CN103465269B - Micro-gripper based on piezoelectric torsional high-frequency vibration release - Google Patents
Micro-gripper based on piezoelectric torsional high-frequency vibration release Download PDFInfo
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- CN103465269B CN103465269B CN201310433467.0A CN201310433467A CN103465269B CN 103465269 B CN103465269 B CN 103465269B CN 201310433467 A CN201310433467 A CN 201310433467A CN 103465269 B CN103465269 B CN 103465269B
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Abstract
The invention relates to a micro-gripper based on piezoelectric torsional high-frequency vibration release. The micro-gripper comprises a bracket, a piezoelectric shearing actuator, a piezoelectric torsional vibration exciter, a clamping arm, a macro-positioning platform and a micro-positioning platform, wherein the bracket is mounted on the micro-positioning platform; the piezoelectric shearing actuator comprises shearing actuator bases and a piezoelectric fiber shearing slice; the shearing actuator bases are arranged on the bracket; the piezoelectric fiber shearing slice is fixed on the shearing actuator bases; the piezoelectric torsional vibration exciter comprises a torsional vibration exciter base and piezoelectric fiber torsional slices; the torsional vibration exciter base is fixedly mounted on the shearing actuator bases; the piezoelectric fiber torsional slices are uniformly distributed on a side wall of the torsional vibration exciter base; the clamping arm is fixed on the torsional vibration exciter base and is used for clamping a micro-operation object; when two shearing actuator bases move along opposite directions, the micro-gripper is folded; the piezoelectric fiber torsional slices are uniformly distributed on the side wall of the torsional vibration exciter base; and when an exciting signal is exerted on the piezoelectric fiber torsional slices, the torsional vibration exciter base is subjected to torsional vibration. The micro-gripper based on piezoelectric torsional high-frequency vibration release has the advantage that the release success of the micro-operation object can be ensured.
Description
Technical field
The present invention relates to Robotics and field of micro electromechanical technology, particularly a kind of micro clamping device.
Technical background
MEMS (MEMS) refer to can batch making, integrate micro mechanism, microsensor, micro actuator, signal transacting and control circuit and interface, communicate and the micro-system of power supply etc.MEMS not only can reduce system cost, but also can complete the task that many traditional large scale Mechatronic Systems cannot complete, as microscopic objects flexible operating.Micro clamping device is the key components of MEMS, is the basic tool of linking up the Macrocosm and microcosm world, plays an important role in the research of MEMS and the development of microminiaturized product.
Micro clamping device is applied to the fields such as micro assemby, and micro clamping device all has a wide range of applications in precision instrument, biomedicine, Aero-Space and military field.Micro assemby robot has a wide range of applications in fields such as micro-Assembly of the parts, MEMS, precision optics.And micro clamping device is as the end effector of micro assemby robot, directly determine the working effect of robot.
Chinese patent application CN201210038297.1, disclose a kind of piezoelectric driving micro gripper, it comprises Piezoelectric Driving part and micro-retained part, Piezoelectric Driving part comprises driving element, ellipse beam enlarger, lever amplifying mechanism and articulated link mechanism, ellipse beam enlarger comprises the first Curved beam and the second Curved beam that arrange symmetrically; Lever amplifying mechanism comprises the first cantilever beam and the second cantilever beam; Driving element motion drives the distortion of ellipse enlarger, the distortion of ellipse beam enlarger drives lever amplifying mechanism motion, detect retained part and comprise two clamping limbs be oppositely arranged, each clamping limb is integrated with two piezoresistance sensors, four piezoresistance sensors form a full-bridge detection architecture.
The driving element of this piezoelectric driving micro gripper can only produce stretching motion under the effect of voltage, when driving element is upheld, first Curved beam and second Curved beam of ellipse beam inwardly close up, thus drive the cantilever beam of lever amplifying mechanism inwardly to close up, two clamping limbs clamp mutually, thus realize the clamping of microoperation object.When driving element shrinks, two Curved beams of ellipse beam outwards arch upward, and drive the cantilever beam of lever amplifying mechanism outwards to encircle, and two clamping limbs are separated, thus release microoperation object.The shortcoming of this piezoelectric driving micro gripper is: when microoperation, due to scale effect and skin effect, the adhesion strengths such as Van der Waals force, capillary force, electrostatic force play a major role, be easy to occur that microoperation object adheres to the situation on micro clamping device, through separating by two clamping limbs during release, microoperation object is easy to cannot depart from clamping limb because of adhesion strength, causes release failure.
