CN203481189U - Photoresist remover bench - Google Patents
Photoresist remover bench Download PDFInfo
- Publication number
- CN203481189U CN203481189U CN201320524034.1U CN201320524034U CN203481189U CN 203481189 U CN203481189 U CN 203481189U CN 201320524034 U CN201320524034 U CN 201320524034U CN 203481189 U CN203481189 U CN 203481189U
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- Prior art keywords
- cylinder
- rocking bar
- board
- chamber
- spm
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Abstract
The utility model provides a photoresist remover bench. The photoresist remover bench includes an accommodation chamber, a chuck disposed on a chamber bottom of the accommodation chamber, and an SPM spraying system disposed on a chamber wall, wherein the SPM spraying system at least includes a cylinder control module, a cylinder, a mounting support seat and a rocking bar; an bottom end of the rocking bar bents and is connected with a liquid conveying arm which swings back and forth along with the back-and-forth rotation of the rocking bar; a liquid connection head is disposed on a side wall of the rocking bar; a throttle valve is disposed at an air inlet end of the cylinder; the cylinder control module includes a cylinder swing control solenoid valve and a pulse relay; the pulse relay includes an input loop and an output loop; and the cylinder swing control solenoid valve is connected in the output loop. The end part of the liquid conveying arm swings back and forth from a center position of a light cover template to an edge of the light cover template when the photoresist remover is at work, so that adequate reaction temperature and reaction concentration are obtained in the entire reaction process from the center of the light cover template to the edge of the light cover template, and integral photoresist removing ability is enhanced.
Description
Technical field
The utility model belongs to semiconductor applications, relates to a kind of board that removes photoresist.
Background technology
In the manufacture process of optical mask plate, need to make on optical mask plate, to form with photoresist layout patterns or other circuit pattern and the data pattern of integrated circuit and semiconductor device, after completing the processing technologys such as exposure, development, etching, need to remove the photoresist of optical mask plate remained on surface.SPM(Sulphoacid Peroxide Mixed, Sulfuric-acid-hydrogen-peroxide mixed liquor) be the cleaning liquid that microelectronic industry is generally used, its main application is for the organic residue on cleaning base plate.The groundwork principle that SPM cleans organic residue be utilize SPM strong oxidizing property by organics dehydration and be oxidized to carbon dioxide and water.Traditional SPM generation system is sulfuric acid and hydrogen peroxide to be placed in to a container by a certain percentage mix, and mixture is heated to certain temperature, the object being cleaned is immersed in this mixed liquor and cleans, and the SPM of this kind of generation system reuses, and needs periodic replacement.Due to hydrogen peroxide easily decomposition under heating and acid condition, so the activity of class SPM generation system has unsteadiness, and due to the reusing of SPM, can cause the cross pollution of cleaning object.Another technique is to remove the photoresist on optical mask plate by rotary spray method, this method of removing photoresist can effectively be saved acid consumption with respect to traditional deep slot type immersion process, because liquid is active strong, after removing photoresist, liquid is directly drained and is no longer recycled, can not cause cross pollution, the effect of removing photoresist is relatively stable.
The existing board that removes photoresist adopts rotary spray mode, SPM arm in use hovers over optical mask plate top, the mixed liquor of sulfuric acid and hydrogen peroxide is ejected on optical mask plate, and the chemical mixing liquid by high temperature reacts with the photoresist on optical mask plate, reaches the object of removing photoresist.But in actual use, because SPM arm hovers a bit, although the chuck of optical mask plate below drives optical mask plate rotation mixed liquor can be thrown away and forms the liquid film that covers whole optical mask plate, but the uniformity of the amount of the temperature of mixed liquor and distribution does not all reach required technological requirement, be that the reaction temperature of optical mask plate edge and the accumulation thickness of mixed liquor can not be guaranteed, thereby it is residual that photoresist occurs, cause the finished product problem of this operation, to subsequent technique, bring problem.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of board that removes photoresist, and for solving uniformity that prior art removes photoresist in process due to the temperature of SPM mixed liquor and the amount of distribution, does not reach and requires to cause occurring the residual problem of photoresist.
