CN203495965U - Micro-holder for release based on piezoelectric torsion high-frequency vibration - Google Patents
Micro-holder for release based on piezoelectric torsion high-frequency vibration Download PDFInfo
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- CN203495965U CN203495965U CN201320589370.4U CN201320589370U CN203495965U CN 203495965 U CN203495965 U CN 203495965U CN 201320589370 U CN201320589370 U CN 201320589370U CN 203495965 U CN203495965 U CN 203495965U
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- 239000000835 fiber Substances 0.000 claims abstract description 7
- 239000011159 matrix material Substances 0.000 claims description 84
- 238000010008 shearing Methods 0.000 claims description 81
- 239000004744 fabric Substances 0.000 claims description 71
- 239000011888 foil Substances 0.000 claims description 44
- 238000009434 installation Methods 0.000 claims description 10
- 238000005086 pumping Methods 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
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Abstract
A micro-holder for release based on piezoelectric torsion high-frequency vibration comprises a support, piezoelectric cutting actuators, piezoelectric torsion vibration exciters, clamping arms, a macro-moving platform and a micro-moving platform. The piezoelectric cutting actuators include cutting actuator base bodies arranged on the support and piezoelectric fiber cutting slices fixed to the cutting actuator base bodies. The piezoelectric torsion vibration exciters include torsion vibration exciter base bodies disposed on the cutting actuator base bodies and piezoelectric fiber torsion slices evenly distributed on the side surface of each torsion vibration exciter base body. The clamping arms are fixed to the torsion vibration exciter base bodies and clamp a micro-operation object. When the two cutting actuator base bodies move toward each other, the micro-holder is folded. The piezoelectric fiber torsion slices are evenly distributed on the side surface of each torsion vibration exciter base body which vibrates in a torsional manner when excitation signals are applied to the piezoelectric fiber torsion slices. The micro-holder has the advantages of ensuring successful release of the micro-operation object.
Description
Technical field
The utility model relates to Robotics and field of micro electromechanical technology, particularly a kind of micro clamping device.
Technical background
MEMS (MEMS) refers to can batch making, integrate micro mechanism, microsensor, miniature actuator, signal processing and control circuit and interface, communicate by letter and the micro-system of power supply etc.MEMS not only can reduce system cost, but also can complete the task that many traditional large scale Mechatronic Systems cannot complete, as microscopic objects flexible operating.Micro clamping device is the key components of MEMS, is the basic tool of linking up the Macrocosm and microcosm world, in the research of MEMS and the development of microminiaturized product, plays an important role.
Micro clamping device is applied to the fields such as micro-assembling, and micro clamping device all has a wide range of applications in precision instrument, biomedicine, Aero-Space and military field.Micro-assembly robot has a wide range of applications in fields such as micro-Assembly of the parts, MEMS, precision optics.And micro clamping device is as the end effector of micro-assembly robot, directly determine the working effect of robot.
Chinese patent application CN201210038297.1, disclosed a kind of piezoelectric driving micro gripper, it comprises Piezoelectric Driving part and micro-retained part, Piezoelectric Driving partly comprises driving element, ellipse beam enlarger, lever amplifying mechanism and articulated link mechanism, ellipse beam enlarger comprises the first Curved beam and the second Curved beam arranging symmetrically; Lever amplifying mechanism comprises the first cantilever beam and the second cantilever beam; Driving element motion drives the distortion of ellipse enlarger, the distortion of ellipse beam enlarger drives lever amplifying mechanism motion, detect retained part and comprise two clamping limbs that are oppositely arranged, on each clamping limb, be integrated with two piezoresistance sensors, four piezoresistance sensors form a full-bridge detection architecture.
The driving element of this piezoelectric driving micro gripper can only produce stretching motion under the effect of voltage, when driving element is upheld, the first Curved beam and second Curved beam of ellipse beam inwardly close up, thereby drive the cantilever beam of lever amplifying mechanism inwardly to close up, two clamping limbs clamp mutually, thereby realize the clamping of microoperation object.When driving element shrinks, two Curved beams of ellipse beam outwards arch upward, and drive the cantilever beam of lever amplifying mechanism outwards to encircle, two clamping limb separation, thus discharge microoperation object.The shortcoming of this piezoelectric driving micro gripper is: when microoperation, due to scale effect and skin effect, the adhesion strengths such as Van der Waals force, capillary force, electrostatic force play a major role, be easy to occur that microoperation object adheres to the situation on micro clamping device, during release, warp by two clamping limbs separately, microoperation object is easy to cannot depart from clamping limb because of adhesion strength, causes release failure.