Summary of the invention
There is microoperation object easily adhere and cause the shortcoming of release failure when discharging to overcome existing piezoelectric driving micro gripper, the invention provides a kind of dither release is successfully reversed in the release of microoperation object micro clamping device based on piezoelectricity that can ensure.
The micro clamping device of dither release is reversed based on piezoelectricity, comprise support, piezoelectricity shears actuator, piezoelectricity reverse vibration generator, clamping limb, macro-moving stage and micromotion platform, support installing is on micromotion platform, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix be installed on support and the piezoelectric fabric shearing foil be fixed on shearing actuator matrix, piezoelectricity reverse vibration generator comprises the reverse vibration generator matrix that is fixedly installed in and shears on actuator matrix and all reverses thin slice with the piezoelectric fabric be distributed on the side of reverse vibration generator matrix, clamping limb to be fixed on reverse vibration generator matrix and to clamp microoperation object,
During two shearing actuator matrix move toward one another, micro clamping device closes up; The side of reverse vibration generator matrix is distributed with piezoelectric fabric equably and reverses thin slice, produces twisting vibration to reverse vibration generator matrix during piezoelectric fabric torsion thin slice applying pumping signal.Reverse vibration generator matrix reverses around its axis.
Further, that shears actuator matrix is fixed with inner side piezoelectric fabric shearing foil near the inner side that another shears actuator matrix, outside is fixed with outside piezoelectric fabric shearing foil, inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil pass into voltage respectively, inner side piezoelectric fabric shearing foil shrinks, and outside piezoelectric fabric shearing foil stretches simultaneously.
Further, support comprises the fixed part and the installation portion fixing with shearing actuator matrix fixed with micromotion platform, and installation portion is V-shaped.Shear actuator matrix, reverse vibration generator matrix and clamping limb linearly, the free end clamping microoperation object of clamping limb.
Further, shear actuator matrix to take the shape of the letter U, the blind end shearing actuator matrix is fixed by screw and support, openend is fixed by screw and reverse vibration generator matrix, and inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil are separately fixed on two side arms of shearing actuator matrix.
Further, reverse vibration generator matrix comprises the torsional part and the connecting portion fixing with shearing actuator matrix of installing compressing tablet fiber torsion thin slice; Torsional part is regular prism, and each side of torsional part is fixed with piezoelectric fabric and reverses thin slice; Connecting portion has the Plane Installation face of fitting with the side arm shearing actuator matrix.
Further, reverse vibration generator matrix is fixedly connected with by screw thread with clamping limb.
Further, piezoelectric fabric reverses the quantity of thin slice is even number.
Further, macro-moving stage moves with millimeter/Centimeter Level, and micromotion platform moves with micrometer/nanometer level.
The present invention in use, macro-moving stage and micromotion platform is first made to move to the initial position of microoperation object, again contrary voltage is applied to the inner side piezoelectric fabric shearing foil sheared on actuator matrix and outside piezoelectric fabric shearing foil, inner side piezoelectric fabric shearing foil shrinks, outside piezoelectric fabric shearing foil stretches, and two clamping limbs close up clamps microoperation object.Then make macro-moving stage and micromotion platform continue motion, take micro clamping device and microoperation object to destination locations, the voltage of release piezoelectric fabric shearing foil, piezoelectric fabric is sheared actuator matrix and is resetted, and two clamping limbs separately.Simultaneously, reverse thin slice to piezoelectric fabric and apply pumping signal, piezoelectric fabric reverses thin slice and drives reverse vibration generator matrix generation high frequency torsional vibration, and then makes two clamping limb generation high frequency torsional vibration, microoperation object is shaken from micro clamping device, completes the release to micro clamping device.