For achieving the above object and other relevant objects, the utility model provides a kind of board that removes photoresist, described in remove photoresist board comprise one by the bottom of chamber and around the chamber wall of a week at the bottom of described chamber, form accommodate cavity; On at the bottom of described chamber, be provided with one for carrying optical mask plate and driving the chuck of described optical mask plate rotation; On the wall of described chamber, be provided with a SPM spray system; Described SPM spray system at least comprises cylinder control module, the cylinder being connected with described cylinder control module, the erection support being connected with described cylinder and is installed on and on described erection support, is connected with described cylinder and along with the reciprocating motion of described cylinder carrys out the rocking bar of back rotation; The bending of described rocking bar bottom is connected with a transfusion arm that comes back rotation to swing back and forth along with described rocking bar; Described rocking bar sidewall is provided with a liquid joint being communicated with described transfusion arm; The inlet end of described cylinder is provided with to control the choke valve of described cylinder moving speed; Described cylinder control module comprises that cylinder swings control electromagnetically operated valve and time pulse relay; Described time pulse relay comprises input circuit and output loop; Described cylinder swings control electromagnetically operated valve and is connected in described output loop; Thereby described input circuit is controlled the break-make of described output loop and is controlled the reciprocating motion that described cylinder swings the power on/off state of control electromagnetically operated valve and then controls described cylinder.
Alternatively, described rocking bar is connected with described cylinder by rocking arm, crank mechanism and cylinder coupling assembling successively.
Alternatively, the pendulum angle scope of described transfusion arm is 0～90 °.
Alternatively, described liquid joint is connected with a SPM electric hybrid module.
Alternatively, described transfusion arm is linearity or bending.
Alternatively, described time pulse relay adopts electromagnetic relay.
Alternatively, described time pulse relay is dynamic circuit connector type, moving fault or conversion hysteria.
As mentioned above, the board that removes photoresist of the present utility model, there is following beneficial effect: during the board that removes photoresist work, transfusion arm end swings back and forth from optical mask plate center to optical mask plate edge, center to the edge that is optical mask plate can obtain enough reaction temperatures and reaction density in whole technical process, promotes the integral body ability of removing photoresist, lifting process rate of finished products, and the corresponding shortening process time, improve output.By the choke valve on adjusting cylinders, can obtain required cylinder moving speed, thereby obtain the transfusion arm that needs show and swing back speed; By setting the frequency of time pulse relay, can obtain the hunting period of cylinder, thereby the pendulum angle of the transfusion arm that acquisition needs meets the needed technique initialization of different size optical mask plate.
Accompanying drawing explanation
Fig. 1 is shown as the structural representation of the board that removes photoresist of the present utility model.
Fig. 2 is shown as the circuit diagram of cylinder control module in the board that removes photoresist of the present utility model.
Fig. 3 is shown as the plan structure schematic diagram of SPM spray system in the board that removes photoresist of the present utility model.
Element numbers explanation
At the bottom of 1 chamber
2 chamber walls
3 chucks
4 SPM spray systems
5 cylinders
6 erection supports
7 rocking bars
8 transfusion arms
9 liquid joints
10 cylinders swing controls electromagnetically operated valve
11 input circuits
12 output loops
13 power supplys
14 earth terminals
15 line banks
16 cylinder coupling assemblings
17 piston pieces
18 crank mechanisms
19 rocking arms
Embodiment
By particular specific embodiment, execution mode of the present utility model is described below, person skilled in the art scholar can understand other advantages of the present utility model and effect easily by the disclosed content of this specification.
Refer to Fig. 1 to Fig. 3.Notice, appended graphic the illustrated structure of this specification, ratio, size etc., equal contents in order to coordinate specification to disclose only, for person skilled in the art scholar, understand and read, not in order to limit the enforceable qualifications of the utility model, therefore the technical essential meaning of tool not, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under the effect that the utility model can produce and the object that can reach, all should still drop on the technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, in this specification, quote as " on ", the term of D score, " left side ", " right side ", " centre " and " " etc., also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under without essence change technology contents, when being also considered as the enforceable category of the utility model.
The utility model provides a kind of board that removes photoresist, described in remove photoresist board comprise one by the bottom of chamber and around the chamber wall of a week at the bottom of described chamber, form accommodate cavity; On at the bottom of described chamber, be provided with one for carrying optical mask plate and driving the chuck of described optical mask plate rotation; On the wall of described chamber, be provided with a SPM spray system; Described SPM spray system at least comprises cylinder control module, the cylinder being connected with described cylinder control module, the erection support being connected with described cylinder and is installed on and on described erection support, is connected with described cylinder and along with the reciprocating motion of described cylinder carrys out the rocking bar of back rotation; The bending of described rocking bar bottom is connected with a transfusion arm that comes back rotation to swing back and forth along with described rocking bar; Described rocking bar sidewall is provided with a liquid joint being communicated with described transfusion arm; The inlet end of described cylinder is provided with to control the choke valve of described cylinder moving speed; Described cylinder control module comprises that cylinder swings control electromagnetically operated valve and time pulse relay; Described time pulse relay comprises input circuit and output loop; Described cylinder swings control electromagnetically operated valve and is connected in described output loop; Thereby described input circuit is controlled the break-make of described output loop and is controlled the reciprocating motion that described cylinder swings the power on/off state of control electromagnetically operated valve and then controls described cylinder.
