁被加工特别是以金属材料40,特别是铝、钛、铜、银或金光反射地涂覆,而且所述发射光以由此所得的想要的出射角度重新从发射光导向单元中出射或以由此所得的想要的入射角度进入测量装置34。
相应地,发射光32作为接收光36以预定角度从测量装置34反射回光接收面38,在这里对接收光36的所有量,例如光强度和偏振角度进行分析。
由此可实现预先定义的光路,所述光路使得被改进的分析成为可能。
有利地将光接收器22和电子卡24构造成整体式元件,从而能另外产生非常紧凑的结构。
图2A示出了根据本实用新型的实施例,其中光发射器20集成布置在光发射导向元件中,其中侧壁光反射地以金属材料48涂覆。
在这种情况下,将光发射器20布置在光接收器22的孔30内,从而使得可进一步减小传感器10的轴向尺寸。通过接合线32来实现电接触,所述接合线在示出的实施形式中与光接收器22直接接合或电连接。
在此布置中,光发射器20不是通过光接收器22来部分遮盖的,从而使光发射器20的全部光强度可用于测量。
根据图3,将发射光导向单元构造成圆锥状发散形的孔30,从而使得发射光导向单元类似于凸透镜作用。这时发射光导向单元,特别是孔30 的内直径φ从光发射器20往测量装置34的方向上递增。这样一来发射光32的发光角度之和在从发射光导向单元中出射时比进入发射光导向单元中时要小。因此发射光32趋于集中在光轴方向上,从而可获得更大的光强度。减小的发光角度相应地从测量装置34反射到光接收面38上,从而使得接收光36集中在具有更高信号强度的光接收面38上从而导致分析得到改进。
与前面描述的实施例不同,也可便利地分散发光角度而不是集中发光角度,从而使得按图4在光接收器22中设置圆锥状收敛形的发射光导向单元。这时发射光导向单元的内直径从光发射器20在朝着测量装置34的方向上减小,从而使得发射光32的光束被反射远离光轴。虽然在本实施例中光接收器的照明强度减小了,但是光接收器的照明范围更大了,这在某些应用中是有利的。
在图5和图6中,将发射光导向单元分别构造成双圆锥形的或椭圆形的孔30。由此得到预先定义的适当的偏转角度或发光角度,其适用于传感器10的指定用途。
有利地将发射光导向单元,特别是孔30的侧壁用光反射材料,特别是用金属材料,如铝、钛、铜、银、金等涂覆,从而使得侧壁从光学角度看为光导体,因为从侧面射到孔30中的发射光32一直以预先定义的偏转角度反射,直到其从孔30的另一端出射。在这种情况下,可根据发射光导向单元的几何形状来改变整个照明的特点。这时发射光导向单元或孔30自身为光束整形光学元件。因此在特别的情况下可实现,部分发射光32不在发射光导向单元的另一侧出射。
将定义的孔30制造成在电子卡24中或光接收器22中的发射光导向单元花费太高,在这种情况下便利的是,使用套筒42作为发射光导向单元,如图7所示。这时,套筒42具有定义好的适合某一用途的形状,其特别具有圆柱形的、圆锥状发散形的、圆锥状收敛形的、双圆锥形的或椭圆形的侧壁。所述侧壁优选用光反射材料,特别是用铝、钛、铜、银、金等涂覆。套筒42自身可全部由上述材料构成,使得通过将套筒42置入电子卡24或光接收器22中来简化根据本实用新型的传感器10的制造。
可将发射光导向单元的侧壁加工成光散射或光部分散射的,从而使得不能获得纯反射的特征,例如以使得发射光32,特别是传感器10的照明能够均匀化。
图8示出了传感器10的另一种实施形式,其中在光发射器20与发射光导向单元之间布置了光束整形元件44,特别是透镜或衍射元件形式的光束整形元件。以如下方式布置光束整形元件44,即使得直接在发射光导向单元的入口前面,理想状况是在发射光导向单元的入口中形成发射光32的聚焦点FP,从而使得借助已知的光学参数,例如各元件间的间距、光束整形元件的焦距等等来便于精确分析或使精确分析成为可能。
有利地在具有集成的光接收器22的电子卡24上布置多个发射光导向单元和所属的光发射器20。所述单元和光发射器20在预定模式或网格中布置在具有集成式光接收器22的电子卡24上。
因此在生产光电传感器时可布置测量装置34、在发射光方向上发射发射光的光发射器20、以及具有光接收面38的光接收器22,从而使得光接收面38基本上位于测量装置34和光发射器20之间且光接收器22接收反射回的发射光32作为接收光36,并且将发射光导向单元设置在光接收器22中,从而使得发射光32从发射光导向单元中出射时获得到发射光方向的预定偏转角度。
在这种情况下通过机械钻孔、激光钻孔、喷砂或化学蚀刻的方式将孔30作为发射光导向单元嵌入光接收器22中。如果在出射时偏转的发射光32的预期特征通过在光接收器22中或具有集成式光接收器22的电子卡24中的孔30无法实现的话,则可将套筒42作为发射光导向单元置入光接收器22中,其经过相应的整形,以达到发射光32的预期偏转。套筒42在这里可特别由光反射材料,例如铝、钛、铜、银、金等等制成,或者由光散射的材料制成。
参考标记列表

