CN103753380B - Based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission - Google Patents
Based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission Download PDFInfo
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- CN103753380B CN103753380B CN201310692456.4A CN201310692456A CN103753380B CN 103753380 B CN103753380 B CN 103753380B CN 201310692456 A CN201310692456 A CN 201310692456A CN 103753380 B CN103753380 B CN 103753380B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/015—Temperature control
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Abstract
The invention discloses a kind of chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission.Drip irrigation device of the present invention is: based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission, thermocouple temperature sensor is adopted to monitor the temperature of substrate in CMP process, do you adopt the ARM of current main flow? STM32F103 series microprocessor processes, and by NRF905 and gsm wireless module, temperature data is sent to computer and mobile phone and then realization to the display of temperature and regulation and control.The gsm wireless transceiver module that the present invention adopts and microprocessor all sustainable, stablize and uninterruptedly reliably run all the year round for 24 hours, adopt STM32F103 series microprocessor, control accuracy is high, and reaction speed soon, controls more flexible.
Description
Technical field
The present invention relates to chemically mechanical polishing interface temperature detecting and controlling system, be specifically related to a kind of chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission.
Background technology
Semiconductor lighting is 21 century one of high-tech sector most with prospects.LED illumination industry faces unprecedented policy opportunity, the technology upgrading space out of expection, huge market potential, and development prospect is wide.Novel semi-conducting material SiC single crystal substrate is not only widely used in semiconductor lighting, but also in civilian, microelectronics, photoelectron, military issue weapons system, Aero-Space, automobile equipment and the field such as petroleum geology exploration be widely used, there is huge potential user and market.
The serviceability of SiC base device and manufacturing cost are the key factors of industry development such as restriction microelectronics, photoelectron etc., and crystal substrates conventional machining process is mainly continued to use in the processing of SiC single crystal substrate: the grinding of inner circle sawing sheet, free abrasive and machine glazed finish.
Chemically mechanical polishing (CMP) technology is that the utilization chemistry that grows up the nearly more than ten years and mechanical compound action realize the new technology of ultra-smooth not damaged Surface Machining, in the processing of CMP, to inevitably produce a large amount of heats, cause the rising of temperature, these heats mainly come from friction cutting in process and chemical reaction, and the change of temperature has larger impact to chemically mechanical polishing.The SiC single crystal substrate with ultra-smooth not damaged surface has broad application prospects, and temperature is the key factor affecting SiC single crystal substrate quality, therefore, carries out monitor and forecast significant to the processing temperature of substrate.
At present, the back temperature of external minority scholar to pad interface temperature and silicon chip surface to be machined is only had to carry out on-line measurement, the variations in temperature by using infrared video camera to measure pad interface such as Hocheng, infrared video camera temperature-measuring results restricted by surface emissivity, and the material of surface emissivity and testee, surface roughness, degree of oxidation and relevant with or without greasy dirt etc., these Parameters variation are variable, be difficult to quantitatively accurately determine, thus make the accuracy of measurement decline.Simultaneously infrared video camera affects comparatively greatly, so the error of its measured temperature is larger by the characteristic of environment temperature, video camera self emittance, camera lens and other factors.Temperature signal on polishing pad is easy to the interference effect being subject to mechanicalness noise, and simultaneously owing to there is the factors such as polishing fluid, temperature value is also not easy to measure.Limit by thermometric signal location, truly can not reflect the temperature of polishing fluid in Wafer Chemical Mechanical Polishing machining area.
After silicon chip is bonded at the special rubbing head with two kinds of different grooves by sampum etc., the variations in temperature of silicon chip back side diverse location in CMP process is measured by infrared video camera, the method that the accuracy of its result more directly measures polishing pad temperature improves, but still have weak point: infrared video camera temperature measurement accuracy is lower, be nonmetal by throwing silicon chip and have certain thickness, in heat transfer process, this thickness can not be ignored, first raised by throwing surface temperature in polishing process, then heat transmits along by throwing face to by the back side of throwing surface, and the thermograde declined is produced in silicon wafer thickness direction, now surveyed back temperature is than low by throwing face actual temperature.In sum, above method has their own characteristics each, and has carried out many useful research to polishing pad and processing work temperature in silicon chip CMP process.But, these methods directly can not reflect the variations in temperature situation of polishing fluid in actual silicon chip CMP machining area, research is needed directly to reflect the thermometric method of polishing fluid in real time, so that analyze polishing fluid temperature better to the impact of silicon chip CMP processing mechanism.
Therefore, the change of research temperature in whole polishing process and distribution situation, monitor and forecast temperature becomes research polishing mechanism and improves the major issue of working surface integrality.
Summary of the invention
The technical problem that the present invention solves there is provided a kind of chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission, this system adopts thermocouple temperature sensor to monitor the temperature of substrate in CMP process, adopt the ARMSTM32F103 series microprocessor of current main flow to process, and by NRF905 and gsm wireless module, temperature data is sent to computer and mobile phone and then realization to the display of temperature and regulation and control.
Technical scheme of the present invention is: based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission, it is characterized in that comprising transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine, thermocouple temperature sensor, transmitting terminal lithium ion battery, mill, transmitting terminal circuit case, NRF905 transmitting antenna, transmitting terminal processor reset key, transmitting terminal power switch, described polishing machine top is provided with mill, transmitting terminal lithium ion battery is arranged on the inside of polishing machine, the top of mill is provided with transmitting terminal circuit case, seven groups of thermocouple temperature sensors are equipped with respectively along mill radial direction in the top of mill and the bottom of transmitting terminal circuit case, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill wafer lower surface, and insulating cement is scribbled around thermocouple temperature sensor, through circuit board, transmitting terminal control circuit is housed in transmitting terminal circuit case, NRF905 transmitting antenna IC19 is equipped with on the top of transmitting terminal circuit case, the side of transmitting terminal circuit case is provided with transmitting terminal power switch K1 and transmitting terminal processor reset key SAW2 side by side, described receiving terminal comprises receiving terminal circuit shell, receiving terminal power switch, receiving terminal processor reset key, LCDs, EM310 antenna, NRF905 reception antenna, first communication indicator lamp, second communication indicator lamp, function of tonic chord button, raise button, lower button, inquiry button, serial ports, receiving terminal lithium ion battery and attaching plug, wherein EM310 antenna and NRF905 reception antenna are contained in the top of receiving terminal circuit shell side by side, LCDs is equipped with in the front portion of receiving terminal circuit shell, first communication indicator lamp, second communication indicator lamp, receiving terminal processor reset key SAW1, receiving terminal power switch K2, receiving terminal lithium ion battery, function of tonic chord button SAW3, raise button SAW4, lower button SAW5, inquiry button SAW6 and serial ports J1, attaching plug CT is equipped with in the left side of receiving terminal circuit shell, through circuit board, receiving terminal control circuit is housed in receiving terminal circuit shell.