Fig. 1 to Fig. 3 is the board that removes photoresist of one embodiment of the invention, and described schematic diagram is example, at this, should excessively not limit the scope of protection of the invention.
First refer to Fig. 1, be shown as the structural representation of the board that removes photoresist of the present invention, as shown in the figure, described in the board that removes photoresist comprise and accommodate cavity, described in accommodate cavity by chamber at the bottom of 1 and form around the chamber wall 2 of 1 one weeks at the bottom of described chamber; At the bottom of described chamber, be provided with one on 1 for carrying optical mask plate and driving the chuck 3 of described optical mask plate rotation; On the wall of described chamber, be provided with a SPM spray system 4.
Described SPM spray system at least comprises cylinder control module 4, the cylinder 5 being connected with described cylinder control module 4, the erection support 6 being connected with described cylinder 5 and is installed on and on described erection support 6 and with described cylinder 5, is connected and along with the reciprocating motion of described cylinder 5 carrys out the rocking bar 7 of back rotation.Described rocking bar 7 bottom bendings are connected with a transfusion arm 8 that comes back rotation to swing back and forth along with described rocking bar 7, and described rocking bar 7 sidewalls are provided with a liquid joint 9 being communicated with described transfusion arm 8.
Concrete, described SPM spray system is installed on described chamber wall 2 by described erection support 6, and the inlet end of described cylinder 2 is provided with to control the choke valve of described cylinder moving speed, because cylinder has been very ripe technology, for common practise, for its concrete structure, repeat no more herein.Described cylinder comprises piston piece, it is pointed out that cylinder moving speed described herein refers to the movement velocity of the piston piece in cylinder.
Concrete, described liquid joint 9 is connected (not shown) with a SPM electric hybrid module, and described SPM electric hybrid module can be heated to SPM solution preset temperature and be fed in described transfusion arm 8.The pendulum angle scope of described transfusion arm 8 is 0～90 °.
Refer to Fig. 2, be shown as the circuit diagram of described cylinder control module 4, as shown in the figure, described cylinder control module 4 comprises that cylinder swings control electromagnetically operated valve 10 and time pulse relay; Described time pulse relay comprises input circuit 11 and output loop 12, and the critical piece of described input circuit 11 is coils, and the critical piece of described output loop 12 is contacts, plays the effect in this loop of switch.Described cylinder swings control electromagnetically operated valve 10 and is connected in described output loop 12.Thereby the break-make that described input circuit 11 is controlled described output loop 12 is controlled described cylinder and is swung the power on/off state of controlling electromagnetically operated valve 10 and then the reciprocating motion of controlling described cylinder 5.The reciprocating motion that it is pointed out that cylinder 5 described herein refers to the reciprocating motion of piston piece in cylinder.Described input circuit 11, output loop 12 connect by the different terminals of line bank 15 from power supply 13, earth terminal 14.
Concrete; relay is a kind of electronic control device; it has control system (input circuit) and by control system (output loop); conventionally be applied in automatic control circuit; it is actually a kind of " automatic switch " that removes to control larger electric current with less electric current, therefore play the effects such as automatic adjusting, safeguard protection, change-over circuit in circuit.In the utility model, described time pulse relay 10 adopts electromagnetic relay, electromagnetic relay is generally comprised of iron core, coil, armature, contact reed etc., as long as add certain voltage at coil two ends, in coil, will flow through certain electric current, thereby generation galvanomagnetic effect, armature will overcome the pulling force of return spring under the effect of electromagnetic attracting force to be inhaled to iron core, thereby with moving contact and fixed contact (normally opened contact) adhesive of moving armature.After coil blackout, the suction of electromagnetism also disappears thereupon, and armature will return to original position at the reaction force of spring, makes moving contact and original fixed contact (normally-closed contact) release.Adhesive like this, release, thus reached the conducting in circuit, the object of cut-out.In the utility model, the contact of described time pulse relay 10 can adopt dynamic circuit connector type, moving fault or conversion hysteria, and when described dynamic circuit connector type refers to coil no power, two contacts disconnect, and after energising, two contacts are just closed; When described moving fault refers to coil no power, two contacts are closed, and latter two contact that switches on just disconnects; Described conversion hysteria refers to and comprises three contacts, in the middle of, be moving contact, each fixed contact up and down, during coil no power, moving contact and one of them fixed contact disconnect and another closure, after coil electricity, moving contact is just mobile, make the original one-tenth disconnecting closed, the original one-tenth off-state of closure, reaches the object of conversion.Time pulse relay of the present utility model under certain pulse frequency, output loop ceaselessly disconnect with closed state under switch.