Claims (5)

1.一种用于检测旋转角度的光电传感器,配有测量装置,在发射光方向上发射发射光的光发射器,以及具有光接收面的光接收器,其中所述光接收面被布置成使得所述光接收面位于所述测量装置和所述光发射器之间,并且所述光接收器接收被反射回的发射光作为接收光,其特征在于,布置发射光导向单元,将所述发射光导向单元设计成使得当发射光再次从发射光导向单元出射时,发射光在发射光方向上产生预先定义好的偏转角度,其中所述发射光导向单元布置在所述光接收器中,而且其中所述发射光导向单元由至少一个孔构成,所述至少一个孔嵌入在所述光接收器中,从而使得所述发射光导向单元具有的形状为圆柱形、圆锥状发散形、圆锥状收敛形、双圆锥形或椭圆形,而且所述发射光导向单元的侧壁被加工成是以金属材料光反射地涂覆而且还被构造成光散射的或光部分散射的。
2.如权利要求1所述的光电传感器,其特征在于,所述至少一个孔通过机械钻孔、激光钻孔、喷砂或化学蚀刻的方式嵌入在所述光接收器中。
3.如权利要求1所述的光电传感器,其特征在于,所述金属材料是铝、钛、铜、银或金。
4.如权利要求1至3中任一项所述的光电传感器,其特征在于,所述孔被构造成具有矩形底面的金字塔形状。
5.如权利要求1至3中任一项所述的光电传感器,其特征在于,所述发射光导向单元由至少一个嵌入在所述光接收器中的套筒组成。
CN201420531739.0U 2013-10-09 2014-09-16 光电传感器 Active CN204313806U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13187973.6A EP2860497B2 (de) 2013-10-09 2013-10-09 Optoelektronischer Sensor und Verfahren zur Herstellung eines solchen
EP13187973.6 2013-10-09

Publications (1)

Publication Number Publication Date
CN204313806U true CN204313806U (zh) 2015-05-06

Family

ID=49303904

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420531739.0U Active CN204313806U (zh) 2013-10-09 2014-09-16 光电传感器

Country Status (3)

Country Link
US (1) US20150097111A1 (zh)
EP (1) EP2860497B2 (zh)
CN (1) CN204313806U (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106774653A (zh) * 2016-12-06 2017-05-31 广东欧珀移动通信有限公司 一种终端
CN108759675A (zh) * 2018-06-29 2018-11-06 苏州富强科技有限公司 一种用于放置工件的支撑冶具
CN111052287A (zh) * 2017-09-28 2020-04-21 株式会社电装 操作装置
CN114577118A (zh) * 2022-02-16 2022-06-03 江苏中关村嘉拓新能源设备有限公司 耐高温大量程偏移量传感器及标定方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10164156B2 (en) * 2017-03-31 2018-12-25 Taiwan Semiconductor Manufacturing Co., Ltd. Structure and formation method of image sensor structure with grid structure
DE102017012251A1 (de) 2017-10-20 2019-04-25 Sick Ag Sende-Empfangsmodul für einen optoelektronischen Sensor und Verfahren zur Erfassung von Objekten
DE102017124535A1 (de) 2017-10-20 2019-04-25 Sick Ag Sende-Empfangsmodul für einen optoelektronischen Sensor und Verfahren zur Erfassung von Objekten
JP6620176B2 (ja) * 2018-01-29 2019-12-11 アオイ電子株式会社 半導体装置
DE102018218706A1 (de) * 2018-10-31 2020-04-30 Osram Gmbh Abstandsmesseinheit
WO2022150690A1 (en) * 2021-01-08 2022-07-14 Novanta Corporation Rotary position encoder based on polarization
TWI792305B (zh) * 2021-05-10 2023-02-11 大陸商信泰光學(深圳)有限公司 光路共軸的光學裝置(六)
US20240044675A1 (en) 2022-08-08 2024-02-08 Hengstler Gmbh Optoelectronic device comprising light processing device with a through-opening