Transmitting terminal control circuit of the present invention comprises temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset IC circuit 17, NRF905 radio transmitter IC19, transmitting terminal crystal oscillating circuit IC18, transmitting terminal microprocessor IC23, transmitting terminal microprocessor IC23 respectively with temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset IC circuit 17, NRF905 radio transmitter IC19 is connected with transmitting terminal crystal oscillating circuit IC18, 6 pin of the one K type thermocouple serial analog-digital converter of described temperature collection circuit IC16, 45 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 46 pin, 6 pin of the 2nd K type thermocouple serial analog-digital converter, 43 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 44 pin, 6 pin of the 3rd K type thermocouple serial analog-digital converter, 41 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 42 pin, 6 pin of the 4th K type thermocouple serial analog-digital converter, 39 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 40 pin, 6 pin of the 5th K type thermocouple serial analog-digital converter, 5 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 38 pin, 6 pin of the 6th K type thermocouple serial analog-digital converter, 3 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 4 pin, 6 pin of the 7th K type thermocouple serial analog-digital converter, 1 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 2 pin, 5 pin of the one K type thermocouple serial analog-digital converter connect the B6 pin of clock driver circuit IC22, 5 pin of the 2nd K type thermocouple serial analog-digital converter connect the B5 pin of clock driver circuit IC22, 5 pin of the 3rd K type thermocouple serial analog-digital converter connect the B4 pin of clock driver circuit IC22, 5 pin of the 4th K type thermocouple serial analog-digital converter connect the B3 pin of clock driver circuit IC22, 5 pin of the 5th K type thermocouple serial analog-digital converter connect the B2 pin of clock driver circuit IC22, 5 pin of the 6th K type thermocouple serial analog-digital converter connect the B1 pin of clock driver circuit IC22, 5 pin of the 7th K type thermocouple serial analog-digital converter connect the B0 pin of clock driver circuit IC22, 52 pin of the A pin sending and receiving sending end microprocessor IC23 of described clock driver circuit IC22, one end of the electric capacity C32 of transmitting terminal microprocessor reset circuit and one end earth of transmitting terminal microprocessor reset key SAW2,16 pin of one end sending and receiving sending end microprocessor IC23 of the other end of electric capacity C32, the other end of transmitting terminal microprocessor reset key SAW2 and resistance R24, the other end sending and receiving sending end 3.3V power supply of resistance R24, one end of the electric capacity C33 of transmitting terminal crystal oscillating circuit and one end earth of electric capacity C34,9 pin of the other end of electric capacity C33 and one end sending and receiving sending end microprocessor IC23 of crystal oscillator TX3,8 pin of the other end of electric capacity C34 and the other end sending and receiving sending end microprocessor IC23 of crystal oscillator TX3, one end of electric capacity C35 and one end earth of electric capacity C36,12 pin of the other end of electric capacity C35 and one end sending and receiving sending end microprocessor IC23 of crystal oscillator TX4,13 pin of the other end of electric capacity C36 and the other end sending and receiving sending end microprocessor IC23 of crystal oscillator TX4, 13 pin of described NRF905 radio transmitter IC19 and 14 pin earths, 1 pin connects power supply, 25 pin, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin, 24 pin of 2 pin, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin difference sending and receiving sending end microprocessor IC23, 1 pin of described memory circuit IC21,2 pin, 3 pin, 4 pin and 7 pin earths, 8 pin of one end of resistance R25, one end of resistance R26 and memory circuit IC21 joining power, 47 pin of the other end of resistance R26 and the 6 pin sending and receiving sending end microprocessor IC23 of memory circuit IC21,48 pin of the other end of resistance R25 and the 5 pin sending and receiving sending end microprocessor IC23 of memory circuit IC21, the 19 pin ground connection of transmitting terminal microprocessor IC23,10 pin, 27 pin, 99 pin, 74 pin and 49 pin earths, 22 pin connect power supply, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin joining power, described receiving terminal control circuit comprises receiving terminal 3.3V power circuit IC1, receiving terminal microprocessor reset IC circuit 14, SIM card holder IC circuit 13, memory circuitry IC2, drive circuit IC8, receiving terminal crystal oscillating circuit IC9, key circuit IC10, receiving and transmitting data signals indicating circuit IC11, SIM card holder connecting circuit IC12, NRF905 wireless receiving circuit IC7, liquid crystal display circuit IC15, EM310 power circuit IC5, EM310 IC circuit 4, serial port circuit IC6 and receiving terminal microprocessor IC3, one end of the electric capacity C1 of described receiving terminal microprocessor reset IC circuit 14 and one end earth of receiving terminal microprocessor reset key SAW1, the other end of electric capacity C1, 16 pin of the other end of receiving terminal microprocessor reset key SAW1 and a termination receiving terminal microprocessor of resistance R1, another termination receiving terminal 3.3V power supply of resistance R1, one end of the resistance R5 of described drive circuit IC8 and the emitter stage earth of triode Q1, one end of resistance R4, one end of resistance R5 are connected with the base stage of triode Q1,68 pin of another termination receiving terminal microprocessor IC3 of resistance R4, the colelctor electrode of triode Q1 connects 41 pin of EM310 IC circuit 4, 1 pin of described memory circuitry IC2,2 pin, 3 pin, 4 pin and 7 pin earths, one end of resistance R2 is connected 48 pin of receiving terminal microprocessor with 5 pin of memory circuitry IC2, one end of resistance R3 and 6 pin of memory circuitry IC2 connect 47 pin of micro-receiving terminal processor, and the other end of resistance R2 and the other end of resistance R3 are connected with 8 pin of receiving terminal microprocessor 3.3V power supply, one end earth of one end of the electric capacity C2 of described receiving terminal crystal oscillating circuit IC9, one end of electric capacity C3, one end of electric capacity C4 and electric capacity C5,9 pin of the other end of electric capacity C2 and a termination receiving terminal microprocessor of crystal oscillator TX1,8 pin of the other end of electric capacity C3 and another termination receiving terminal microprocessor of crystal oscillator TX1,12 pin of the other end of electric capacity C4 and a termination receiving terminal microprocessor of crystal oscillator TX2,13 pin of the other end of electric capacity C5 and another termination receiving terminal microprocessor of crystal oscillator TX2, one end of the electric capacity C6 of described key circuit IC10, one end of function of tonic chord button SAW3, one end of electric capacity C7, raise one end of button SAW4, one end of electric capacity C8, lower one end of button SAW5, one end of electric capacity C9 and one end earth of inquiry button SAW6, the other end of electric capacity C6, 84 pin of the other end of function of tonic chord button SAW3 and a termination receiving terminal microprocessor of resistance R6, the other end of electric capacity C7, raise the other end of button SAW4, 83 pin of the one termination receiving terminal microprocessor of resistance R7, the other end of electric capacity C8, lower 82 pin of the other end of button SAW5 and a termination receiving terminal microprocessor of resistance R8, the other end of electric capacity C9, the other end of inquiry button SAW6, 81 pin of the one termination receiving terminal microprocessor of resistance R9, the other end of resistance R6, the other end of resistance R7, the other end of resistance R8 and the other end of resistance R9 also connect receiving terminal 3.3V power supply, one end of the resistance R12 of receiving and transmitting data signals indicating circuit IC11, the emitter stage of triode Q3, one end of resistance R15 and the emitter stage earth of triode Q2, one end of resistance R11, the other end of resistance R12, the base stage of triode Q3 is connected, 32 pin of another termination EM310 IC circuit 4 of resistance R11, the colelctor electrode of triode Q3 connects the negative pole of receiving and transmitting data signals indicator lamp LED1 through resistance R10, the positive pole of receiving and transmitting data signals indicator lamp LED1 connects 5V power supply, one end of resistance R14, one end of resistance R15, the base stage of triode Q2 is connected, 13 pin of another termination EM310 IC circuit 4 of resistance R14, the colelctor electrode of triode Q2 connects the negative pole of receiving and transmitting data signals indicator lamp LED2 through resistance R13, the positive pole of receiving and transmitting data signals indicator lamp LED2 connects 5V power supply.