Utility model content
In order to overcome existing piezoelectric driving micro gripper, exist the easy generation adhesion when discharging of microoperation object to cause the shortcoming of release failure, the utility model provides a kind of can guarantee that microoperation object discharges the successfully micro clamping device based on the release of piezoelectricity torsion dither.
Based on piezoelectricity, reverse the micro clamping device that dither discharges, comprise support, piezoelectricity is sheared actuator, piezoelectricity reverse vibration generator, clamping limb, macro-moving stage and micromotion platform, support is arranged on micromotion platform, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix being installed on support and be fixed on the piezoelectric fabric shearing foil of shearing on actuator matrix, piezoelectricity reverse vibration generator comprises that the piezoelectric fabric being fixedly installed on the side of shearing the reverse vibration generator matrix on actuator matrix and being uniformly distributed in reverse vibration generator matrix reverses thin slice, clamping limb is fixed on reverse vibration generator matrix and clamps microoperation object,
During two shearing actuator matrix move toward one another, micro clamping device closes up; The side of reverse vibration generator matrix is distributed with equably piezoelectric fabric and reverses thin slice, and when piezoelectric fabric torsion thin slice is applied to pumping signal, reverse vibration generator matrix produces twisting vibration.Reverse vibration generator matrix reverses around its axis.
Further, the inner side of shearing actuator matrix near another of shearing actuator matrix is fixed with inner side piezoelectric fabric shearing foil, outside is fixed with outside piezoelectric fabric shearing foil, inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil pass into respectively voltage, inner side piezoelectric fabric shearing foil shrinks, and outside piezoelectric fabric shearing foil stretches simultaneously.
Further, support comprise the fixed part fixing with micromotion platform and with shearing actuator matrix fixing installation portion, installation portion is V-shaped.Shear actuator matrix, reverse vibration generator matrix and clamping limb linearly, the free end of clamping limb clamping microoperation object.
Further, shearing actuator matrix takes the shape of the letter U, shearing the blind end of actuator matrix fixes by screw and support, openend is fixed by screw and reverse vibration generator matrix, and inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil are separately fixed on two side arms shearing actuator matrix.
Further, reverse vibration generator matrix comprises and installs that compressing tablet fiber reverses the torsional part of thin slice and the fixing connecting portion with shearing actuator matrix; Torsional part is regular prism, and each side of torsional part is fixed with piezoelectric fabric and reverses thin slice; Connecting portion has and the Plane Installation face of shearing the side arm laminating of actuator matrix.
Further, reverse vibration generator matrix is fixedly connected with by screw thread with clamping limb.
Further, the quantity of piezoelectric fabric torsion thin slice is even number.
Further, macro-moving stage moves with millimeter/Centimeter Level, and micromotion platform moves with micrometer/nanometer level.
The utility model in use, first make macro-moving stage and micromotion platform move to the initial position of microoperation object, again inner side piezoelectric fabric shearing foil and the outside piezoelectric fabric shearing foil sheared on actuator matrix are applied to contrary voltage, inner side piezoelectric fabric shearing foil shrinks, outside piezoelectric fabric shearing foil stretches, and two clamping limbs close up clamps microoperation object.Then make macro-moving stage and micromotion platform continue motion, take micro clamping device and microoperation object to destination locations, discharge the voltage of piezoelectric fabric shearing foil, piezoelectric fabric is sheared actuator matrix and is resetted, and two clamping limbs separately.Simultaneously, piezoelectric fabric is reversed to thin slice and apply pumping signal, piezoelectric fabric reverses thin slice and drives the twisting vibration of reverse vibration generator matrix generation high frequency, and then makes the twisting vibration of two clamping limb generation high frequencies, microoperation object is shaken from micro clamping device, complete the release to micro clamping device.
