CN204142905U - The band pattern CP proving installation of cmos image sensor product - Google Patents
The band pattern CP proving installation of cmos image sensor product Download PDFInfo
- Publication number
- CN204142905U CN204142905U CN201420632236.2U CN201420632236U CN204142905U CN 204142905 U CN204142905 U CN 204142905U CN 201420632236 U CN201420632236 U CN 201420632236U CN 204142905 U CN204142905 U CN 204142905U
- Authority
- CN
- China
- Prior art keywords
- image sensor
- glass
- cmos image
- proving installation
- sensor product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The utility model discloses a kind of band pattern CP proving installation of cmos image sensor product, comprise probe, probe is provided with figure glass, figure glass is provided with test pattern and alignment mark.The both sides of probe are respectively equipped with mobile draw-in groove, and the two ends of mobile draw-in groove are respectively equipped with stepper motor, and the axle of two stepper motors is oppositely arranged, and are connected with round-shaped guide rail between the axle of two stepper motors, and figure glass is placed on round-shaped guide rail.Chip defect can be found more accurately, improve the efficiency of test.
Description
Technical field
The utility model relates to a kind of WAFER proving installation, particularly relates to a kind of band pattern CP proving installation of cmos image sensor product.
Background technology
WAFER test (CP test) of cmos image sensor product is indispensable test event, requires the accuracy that can be able to ensure to test.
Method of testing accuracy of the prior art is lower, testing efficiency is lower.
Utility model content
The purpose of this utility model is to provide the band pattern CP proving installation of the cmos image sensor product that a kind of accuracy is high, testing efficiency is high.
The purpose of this utility model is achieved through the following technical solutions:
The band pattern CP proving installation of cmos image sensor product of the present utility model, comprise probe, described probe is provided with figure glass, described figure glass is provided with test pattern and alignment mark.
The technical scheme provided as can be seen from above-mentioned the utility model, the band pattern CP proving installation of the cmos image sensor product that the utility model embodiment provides, owing to probe being provided with figure glass, described figure glass is provided with test pattern and alignment mark, chip defect can be found more accurately, improve the efficiency of test.
Accompanying drawing explanation
Fig. 1 is the structural representation of figure glass in the utility model embodiment;
Fig. 2 is figure glass mounting structure schematic diagram on the probe card in the utility model embodiment;
Fig. 3 is the structural representation of mobile draw-in groove in the utility model embodiment.
In figure:
1, test pattern, 2, alignment mark, 3, figure glass, 4, PUPIL LENS (testing lens), 5, mobile draw-in groove, 6, probe, 7, step motor, 8, guide rail.
Embodiment
To be described in further detail the utility model embodiment below.
The band pattern CP proving installation of cmos image sensor product of the present utility model, its preferably embodiment be:
Comprise probe, described probe is provided with figure glass, described figure glass is provided with test pattern and alignment mark.
The both sides of described probe are respectively equipped with mobile draw-in groove, are provided with drive unit in described mobile draw-in groove, and described figure glass is arranged on described drive unit.
Described drive unit comprises stepper motor, and the axle of described stepper motor is connected with guide rail, and described figure glass is located on described guide rail.
The two ends of described mobile draw-in groove are respectively equipped with stepper motor, and the axle of two stepper motors is oppositely arranged, and described guide rail is connected between the axle of two stepper motors.
Described guide rail is round-shaped.
The band pattern CP proving installation of cmos image sensor product of the present utility model, is printed on glass by the PATTERN (pattern) of test, by the movement of programmed control glass, realizes having the test of PATTERN and the test without PATTERN; For ensureing the accuracy of test, alignment mark being printed by glass, to realize on glass PATTERN to the photosensitivity test of chip.WAFER test (CP test) of cmos image sensor product, in the upper installation of PROBE CARD (probe) with specific figured plate glass, can find chip defect more accurately, improve the efficiency of test.
The above; be only the utility model preferably embodiment; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the change that can expect easily or replacement, all should be encompassed within protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.
Claims (5)
1. a band pattern CP proving installation for cmos image sensor product, comprise probe, it is characterized in that, described probe is provided with figure glass, described figure glass is provided with test pattern and alignment mark.
2. the band pattern CP proving installation of cmos image sensor product according to claim 1, it is characterized in that, the both sides of described probe are respectively equipped with mobile draw-in groove, are provided with drive unit in described mobile draw-in groove, and described figure glass is arranged on described drive unit.
3. the band pattern CP proving installation of cmos image sensor product according to claim 2, it is characterized in that, described drive unit comprises stepper motor, and the axle of described stepper motor is connected with guide rail, and described figure glass is located on described guide rail.
4. the band pattern CP proving installation of cmos image sensor product according to claim 3, it is characterized in that, the two ends of described mobile draw-in groove are respectively equipped with stepper motor, and the axle of two stepper motors is oppositely arranged, and described guide rail is connected between the axle of two stepper motors.
5. the band pattern CP proving installation of cmos image sensor product according to claim 4, it is characterized in that, described guide rail is round-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420632236.2U CN204142905U (en) | 2014-10-28 | 2014-10-28 | The band pattern CP proving installation of cmos image sensor product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420632236.2U CN204142905U (en) | 2014-10-28 | 2014-10-28 | The band pattern CP proving installation of cmos image sensor product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204142905U true CN204142905U (en) | 2015-02-04 |
Family
ID=52419585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420632236.2U Withdrawn - After Issue CN204142905U (en) | 2014-10-28 | 2014-10-28 | The band pattern CP proving installation of cmos image sensor product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204142905U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297659A (en) * | 2014-10-28 | 2015-01-21 | 北京思比科微电子技术股份有限公司 | Pattern CP device for CMOS image sensor products |
-
2014
- 2014-10-28 CN CN201420632236.2U patent/CN204142905U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297659A (en) * | 2014-10-28 | 2015-01-21 | 北京思比科微电子技术股份有限公司 | Pattern CP device for CMOS image sensor products |
| CN104297659B (en) * | 2014-10-28 | 2017-08-08 | 北京思比科微电子技术股份有限公司 | The band pattern CP test devices of CMOS image sensor product |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150204 Effective date of abandoning: 20170808 |
|
| AV01 | Patent right actively abandoned |