Receiving terminal microprocessor IC3 of the present invention comprises microprocessor and standby lithium battery VBAT, wherein 10 pin of microprocessor, 27 pin, 99 pin, 74 pin, 49 pin and 19 pin earths, 22 pin of microprocessor, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin connect receiving terminal 3.3V power supply, the minus earth of standby lithium battery VBAT, the positive pole of standby lithium battery VBAT connects 6 pin of microprocessor.
The minus earth of the lithium ion battery Li-ion1 of transmitting terminal 3.3V power circuit IC20 of the present invention, the positive pole of lithium ion battery Li-ion1 connects 3 pin of ultra low differential pressure flow straightener U1A through K2, the 2 pin ground connection of ultra low differential pressure flow straightener U1A, 1 pin is power output end, described receiving terminal 3.3V power circuit IC1 comprises ultra low differential pressure flow straightener U14 and battery charger U15, 2 pin of ultra low differential pressure flow straightener U14 and the negative pole of lithium ion battery Li-ion2 also connect ground connection, the positive pole of lithium ion battery Li-ion2 connects one end of K2 respectively, 3 pin of battery charger, 5 pin of the linear voltage regulator U13 of EM310 power circuit IC5, 6 pin of the other end of electric capacity C12 and the linear voltage regulator U13 of EM310 power circuit IC5, 7 pin, the minus earth of lithium ion battery Li-ion2, 3 pin of another termination ultra low differential pressure flow straightener U14 of K2, the two ends of 220V attaching plug CT connect 1 pin of battery charger U15 respectively, 2 pin.
Temperature collection circuit IC16 of the present invention comprises seven groups of thermocouple temperature sensors and seven groups of K type thermocouple serial analog-digital converters, first thermocouple temperature sensor, second thermocouple temperature sensor, three thermocouple temperature sensor, 4th thermocouple temperature sensor, 5th thermocouple temperature sensor, 6th thermocouple temperature sensor, the two ends of the 7th thermocouple temperature sensor connect a K type thermocouple serial analog-digital converter respectively, 2nd K type thermocouple serial analog-digital converter, 3rd K type thermocouple serial analog-digital converter, 4th K type thermocouple serial analog-digital converter, 5th K type thermocouple serial analog-digital converter, 6th K type thermocouple serial analog-digital converter, 2 pin of the 7th K type thermocouple serial analog-digital converter, 3 pin, 4 pin of the one K type thermocouple serial analog-digital converter, 4 pin of the 2nd K type thermocouple serial analog-digital converter, 4 pin of the 3rd K type thermocouple serial analog-digital converter, 4 pin of the 4th K type thermocouple serial analog-digital converter, 4 pin of the 5th K type thermocouple serial analog-digital converter, 4 pin of the 6th K type thermocouple serial analog-digital converter, 4 pin of the 7th K type thermocouple serial analog-digital converter, one end of electric capacity C25, one end of electric capacity C26, one end of electric capacity C27, one end of electric capacity C28, one end of electric capacity C29, one end of electric capacity C30 and one end of electric capacity C31 joining power, the other end of electric capacity C25, the other end of electric capacity C26, the other end of electric capacity C27, the other end of electric capacity C28, the other end of electric capacity C29, the other end of electric capacity C30, the other end of electric capacity C31, 1 pin of the one K type thermocouple serial analog-digital converter, 1 pin of the 2nd K type thermocouple serial analog-digital converter, 1 pin of the 3rd K type thermocouple serial analog-digital converter, 1 pin of the 4th K type thermocouple serial analog-digital converter, 1 pin of the 5th K type thermocouple serial analog-digital converter, 1 pin of the 6th K type thermocouple serial analog-digital converter, 1 pin earth of the 7th K type thermocouple serial analog-digital converter.
SIM card holder connecting circuit IC12 of the present invention comprises card holder connector SMFI, the 2 pin ground connection of card holder connector SMFI, 3 pin of card holder connector SMFI connect 5V power supply, one end of 4 pin of card holder connector SMFI, 4 pin of EM310 IC circuit 4, R17 is connected, 5 pin of card holder connector SMFI, 1 pin of EM310 IC circuit 4 are connected with one end of resistance R18, and 6 pin of card holder connector SMFI, 3 pin of EM310 IC circuit 4 are connected with one end of resistance R16; Described SIM card holder IC circuit 13 comprises sim card socket SIM-SOCKET-8, the 2 pin ground connection of sim card socket SIM-SOCKET-8,1 pin of sim card socket SIM-SOCKET-8, a termination 5V power supply of electric capacity C10, the other end ground connection of electric capacity C10,3 pin of sim card socket SIM-SOCKET-8 connect the other end of R17,5 pin of sim card socket SIM-SOCKET-8 connect the other end of R18, the other end of the 6 pin connecting resistance R16 of sim card socket SIM-SOCKET-8.
EM310 IC circuit 4 of the present invention comprises EM310 processor, 6 pin of EM310 processor, 8 pin, 42 pin, 21 pin, 22 pin, 23 pin, 24 pin, 25 pin, one end of electric capacity C20, one end of electric capacity C21, one end of electric capacity C22, one end of electric capacity C23 and one end earth of electric capacity C24, 30 pin of EM310 processor, 29 pin, 28 pin, the other end of 27 pin and the parallel connection of 26 pin and electric capacity C20, the other end of electric capacity C21, the other end of electric capacity C22, the other end of electric capacity C23, the other end of electric capacity C24 is connected, 2 pin and 31 pin of EM310 processor connect 5V power supply, 15 pin of EM310 processor connect 69 pin of receiving terminal microprocessor through resistance R19, 17 pin of EM310 processor connect 68 pin of receiving terminal microprocessor through resistance R20, 40 foot meridian capacitor C11 ground connection of EM310 processor, described EM310 power circuit IC5 comprises linear voltage regulator U13, 6 pin of linear voltage regulator U13, one end of 7 pin and electric capacity C12 also connects the negative pole of lithium ion battery Li-ion2, one end of electric capacity C13, one end of resistance R21, one end of resistance R23, one end of inductance L 2 and one end earth of electric capacity C15, the other end of electric capacity C13 and the other end of resistance R21 1 pin of tie voltage-stablizer, the other end of resistance R23 connects 2 pin of linear voltage regulator and one end of resistance R22, the other end of resistance R22 connects the other end of electric capacity C15 and the negative pole of diode D2 respectively, the positive pole of diode D2 connects the other end of inductance L 2 and one end of electric capacity C14 respectively, the other end of electric capacity C14 connects one end of inductance L 1 and 8 pin of linear voltage regulator respectively, the other end of inductance L 1 connects 5 pin of linear voltage regulator, the other end of electric capacity C12 and the positive pole of lithium ion battery Li-ion2.