The beneficial effects of the utility model are:
1. utilize piezoelectric fabric to reverse thin slice drive reverse vibration generator matrix and produce high frequency twisting vibration, the centrifugal force that this dither produces overcomes the adhesion strength between microoperation object and clamping limb, guarantees that microoperation object is by success, release accurately.
2. while clamping, utilize the flexible drive of piezoelectric fabric shearing foil to shear actuator matrix move toward one another, thereby two clamping limbs are closed up, clamp microoperation object; Release voltage during release, piezoelectric fabric shearing foil resets, two clamping limb separation.The volume of piezoelectric fabric shearing foil is little, and thickness is little, is conducive to microminaturization of the present utility model.
By with being used in conjunction with of macro-moving stage and micromotion platform, can complete the operations such as clamping, carrying and release, range of application is wider.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present utility model.
Fig. 2 is the schematic diagram of drive mechanism.
Fig. 3 is the schematic diagram of support.
Fig. 4 is the schematic diagram of shearing actuator matrix, reverse vibration generator matrix and clamping limb.
Fig. 5 shears the schematic diagram of actuator matrix.
Fig. 6 is the schematic diagram of reverse vibration generator matrix.
Fig. 7 is the schematic diagram of clamping limb.
Fig. 8 is the schematic diagram of the utility model duty.
The specific embodiment
Based on piezoelectricity, reverse the micro clamping device that dither discharges, comprise support 1, piezoelectricity is sheared actuator, piezoelectricity reverse vibration generator, clamping limb 5, macro-moving stage 8 and micromotion platform 7, support 1 is arranged on micromotion platform 7, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix 3 being installed on support 1 and be fixed on the piezoelectric fabric shearing foil of shearing on actuator matrix 3, piezoelectricity reverse vibration generator comprises that the piezoelectric fabric being fixedly installed on the reverse vibration generator matrix 6 of shearing on actuator matrix 3 and the side that is uniformly distributed in reverse vibration generator matrix 6 reverses thin slice 4, clamping limb 5 is fixed on reverse vibration generator matrix 6 and clamps microoperation object 9,
During two shearing actuator matrix 3 move toward one another, micro clamping device closes up; The side of reverse vibration generator matrix 6 is distributed with equably piezoelectric fabric and reverses thin slice 4, and when piezoelectric fabric torsion thin slice 4 is applied to pumping signal, reverse vibration generator matrix 6 produces twisting vibrations.Reverse vibration generator matrix 6 reverses around its axis.
As shown in Figure 5, the inner side of shearing actuator matrix 3 near another of shearing actuator matrix 3 is fixed with inner side piezoelectric fabric shearing foil 21, outside is fixed with outside piezoelectric fabric shearing foil 22, inner side piezoelectric fabric shearing foil 21 and outside piezoelectric fabric shearing foil 22 pass into respectively voltage, inner side piezoelectric fabric shearing foil 21 shrinks, and outside piezoelectric fabric shearing foil 22 stretches simultaneously.
As shown in Figure 3, support 1 comprise the fixed part 11 fixing with micromotion platform 7 and with shearing actuator matrix 3 fixing installation portion 12, installation portion 12 is V-shaped.Between installation portion 12 and shearing actuator matrix 3, there are 4 hold-down screws.As shown in Figure 4, shear actuator matrix 3, reverse vibration generator matrix 6 and clamping limb 5 linearly, the free end of clamping limb 5 clamping microoperation object 9.
As shown in Figure 5, shear actuator matrix 3 and take the shape of the letter U, the blind end of shearing actuator matrix 3 is fixing by screw and support 1, and openend is fixing by screw and reverse vibration generator matrix 6; The quantity of screw is not limited to 4 that in Fig. 4-6, exemplify.Inner side piezoelectric fabric shearing foil 21 and outside piezoelectric fabric shearing foil 22 are separately fixed on two side arms shearing actuator matrix 3.Two piezoelectric fabric shearing foils are adhesively fixed in shearing actuator matrix 3.
