CN204307587U - A kind of chemical liquids mixing arrangement - Google Patents
A kind of chemical liquids mixing arrangement Download PDFInfo
- Publication number
- CN204307587U CN204307587U CN201420784878.4U CN201420784878U CN204307587U CN 204307587 U CN204307587 U CN 204307587U CN 201420784878 U CN201420784878 U CN 201420784878U CN 204307587 U CN204307587 U CN 204307587U
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- CN
- China
- Prior art keywords
- chemical liquids
- input pipe
- blending tank
- mixing arrangement
- pipe
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Abstract
The utility model relates to a kind of chemical liquids mixing arrangement, it is characterized in that: comprise the chemical liquids storage tank connecting ascending pipe and efferent duct, chemical liquids storage tank connects chemical liquids blending tank by the second input pipe, be provided with in chemical liquids blending tank and connect the spiral escape pipe that source of the gas and sidewall are provided with venthole, chemical liquids blending tank connects chemical liquids recurrent canal and chemical liquids recovery tube respectively, chemical liquids blending tank is connected from replenisher surge tank by the first input pipe, be arranged on the second input pipe and be all connected rear pump with on the first input pipe, the first helix tube and the second helix tube the equal shutoff of end and on tube wall, be equipped with one group of perforate.Advantage of the present utility model: this apparatus structure is simple, and easy to use, cost is low, effectively can solve the fluid infusion problem of non-uniform existed in existing semiconductor manufacturing equipment, its batch mixing is even, and batch mixing speed is fast.
Description
Technical field
The utility model relates to chemical cleaning technique field, particularly relates to a kind of chemical liquids mixing arrangement.
Background technology
In semiconductor technology cleaning equipment, for the situation that chemical liquids reclaims, in technical process, some chemical liquids is directly got back in fluid reservoir without processing chamber, another part chemical liquids needs to be recovered in fluid reservoir after finishing technique, instead of directly drains.After chemical liquids arrives certain life time, just chemical liquids entirety is drained, and then again supplement fresh chemical liquids, after Temperature Treatment and circulation are carried out to chemical liquids, start the technical process of next round again.
Increase to some extent for before the relative technique of chemical liquids viscosity after recovery, normally complete technique in order to ensure within the regular hour, need in technical process, supplement the loss of moist caused because of volatilization.The solution taked at present supplements ultra-pure water at regular time and quantity in technical process, but Problems existing is the chemical liquids upper surface that the water after supplementing all floats in fluid reservoir, reason is that the ratio of viscosities of chemical liquids own is larger, ultra-pure water is difficult to be blended in chemical liquids, through long a period of time, clearly can find that the ultra-pure water after supplementing all floats over chemical liquids on the surface mostly, thus cause the chemical liquids in fluid reservoir not to be in relatively uniform state in technical process.Three kinds of liquid can not be mixed uniformly, therefore shorten the service life of chemical liquids.
Utility model content
The purpose of this utility model is to solve the shortcoming existed in prior art, and a kind of chemical liquids mixing arrangement proposed.
To achieve these goals, the utility model have employed following technical scheme:
A kind of chemical liquids mixing arrangement, it is characterized in that: comprise chemical liquids storage tank, an ascending pipe is connected in the upside of chemical liquids storage tank, downside connects an efferent duct, described ascending pipe connects a by-pass valve control, described efferent duct connects a rear pump, described chemical liquids storage tank connects chemical liquids blending tank by the second input pipe, the second input pipe being arranged on described chemical liquids blending tank is the second helix tube, a spiral escape pipe is also provided with in described chemical liquids storage tank, described spiral escape pipe connects source of the gas, the sidewall of spiral escape pipe is provided with one group of venthole, described chemical liquids blending tank connects chemical liquids recurrent canal and chemical liquids recovery tube respectively, described chemical liquids blending tank is also connected from replenisher surge tank by the first input pipe, the first input pipe being arranged on described replenisher surge tank is the first helix tube, described second input pipe with the first input pipe are all connected a rear pump, described first helix tube and the second helix tube the equal shutoff of end and on tube wall, be equipped with one group of perforate.