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19859670A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
US6567572B2 (en) 2000-06-28 2003-05-20 The Board Of Trustees Of The Leland Stanford Junior University Optical displacement sensor
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
CN101002073A (zh) * 2004-07-22 2007-07-18 株式会社安川电机 反射型光检测器
US7732233B2 (en) * 2006-07-24 2010-06-08 Touch Micro-System Technology Corp. Method for making light emitting diode chip package
EP2541273B1 (de) * 2011-06-28 2013-05-22 Sick Ag Erfassung und Abstandsbestimmung von Objekten

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106774653A (zh) * 2016-12-06 2017-05-31 广东欧珀移动通信有限公司 一种终端
CN106774653B (zh) * 2016-12-06 2020-06-02 Oppo广东移动通信有限公司 一种终端
CN111052287A (zh) * 2017-09-28 2020-04-21 株式会社电装 操作装置
CN111052287B (zh) * 2017-09-28 2022-01-11 株式会社电装 操作装置
CN108759675A (zh) * 2018-06-29 2018-11-06 苏州富强科技有限公司 一种用于放置工件的支撑冶具
CN114577118A (zh) * 2022-02-16 2022-06-03 江苏中关村嘉拓新能源设备有限公司 耐高温大量程偏移量传感器及标定方法

Also Published As

Publication number Publication date
EP2860497A1 (de) 2015-04-15
US20150097111A1 (en) 2015-04-09
EP2860497B1 (de) 2016-06-08
EP2860497B2 (de) 2019-04-10

Similar Documents

Publication Publication Date Title
CN204313806U (zh) 光电传感器
CN106471332B (zh) 多波长共焦测量装置
CN104808193B (zh) 基于非偏振分光棱镜的f‑p标准具瑞利散射多普勒鉴频装置
CN106125063A (zh) 多波长阵列激光雷达
CN102353447A (zh) 一种用于光谱成像仪的光谱定标装置
CN108918498A (zh) 一种实现线聚焦激发的拉曼探头
CN105116557A (zh) 分光片及其激光共轴测距仪和应用
CN101782428B (zh) 光谱自校正光度计及其测量方法
CN101978247A (zh) 光电检测器和测量光的方法
CN103048046A (zh) 双光束光谱仪
CN102183359B (zh) 对光束的准直性进行检测的方法和装置
CN104220863A (zh) 气体检测器***
JP6833924B2 (ja) 光電センサ及び物体検出方法
CN105866029B (zh) 光学分析仪
US7456962B2 (en) Conical refraction polarimeter
CN201368770Y (zh) 光谱自校正光度计
JP2007198883A (ja) 光ファイバープローブによる分光測定装置
CN109425434A (zh) 一种消除发射率误差的等离子体三维温度场测量装置
CN103175612A (zh) 一种星载成像光谱仪在轨偏振测量***
CN101344430A (zh) 可同时感测发光强度与色度的高速光学感测装置与***
CN101408680A (zh) 四程放大***远场监视装置及其准直方法
CN108827460A (zh) 辐亮度探头和光学测量***
CN111323408A (zh) 微区下发光件的外量子效率检测***及其检测方法
CN105651733B (zh) 材料散射特性测量装置及方法
CN107356331B (zh) 可调多峰且实现光谱分辨率直接测量的光源

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant