CN203622165U

CN203622165U - Chemical-mechanical polishing interface temperature detection control system based on wireless transmission

Info

Publication number: CN203622165U
Application number: CN201320832722.4U
Authority: CN
Inventors: 苏建修; 马胜奇; 陈艳锋; 郭予新; 彭中华; 胡阳; 吴浩; 王振玲; 冯东辉
Original assignee: Henan Institute of Science and Technology
Current assignee: Henan Institute of Science and Technology
Priority date: 2013-12-18
Filing date: 2013-12-18
Publication date: 2014-06-04
Anticipated expiration: 2023-12-18

Abstract

The utility model discloses a chemical-mechanical polishing interface temperature detection control system based on wireless transmission. According to the technical scheme, the chemical-mechanical polishing interface temperature detection control system based on wireless transmission is characterized in that a thermoelectric temperature sensor is adopted for monitoring the temperature of a substrate in the chemical-mechanical polishing process, a main-trend ARMSTM32F103 series microprocessor at present is adopted for conducting processing, and temperature data are transmitted to a computer and a mobile phone through NRF905 and GSM wireless modules to further display and control the temperature. According to the chemical-mechanical polishing interface temperature detection control system, the adopted GSM wireless receiving and dispatching module and the adopted microprocessor can both sustainably, stably, discontinuously and reliably operate in a 24-hour mode all the year round, the STM32F103 series microprocessor is adopted, the control accuracy is high, the reaction speed is high, and the control is flexible.

Description

Chemically mechanical polishing interface temperature based on wireless transmission detects control system

Technical field

The utility model relates to chemically mechanical polishing interface temperature and detects control system, is specifically related to a kind of chemically mechanical polishing interface temperature based on wireless transmission and detects control system.

Background technology

Semiconductor lighting is 21 century one of high-tech sector most with prospects.LED Lighting Industry faces unprecedented policy opportunity, the technology upgrading space out of expection, huge market potential, and development prospect is wide.Novel semi-conducting material SiC single crystalline substrate is not only widely used in semiconductor lighting, but also in civilian, microelectronics, photoelectron, military armament systems, Aero-Space, automobile equipment and the field such as petroleum geology exploration be widely used, there is huge potential user and market.

The serviceability of SiC base device and manufacturing cost are the key factors of the industry developments such as restriction microelectronics, photoelectron, and crystal substrates conventional machining process is mainly continued to use in the processing of SiC monocrystal chip: inner circle sawing sheet, free abrasive grind and machine glazed finish.

Chemically mechanical polishing (CMP) technology is the new technology that the utilization chemistry that grows up the nearly more than ten years and mechanical compound action realize ultra-smooth not damaged Surface Machining, in the processing of CMP, a large amount of heats will inevitably be produced, cause the rising of temperature, these heats mainly come from friction cutting and the chemical reaction in process, and the variation of temperature has larger impact to chemically mechanical polishing.The SiC monocrystal chip with ultra-smooth not damaged surface has broad application prospects, and temperature is the key factor that affects SiC monocrystal chip quality, therefore, monitors and control significant to the processing temperature of substrate.

At present, only have external minority scholar to carry out on-line measurement to the back temperature of pad interface temperature and silicon chip surface to be machined, Hocheng etc. are by using infrared video camera to measure the variations in temperature of pad interface, infrared video camera temperature-measuring results is restricted by surface emissivity, and material, surface roughness, the degree of oxidation of surface emissivity and testee and have or not greasy dirt etc. relevant, these parameters are changeable, be difficult to quantitatively accurately determine, thereby the accuracy of measuring is declined.Simultaneously affected by the characteristic of environment temperature, video camera self emittance, camera lens and other factors larger for infrared video camera, so the error of its measured temperature is larger.Temperature signal on polishing pad is easy to be subject to the interference effect of mechanicalness noise, and simultaneously owing to there being the factors such as polishing fluid, temperature value is also not easy to measure.Limited by thermometric signal location, can not truly reflect the temperature of polishing fluid in Wafer Chemical Mechanical Polishing machining area.

Sampum etc. are bonded at silicon chip after the special rubbing head with two kinds of different grooves, measure the variations in temperature of silicon chip back side diverse location in CMP process by infrared video camera, the method that the accuracy of its result is more directly measured polishing pad temperature improves, but still have weak point: infrared video camera temperature measurement accuracy is lower, being thrown silicon chip is nonmetal and has certain thickness, in heat transfer process, this thickness can not be ignored, in polishing process, being thrown surface temperature first raises, then heat is along being transmitted to being thrown the surperficial back side by throwing face, and the thermograde declining in the generation of silicon wafer thickness direction, now the back temperature of surveying lower than being thrown face actual temperature.In sum, above method has their own characteristics each, and polishing pad and processing work temperature in silicon chip CMP process have been carried out to many useful research.But, these methods can not directly reflect the variations in temperature situation of polishing fluid in actual silicon chip CMP machining area, need research directly to reflect in real time the thermometric method of polishing fluid, so that analyze better the impact of polishing fluid temperature on silicon chip CMP processing mechanism.

Therefore, research temperature in whole polishing process variation and distribution situation, monitoring and control the major issue that temperature becomes research polishing mechanism and improves working surface integrality.

Summary of the invention

The technical problem that the utility model solves has been to provide a kind of chemically mechanical polishing interface temperature based on wireless transmission and has detected control system, this system adopts thermocouple temperature sensor to monitor the temperature of substrate in CMP process, adopt the ARM STM32F103 series microprocessor of current main flow to process, and by NRF905 and gsm wireless module, temperature data is sent to computer and mobile phone and then demonstration and the regulation and control of realization to temperature.

The technical solution of the utility model is: the chemically mechanical polishing interface temperature based on wireless transmission detects control system, it is characterized in that comprising transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine, thermocouple temperature sensor, transmitting terminal lithium ion battery, mill, transmitting terminal circuit case, NRF905 transmitting antenna, transmitting terminal processor reset key, transmitting terminal power switch, described polishing machine top is provided with mill, transmitting terminal lithium ion battery is arranged on the inside of polishing machine, the top of mill is provided with transmitting terminal circuit case, seven groups of thermocouple temperature sensors are radially equipped with respectively along mill in the bottom of the top of mill and transmitting terminal circuit case, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill wafer lower surface, and scribble insulating cement around thermocouple temperature sensor, in transmitting terminal circuit case, through circuit board, transmitting terminal control circuit is housed, NRF905 transmitting antenna IC19 is equipped with on the top of transmitting terminal circuit case, one side of transmitting terminal circuit case is provided with transmitting terminal power switch K1 and transmitting terminal processor reset key SAW2 side by side, described receiving terminal comprises receiving terminal circuit shell, receiving terminal power switch, receiving terminal processor reset key, LCDs, EM310 antenna, NRF905 reception antenna, the first communication indicator lamp, the second communication indicator lamp, function of tonic chord button, raise button, lower button, inquiry button, serial ports, receiving terminal lithium ion battery and attaching plug, wherein EM310 antenna and NRF905 reception antenna are contained in the top of receiving terminal circuit shell side by side, LCDs is equipped with in the front portion of receiving terminal circuit shell, the first communication indicator lamp, the second communication indicator lamp, receiving terminal processor reset key SAW1, receiving terminal power switch K2, receiving terminal lithium ion battery, function of tonic chord button SAW3, raise button SAW4, lower button SAW5, inquiry button SAW6 and serial ports J1, attaching plug CT is equipped with in the left side of receiving terminal circuit shell, in receiving terminal circuit shell, through circuit board, receiving terminal control circuit is housed.

Transmitting terminal control circuit described in the utility model comprises temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset circuit IC17, NRF905 radio transmitter IC19, transmitting terminal crystal oscillating circuit IC18, transmitting terminal microprocessor IC23, transmitting terminal microprocessor IC23 respectively with temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset circuit IC17, NRF905 radio transmitter IC19 is connected with transmitting terminal crystal oscillating circuit IC18, 6 pin of a K type thermocouple serial analog-digital converter of described temperature collection circuit IC16, 7 pin are 45 pin of sending and receiving sending end microprocessor IC23 respectively, 46 pin, 6 pin of the 2nd K type thermocouple serial analog-digital converter, 7 pin are 43 pin of sending and receiving sending end microprocessor IC23 respectively, 44 pin, 6 pin of the 3rd K type thermocouple serial analog-digital converter, 7 pin are 41 pin of sending and receiving sending end microprocessor IC23 respectively, 42 pin, 6 pin of the 4th K type thermocouple serial analog-digital converter, 7 pin are 39 pin of sending and receiving sending end microprocessor IC23 respectively, 40 pin, 6 pin of the 5th K type thermocouple serial analog-digital converter, 7 pin are 5 pin of sending and receiving sending end microprocessor IC23 respectively, 38 pin, 6 pin of the 6th K type thermocouple serial analog-digital converter, 7 pin are 3 pin of sending and receiving sending end microprocessor IC23 respectively, 4 pin, 6 pin of the 7th K type thermocouple serial analog-digital converter, 7 pin are 1 pin of sending and receiving sending end microprocessor IC23 respectively, 2 pin, 5 pin of the one K type thermocouple serial analog-digital converter connect the B6 pin of clock driver IC22, 5 pin of the 2nd K type thermocouple serial analog-digital converter connect the B5 pin of clock driver IC22, 5 pin of the 3rd K type thermocouple serial analog-digital converter connect the B4 pin of clock driver IC22, 5 pin of the 4th K type thermocouple serial analog-digital converter connect the B3 pin of clock driver IC22, 5 pin of the 5th K type thermocouple serial analog-digital converter connect the B2 pin of clock driver IC22, 5 pin of the 6th K type thermocouple serial analog-digital converter connect the B1 pin of clock driver IC22, 5 pin of the 6th K type thermocouple serial analog-digital converter connect the B0 pin of clock driver IC22, 52 pin of the A pin sending and receiving sending end microprocessor IC23 of described clock driver IC22, one end earth of one end of the capacitor C 32 of transmitting terminal microprocessor reset circuit and transmitting terminal microprocessor reset key SAW2,16 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 32, the other end of transmitting terminal microprocessor reset key SAW2 and resistance R 24, the other end sending and receiving sending end 3.3V power supply of resistance R 24, one end of the capacitor C 33 of transmitting terminal crystal oscillating circuit and one end earth of

capacitor C

34,9 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 33 and crystal oscillator TX3,8 pin of the other end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 34 and crystal oscillator TX3, one end earth of one end of capacitor C 35 and

capacitor C

36,12 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 35 and crystal oscillator TX4,13 pin of the other end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 36 and crystal oscillator TX4, 13 pin of described NRF905 radio transmitter IC19 and 14 pin earths, 1 pin connects power supply, and 2 pin, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin are 25 pin, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin, 24 pin of sending and receiving sending end microprocessor IC23 respectively, 1 pin, 2 pin, 3 pin, 4 pin and the 7 pin earths of described memory circuit IC21,8 pin the joining power of one end of resistance R 25, one end of resistance R 26 and memory circuit IC21,47 pin of the 6 pin sending and receiving sending end microprocessor IC23 of the other end of resistance R 26 and memory circuit IC21,48 pin of the 5 pin sending and receiving sending end microprocessor IC23 of the other end of resistance R 25 and memory circuit IC21, the 19 pin ground connection of transmitting terminal microprocessor IC23,10 pin, 27 pin, 99 pin, 74 pin and 49 pin earths, 22 pin connect power supply, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin joining power, described receiving terminal control circuit comprises receiving terminal 3.3V power circuit IC1, receiving terminal microprocessor reset circuit IC14, SIM seat IC circuit 13, memory circuitry IC2, drive circuit IC8, receiving terminal crystal oscillating circuit IC9, key circuit IC10, receiving and transmitting data signals indicating circuit IC11, SIM seat connecting circuit IC12, NRF905 wireless receiving circuit IC7, liquid crystal display circuit IC15, EM310 power circuit IC5, EM310 IC circuit 4, serial port circuit IC6 and receiving terminal microprocessor IC3, one end of the capacitor C 1 of described receiving terminal microprocessor reset circuit IC14 and one end earth of receiving terminal microprocessor reset key SAW1, the other end of

capacitor C

1, 16 pin of the other end of receiving terminal microprocessor reset key SAW1 and a termination receiving terminal microprocessor of resistance R 1, another termination receiving terminal 3.3V power supply of resistance R 1, one end of the resistance R 5 of described drive circuit IC8 and the emitter stage earth of triode Q1, one end of resistance R 4, one end of resistance R 5 are connected with the base stage of triode Q1,68 pin of another termination receiving terminal microprocessor IC3 of resistance R 4, the colelctor electrode of triode Q1 connects 41 pin of EM310

IC circuit

4, 1 pin, 2 pin, 3 pin, 4 pin and the 7 pin earths of described memory circuitry IC2,5 pin of one end of resistance R 2 and memory circuitry IC2 are connected 48 pin of receiving terminal microprocessor, 6 pin of one end of resistance R 3 and memory circuitry IC2 connect 47 pin of micro-receiving terminal processor, the other end of resistance R 2 and the other end of

resistance R

3 and 8 pin of the receiving terminal microprocessor 3.3V power supply that is connected, one end of the capacitor C 2 of described receiving terminal crystal oscillating circuit IC9, one end of capacitor C 3, one end of capacitor C 4 and one end earth of

capacitor C

5,9 pin of a termination receiving terminal microprocessor of the other end of capacitor C 2 and crystal oscillator TX1,8 pin of another termination receiving terminal microprocessor of the other end of capacitor C 3 and crystal oscillator TX1,12 pin of a termination receiving terminal microprocessor of the other end of capacitor C 4 and crystal oscillator TX2,13 pin of another termination receiving terminal microprocessor of the other end of capacitor C 5 and crystal oscillator TX2, one end of the capacitor C 6 of described key circuit IC10, one end of function of tonic chord button SAW3, one end of capacitor C 7, raise one end of button SAW4, one end of capacitor C 8, lower one end of button SAW5, one end earth of one end of capacitor C 9 and inquiry button SAW6, the other end of

capacitor C

6, 84 pin of one termination receiving terminal microprocessor of the other end of function of tonic chord button SAW3 and resistance R 6, the other end of capacitor C 7, raise the other end of button SAW4, 83 pin of one termination receiving terminal microprocessor of resistance R 7, the other end of capacitor C 8, lower 82 pin of the other end of button SAW5 and a termination receiving terminal microprocessor of resistance R 8, the other end of capacitor C 9, the other end of inquiry button SAW6, 81 pin of one termination receiving terminal microprocessor of resistance R 9, the other end of resistance R 6, the other end of resistance R 7, the other end of the other end of resistance R 8 and resistance R 9 also connects receiving terminal 3.3V power supply, one end of the resistance R 12 of receiving and transmitting data signals indicating circuit IC11, the emitter stage of triode Q3, the emitter stage earth of one end of resistance R 15 and triode Q2, one end of resistance R 11, the other end of resistance R 12, the base stage of triode Q3 is connected, 32 pin of another termination EM310 IC circuit 4 of resistance R 11, the colelctor electrode of triode Q3 connects the negative pole of receiving and transmitting data signals indicator lamp LED1 through resistance R 10, the positive pole of receiving and transmitting data signals indicator lamp LED1 connects 5V power supply, one end of resistance R 14, one end of resistance R 15, the base stage of triode Q2 is connected, 13 pin of another termination EM310 IC circuit 4 of resistance R 14, the colelctor electrode of triode Q2 connects the negative pole of receiving and transmitting data signals indicator lamp LED2 through resistance R 13, the positive pole of receiving and transmitting data signals indicator lamp LED2 connects 5V power supply.

Receiving terminal microprocessor reason IC3 described in the utility model comprises microprocessor and standby lithium battery VBAT, wherein 10 pin of microprocessor, 27 pin, 99 pin, 74 pin, 49 pin and 19 pin earths, 22 pin, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin of microprocessor connect receiving terminal 3.3V power supply, the minus earth of standby lithium battery VBAT, the positive pole of standby lithium battery VBAT connects 6 pin of microprocessor.

The minus earth of the lithium ion battery Li-ion1 of transmitting terminal power circuit IC20 described in the utility model, the positive pole of lithium ion battery Li-ion1 connects 3 pin of ultra low differential pressure flow straightener U1A through K2, the 2 pin ground connection of ultra low differential pressure flow straightener U1A, 1 pin is power output end, described receiving terminal 3.3V power circuit IC1 comprises ultra low differential pressure flow straightener U14 and battery charger U15, 2 pin of ultra low differential pressure flow straightener U14 and the negative pole of lithium ion battery Li-ion2 also connect ground connection, the positive pole of lithium ion battery Li-ion2 connects respectively one end of K2, 3 pin of battery charger, 5 pin of the linear voltage regulator U13 of EM310 power circuit IC5, 6 pin of the linear voltage regulator U13 of the other end of capacitor C 12 and EM310 power circuit IC5, 7 pin, the minus earth of lithium ion battery Li-ion2, 3 pin of another termination ultra low differential pressure flow straightener U14 of K2, the two ends of 220V attaching plug CT connect respectively 1 pin of battery charger U15, 2 pin.

Temperature collection circuit IC16 described in the utility model comprises seven groups of thermocouple temperature sensors and seven groups of K type thermocouple serial analog-digital converters, the first thermocouple temperature sensor, the second thermocouple temperature sensor, the 3rd thermocouple temperature sensor, the 4th thermocouple temperature sensor, the 5th thermocouple temperature sensor, the 6th thermocouple temperature sensor, the two ends of the 7th thermocouple temperature sensor connect respectively a K type thermocouple serial analog-digital converter, the 2nd K type thermocouple serial analog-digital converter, the 3rd K type thermocouple serial analog-digital converter, the 4th K type thermocouple serial analog-digital converter, the 5th K type thermocouple serial analog-digital converter, the 6th K type thermocouple serial analog-digital converter, 2 pin of the 7th K type thermocouple serial analog-digital converter, 3 pin, 4 pin of the one K type thermocouple serial analog-digital converter, 4 pin of the 2nd K type thermocouple serial analog-digital converter, 4 pin of the 3rd K type thermocouple serial analog-digital converter, 4 pin of the 4th K type thermocouple serial analog-digital converter, 4 pin of the 5th K type thermocouple serial analog-digital converter, 4 pin of the 6th K type thermocouple serial analog-digital converter, 4 pin of the 7th K type thermocouple serial analog-digital converter, one end of capacitor C 25, one end of capacitor C 26, one end of capacitor C 27, one end of capacitor C 28, one end of capacitor C 29, one end of one end of capacitor C 30 and capacitor C 31 joining power, the other end of capacitor C 25, the other end of capacitor C 26, the other end of capacitor C 27, the other end of capacitor C 28, the other end of capacitor C 29, the other end of capacitor C 30, the other end of

capacitor C

31, 1 pin of the one K type thermocouple serial analog-digital converter, 1 pin of the 2nd K type thermocouple serial analog-digital converter, 1 pin of the 3rd K type thermocouple serial analog-digital converter, 1 pin of the 4th K type thermocouple serial analog-digital converter, 1 pin of the 5th K type thermocouple serial analog-digital converter, 1 pin of the 6th K type thermocouple serial analog-digital converter, 1 pin earth of the 7th K type thermocouple serial analog-digital converter.

SIM seat connecting circuit IC12 described in the utility model comprises card holder connector SMFI, the 2 pin ground connection of card holder connector SMFI, 3 pin of card holder connector SMFI connect 5V power supply, one end of 4 pin of card holder connector SMFI, 4 pin of EM310 IC circuit 4, R17 is connected, 5 pin of card holder connector SMFI, 1 pin of EM310 IC circuit 4 are connected with one end of

resistance R

18, and 6 pin of card holder connector SMFI, 3 pin of EM310 IC circuit 4 are connected with one end of resistance R 16; Described SIM seat IC circuit 13 comprises sim card socket SIM-SOCKET-8, the 2 pin ground connection of sim card socket SIM-SOCKET-8,1 pin of sim card socket SIM-SOCKET-8, a termination 5V power supply of capacitor C 10, the other end ground connection of

capacitor C

10,3 pin of sim card socket SIM-SOCKET-8 connect the other end of R17,5 pin of sim card socket SIM-SOCKET-8 connect the other end of R18, the other end of the 6 pin connecting resistance R16 of sim card socket SIM-SOCKET-8.

EM310 IC circuit 4 described in the utility model comprises EM310 processor, 6 pin of EM310 processor, 8 pin, 42 pin, 21 pin, 22 pin, 23 pin, 24 pin, 25 pin, one end of capacitor C 20, one end of capacitor C 21, one end of capacitor C 22, one end earth of one end of capacitor C 23 and

capacitor C

24, 30 pin of EM310 processor, 29 pin, 28 pin, the other end of 27 pin and the parallel connection of 26 pin and capacitor C 20, the other end of capacitor C 21, the other end of capacitor C 22, the other end of capacitor C 23, the other end of capacitor C 24 is connected, 2 pin and 31 pin of EM310 processor connect 5V power supply, 15 pin of EM310 processor connect 69 pin of receiving terminal microprocessor through

resistance R

19, 17 pin of EM310 processor connect 68 pin of receiving terminal microprocessor through

resistance R

20, 40 foot meridian capacitor C11 ground connection of EM310 processor, described EM310 power circuit IC5 comprises linear voltage regulator U13, 6 pin of linear voltage regulator U13, one end of 7 pin and capacitor C 12 also connects the negative pole of lithium ion battery Li-ion2, one end of capacitor C 13, one end of resistance R 21, one end of resistance R 23, one end earth of one end of inductance L 2 and

capacitor C

15, 1 pin of the other end of the other end of capacitor C 13 and resistance R 21 tie voltage-stablizer, the other end of resistance R 23 connects 2 pin of linear voltage regulator and one end of resistance R 22, the other end of resistance R 22 connects respectively the other end of capacitor C 15 and the negative pole of diode D2, the positive pole of diode D2 connects respectively the other end of inductance L 2 and one end of capacitor C 14, the other end of capacitor C 14 connects respectively one end of

inductance L

1 and 8 pin of linear voltage regulator, the other end of inductance L 1 connects 5 pin of linear voltage regulator, the positive pole of the other end of capacitor C 12 and lithium ion battery Li-ion2.

Serial port circuit IC6 described in the utility model comprises serial ports electrical level transferring chip U9, serial ports female socket J1, the 6 foot meridian capacitor C18 ground connection of serial ports electrical level transferring chip U9, 5 pin of the flat conversion chip of one termination serial port power of

capacitor C

19, 4 pin of the flat conversion chip of another termination serial port power of

capacitor C

19, 3 pin of the flat conversion chip of one termination serial port power of

capacitor C

17, 1 pin of the flat conversion chip of another termination serial port power of

capacitor C

17, 2 pin of the flat conversion chip of one termination serial port power of

capacitor C

16, 16 pin of the flat conversion chip of another termination serial port power of

capacitor C

16, 13 pin of serial ports electrical level transferring chip connect 3 pin of serial ports female socket J1, 14 pin of serial ports electrical level transferring chip connect 2 pin of serial ports female socket J1, 12 pin of serial ports electrical level transferring chip connect 69 pin of receiving terminal microprocessor, 11 pin of serial ports electrical level transferring chip connect 68 pin of receiving terminal microprocessor.

NRF905 wireless receiving circuit IC7 described in the utility model comprises wireless receiving module, 1 pin of wireless receiving module connects receiving terminal 3.3V power supply, 13 pin of wireless receiving module and 14 pin earths, 2 pin, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin and 12 pin of wireless receiving module connect respectively 25 pin, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin and 14 pin of receiving terminal microprocessor.

Liquid crystal display circuit IC15 described in the utility model comprises LCD MODULE, 1 pin of LCD MODULE and 16 pin earths, 15 pin of LCD MODULE connect 5V power supply, 2 pin of LCD MODULE and one end of PR1 also connect 5V power supply, the other end ground connection of PR1, 3 pin of the slip termination LCD MODULE of PR1, 4 pin of LCD MODULE, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin, 13 pin and 14 pin connect respectively 86 pin of receiving terminal microprocessor, 87 pin, 88 pin, 55 pin, 56 pin, 57 pin, 58 pin, 59 pin, 60 pin, 61 pin and 62 pin.

The major function that the utility model system realizes comprises following aspect: the one, and Real-time Collection temperature data also adopts wireless mode transmission and monitoring; The 2nd, detect in real time and show the performance diagram of polishing component temperature signal, capable of automatic alarm or be sent to mobile phone and realize the state of remote monitoring machine when temperature reaches.

The utlity model has following beneficial effect: the gsm wireless transceiver module that 1, this system adopts and microprocessor all sustainable, stablize uninterruptedly operation reliably all the year round in 24 hours; 2, gsm module can be connected by RS232 serial ports or USB interface with the communication of computer, to facilitate adjustment control program; 3, the long-range of original creation only wanted a mobile phone without distance limit telecontrol engineering to the initialization of system, and all configurations of this system are all to realize by SMS, have broken through the restriction in time and space, and system maintenance work is very simple; 4, this system adopts STM32F103 series microprocessor, and control accuracy is high, and reaction speed is fast, controls more flexible.

Accompanying drawing explanation

Fig. 1 is the structural representation of the utility model transmitting terminal, Fig. 2 is the structural representation of the utility model receiving terminal, Fig. 3 is the line module figure of the utility model transmitting terminal, Fig. 4 is the line module figure of the utility model receiving terminal, Fig. 5 is the utility model clock driver circuit figure, Fig. 6 is the circuit diagram of the utility model Sender side Storage device 24C04, Fig. 7 is the utility model transmitting terminal 3.3V power circuit diagram, Fig. 8 the utility model NRF905 radio transmitter figure, Fig. 9 is the utility model temperature collection circuit figure, Figure 10 is the utility model transmitting terminal microprocessor reset circuit figure, Figure 11 is the utility model transmitting terminal crystal oscillating circuit figure, Figure 12 is the utility model transmitting terminal microcontroller circuit figure, Figure 13 is the utility model receiving terminal 3.3V power circuit diagram, Figure 14 is the utility model receiving terminal processor reset circuit diagram, Figure 15 is the utility model receiving terminal memory 24C04 circuit diagram, Figure 16 is the utility model drive circuit figure, Figure 17 is the utility model receiving terminal crystal oscillating circuit figure, Figure 18 is the utility model SIM seat circuit diagram, Figure 19 is the utility model receiving terminal microcontroller circuit figure, Figure 20 is the utility model key circuit figure, Figure 21 is that the utility model sends data-signal indicating circuit figure, Figure 22 is the utility model SIM seat connecting circuit figure, Figure 23 is the utility model NRF905 wireless receiving circuit figure, Figure 24 is the utility model LCD1602 display circuit figure, Figure 25 is the utility model EM310 power circuit, Figure 26 is the utility model EM310 circuit diagram, Figure 27 is the utility model serial port circuit figure.

Drawing explanation: 1, polishing machine, 2, transmitting terminal lithium ion battery, 3, mill, 4, transmitting terminal circuit case, 5, NRF905 transmitting antenna, 6, transmitting terminal processor reset key, 7, transmitting terminal power switch, 8, liquid crystal display, 9, EM310 antenna, 10, NRF905 reception antenna, 11, the first communication indicator lamp, 12, function of tonic chord button, 13, raise button, 14, lower button, 15, inquiry button, 16, serial ports, 17, receiving terminal circuit shell, 18, receiving terminal power switch, 19, receiving terminal processor reset key, 20, the second communication indicator lamp, 21, receiving terminal lithium ion battery.

The specific embodiment

Below in conjunction with accompanying drawing, the specific embodiment of the present utility model is described in further detail.Chemically mechanical polishing interface temperature based on wireless transmission detects control system, comprise transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine 1, thermocouple temperature sensor, transmitting terminal lithium ion battery 2, mill 3, transmitting terminal circuit case 4, NRF905 transmitting antenna 5, transmitting terminal processor reset key 6, transmitting terminal power switch 7, described polishing machine 1 top is provided with mill 3, transmitting terminal lithium ion battery 2 is arranged on the inside of polishing machine 1, the top of mill 3 is provided with transmitting terminal circuit case 4, seven groups of thermocouple temperature sensors are radially equipped with respectively along mill 3 in the bottom of the top of mill 3 and transmitting terminal circuit case 4, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill 3 wafer lower surfaces, and scribble insulating cement around thermocouple temperature sensor, transmitting terminal circuit case 4 is interior is equipped with transmitting terminal control circuit through circuit board, NRF905 transmitting antenna 5 is equipped with on the top of transmitting terminal circuit case 4, one side of transmitting terminal circuit case 4 is provided with transmitting terminal power switch 7 and transmitting terminal processor reset key 6 side by side, described receiving terminal comprises receiving terminal circuit shell 17, receiving terminal power switch 18, receiving terminal processor reset key 19, LCDs 8, EM310 antenna 9, NRF905 reception antenna 10, the first communication indicator lamp 11, the second communication indicator lamp 20, function of tonic chord button 12, raise button 13, lower button 14, inquiry button 15, serial ports 16, receiving terminal lithium ion battery 21 and attaching plug, wherein EM310 antenna 9 and NRF905 reception antenna 10 are contained in the top of receiving terminal circuit shell 17 side by side, LCDs 8 is equipped with in the front portion of receiving terminal circuit shell 17, the first communication indicator lamp 11, the second communication indicator lamp 20, receiving terminal processor reset key 19, receiving terminal power switch 18, receiving terminal lithium ion battery 21, function of tonic chord button 12, raise button 13, lower button 14, inquiry button 15 and serial ports 16, attaching plug CT is equipped with in the left side of receiving terminal circuit shell 17, receiving terminal circuit shell 17 is interior is equipped with receiving terminal control circuit through circuit board.

The major function that the utility model system realizes comprises following aspect: the one, and Real-time Collection temperature data also adopts wireless mode transmission and monitoring; The 2nd, detect in real time and show the performance diagram of polishing component temperature signal, capable of automatic alarm or be sent to mobile phone and realize the state of remote monitoring machine when temperature reaches.Connection block diagram between the each functional module of chemically mechanical polishing interface temperature detection control system and circuit theory diagrams are as shown in the figure.

Temperature signal is after K type thermocouple detects, temperature signal is converted to voltage signal, process through MAX6675, the faint signal that thermocouple temperature sensor is sent here amplifies processing, improve the stability of circuit signal, through A/D analog-to-digital conversion, convert the temperature voltage of simulation or current signal (analog quantity) to equivalent digital quantity that computer can identifying processing.Signals collecting part is connected with ARM STM32F103 series microprocessor, microprocessor detects after temperature signal, by NRF905 wireless-transmission network, the temperature information detecting is sent to receiving terminal, receiving terminal is after microprocessor controller is processed, by electrical level transferring chip MAX232 conversion chip, the relevant information of temperature is sent on computer, take VB6.0 interface as display window, form displays temperature curve temperature signal with coordinate, in the time that temperature signal exceedes the higher limit of setting, the phone number that host computer interface can set from trend by EM310 module sends note, when personnel are not during or not board side, as wonder current temperature information, can send short message enquiry and obtain the current working condition of board to EM310 module, to carry out remote monitor.

The real-time control of native system to temperature signal is to communicate by serial ports and the computer of ARM controller.The demonstration of temperature signal is carried out dynamic monitoring in real time on computers by host computer interface.Host computer is take VB6.0 as controlling interface, just record temperature now the figure that runs a curve at interval of the time of one, when temperature below or above we set temperature value time, system can eject prompt window and send prompt tone, when this process occurs, system can continue record curve map and the dynamic data of temperature and be saved in database, for user's inquiry and analysis.Rotating speed or the silicon chip contact etc. of the temperature value automatic regulating machine bed motor that system also can be set according to host computer, thus the temperature of adjusting polishing body is normally worked it within the specific limits.

In order to make system have more security and intelligent, SMS alarm function and remote short messages control function in design, are also expanded.In the time that operating personnel leave supervisory control comuter, can click " locking " button at host computer interface, carry out message monitoring.When after " locking ", phone number and temperature limit, can not change again, in case faulty operation, causes equipment to mistakenly send text message or send out note wrong.This function can freely be selected operation, when after release, will automatically not send SMS.At this moment the EM310 module, being connected with ARM STM32F103 series microprocessor has started monitoring work.In the time that temperature exceedes setting value, EM310 module will send warning message from trend designated user mobile phone, and user also can pass through answer short message control routine, realizes the Long-distance Control to equipment.

In native system, set and by ARM STM32F103 series microprocessor control gsm module, temperature is monitored by host computer.Note Long-distance Control adopts EM310 wireless communication module to realize the monitoring of mobile phone to temperature, EM310 module is technical grade GSM, the GPRS module that Chinese Huawei Company produces, the inner ICP/IP protocol that embeds, supported data, voice, short message and fax, be operated in two frequency ranges of EGSM900 and GSM1800, power range is direct current 3.4～4.7V.Average standby current 3.5mA, shutdown leakage current 40uA, SIM card voltage support 3V and 1.8V, the short message send and receive of support TEXT and PDU form, EM310 module has 50 pins.In the design, EM310 module is connected with Mobile phone card circuit, power circuit, boot-strap circuit, power supply indicator circuit, network indicator light circuit, serial communication circuit and other auxiliary elements, EM310 module provides a road serial line interface, supports 8 wire serial bus interfaces or 4 wire serial bus interfaces or 2 line serial line interfaces.EM310 gsm module is by UART interface and the extraneous input of carrying out serial communication and AT instruction.UART support programmable data width, programmable data position of rest, programmable strange/even parity check or there is no verification, the baud rate of the minimum support of the baud rate 300bit/s of the highest support of this UART mouth 115.2kbit/s, acquiescence is supported the speed of 9600bit/s, supports baud rate power down to preserve.

At the receiving terminal of temperature signal collection, be provided with LCD1602 display, as the auxiliary demonstration of host computer interface display module, be used for showing in real time the temperature of silicon chip machining area and current time when shut down of computer (host computer is closed).Character-type liquid crystal display module adopts dot lcd to show, is called for short LCD, is a kind of display device that is specifically designed to ASCII character symbols such as showing letter, numeral, symbol.This display device adopts soft encapsulation, and controller major part is HD44780, the SIP16 pin that interface is standard, independent power source, communication data and control three parts.1602 chips and backlight circuit operating voltage and microprocessor compatibility, can be connected with microprocessor easily.

The gsm wireless transceiver module that this system adopts and microprocessor all sustainable, stablize uninterruptedly operation reliably all the year round in 24 hours.Gsm module can be connected by RS232 serial ports or USB interface with the communication of computer, to facilitate adjustment control program.That creates is long-range without distance limit telecontrol engineering, and the initialization of system is only wanted to a mobile phone, and all configurations of this system are all to realize by SMS, have broken through the restriction in time and space, and system maintenance work is very simple.This system adopts STM32F103 series microprocessor, and control accuracy is high, and reaction speed is fast, controls more flexible.

The utility model has carried out analysis and comparison according to the occupation mode of temperature sensor to contact method and two kinds of thermometries of eyes with non-contact method, consider the thermometric factors of polishing fluid in restriction Wafer Chemical Mechanical Polishing machining area, propose multiple spot original position based on contact method and measured in real time the method for polishing fluid temperature in Wafer Chemical Mechanical Polishing machining area, on silicon chip, punch with laser, along three thermocouple temperature sensors of radial distribution of silicon chip, realize the kinetic measurement of polishing fluid temperature in Wafer Chemical Mechanical Polishing machining area, and use GPS technology to realize direct demonstration and the remote monitoring to temperature characteristics, the method has the following advantages compared with polishing fluid temperature non-contact measurement method in the Wafer Chemical Mechanical Polishing machining area having adopted at present: (1) measuring method precision in this paper is higher, can be from establishing network, be convenient to realize multiple spot and concentrate measurement, (2) compared with using transparent organic glass dish with noncontact measuring method, on rubbing head, paste silicon chip and carry out the thermometric method of polishing fluid closer to Wafer Chemical Mechanical Polishing process.Secondly, on the basis of Wafer Chemical Mechanical Polishing testing stand, set up polishing fluid temperature measurement system and device in the Wafer Chemical Mechanical Polishing machining area being formed by thermocouple temperature sensor, signal condition amplifier, signal processor, data collecting instrument, GSM network system, mobile phone and computer.This measuring system and device have been realized seven thermocouple temperature sensors along rubbing head radial distribution, the exposed hot junction of thermocouple temperature sensor is by the variation of polishing fluid temperature in silicon chip direct feeling machining area, measuring-signal is after conditioning amplification, analog-to-digital conversion, Information Collecting & Processing, deliver to microprocessor, through NRF905, EM310 module communication, carry out Real-time Collection and control by host computer interface, realized the measurement to polishing fluid variations in temperature in machining area, the error of this measuring system is less than scholar 0.47%.On the basis of HART agreement, temperature transmitter is carried out to configuration and calibration, the thermometric error of polishing fluid in Wafer Chemical Mechanical Polishing machining area has been analyzed, and taked corresponding measure, reduced and disturb, reduced error.

Claims

1. the chemically mechanical polishing interface temperature based on wireless transmission detects control system, it is characterized in that comprising transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine, thermocouple temperature sensor, transmitting terminal lithium ion battery, mill, transmitting terminal circuit case, NRF905 transmitting antenna, transmitting terminal processor reset key, transmitting terminal power switch, described polishing machine top is provided with mill, transmitting terminal lithium ion battery is arranged on the inside of polishing machine, the top of mill is provided with transmitting terminal circuit case, seven groups of thermocouple temperature sensors are radially equipped with respectively along mill in the bottom of the top of mill and transmitting terminal circuit case, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill wafer lower surface, and scribble insulating cement around thermocouple temperature sensor, in transmitting terminal circuit case, through circuit board, transmitting terminal control circuit is housed, NRF905 transmitting antenna is equipped with on the top of transmitting terminal circuit case, one side of transmitting terminal circuit case is provided with transmitting terminal power switch and transmitting terminal processor reset key side by side, described receiving terminal comprises receiving terminal circuit shell, receiving terminal power switch, receiving terminal processor reset key, LCDs, EM310 antenna, NRF905 reception antenna, the first communication indicator lamp, the second communication indicator lamp, function of tonic chord button, raise button, lower button, inquiry button, serial ports, receiving terminal lithium ion battery and attaching plug, wherein EM310 antenna and NRF905 reception antenna are contained in the top of receiving terminal circuit shell side by side, LCDs is equipped with in the front portion of receiving terminal circuit shell, the first communication indicator lamp, the second communication indicator lamp, receiving terminal processor reset key, receiving terminal power switch, receiving terminal lithium ion battery, function of tonic chord button, raise button, lower button, inquiry button and serial ports, attaching plug is equipped with in the left side of receiving terminal circuit shell, in receiving terminal circuit shell, through circuit board, receiving terminal control circuit is housed.

2. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 1 detects control system, it is characterized in that: described transmitting terminal control circuit comprises temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset circuit IC17, NRF905 radio transmitter IC19, transmitting terminal crystal oscillating circuit IC18, transmitting terminal microprocessor IC23, transmitting terminal microprocessor IC23 respectively with temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset circuit IC17, NRF905 radio transmitter IC19 is connected with transmitting terminal crystal oscillating circuit IC18, 6 pin of a K type thermocouple serial analog-digital converter of described temperature collection circuit IC16, 7 pin are 45 pin of sending and receiving sending end microprocessor IC23 respectively, 46 pin, 6 pin of the 2nd K type thermocouple serial analog-digital converter, 7 pin are 43 pin of sending and receiving sending end microprocessor IC23 respectively, 44 pin, 6 pin of the 3rd K type thermocouple serial analog-digital converter, 7 pin are 41 pin of sending and receiving sending end microprocessor IC23 respectively, 42 pin, 6 pin of the 4th K type thermocouple serial analog-digital converter, 7 pin are 39 pin of sending and receiving sending end microprocessor IC23 respectively, 40 pin, 6 pin of the 5th K type thermocouple serial analog-digital converter, 7 pin are 5 pin of sending and receiving sending end microprocessor IC23 respectively, 38 pin, 6 pin of the 6th K type thermocouple serial analog-digital converter, 7 pin are 3 pin of sending and receiving sending end microprocessor IC23 respectively, 4 pin, 6 pin of the 7th K type thermocouple serial analog-digital converter, 7 pin are 1 pin of sending and receiving sending end microprocessor IC23 respectively, 2 pin, 5 pin of the one K type thermocouple serial analog-digital converter connect the B6 pin of clock driver IC22, 5 pin of the 2nd K type thermocouple serial analog-digital converter connect the B5 pin of clock driver IC22, 5 pin of the 3rd K type thermocouple serial analog-digital converter connect the B4 pin of clock driver IC22, 5 pin of the 4th K type thermocouple serial analog-digital converter connect the B3 pin of clock driver IC22, 5 pin of the 5th K type thermocouple serial analog-digital converter connect the B2 pin of clock driver IC22, 5 pin of the 6th K type thermocouple serial analog-digital converter connect the B1 pin of clock driver IC22, 5 pin of the 7th K type thermocouple serial analog-digital converter connect the B0 pin of clock driver IC22, 52 pin of the A pin sending and receiving sending end microprocessor IC23 of described clock driver IC22, one end of the capacitor C 32 of described transmitting terminal microprocessor reset circuit IC17 and one end earth of transmitting terminal microprocessor reset key SAW2,16 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 32, the other end of transmitting terminal microprocessor reset key SAW2 and resistance R 24, the other end sending and receiving sending end 3.3V power supply of resistance R 24, one end of the capacitor C 33 of transmitting terminal crystal oscillating circuit and one end earth of capacitor C 34,9 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 33 and crystal oscillator TX3,8 pin of the other end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 34 and crystal oscillator TX3, one end earth of one end of capacitor C 35 and capacitor C 36,12 pin of one end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 35 and crystal oscillator TX4,13 pin of the other end sending and receiving sending end microprocessor IC23 of the other end of capacitor C 36 and crystal oscillator TX4, 13 pin of described NRF905 radio transmitter IC19 and 14 pin earths, 1 pin connects power supply, and 2 pin, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin are 25 pin, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin, 24 pin of sending and receiving sending end microprocessor IC23 respectively, 1 pin, 2 pin, 3 pin, 4 pin and the 7 pin earths of described memory circuit IC21,8 pin the joining power of one end of resistance R 25, one end of resistance R 26 and memory circuit IC21,47 pin of the 6 pin sending and receiving sending end microprocessor IC23 of the other end of resistance R 26 and memory circuit IC21,48 pin of the 5 pin sending and receiving sending end microprocessor IC23 of the other end of resistance R 25 and memory circuit IC21, the 19 pin ground connection of transmitting terminal microprocessor IC23,10 pin, 27 pin, 99 pin, 74 pin and 49 pin earths, 22 pin connect power supply, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin joining power, described receiving terminal control circuit comprises receiving terminal 3.3V power circuit IC1, receiving terminal microprocessor reset circuit IC14, SIM seat IC circuit 13, memory circuitry IC2, drive circuit IC8, receiving terminal crystal oscillating circuit IC9, key circuit IC10, receiving and transmitting data signals indicating circuit IC11, SIM seat connecting circuit IC12, NRF905 wireless receiving circuit IC7, liquid crystal display circuit IC15, EM310 power circuit IC5, EM310 IC circuit 4, serial port circuit IC6 and receiving terminal microprocessor IC3, one end of the capacitor C 1 of described receiving terminal microprocessor reset circuit IC14 and one end earth of receiving terminal microprocessor reset key SAW1, the other end of capacitor C 1, 16 pin of the other end of receiving terminal microprocessor reset key SAW1 and a termination receiving terminal microprocessor of resistance R 1, another termination receiving terminal 3.3V power supply of resistance R 1, one end of the resistance R 5 of described drive circuit IC8 and the emitter stage earth of triode Q1, one end of resistance R 4, one end of resistance R 5 are connected with the base stage of triode Q1,68 pin of another termination receiving terminal microprocessor IC3 of resistance R 4, the colelctor electrode of triode Q1 connects 41 pin of EM310 IC circuit 4, 1 pin, 2 pin, 3 pin, 4 pin and the 7 pin earths of described memory circuitry IC2,5 pin of one end of resistance R 2 and memory circuitry IC2 are connected 48 pin of receiving terminal microprocessor, 6 pin of one end of resistance R 3 and memory circuitry IC2 connect 47 pin of micro-receiving terminal processor, the other end of resistance R 2 and the other end of resistance R 3 and 8 pin of the receiving terminal microprocessor 3.3V power supply that is connected, one end of the capacitor C 2 of described receiving terminal crystal oscillating circuit IC9, one end of capacitor C 3, one end of capacitor C 4 and one end earth of capacitor C 5,9 pin of a termination receiving terminal microprocessor of the other end of capacitor C 2 and crystal oscillator TX1,8 pin of another termination receiving terminal microprocessor of the other end of capacitor C 3 and crystal oscillator TX1,12 pin of a termination receiving terminal microprocessor of the other end of capacitor C 4 and crystal oscillator TX2,13 pin of another termination receiving terminal microprocessor of the other end of capacitor C 5 and crystal oscillator TX2, one end of the capacitor C 6 of described key circuit IC10, one end of function of tonic chord button SAW3, one end of capacitor C 7, raise one end of button SAW4, one end of capacitor C 8, lower one end of button SAW5, one end earth of one end of capacitor C 9 and inquiry button SAW6, the other end of capacitor C 6, 84 pin of one termination receiving terminal microprocessor of the other end of function of tonic chord button SAW3 and resistance R 6, the other end of capacitor C 7, raise the other end of button SAW4, 83 pin of one termination receiving terminal microprocessor of resistance R 7, the other end of capacitor C 8, lower 82 pin of the other end of button SAW5 and a termination receiving terminal microprocessor of resistance R 8, the other end of capacitor C 9, the other end of inquiry button SAW6, 81 pin of one termination receiving terminal microprocessor of resistance R 9, the other end of resistance R 6, the other end of resistance R 7, the other end of the other end of resistance R 8 and resistance R 9 also connects receiving terminal 3.3V power supply, one end of the resistance R 12 of receiving and transmitting data signals indicating circuit IC11, the emitter stage of triode Q3, the emitter stage earth of one end of resistance R 15 and triode Q2, one end of resistance R 11, the other end of resistance R 12, the base stage of triode Q3 is connected, 32 pin of another termination EM310 IC circuit 4 of resistance R 11, the colelctor electrode of triode Q3 connects the negative pole of receiving and transmitting data signals indicator lamp LED1 through resistance R 10, the positive pole of receiving and transmitting data signals indicator lamp LED1 connects 5V power supply, one end of resistance R 14, one end of resistance R 15, the base stage of triode Q2 is connected, 13 pin of another termination EM310 IC circuit 4 of resistance R 14, the colelctor electrode of triode Q2 connects the negative pole of receiving and transmitting data signals indicator lamp LED2 through resistance R 13, the positive pole of receiving and transmitting data signals indicator lamp LED2 connects 5V power supply.

3. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described receiving terminal microprocessor reason IC3 comprises microprocessor and standby lithium battery VBAT, wherein 10 pin of microprocessor, 27 pin, 99 pin, 74 pin, 49 pin and 19 pin earths, 22 pin, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin of microprocessor connect receiving terminal 3.3V power supply, the minus earth of standby lithium battery VBAT, the positive pole of standby lithium battery VBAT connects 6 pin of microprocessor.

4. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: the minus earth of the lithium ion battery Li-ion1 of described transmitting terminal power circuit IC20, the positive pole of lithium ion battery Li-ion1 connects 3 pin of ultra low differential pressure flow straightener U1A through K2, the 2 pin ground connection of ultra low differential pressure flow straightener U1A, 1 pin is power output end, described receiving terminal 3.3V power circuit IC1 comprises ultra low differential pressure flow straightener U14 and battery charger U15, 2 pin of ultra low differential pressure flow straightener U14 and the negative pole of lithium ion battery Li-ion2 also connect ground connection, the positive pole of lithium ion battery Li-ion2 connects respectively one end of K2, 3 pin of battery charger, 5 pin of the linear voltage regulator U13 of EM310 power circuit IC5, 6 pin of the linear voltage regulator U13 of the other end of capacitor C 12 and EM310 power circuit IC5, 7 pin, the minus earth of lithium ion battery Li-ion2, 3 pin of another termination ultra low differential pressure flow straightener U14 of K2, the two ends of 220V attaching plug CT connect respectively 1 pin of battery charger U15, 2 pin.

5. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described temperature collection circuit IC16 comprises seven groups of thermocouple temperature sensors and seven groups of K type thermocouple serial analog-digital converters, the first thermocouple temperature sensor, the second thermocouple temperature sensor, the 3rd thermocouple temperature sensor, the 4th thermocouple temperature sensor, the 5th thermocouple temperature sensor, the 6th thermocouple temperature sensor, the two ends of the 7th thermocouple temperature sensor connect respectively a K type thermocouple serial analog-digital converter, the 2nd K type thermocouple serial analog-digital converter, the 3rd K type thermocouple serial analog-digital converter, the 4th K type thermocouple serial analog-digital converter, the 5th K type thermocouple serial analog-digital converter, the 6th K type thermocouple serial analog-digital converter, 2 pin of the 7th K type thermocouple serial analog-digital converter, 3 pin, 4 pin of the one K type thermocouple serial analog-digital converter, 4 pin of the 2nd K type thermocouple serial analog-digital converter, 4 pin of the 3rd K type thermocouple serial analog-digital converter, 4 pin of the 4th K type thermocouple serial analog-digital converter, 4 pin of the 5th K type thermocouple serial analog-digital converter, 4 pin of the 6th K type thermocouple serial analog-digital converter, 4 pin of the 7th K type thermocouple serial analog-digital converter, one end of capacitor C 25, one end of capacitor C 26, one end of capacitor C 27, one end of capacitor C 28, one end of capacitor C 29, one end of one end of capacitor C 30 and capacitor C 31 joining power, the other end of capacitor C 25, the other end of capacitor C 26, the other end of capacitor C 27, the other end of capacitor C 28, the other end of capacitor C 29, the other end of capacitor C 30, the other end of capacitor C 31, 1 pin of the one K type thermocouple serial analog-digital converter, 1 pin of the 2nd K type thermocouple serial analog-digital converter, 1 pin of the 3rd K type thermocouple serial analog-digital converter, 1 pin of the 4th K type thermocouple serial analog-digital converter, 1 pin of the 5th K type thermocouple serial analog-digital converter, 1 pin of the 6th K type thermocouple serial analog-digital converter, 1 pin earth of the 7th K type thermocouple serial analog-digital converter.

6. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described SIM seat connecting circuit IC12 comprises card holder connector SMFI, the 2 pin ground connection of card holder connector SMFI, 3 pin of card holder connector SMFI connect 5V power supply, 4 pin of card holder connector SMFI, 4 pin of EM310 IC circuit 4, one end of R17 is connected, 5 pin of card holder connector SMFI, 1 pin of EM310 IC circuit 4 is connected with one end of resistance R 18, 6 pin of card holder connector SMFI, 3 pin of EM310 IC circuit 4 are connected with one end of resistance R 16, described SIM seat IC circuit 13 comprises sim card socket SIM-SOCKET-8, the 2 pin ground connection of sim card socket SIM-SOCKET-8,1 pin of sim card socket SIM-SOCKET-8, a termination 5V power supply of capacitor C 10, the other end ground connection of capacitor C 10,3 pin of sim card socket SIM-SOCKET-8 connect the other end of R17,5 pin of sim card socket SIM-SOCKET-8 connect the other end of R18, the other end of the 6 pin connecting resistance R16 of sim card socket SIM-SOCKET-8.

7. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described EM310 IC circuit 4 comprises EM310 processor, 6 pin of EM310 processor, 8 pin, 42 pin, 21 pin, 22 pin, 23 pin, 24 pin, 25 pin, one end of capacitor C 20, one end of capacitor C 21, one end of capacitor C 22, one end earth of one end of capacitor C 23 and capacitor C 24, 30 pin of EM310 processor, 29 pin, 28 pin, the other end of 27 pin and the parallel connection of 26 pin and capacitor C 20, the other end of capacitor C 21, the other end of capacitor C 22, the other end of capacitor C 23, the other end of capacitor C 24 is connected, 2 pin and 31 pin of EM310 processor connect 5V power supply, 15 pin of EM310 processor connect 69 pin of receiving terminal microprocessor through resistance R 19, 17 pin of EM310 processor connect 68 pin of receiving terminal microprocessor through resistance R 20, 40 foot meridian capacitor C11 ground connection of EM310 processor, described EM310 power circuit IC5 comprises linear voltage regulator U13, 6 pin of linear voltage regulator U13, one end of 7 pin and capacitor C 12 also connects the negative pole of lithium ion battery Li-ion2, one end of capacitor C 13, one end of resistance R 21, one end of resistance R 23, one end earth of one end of inductance L 2 and capacitor C 15, 1 pin of the other end of the other end of capacitor C 13 and resistance R 21 tie voltage-stablizer, the other end of resistance R 23 connects 2 pin of linear voltage regulator and one end of resistance R 22, the other end of resistance R 22 connects respectively the other end of capacitor C 15 and the negative pole of diode D2, the positive pole of diode D2 connects respectively the other end of inductance L 2 and one end of capacitor C 14, the other end of capacitor C 14 connects respectively one end of inductance L 1 and 8 pin of linear voltage regulator, the other end of inductance L 1 connects 5 pin of linear voltage regulator, the positive pole of the other end of capacitor C 12 and lithium ion battery Li-ion2.

8. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described serial port circuit IC6 comprises serial ports electrical level transferring chip U9, serial ports female socket J1, the 6 foot meridian capacitor C18 ground connection of serial ports electrical level transferring chip U9, 5 pin of the flat conversion chip of one termination serial port power of capacitor C 19, 4 pin of the flat conversion chip of another termination serial port power of capacitor C 19, 3 pin of the flat conversion chip of one termination serial port power of capacitor C 17, 1 pin of the flat conversion chip of another termination serial port power of capacitor C 17, 2 pin of the flat conversion chip of one termination serial port power of capacitor C 16, 16 pin of the flat conversion chip of another termination serial port power of capacitor C 16, 13 pin of serial ports electrical level transferring chip connect 3 pin of serial ports female socket J1, 14 pin of serial ports electrical level transferring chip connect 2 pin of serial ports female socket J1, 12 pin of serial ports electrical level transferring chip connect 69 pin of receiving terminal microprocessor, 11 pin of serial ports electrical level transferring chip connect 68 pin of receiving terminal microprocessor.

9. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described NRF905 wireless receiving circuit IC7 comprises wireless receiving module, 1 pin of wireless receiving module connects receiving terminal 3.3V power supply, 13 pin of wireless receiving module and 14 pin earths, 2 pin of wireless receiving module, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin and 12 pin connect respectively 25 pin of receiving terminal microprocessor, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin and 14 pin.

10. the chemically mechanical polishing interface temperature based on wireless transmission according to claim 2 detects control system, it is characterized in that: described liquid crystal display circuit IC15 comprises LCD MODULE, 1 pin of LCD MODULE and 16 pin earths, 15 pin of LCD MODULE connect 5V power supply, 2 pin of LCD MODULE and one end of PR1 also connect 5V power supply, the other end ground connection of PR1, 3 pin of the slip termination LCD MODULE of PR1, 4 pin of LCD MODULE, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin, 13 pin and 14 pin connect respectively 86 pin of receiving terminal microprocessor, 87 pin, 88 pin, 55 pin, 56 pin, 57 pin, 58 pin, 59 pin, 60 pin, 61 pin and 62 pin.