The invention has the beneficial effects as follows:
1. utilizing piezoelectric fabric to reverse thin slice drives reverse vibration generator matrix to produce high frequency torsional vibration, and the centrifugal force that this dither produces overcomes the adhesion strength between microoperation object and clamping limb, ensures that microoperation object is by success, discharge accurately.
2. utilize the flexible drive of piezoelectric fabric shearing foil to shear actuator matrix move toward one another during clamping, thus two clamping limbs are closed up, clamp microoperation object; Release voltage during release, piezoelectric fabric shearing foil resets, and two clamping limbs are separated.The volume of piezoelectric fabric shearing foil is little, and thickness is little, is conducive to microminaturization of the present invention.
3. by with macro-moving stage and micromotion platform with the use of, can complete the operations such as clamping, carrying and release, range of application is wider.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Accompanying drawing explanation
Fig. 1 is schematic diagram of the present invention.
Fig. 2 is the schematic diagram of drive mechanism.
Fig. 3 is the schematic diagram of support.
Fig. 4 is the schematic diagram shearing actuator matrix, reverse vibration generator matrix and clamping limb.
Fig. 5 shears the schematic diagram of actuator matrix.
Fig. 6 is the schematic diagram of reverse vibration generator matrix.
Fig. 7 is the schematic diagram of clamping limb.
Fig. 8 is the schematic diagram of duty of the present invention.
Detailed description of the invention
The micro clamping device of dither release is reversed based on piezoelectricity, comprise support 1, piezoelectricity shears actuator, piezoelectricity reverse vibration generator, clamping limb 5, macro-moving stage 8 and micromotion platform 7, support 1 is arranged on micromotion platform 7, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix 3 be installed on support 1 and the piezoelectric fabric shearing foil be fixed on shearing actuator matrix 3, piezoelectricity reverse vibration generator comprises the reverse vibration generator matrix 6 being fixedly installed in and shearing on actuator matrix 3 and the piezoelectric fabric torsion thin slice 4 be uniformly distributed on the side of reverse vibration generator matrix 6, clamping limb 5 to be fixed on reverse vibration generator matrix 6 and to clamp microoperation object 9,
During two shearing actuator matrix 3 move toward one another, micro clamping device closes up; The side of reverse vibration generator matrix 6 is distributed with piezoelectric fabric equably and reverses thin slice 4, reverses reverse vibration generator matrix 6 when thin slice 4 applies pumping signal produce twisting vibration to piezoelectric fabric.Reverse vibration generator matrix 6 reverses around its axis.
As shown in Figure 5, that shears actuator matrix 3 is fixed with inner side piezoelectric fabric shearing foil 21 near the inner side that another shears actuator matrix 3, outside is fixed with outside piezoelectric fabric shearing foil 22, inner side piezoelectric fabric shearing foil 21 and outside piezoelectric fabric shearing foil 22 pass into voltage respectively, inner side piezoelectric fabric shearing foil 21 shrinks, and outside piezoelectric fabric shearing foil 22 stretches simultaneously.
As shown in Figure 3, support 1 comprises the fixed part 11 fixing with micromotion platform 7 and the installation portion 12 fixing with shearing actuator matrix 3, and installation portion 12 is V-shaped.Between installation portion 12 and shearing actuator matrix 3, there are 4 hold-down screws.As shown in Figure 4, shear actuator matrix 3, reverse vibration generator matrix 6 and clamping limb 5 linearly, the free end clamping microoperation object 9 of clamping limb 5.
As shown in Figure 5, shear actuator matrix 3 and take the shape of the letter U, the blind end shearing actuator matrix 3 is fixed by screw and support 1, and openend is fixed by screw and reverse vibration generator matrix 6; The quantity of screw is not limited to 4 that exemplify in Fig. 4-6.Inner side piezoelectric fabric shearing foil 21 and outside piezoelectric fabric shearing foil 22 are separately fixed on two side arms of shearing actuator matrix 3.Two piezoelectric fabric shearing foils are bonded and fixed to shears actuator matrix 3.