As shown in Figure 6, reverse vibration generator matrix 6 comprises and installs that compressing tablet fiber reverses the torsional part 61 of thin slice and the fixing connecting portion 62 with shearing actuator matrix 3; Torsional part 61 is regular prism, and each side of torsional part 61 is fixed with piezoelectric fabric and reverses thin slice 4; Connecting portion 62 has and the Plane Installation face 63 of shearing the side arm laminating of actuator matrix 3.
Reverse vibration generator matrix 6 is fixedly connected with by screw thread with clamping limb 5.
The quantity that piezoelectric fabric reverses thin slice 4 is even number.Each piezoelectric fabric reverses thin slice 4 must a piezoelectric fabric torsion thin slice 4 for symmetry with it, and symmetrical piezoelectric fabric reverses thin slice 4 makes reverse vibration generator matrix 6 stressed evenly.The quantity that piezoelectric fabric reverses thin slice 4 is more, and the torsion effect of reverse vibration generator matrix 6 is better.
Macro-moving stage 8 moves with millimeter/Centimeter Level, and micromotion platform 7 moves with micrometer/nanometer level.Macro-moving stage 8 and micromotion platform 7 promote by common pushing mechanism, as leading screw.
The utility model in use, first make macro-moving stage 8 and micromotion platform 7 move to the initial position of microoperation object 9, again inner side piezoelectric fabric shearing foil 21 and the outside piezoelectric fabric shearing foil 22 sheared on actuator matrix 3 are applied to contrary voltage, inner side piezoelectric fabric shearing foil 21 shrinks, outside piezoelectric fabric shearing foil 22 stretches, two clamping limbs 5 close up clamps microoperation object 9, as shown in Figure 8.Then make macro-moving stage 8 and micromotion platform 7 continue motion, take micro clamping device and microoperation object 9 to destination locations, discharge the voltage of piezoelectric fabric shearing foil, piezoelectric fabric is sheared actuator matrix 3 and is resetted, and two clamping limbs 5 separately.Simultaneously, piezoelectric fabric is reversed to thin slice 4 and apply pumping signal, piezoelectric fabric reverses thin slice 4 and drives reverse vibration generator matrix 6 that high frequency twisting vibration occurs, and then make two clamping limbs 5 that high frequency twisting vibration occur, microoperation object 9 is shaken and fallen workbench 10 from micro clamping device, complete the release to micro clamping device.
The beneficial effects of the utility model are:
1. utilize piezoelectric fabric to reverse thin slice drive reverse vibration generator matrix and produce high frequency twisting vibration, the centrifugal force that this dither produces overcomes the adhesion strength between microoperation object and clamping limb, guarantees that microoperation object is by success, release accurately.
2. while clamping, utilize the flexible drive of piezoelectric fabric shearing foil to shear actuator matrix move toward one another, thereby two clamping limbs are closed up, clamp microoperation object; Release voltage during release, piezoelectric fabric shearing foil resets, two clamping limb separation.The volume of piezoelectric fabric shearing foil is little, and thickness is little, is conducive to microminaturization of the present utility model.
By with being used in conjunction with of macro-moving stage and micromotion platform, can complete the operations such as clamping, carrying and release, range of application is wider.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Content described in this description embodiment is only enumerating the way of realization of utility model design; protection domain of the present utility model should not be regarded as only limiting to the concrete form that embodiment states, protection domain of the present utility model also and the equivalent technologies means that can expect according to the utility model design in those skilled in the art.
Claims (8)
1. based on piezoelectricity, reverse the micro clamping device that dither discharges, it is characterized in that: comprise support, piezoelectricity is sheared actuator, piezoelectricity reverse vibration generator, clamping limb, macro-moving stage and micromotion platform, support is arranged on micromotion platform, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix being installed on support and be fixed on the piezoelectric fabric shearing foil of shearing on actuator matrix, piezoelectricity reverse vibration generator comprises that the piezoelectric fabric being fixedly installed on the side of shearing the reverse vibration generator matrix on actuator matrix and being uniformly distributed in reverse vibration generator matrix reverses thin slice, clamping limb is fixed on reverse vibration generator matrix and clamps microoperation object, during two shearing actuator matrix move toward one another, micro clamping device closes up, the side of reverse vibration generator matrix is distributed with equably piezoelectric fabric and reverses thin slice, and when piezoelectric fabric torsion thin slice is applied to pumping signal, reverse vibration generator matrix produces twisting vibration.