Serial port circuit IC6 of the present invention comprises serial port level conversion chip U9, serial ports female socket J1, the 6 foot meridian capacitor C18 ground connection of serial port level conversion chip U9, 5 pin of the one termination serial port level conversion chip of electric capacity C19, 4 pin of another termination serial port level conversion chip of electric capacity C19, 3 pin of the one termination serial port level conversion chip of electric capacity C17, 1 pin of another termination serial port level conversion chip of electric capacity C17, 2 pin of the one termination serial port level conversion chip of electric capacity C16, 16 pin of another termination serial port level conversion chip of electric capacity C16, 13 pin of serial port level conversion chip connect 3 pin of serial ports female socket J1, 14 pin of serial port level conversion chip connect 2 pin of serial ports female socket J1, 12 pin of serial port level conversion chip connect 69 pin of receiving terminal microprocessor, 11 pin of serial port level conversion chip connect 68 pin of receiving terminal microprocessor.
NRF905 wireless receiving circuit IC7 of the present invention comprises wireless receiving module, 1 pin of wireless receiving module connects receiving terminal 3.3V power supply, 13 pin of wireless receiving module and 14 pin earths, 2 pin of wireless receiving module, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin and 12 pin connect 25 pin of receiving terminal microprocessor, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin and 14 pin respectively.
Liquid crystal display circuit IC15 of the present invention comprises LCD MODULE, 1 pin of LCD MODULE and 16 pin earths, 15 pin of LCD MODULE connect 5V power supply, 2 pin of LCD MODULE and one end of PR1 also connect 5V power supply, the other end ground connection of PR1, 3 pin of the slip termination LCD MODULE of PR1, 4 pin of LCD MODULE, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin, 13 pin and 14 pin connect 86 pin of receiving terminal microprocessor respectively, 87 pin, 88 pin, 55 pin, 56 pin, 57 pin, 58 pin, 59 pin, 60 pin, 61 pin and 62 pin.
The major function that present system realizes comprises following aspect: one is Real-time Collection temperature data and adopts wireless mode transmission and monitoring; Two is detect in real time and show the performance diagram of polishing component temperature signal, capable of automatic alarm or be sent to the state that mobile phone realizes remote monitoring machine when temperature reaches.
The present invention has following beneficial effect: 1, this system adopt gsm wireless transceiver module and microprocessor all sustainable, stablize and uninterruptedly reliably run all the year round for 24 hours; 2, gsm module can be connected by RS232 serial ports or USB interface with the communication of computer, to facilitate adjustment control program; 3, the long-range of original creation only wants a mobile phone without distance restriction telecontrol engineering to the initialization of system, and all configurations of this system are all realized by SMS, and breach the restriction of Time and place, system maintenance work is very simple; 4, this system adopts STM32F103 series microprocessor, and control accuracy is high, and reaction speed is fast, controls more flexible.
Accompanying drawing explanation
Fig. 1 is the structural representation of transmitting terminal of the present invention, Fig. 2 is the structural representation of receiving terminal of the present invention, Fig. 3 is the line module figure of transmitting terminal of the present invention, Fig. 4 is the line module figure of receiving terminal of the present invention, Fig. 5 is clock driver circuit figure of the present invention, Fig. 6 is the circuit diagram of Sender side Storage device 24C04 of the present invention, Fig. 7 is transmitting terminal 3.3V power circuit diagram of the present invention, Fig. 8 NRF905 radio transmitter of the present invention figure, Fig. 9 is temperature collection circuit figure of the present invention, Figure 10 is transmitting terminal microprocessor reset circuit diagram of the present invention, Figure 11 is transmitting terminal crystal oscillating circuit figure of the present invention, Figure 12 is transmitting terminal microcontroller circuit figure of the present invention, Figure 13 is receiving terminal 3.3V power circuit diagram of the present invention, Figure 14 is receiving terminal processor reset circuit diagram of the present invention, Figure 15 is receiving terminal memory 24C04 circuit diagram of the present invention, Figure 16 is drive circuit figure of the present invention, Figure 17 is receiving terminal crystal oscillating circuit figure of the present invention, Figure 18 is SIM card holder circuit diagram of the present invention, Figure 19 is receiving terminal microcontroller circuit figure of the present invention, Figure 20 is key circuit figure of the present invention, Figure 21 is that the present invention sends data-signal indicating circuit figure, Figure 22 is SIM card holder connecting circuit figure of the present invention, Figure 23 is NRF905 wireless receiving circuit figure of the present invention, Figure 24 is LCD1602 display circuit figure of the present invention, Figure 25 is EM310 power circuit of the present invention, Figure 26 is EM310 circuit diagram of the present invention, Figure 27 is serial port circuit figure of the present invention.
Drawing illustrates: 1, polishing machine, 2, transmitting terminal lithium ion battery, 3, mill, 4, transmitting terminal circuit case, 5, NRF905 transmitting antenna, 6, transmitting terminal processor reset key, 7, transmitting terminal power switch, 8, liquid crystal display, 9, EM310 antenna, 10, NRF905 reception antenna, 11, first communication indicator lamp, 12, function of tonic chord button, 13, raise button, 14, lower button, 15, inquiry button, 16, serial ports, 17, receiving terminal circuit shell, 18, receiving terminal power switch, 19, receiving terminal processor reset key, 20, second communication indicator lamp.
Detailed description of the invention
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.Based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission, comprise transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine 1, thermocouple temperature sensor, transmitting terminal lithium ion battery 2, mill 3, transmitting terminal circuit case 4, NRF905 transmitting antenna 5, transmitting terminal processor reset key 6, transmitting terminal power switch 7, described polishing machine 1 top is provided with mill 3, transmitting terminal lithium ion battery 2 is arranged on the inside of polishing machine 1, the top of mill 3 is provided with transmitting terminal circuit case 4, seven groups of thermocouple temperature sensors are equipped with respectively along mill 3 radial direction in the top of mill 3 and the bottom of transmitting terminal circuit case 4, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill 3 wafer lower surface, and insulating cement is scribbled around thermocouple temperature sensor, through circuit board, transmitting terminal control circuit is housed in transmitting terminal circuit case 4, NRF905 transmitting antenna 5 is equipped with on the top of transmitting terminal circuit case 4, the side of transmitting terminal circuit case 4 is provided with transmitting terminal power switch 7 and transmitting terminal processor reset key 6 side by side, described receiving terminal comprises receiving terminal circuit shell 17, receiving terminal power switch 18, receiving terminal processor reset key 19, LCDs 8, EM310 antenna 9, NRF905 reception antenna 10, first communication indicator lamp 11, second communication indicator lamp 20, function of tonic chord button 12, raise button 13, lower button 14, inquiry button 15, serial ports 16, receiving terminal lithium ion battery and attaching plug, wherein EM310 antenna 9 and NRF905 reception antenna 10 are contained in the top of receiving terminal circuit shell 17 side by side, LCDs 8 is equipped with in the front portion of receiving terminal circuit shell 17, first communication indicator lamp 11, second communication indicator lamp 20, receiving terminal processor reset key 19, receiving terminal power switch 18, receiving terminal lithium ion battery, function of tonic chord button 12, raise button 13, lower button 14, inquiry button 15 and serial ports 16, attaching plug CT is equipped with in the left side of receiving terminal circuit shell 17, through circuit board, receiving terminal control circuit is housed in receiving terminal circuit shell 17.