As shown in Figure 6, reverse vibration generator matrix 6 comprises the torsional part 61 and the connecting portion 62 fixing with shearing actuator matrix 3 of installing compressing tablet fiber torsion thin slice; Torsional part 61 is in regular prism, and each side of torsional part 61 is fixed with piezoelectric fabric and reverses thin slice 4; Connecting portion 62 has the Plane Installation face 63 of fitting with the side arm shearing actuator matrix 3.
Reverse vibration generator matrix 6 is fixedly connected with by screw thread with clamping limb 5.
The quantity that piezoelectric fabric reverses thin slice 4 is even number.Each piezoelectric fabric torsion thin slice 4 must have a piezoelectric fabric torsion thin slice 4 symmetrical with it, and symmetrical piezoelectric fabric reverses thin slice 4 and makes reverse vibration generator matrix 6 uniform force.The quantity that piezoelectric fabric reverses thin slice 4 is more, and the torsion effect of reverse vibration generator matrix 6 is better.
Macro-moving stage 8 moves with millimeter/Centimeter Level, and micromotion platform 7 moves with micrometer/nanometer level.Macro-moving stage 8 and micromotion platform 7 are promoted, as leading screw by common pushing mechanism.
The present invention in use, macro-moving stage 8 and micromotion platform 7 is first made to move to the initial position of microoperation object 9, again contrary voltage is applied to the inner side piezoelectric fabric shearing foil 21 sheared on actuator matrix 3 and outside piezoelectric fabric shearing foil 22, inner side piezoelectric fabric shearing foil 21 shrinks, outside piezoelectric fabric shearing foil 22 stretches, two clamping limbs 5 close up clamps microoperation object 9, as shown in Figure 8.Then make macro-moving stage 8 and micromotion platform 7 continue motion, take micro clamping device and microoperation object 9 to destination locations, the voltage of release piezoelectric fabric shearing foil, piezoelectric fabric is sheared actuator matrix 3 and is resetted, and two clamping limbs 5 separately.Simultaneously, thin slice 4 is reversed to piezoelectric fabric and applies pumping signal, piezoelectric fabric reverses thin slice 4 and drives reverse vibration generator matrix 6 that high frequency torsional vibration occurs, and then make two clamping limbs 5 that high frequency torsional vibration occur, microoperation object 9 is shaken from micro clamping device and falls workbench 10, complete the release to micro clamping device.
The invention has the beneficial effects as follows:
1. utilizing piezoelectric fabric to reverse thin slice drives reverse vibration generator matrix to produce high frequency torsional vibration, and the centrifugal force that this dither produces overcomes the adhesion strength between microoperation object and clamping limb, ensures that microoperation object is by success, discharge accurately.
2. utilize the flexible drive of piezoelectric fabric shearing foil to shear actuator matrix move toward one another during clamping, thus two clamping limbs are closed up, clamp microoperation object; Release voltage during release, piezoelectric fabric shearing foil resets, and two clamping limbs are separated.The volume of piezoelectric fabric shearing foil is little, and thickness is little, is conducive to microminaturization of the present invention.
3. by with macro-moving stage and micromotion platform with the use of, can complete the operations such as clamping, carrying and release, range of application is wider.
4. lightweight, easy to operate, be applicable to micro-manipulating robot system and MEMS.
Content described in this description embodiment is only enumerating the way of realization of inventive concept; protection scope of the present invention should not be regarded as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention also and conceive the equivalent technologies means that can expect according to the present invention in those skilled in the art.
Claims (8)
1. the micro clamping device of dither release is reversed based on piezoelectricity, it is characterized in that: comprise support, piezoelectricity shears actuator, piezoelectricity reverse vibration generator, clamping limb, macro-moving stage and micromotion platform, support installing is on micromotion platform, piezoelectricity is sheared actuator and is comprised the shearing actuator matrix be installed on support and the piezoelectric fabric shearing foil be fixed on shearing actuator matrix, piezoelectricity reverse vibration generator comprises the reverse vibration generator matrix be fixedly installed on shearing actuator matrix and the piezoelectric fabric torsion thin slice be uniformly distributed on the side of reverse vibration generator matrix, clamping limb to be fixed on reverse vibration generator matrix and to clamp microoperation object, during two shearing actuator matrix move toward one another, micro clamping device closes up, twisting vibration is produced to reverse vibration generator matrix during piezoelectric fabric torsion thin slice applying pumping signal.