2. as claimed in claim 1ly based on piezoelectricity, reverse the micro clamping device that dither discharges, it is characterized in that: the inner side of shearing actuator matrix near another of shearing actuator matrix is fixed with inner side piezoelectric fabric shearing foil, outside is fixed with outside piezoelectric fabric shearing foil, inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil pass into respectively voltage, inner side piezoelectric fabric shearing foil shrinks, and outside piezoelectric fabric shearing foil stretches simultaneously.
3. as claimed in claim 2ly based on piezoelectricity, reverse the micro clamping device that dither discharges, it is characterized in that: support comprise the fixed part fixing with micromotion platform and with shearing actuator matrix fixing installation portion, installation portion is V-shaped.
4. as claimed in claim 3ly based on piezoelectricity, reverse the micro clamping device that dither discharges, it is characterized in that: shear actuator matrix and take the shape of the letter U, shearing the blind end of actuator matrix fixes by screw and support, openend is fixed by screw and reverse vibration generator matrix, and inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil are separately fixed on two side arms shearing actuator matrix.
5. as described in one of claim 1-4, based on piezoelectricity, reverse the micro clamping device that dither discharges, it is characterized in that: reverse vibration generator matrix comprises installs that compressing tablet fiber reverses the torsional part of thin slice and the fixing connecting portion with shearing actuator matrix; Torsional part is regular prism, and each side of torsional part is fixed with piezoelectric fabric and reverses thin slice; Connecting portion has and the Plane Installation face of shearing the side arm laminating of actuator matrix.
6. the micro clamping device that reverses dither release based on piezoelectricity as claimed in claim 5, is characterized in that: reverse vibration generator matrix is fixedly connected with by screw thread with clamping limb.
7. the micro clamping device that reverses dither release based on piezoelectricity as claimed in claim 6, is characterized in that: the quantity that piezoelectric fabric reverses thin slice is even number.
8. the micro clamping device that reverses dither release based on piezoelectricity as claimed in claim 7, is characterized in that: macro-moving stage moves with millimeter/Centimeter Level, and micromotion platform moves with micrometer/nanometer level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320589370.4U CN203495965U (en) | 2013-09-22 | 2013-09-22 | Micro-holder for release based on piezoelectric torsion high-frequency vibration |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320589370.4U CN203495965U (en) | 2013-09-22 | 2013-09-22 | Micro-holder for release based on piezoelectric torsion high-frequency vibration |
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| CN203495965U true CN203495965U (en) | 2014-03-26 |
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| CN201320589370.4U Expired - Lifetime CN203495965U (en) | 2013-09-22 | 2013-09-22 | Micro-holder for release based on piezoelectric torsion high-frequency vibration |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103465269A (en) * | 2013-09-22 | 2013-12-25 | 浙江大学 | Micro-gripper based on piezoelectric torsional high-frequency vibration release |
| CN105619377A (en) * | 2016-04-05 | 2016-06-01 | 江西理工大学 | Space micro-gripper based on compliant mechanisms |
| CN110108635A (en) * | 2019-05-11 | 2019-08-09 | 金华职业技术学院 | A kind of unicellular adherency force measuring method |
-
2013
- 2013-09-22 CN CN201320589370.4U patent/CN203495965U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103465269A (en) * | 2013-09-22 | 2013-12-25 | 浙江大学 | Micro-gripper based on piezoelectric torsional high-frequency vibration release |
| CN105619377A (en) * | 2016-04-05 | 2016-06-01 | 江西理工大学 | Space micro-gripper based on compliant mechanisms |
| CN110108635A (en) * | 2019-05-11 | 2019-08-09 | 金华职业技术学院 | A kind of unicellular adherency force measuring method |
| CN110108635B (en) * | 2019-05-11 | 2024-03-22 | 金华职业技术学院 | Single cell adhesion force measuring method |
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| GR01 | Patent grant | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20140326 Effective date of abandoning: 20150708 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20140326 Effective date of abandoning: 20150708 |
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| RGAV | Abandon patent right to avoid regrant |