The major function that present system realizes comprises following aspect: one is Real-time Collection temperature data and adopts wireless mode transmission and monitoring; Two is detect in real time and show the performance diagram of polishing component temperature signal, capable of automatic alarm or be sent to the state that mobile phone realizes remote monitoring machine when temperature reaches.Connection block diagram between each functional module of chemically mechanical polishing interface temperature detecting and controlling system and circuit theory diagrams are as shown in the figure.
Temperature signal is after K type thermocouple detects, temperature signal is converted to voltage signal, through MAX6675 process, the faint signal that thermocouple temperature sensor is sent here is carried out amplification process, improve the stability of circuit signal, through A/D analog-to-digital conversion, converting the temperature voltage of simulation or current signal (analog quantity) to computer can the digital equivalent amount of identifying processing.Signals collecting part is connected with ARMSTM32F103 series microprocessor, after microprocessor detects temperature signal, by NRF905 wireless-transmission network, the temperature information detected is sent to receiving terminal, receiving terminal is after microprocessor controller process, by electrical level transferring chip MAX232 conversion chip, the relevant information of temperature is sent on computer, with VB6.0 interface for display window, temperature signal with the form displays temperature curve of coordinate, when temperature signal exceedes the higher limit of setting, the phone number that host computer interface can be set from trend by EM310 module sends note, when personnel are not or not board side, as wondered current temperature information, short message enquiry can be sent to EM310 module to obtain the current working condition of board, to carry out remote monitor.
Native system, to the real-time control of temperature signal, is communicated with computer by the serial ports of ARM controller.The display of temperature signal carries out dynamic monitoring in real time on computers by host computer interface.Host computer take VB6.0 as control inerface, temperature now is just recorded and the figure that runs a curve at interval of the time of one, when the temperature value that temperature sets below or above us, system can eject prompt window and send prompt tone, when this process occurs, system can continue to record the curve map of temperature and dynamic data and be saved in database, for user's inquiry and analysis.System also according to the rotating speed of the temperature value automatic regulating machine bed motor of host computer setting or silicon chip contact etc., thus can regulate the temperature of polishing body, makes it normally work within the specific limits.
In order to make system have more security and intelligent, also extend SMS alarm function and remote short messages controlling functions in the design.When operating personnel leave supervisory control comuter, " locking " button can be clicked in host computer interface, carry out message monitoring.When after " locking ", phone number and temperature limit, can not change again, in case faulty operation, causes equipment to mistakenly send text message or send out note wrong.This function can operate by unrestricted choice, when after unblock, automatically will not send SMS.At this moment, the EM310 module be connected with ARMSTM32F103 series microprocessor starts monitoring work.When temperature exceedes setting value, EM310 module will send warning message from trend designated user mobile phone, and user is also by answer short message control routine, realizes the Long-distance Control to equipment.
Set by host computer in native system and by ARMSTM32F103 series microprocessor control gsm module, temperature is monitored.Note Long-distance Control adopts EM310 wireless communication module to realize the monitoring of mobile phone to temperature, EM310 module is technical grade GSM, the GPRS module that Chinese Huawei Company produces, inner embedding ICP/IP protocol, supported data, voice, short message and fax, be operated in EGSM900 and GSM1800 two frequency ranges, power range is direct current 3.4 ~ 4.7V.Average standby current 3.5mA, shutdown leakage current 40uA, SIM voltage support 3V and 1.8V, support the short message of TEXT and PDU form to send and receive, EM310 module has 50 pins.In the design, EM310 module is connected with Mobile phone card circuit, power circuit, boot-strap circuit, power supply indicator circuit, network indicator light circuit, serial communication circuit and other auxiliary elements, EM310 module provides a road serial line interface, supports 8 wire serial bus interfaces or 4 wire serial bus interfaces or 2 line serial line interfaces.EM310GSM module is by UART interface and the extraneous input carrying out serial communication and AT instruction.UART supports programmable data width, programmable data position of rest, very programmable/even parity check or not verification, the baud rate of the baud rate minimum support 300bit/s of this UART mouth the highest support 115.2kbit/s, acquiescence supports the speed of 9600bit/s, supports that baud rate power down is preserved.
At the receiving terminal of temperature signal collection, be provided with LCD1602 display, as the auxiliary display of host computer interface display module, be used for showing the temperature of silicon chip machining area and current time in real time when shut down of computer (host computer closedown).Character-type liquid crystal display module adopts dot lcd display, is called for short LCD, is a kind of display device being specifically designed to ASCII character symbol such as display letter, numeral, symbol etc.This display device adopts soft encapsulation, and controller major part is HD44780, and interface is the SIP16 pin of standard, independent power source, communication data and control three part.1602 chips and backlight circuit operating voltage and microprocessor compatible, can be connected with microprocessor easily.
This system adopt gsm wireless transceiver module and microprocessor all sustainable, stablize and uninterruptedly reliably run all the year round for 24 hours.Gsm module can be connected by RS232 serial ports or USB interface with the communication of computer, to facilitate adjustment control program.The long-range of original creation limits telecontrol engineering without distance, and only want a mobile phone to the initialization of system, all configurations of this system are all realized by SMS, and breach the restriction of Time and place, system maintenance work is very simple.This system adopts STM32F103 series microprocessor, and control accuracy is high, and reaction speed is fast, controls more flexible.