2. the micro clamping device reversing dither release based on piezoelectricity as described in claim 1, it is characterized in that: that shears actuator matrix is fixed with inner side piezoelectric fabric shearing foil near the inner side that another shears actuator matrix, outside is fixed with outside piezoelectric fabric shearing foil, inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil pass into voltage respectively, inner side piezoelectric fabric shearing foil shrinks, and outside piezoelectric fabric shearing foil stretches simultaneously.
3. the micro clamping device reversing dither release based on piezoelectricity as described in claim 2, is characterized in that: support comprises the fixed part and the installation portion fixing with shearing actuator matrix fixed with micromotion platform, and installation portion is V shape.
4. the micro clamping device reversing dither release based on piezoelectricity as described in claim 3, it is characterized in that: shearing actuator matrix is U shape, the blind end shearing actuator matrix is fixed by screw and support, openend is fixed by screw and reverse vibration generator matrix, and inner side piezoelectric fabric shearing foil and outside piezoelectric fabric shearing foil are separately fixed on two side arms of shearing actuator matrix.
5. the micro clamping device reversing dither release based on piezoelectricity as described in one of claim 1-4, is characterized in that: reverse vibration generator matrix comprises the torsional part and the connecting portion fixing with shearing actuator matrix of installing piezoelectric fabric torsion thin slice; Torsional part is regular prism, and each side of torsional part is fixed with piezoelectric fabric and reverses thin slice; Connecting portion has the Plane Installation face of fitting with the side arm shearing actuator matrix.
6. the micro clamping device reversing dither release based on piezoelectricity as described in claim 5, is characterized in that: reverse vibration generator matrix is fixedly connected with by screw thread with clamping limb.
7. the micro clamping device reversing dither release based on piezoelectricity as described in claim 6, is characterized in that: the quantity that piezoelectric fabric reverses thin slice is even number.
8. the micro clamping device reversing dither release based on piezoelectricity as described in claim 7, it is characterized in that: macro-moving stage moves with millimeter/Centimeter Level, micromotion platform moves with micrometer/nanometer level.
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| CN103929092B (en) * | 2014-03-19 | 2017-04-12 | 宁波大学 | Big stroke high precision micro-nano gripper |
| CN104773504B (en) * | 2015-03-26 | 2018-05-08 | 宁波工程学院 | A kind of shovel oscillating mode grabbing device |
| CN108328569A (en) * | 2018-01-30 | 2018-07-27 | 北京理工大学 | A method of active release being carried out to small objects using fluid in microoperation |
| CN108527413B (en) * | 2018-04-18 | 2020-06-05 | 上海大学 | Piezoelectric driving flexible and flexible hand |
| JP2022073193A (en) * | 2020-10-30 | 2022-05-17 | セイコーエプソン株式会社 | Driving method of hand, and the hand |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5046773A (en) * | 1990-01-02 | 1991-09-10 | Hewlett-Packard Company | Micro-gripper assembly |
| JP2012253990A (en) * | 2011-06-07 | 2012-12-20 | Seiko Epson Corp | Piezoelectric actuator, robot hand, and robot |
| CN102497129B (en) * | 2011-12-06 | 2014-06-04 | 浙江大学 | Multi-degree-of-freedom micromanipulator driven by multi-polarization mode piezoelectric actuator |
| JP6008078B2 (en) * | 2011-12-06 | 2016-10-19 | セイコーエプソン株式会社 | Piezoelectric motor, drive device, electronic component transport device, electronic component inspection device, printing device, robot hand, and robot |
| CN102581854B (en) * | 2012-02-20 | 2015-01-07 | 苏州大学 | Piezoelectric driving micro gripper |
| CN203495965U (en) * | 2013-09-22 | 2014-03-26 | 浙江大学 | Micro-holder for release based on piezoelectric torsion high-frequency vibration |
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