Preferably, described spiral escape pipe is arranged in the spiral of the second helix tube.
Preferably, the side of described chemical liquids storage tank connects one group for sensing the liquid level sensor of chemical liquids.
Preferably, described liquid level sensor is connected to the same side of described chemical liquids storage tank, and distance between any upper and lower two adjacent liquid level sensors is equal.
Preferably, the side of described chemical liquids blending tank connects one group for sensing the liquid level sensor of chemical liquids.
Preferably, described liquid level sensor is connected to the same side of described chemical liquids blending tank, and distance between any upper and lower two adjacent liquid level sensors is equal.
Preferably, the liquid outlet of described chemical liquids recurrent canal and chemical liquids recovery tube is all arranged on the bottom in described chemical liquids blending tank,
The utility model has the advantage of: this chemical liquids mixing arrangement structure is simple, and easy to use, cost is low, effectively can solve the fluid infusion problem of non-uniform existed in existing semiconductor manufacturing equipment, its batch mixing is even, and batch mixing speed is fast.
Accompanying drawing explanation
Fig. 1 is basic structure schematic diagram of the present utility model.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
As shown in Figure 1, a kind of chemical liquids mixing arrangement that the utility model provides, it is characterized in that: comprise chemical liquids storage tank 1, an ascending pipe 3 is connected in the upside of chemical liquids storage tank 1, downside connects an efferent duct 6, described ascending pipe 3 connects a by-pass valve control 4, described efferent duct 6 connects a rear pump 7, described chemical liquids storage tank 1 connects chemical liquids blending tank 2 by the second input pipe 8, the second input pipe 8 being arranged on described chemical liquids blending tank 2 is the second helix tube 8.1, a spiral escape pipe 5 is also provided with in described chemical liquids storage tank 1, described spiral escape pipe 5 connects source of the gas 12, the sidewall of spiral escape pipe 5 is provided with one group of venthole, described spiral escape pipe 5 is arranged in the spiral of the second helix tube 8.1.
Described chemical liquids blending tank 2 connects chemical liquids recurrent canal 10 and chemical liquids recovery tube 11 respectively, the liquid outlet of described chemical liquids recurrent canal 10 and chemical liquids recovery tube 11 is all arranged on the bottom in described chemical liquids blending tank 2, described chemical liquids blending tank 2 also connects from replenisher surge tank 9 by the first input pipe 13, the first input pipe 13 being arranged on described replenisher surge tank 17 is the first helix tube 13.1, described second input pipe 8 with the first input pipe 13 are all connected a rear pump 7, described first helix tube 13.1 and the second helix tube 8.1 the equal shutoff of end and on tube wall, be equipped with one group of perforate.
Three are all connected for sensing the liquid level sensor 14 of chemical liquids in chemical liquids storage tank 1 and the side of chemical liquids blending tank 2, described liquid level sensor 14 correspondence is connected to the same side of described chemical liquids storage tank 1 and chemical liquids blending tank 2, and distance between any upper and lower two adjacent liquid level sensors 14 is equal.
First open by-pass valve control 4 during operation, in chemical liquids storage container 1, inject chemical liquids, until the liquid level sensor 14 on it senses chemical liquids, then closing control valve 4.Chemical liquids is transported to corresponding technique unit by the rear pump 7 that now operates, chemistry rework solution and chemical recovery liquid flow in chemical liquids blending tank 2 by chemical liquids recurrent canal 10 and chemical liquids recovery tube 11 respectively, replenisher imports in chemical liquids blending tank 2 by the first input pipe 13 through the first input pipe 13 simultaneously, tapping side due to the first input pipe 13 is spiral helicine first helix tube 13.1, preliminary mixing can be carried out to chemical liquids when replenisher enters in chemical liquids blending tank 2, liquid in chemical liquids blending tank 2 is pumped in chemical liquids storage tank 1 by the rear pump 7 of described preliminary mixed liquid on the second input pipe 8, due to the first helix tube 13.1 helical form and pass into gas at chemical liquids storage tank 1 can by chemical liquids mixing cmpletely.