The present invention has carried out analysis and comparison according to the occupation mode of temperature sensor to contact method and eyes with non-contact method two kinds of thermometries, consider the thermometric factors of polishing fluid in restriction Wafer Chemical Mechanical Polishing machining area, the multiple spot original position proposed based on contact method measures the method for polishing fluid temperature in Wafer Chemical Mechanical Polishing machining area in real time, punch on silicon chip with laser, along radial distribution three thermocouple temperature sensors of silicon chip, achieve the kinetic measurement of polishing fluid temperature in Wafer Chemical Mechanical Polishing machining area, and used GPS technology to achieve direct display to temperature characteristics and remote monitoring, the method has the following advantages compared with polishing fluid temperature non-contact measurement method in the Wafer Chemical Mechanical Polishing machining area adopted at present: (1) measuring method in this paper precision is higher, can from establishing network, be convenient to realize multiple spot and concentrate measurement, (2), compared with using transparent organic glass dish with noncontact measuring method, rubbing head pastes silicon chip and carries out the thermometric method of polishing fluid closer to Wafer Chemical Mechanical Polishing process.Secondly, on the basis of Wafer Chemical Mechanical Polishing testing stand, establish polishing fluid temperature measurement system and device in the Wafer Chemical Mechanical Polishing machining area be made up of thermocouple temperature sensor, signal condition amplifier, signal processor, data collecting instrument, GSM network system, mobile phone and computer.This measuring system and device achieve seven thermocouple temperature sensors along rubbing head radial distribution, the change of polishing fluid temperature in silicon chip direct feeling machining area is passed through in the exposed hot junction of thermocouple temperature sensor, measuring-signal is after conditioning amplification, analog-to-digital conversion, Information Collecting & Processing, deliver to microprocessor, through NRF905, EM310 module communication, Real-time Collection and control is carried out by host computer interface, achieve the measurement to polishing fluid variations in temperature in machining area, the error of this measuring system is less than scholar 0.47%.Configuration and calibration are carried out to temperature transmitter in the basis of HART agreement, the thermometric error of polishing fluid in Wafer Chemical Mechanical Polishing machining area has been analyzed, and takes corresponding measure, reduced interference, reduced error.
Claims (10)
1. based on the chemically mechanical polishing interface temperature detecting and controlling system of wireless transmission, it is characterized in that comprising transmitting terminal and receiving terminal, described transmitting terminal comprises polishing machine, thermocouple temperature sensor, transmitting terminal lithium ion battery, mill, transmitting terminal circuit case, NRF905 transmitting antenna, transmitting terminal processor reset key, transmitting terminal power switch, described polishing machine top is provided with mill, transmitting terminal lithium ion battery is arranged on the inside of polishing machine, the top of mill is provided with transmitting terminal circuit case, seven groups of thermocouple temperature sensors are equipped with respectively along mill radial direction in the top of mill and the bottom of transmitting terminal circuit case, the hot junction that thermocouple temperature sensor is exposed is parallel or contour with mill wafer lower surface, and insulating cement is scribbled around thermocouple temperature sensor, through circuit board, transmitting terminal control circuit is housed in transmitting terminal circuit case, NRF905 transmitting antenna is equipped with on the top of transmitting terminal circuit case, the side of transmitting terminal circuit case is provided with transmitting terminal power switch and transmitting terminal processor reset key side by side, described receiving terminal comprises receiving terminal circuit shell, receiving terminal power switch, receiving terminal processor reset key, LCDs, EM310 antenna, NRF905 reception antenna, first communication indicator lamp, second communication indicator lamp, function of tonic chord button, raise button, lower button, inquiry button, serial ports, receiving terminal lithium ion battery and attaching plug, wherein EM310 antenna and NRF905 reception antenna are contained in the top of receiving terminal circuit shell side by side, LCDs is equipped with in the front portion of receiving terminal circuit shell, first communication indicator lamp, second communication indicator lamp, receiving terminal processor reset key, receiving terminal power switch, receiving terminal lithium ion battery, function of tonic chord button, raise button, lower button, inquiry button and serial ports, attaching plug is equipped with in the left side of receiving terminal circuit shell, through circuit board, receiving terminal control circuit is housed in receiving terminal circuit shell.
2. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 1, it is characterized in that: described transmitting terminal control circuit comprises temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset IC circuit 17, NRF905 radio transmitter IC19, transmitting terminal crystal oscillating circuit IC18, transmitting terminal microprocessor IC23, transmitting terminal microprocessor IC23 respectively with temperature collection circuit IC16, clock driver circuit IC22, memory circuit IC21, transmitting terminal 3.3V power circuit IC20, transmitting terminal microprocessor reset IC circuit 17, NRF905 radio transmitter IC19 is connected with transmitting terminal crystal oscillating circuit IC18, 6 pin of the one K type thermocouple serial analog-digital converter of described temperature collection circuit IC16, 45 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 46 pin, 6 pin of the 2nd K type thermocouple serial analog-digital converter, 43 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 44 pin, 6 pin of the 3rd K type thermocouple serial analog-digital converter, 41 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 42 pin, 6 pin of the 4th K type thermocouple serial analog-digital converter, 39 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 40 pin, 6 pin of the 5th K type thermocouple serial analog-digital converter, 5 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 38 pin, 6 pin of the 6th K type thermocouple serial analog-digital converter, 3 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 4 pin, 6 pin of the 7th K type thermocouple serial analog-digital converter, 1 pin of 7 pin difference sending and receiving sending end microprocessor IC23, 2 pin, 5 pin of the one K type thermocouple serial analog-digital converter connect the B6 pin of clock driver circuit IC22, 5 pin of the 2nd K type thermocouple serial analog-digital converter connect the B5 pin of clock driver circuit IC22, 5 pin of the 3rd K type thermocouple serial analog-digital converter connect the B4 pin of clock driver circuit IC22, 5 pin of the 4th K type thermocouple serial analog-digital converter connect the B3 pin of clock driver circuit IC22, 5 pin of the 5th K type thermocouple serial analog-digital converter connect the B2 pin of clock driver circuit IC22, 5 pin of the 6th K type thermocouple serial analog-digital converter connect the B1 pin of clock driver circuit IC22, 5 pin of the 7th K type thermocouple serial analog-digital converter connect the B0 pin of clock driver circuit IC22, 52 pin of the A pin sending and receiving sending end microprocessor IC23 of described clock driver circuit IC22, one end of the electric capacity C32 of described transmitting terminal microprocessor reset IC circuit 17 and one end earth of transmitting terminal microprocessor reset key SAW2,16 pin of one end sending and receiving sending end microprocessor IC23 of the other end of electric capacity C32, the other end of transmitting terminal microprocessor