Claims (7)
1. a chemical liquids mixing arrangement, it is characterized in that: comprise chemical liquids storage tank (1), an ascending pipe (3) is connected in the upside of chemical liquids storage tank (1), downside connects an efferent duct (6), the upper connection by-pass valve control (4) of described ascending pipe (3), the upper connection rear pump (7) of described efferent duct (6), described chemical liquids storage tank (1) connects chemical liquids blending tank (2) by the second input pipe (8), the second input pipe (8) being arranged on described chemical liquids blending tank (2) is the second helix tube (8.1), a spiral escape pipe (5) is also provided with in described chemical liquids storage tank (1), described spiral escape pipe (5) connects source of the gas (12), the sidewall of spiral escape pipe (5) is provided with one group of venthole, described chemical liquids blending tank (2) connects chemical liquids recurrent canal (10) and chemical liquids recovery tube (11) respectively, described chemical liquids blending tank (2) is also connected from replenisher surge tank (9) by the first input pipe (13), the first input pipe (13) being arranged on described replenisher surge tank (17) is the first helix tube (13.1), described second input pipe (8) with the first input pipe (13) are all connected a rear pump (7), described first helix tube (13.1) and the second helix tube (8.1) the equal shutoff of end and on tube wall, be equipped with one group of perforate.
2. a kind of chemical liquids mixing arrangement according to claim 1, is characterized in that: described spiral escape pipe (5) is arranged in the spiral of the second helix tube (8.1).
3. a kind of chemical liquids mixing arrangement according to claim 1 and 2, is characterized in that: the side of described chemical liquids storage tank (1) connects one group for sensing the liquid level sensor (14) of chemical liquids.
4. a kind of chemical liquids mixing arrangement according to claim 3, it is characterized in that: described liquid level sensor (14) is connected to the same side of described chemical liquids storage tank (1), and distance between any upper and lower two adjacent liquid level sensors (14) is equal.
5. a kind of chemical liquids mixing arrangement according to claim 1 and 2, is characterized in that: the side of described chemical liquids blending tank (2) connects one group for sensing the liquid level sensor (14) of chemical liquids.
6. a kind of chemical liquids mixing arrangement according to claim 5, it is characterized in that: described liquid level sensor (14) is connected to the same side of described chemical liquids blending tank (2), and distance between any upper and lower two adjacent liquid level sensors (14) is equal.
7. a kind of chemical liquids mixing arrangement according to claim 1,2,4 or 6, is characterized in that: the liquid outlet of described chemical liquids recurrent canal (10) and chemical liquids recovery tube (11) is all arranged on the bottom in described chemical liquids blending tank (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420784878.4U CN204307587U (en) | 2014-12-12 | 2014-12-12 | A kind of chemical liquids mixing arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420784878.4U CN204307587U (en) | 2014-12-12 | 2014-12-12 | A kind of chemical liquids mixing arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204307587U true CN204307587U (en) | 2015-05-06 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420784878.4U Expired - Fee Related CN204307587U (en) | 2014-12-12 | 2014-12-12 | A kind of chemical liquids mixing arrangement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204307587U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109331674A (en) * | 2018-11-02 | 2019-02-15 | 江苏新美星包装机械股份有限公司 | Liquid formulation mixing arrangement |
| CN109696542A (en) * | 2018-12-13 | 2019-04-30 | 云南电网有限责任公司电力科学研究院 | A kind of compressing device improving oil gas fusion rate |
-
2014
- 2014-12-12 CN CN201420784878.4U patent/CN204307587U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109331674A (en) * | 2018-11-02 | 2019-02-15 | 江苏新美星包装机械股份有限公司 | Liquid formulation mixing arrangement |
| CN109696542A (en) * | 2018-12-13 | 2019-04-30 | 云南电网有限责任公司电力科学研究院 | A kind of compressing device improving oil gas fusion rate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150506 Termination date: 20151212 |
|
| EXPY | Termination of patent right or utility model |