reset key SAW2 and resistance R24, the other end sending and receiving sending end 3.3V power supply of resistance R24, one end of the electric capacity C33 of transmitting terminal crystal oscillating circuit and one end earth of electric capacity C34,9 pin of the other end of electric capacity C33 and one end sending and receiving sending end microprocessor IC23 of crystal oscillator TX3,8 pin of the other end of electric capacity C34 and the other end sending and receiving sending end microprocessor IC23 of crystal oscillator TX3, one end of electric capacity C35 and one end earth of electric capacity C36,12 pin of the other end of electric capacity C35 and one end sending and receiving sending end microprocessor IC23 of crystal oscillator TX4,13 pin of the other end of electric capacity C36 and the other end sending and receiving sending end microprocessor IC23 of crystal oscillator TX4, 13 pin of described NRF905 radio transmitter IC19 and 14 pin earths, 1 pin connects power supply, 25 pin, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin, 24 pin of 2 pin, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin difference sending and receiving sending end microprocessor IC23, 1 pin of described memory circuit IC21,2 pin, 3 pin, 4 pin and 7 pin earths, 8 pin of one end of resistance R25, one end of resistance R26 and memory circuit IC21 joining power, 47 pin of the other end of resistance R26 and the 6 pin sending and receiving sending end microprocessor IC23 of memory circuit IC21,48 pin of the other end of resistance R25 and the 5 pin sending and receiving sending end microprocessor IC23 of memory circuit IC21, the 19 pin ground connection of transmitting terminal microprocessor IC23,10 pin, 27 pin, 99 pin, 74 pin and 49 pin earths, 22 pin connect power supply, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin joining power, described receiving terminal control circuit comprises receiving terminal 3.3V power circuit IC1, receiving terminal microprocessor reset IC circuit 14, SIM card holder IC circuit 13, memory circuitry IC2, drive circuit IC8, receiving terminal crystal oscillating circuit IC9, key circuit IC10, receiving and transmitting data signals indicating circuit IC11, SIM card holder connecting circuit IC12, NRF905 wireless receiving circuit IC7, liquid crystal display circuit IC15, EM310 power circuit IC5, EM310 IC circuit 4, serial port circuit IC6 and receiving terminal microprocessor IC3, one end of the electric capacity C1 of described receiving terminal microprocessor reset IC circuit 14 and one end earth of receiving terminal microprocessor reset key SAW1, the other end of electric capacity C1, 16 pin of the other end of receiving terminal microprocessor reset key SAW1 and a termination receiving terminal microprocessor of resistance R1, another termination receiving terminal 3.3V power supply of resistance R1, one end of the resistance R5 of described drive circuit IC8 and the emitter stage earth of triode Q1, one end of resistance R4, one end of resistance R5 are connected with the base stage of triode Q1,68 pin of another termination receiving terminal microprocessor IC3 of resistance R4, the colelctor electrode of triode Q1 connects 41 pin of EM310 IC circuit 4, 1 pin of described memory circuitry IC2,2 pin, 3 pin, 4 pin and 7 pin earths, one end of resistance R2 is connected 48 pin of receiving terminal microprocessor with 5 pin of memory circuitry IC2, one end of resistance R3 and 6 pin of memory circuitry IC2 connect 47 pin of micro-receiving terminal processor, and the other end of resistance R2 and the other end of resistance R3 are connected with 8 pin of receiving terminal microprocessor 3.3V power supply, one end earth of one end of the electric capacity C2 of described receiving terminal crystal oscillating circuit IC9, one end of electric capacity C3, one end of electric capacity C4 and electric capacity C5,9 pin of the other end of electric capacity C2 and a termination receiving terminal microprocessor of crystal oscillator TX1,8 pin of the other end of electric capacity C3 and another termination receiving terminal microprocessor of crystal oscillator TX1,12 pin of the other end of electric capacity C4 and a termination receiving terminal microprocessor of crystal oscillator TX2,13 pin of the other end of electric capacity C5 and another termination receiving terminal microprocessor of crystal oscillator TX2, one end of the electric capacity C6 of described key circuit IC10, one end of function of tonic chord button SAW3, one end of electric capacity C7, raise one end of button SAW4, one end of electric capacity C8, lower one end of button SAW5, one end of electric capacity C9 and one end earth of inquiry button SAW6, the other end of electric capacity C6, 84 pin of the other end of function of tonic chord button SAW3 and a termination receiving terminal microprocessor of resistance R6, the other end of electric capacity C7, raise the other end of button SAW4, 83 pin of the one termination receiving terminal microprocessor of resistance R7, the other end of electric capacity C8, lower 82 pin of the other end of button SAW5 and a termination receiving terminal microprocessor of resistance R8, the other end of electric capacity C9, the other end of inquiry button SAW6, 81 pin of the one termination receiving terminal microprocessor of resistance R9, the other end of resistance R6, the other end of resistance R7, the other end of resistance R8 and the other end of resistance R9 also connect receiving terminal 3.3V power supply, one end of the resistance R12 of receiving and transmitting data signals indicating circuit IC11, the emitter stage of triode Q3, one end of resistance R15 and the emitter stage earth of triode Q2, one end of resistance R11, the other end of resistance R12, the base stage of triode Q3 is connected, 32 pin of another termination EM310 IC circuit 4 of resistance R11, the colelctor electrode of triode Q3 connects the negative pole of receiving and transmitting data signals indicator lamp LED1 through resistance R10, the positive pole of receiving and transmitting data signals indicator lamp LED1 connects 5V power supply, one end of resistance R14, one end of resistance R15, the base stage of triode Q2 is connected, 13 pin of another termination EM310 IC circuit 4 of resistance R14, the colelctor electrode of triode Q2 connects the negative pole of receiving and transmitting data signals indicator lamp LED2 through resistance R13, the positive pole of receiving and transmitting data signals indicator lamp LED2 connects 5V power supply.
3. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described receiving terminal microprocessor IC3 comprises microprocessor and standby lithium battery VBAT, wherein 10 pin of microprocessor, 27 pin, 99 pin, 74 pin, 49 pin and 19 pin earths, 22 pin of microprocessor, 11 pin, 28 pin, 100 pin, 75 pin and 50 pin connect receiving terminal 3.3V power supply, the minus earth of standby lithium battery VBAT, the positive pole of standby lithium battery VBAT connects 6 pin of microprocessor.
4. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: the minus earth of the lithium ion battery Li-ion1 of described transmitting terminal 3.3V power circuit IC20, the positive pole of lithium ion battery Li-ion1 connects 3 pin of ultra low differential pressure flow straightener U1A through K2, the 2 pin ground connection of ultra low differential pressure flow straightener U1A, 1 pin is power output end, described receiving terminal 3.3V power circuit IC1 comprises ultra low differential pressure flow straightener U14 and battery charger U15, 2 pin of ultra low differential pressure flow straightener U14 and the negative pole of lithium ion battery Li-ion2 also connect ground connection, the positive pole of lithium ion battery Li-ion2 connects one end of K2 respectively, 3 pin of battery charger, 5 pin of the linear voltage regulator U13 of EM310 power circuit IC5, 6 pin of the other end of electric capacity C12 and the linear voltage regulator U13 of EM310 power circuit IC5, 7 pin, the minus earth of lithium ion battery Li-ion2, 3 pin of another termination ultra low differential pressure flow straightener U14 of K2, the two ends of 220V attaching plug CT connect 1 pin of battery charger U15 respectively, 2 pin.
5. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described temperature collection circuit IC16 comprises seven groups of thermocouple temperature sensors and seven groups of K type thermocouple serial analog-digital converters, first thermocouple temperature sensor, second thermocouple temperature sensor, three thermocouple temperature sensor, 4th thermocouple temperature sensor, 5th thermocouple temperature sensor, 6th thermocouple temperature sensor, the two ends of the 7th thermocouple temperature sensor connect a K type thermocouple serial analog-digital converter respectively, 2nd K type thermocouple serial analog-digital converter, 3rd K type thermocouple serial analog-digital converter, 4th K type thermocouple serial analog-digital converter, 5th K type thermocouple serial analog-digital converter, 6th K type thermocouple serial analog-digital converter, 2 pin of the 7th K type thermocouple serial analog-digital converter, 3 pin, 4 pin of the one K type thermocouple serial analog-digital converter, 4 pin of the 2nd K type thermocouple serial analog-digital converter, 4 pin of the 3rd K type thermocouple serial analog-digital converter, 4 pin of the 4th K type thermocouple serial analog-digital converter, 4 pin of the 5th K type thermocouple serial analog-digital converter, 4 pin of the 6th K type thermocouple serial analog-digital converter, 4 pin of the 7th K type thermocouple serial analog-digital converter, one end of electric capacity C25, one end of electric capacity C26, one end of electric capacity C27, one end of electric capacity C28, one end of electric capacity C29, one end of electric capacity C30 and one end of electric capacity C31 joining power, the other end of electric capacity C25, the other end of electric capacity C26, the other end of electric capacity C27, the other end of electric capacity C28, the other end of electric capacity C29, the other end of electric capacity C30, the other end of electric capacity C31, 1 pin of the one K type thermocouple serial analog-digital converter, 1 pin of the 2nd K type thermocouple serial analog-digital converter, 1 pin of the 3rd K type thermocouple serial analog-digital converter, 1 pin of the 4th K type thermocouple serial analog-digital converter, 1 pin of the 5th K type thermocouple serial analog-digital converter, 1 pin of the 6th K type thermocouple serial analog-digital converter, 1 pin earth of the 7th K type thermocouple serial analog-digital converter.
6. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described SIM card holder connecting circuit IC12 comprises card holder connector SMFI, the 2 pin ground connection of card holder connector SMFI, 3 pin of card holder connector SMFI connect 5V power supply, 4 pin of card holder connector SMFI, 4 pin of EM310 IC circuit 4, one end of R17 is connected, 5 pin of card holder connector SMFI, 1 pin of EM310 IC circuit 4 is connected with one end of resistance R18, 6 pin of card holder connector SMFI, 3 pin of EM310 IC circuit 4 are connected with one end of resistance R16, described SIM card holder IC circuit 13 comprises sim card socket SIM-SOCKET-8, the 2 pin ground connection of sim card socket SIM-SOCKET-8,1 pin of sim card socket SIM-SOCKET-8, a termination 5V power supply of electric capacity C10, the other end ground connection of electric capacity C10,3 pin of sim card socket SIM-SOCKET-8 connect the other end of R17,5 pin of sim card socket SIM-SOCKET-8 connect the other end of R18, the other end of the 6 pin connecting resistance R16 of sim card socket SIM-SOCKET-8.
7. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described EM310 IC circuit 4 comprises EM310 processor, 6 pin of EM310 processor, 8 pin, 42 pin, 21 pin, 22 pin, 23 pin, 24 pin, 25 pin, one end of electric capacity C20, one end of electric capacity C21, one end of electric capacity C22, one end of electric capacity C23 and one end earth of electric capacity C24, 30 pin of EM310 processor, 29 pin, 28 pin, the other end of 27 pin and the parallel connection of 26 pin and electric capacity C20, the other end of electric capacity C21, the other end of electric capacity C22, the other end of electric capacity C23, the other end of electric capacity C24 is connected, 2 pin and 31 pin of EM310 processor connect 5V power supply, 15 pin of EM310 processor connect 69 pin of receiving terminal microprocessor through resistance R19, 17 pin of EM310 processor connect 68 pin of receiving terminal microprocessor through resistance R20, 40 foot meridian capacitor C11 ground connection of EM310 processor, described EM310 power circuit IC5 comprises linear voltage regulator U13, 6 pin of linear voltage regulator U13, one end of 7 pin and electric capacity C12 also connects the negative pole of lithium ion battery Li-ion2, one end of electric capacity C13, one end of resistance R21, one end of resistance R23, one end of inductance L 2 and one end earth of electric capacity C15, the other end of electric capacity C13 and the other end of resistance R21 1 pin of tie voltage-stablizer, the other end of resistance R23 connects 2 pin of linear voltage regulator and one end of resistance R22, the other end of resistance R22 connects the other end of electric capacity C15 and the negative pole of diode D2 respectively, the positive pole of diode D2 connects the other end of inductance L 2 and one end of electric capacity C14 respectively, the other end of electric capacity C14 connects one end of inductance L 1 and 8 pin of linear voltage regulator respectively, the other end of inductance L 1 connects 5 pin of linear voltage regulator, the other end of electric capacity C12 and the positive pole of lithium ion battery Li-ion2.
8. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described serial port circuit IC6 comprises serial port level conversion chip U9, serial ports female socket J1, the 6 foot meridian capacitor C18 ground connection of serial port level conversion chip U9, 5 pin of the one termination serial port level conversion chip of electric capacity C19, 4 pin of another termination serial port level conversion chip of electric capacity C19, 3 pin of the one termination serial port level conversion chip of electric capacity C17, 1 pin of another termination serial port level conversion chip of electric capacity C17, 2 pin of the one termination serial port level conversion chip of electric capacity C16, 16 pin of another termination serial port level conversion chip of electric capacity C16, 13 pin of serial port level conversion chip connect 3 pin of serial ports female socket J1, 14 pin of serial port level conversion chip connect 2 pin of serial ports female socket J1, 12 pin of serial port level conversion chip connect 69 pin of receiving terminal microprocessor, 11 pin of serial port level conversion chip connect 68 pin of receiving terminal microprocessor.
9. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described NRF905 wireless receiving circuit IC7 comprises wireless receiving module, 1 pin of wireless receiving module connects receiving terminal 3.3V power supply, 13 pin of wireless receiving module and 14 pin earths, 2 pin of wireless receiving module, 3 pin, 4 pin, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin and 12 pin connect 25 pin of receiving terminal microprocessor respectively, 26 pin, 23 pin, 29 pin, 30 pin, 71 pin, 32 pin, 72 pin, 76 pin, 31 pin and 14 pin.
10. the chemically mechanical polishing interface temperature detecting and controlling system based on wireless transmission according to claim 2, it is characterized in that: described liquid crystal display circuit IC15 comprises LCD MODULE, 1 pin of LCD MODULE and 16 pin earths, 15 pin of LCD MODULE connect 5V power supply, 2 pin of LCD MODULE and one end of PR1 also connect 5V power supply, the other end ground connection of PR1, 3 pin of the slip termination LCD MODULE of PR1, 4 pin of LCD MODULE, 5 pin, 6 pin, 7 pin, 8 pin, 9 pin, 10 pin, 11 pin, 12 pin, 13 pin and 14 pin connect 86 pin of receiving terminal microprocessor respectively, 87 pin, 88 pin, 55 pin, 56 pin, 57 pin, 58 pin, 59 pin, 60 pin, 61 pin and 62 pin.
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| JP5547472B2 (en) * | 2009-12-28 | 2014-07-16 | 株式会社荏原製作所 | Substrate polishing apparatus, substrate polishing method, and polishing pad surface temperature control apparatus for substrate polishing apparatus |
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| CN102672594A (en) * | 2012-05-04 | 2012-09-19 | 上海华力微电子有限公司 | Device for precisely controlling temperature of CMP (Chemical Mechanical Polishing) grinding disc |
| CN103273413A (en) * | 2013-04-09 | 2013-09-04 | 上海华力微电子有限公司 | Chemical-mechanical polishing device |
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