Concrete, described cylinder swings the gas circuit of control electromagnetically operated valve 10 and often opens; If described cylinder swings, control electromagnetically operated valve 10 dead electricity, it can rest on its initial position, and compressed air (CDA) still arrives cylinder by electromagnetically operated valve, by cylinder top at a terminal; If described cylinder swings control, electromagnetically operated valve 10 powers on, and electromagnetically operated valve is done to switch, and CDA is still swung and controlled electromagnetically operated valve arrival cylinder by cylinder, but has switched the air inlet of cylinder, makes cylinder moving until arrive another terminal.In the utility model, the power on/off state of described cylinder swing control valve is controlled by described impulse electromagnetic valve, and therefore the reciprocating frequency of described cylinder 5 is identical with the pulse frequency of described time pulse relay.
Concrete, described rocking bar 7 is connected with institute cylinder by cylinder coupling assembling, crank mechanism and rocking arm.Refer to Fig. 3, be shown as the plan structure schematic diagram of described SPM spray system, as shown in the figure, described cylinder coupling assembling 16 left ends connect the piston piece 17 in described cylinder 2, described cylinder coupling assembling 16 right-hand members connect described crank mechanism 18 left ends, and described rocking arm 19 is arranged at the top of rocking bar 7 and is connected with described crank mechanism 18 right-hand members.Described transfusion arm 8 can be linearity, also can be bending (as shown in Figure 3), and described transfusion arm 8 is accommodated the space of cavity described in being conducive to save for bending.Between described rocking bar 7 and described erection support 6, also can increase other connectors if bearing, spacer, sleeve, screw etc. are to increase stability, this is common practise, repeats no more herein.
The using method of the board that removes photoresist of the present utility model is as follows: optical mask plate is positioned on described chuck 3 and clamps and make described optical mask plate to rotate along with the rotation of described chuck; According to the size of described optical mask plate, calculate required transfusion arm swing angle, show and swing back speed by what regulate that choke valve on described cylinder obtains that thereby required cylinder piston part movement velocity obtains the transfusion arm that needs, thereby by setting the pulse frequency of described time pulse relay, control the reciprocating frequency of described cylinder and control described rocking bar and carry out the frequency of back rotation and then control the frequency that described transfusion arm is shown and swung back, obtain the transfusion arm swing angle needing; SPM(Sulphoacid Peroxide Mixed, Sulfuric-acid-hydrogen-peroxide mixed liquor) from described infusion connector 9, enter described transfusion arm and be sprayed at optical mask plate back and forth.
In sum, in cylinder control module of the present utility model, added time pulse relay, during the board that removes photoresist work, transfusion arm end swings back and forth from optical mask plate center to optical mask plate edge, make center to the edge of optical mask plate can obtain enough reaction temperatures and reaction density in whole technical process, promote the integral body ability of removing photoresist, lifting process rate of finished products, and the corresponding shortening process time, improve output.By the choke valve on adjusting cylinders, can obtain required cylinder moving speed, thereby obtain the transfusion arm that needs show and swing back speed; By setting the frequency of time pulse relay, can obtain the hunting period of cylinder, thereby the pendulum angle of the transfusion arm that acquisition needs meets the needed technique initialization of different size optical mask plate.So the utility model has effectively overcome various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (7)
1. the board that removes photoresist, described in remove photoresist board comprise one by the bottom of chamber and around the chamber wall of a week at the bottom of described chamber, form accommodate cavity; On at the bottom of described chamber, be provided with one for carrying optical mask plate and driving the chuck of described optical mask plate rotation; On the wall of described chamber, be provided with a SPM spray system; Described SPM spray system at least comprises cylinder control module, the cylinder being connected with described cylinder control module, the erection support being connected with described cylinder and is installed on and on described erection support, is connected with described cylinder and along with the reciprocating motion of described cylinder carrys out the rocking bar of back rotation; The bending of described rocking bar bottom is connected with a transfusion arm that comes back rotation to swing back and forth along with described rocking bar; Described rocking bar sidewall is provided with a liquid joint being communicated with described transfusion arm; The inlet end of described cylinder is provided with to control the choke valve of described cylinder moving speed, it is characterized in that: described cylinder control module comprises that cylinder swings control electromagnetically operated valve and time pulse relay; Described time pulse relay comprises input circuit and output loop; Described cylinder swings control electromagnetically operated valve and is connected in described output loop; Thereby described input circuit is controlled the break-make of described output loop and is controlled the reciprocating motion that described cylinder swings the power on/off state of control electromagnetically operated valve and then controls described cylinder.
2. the board that removes photoresist according to claim 1, is characterized in that: described rocking bar is connected with described cylinder by rocking arm, crank mechanism and cylinder coupling assembling successively.
3. the board that removes photoresist according to claim 1, is characterized in that: the pendulum angle scope of described transfusion arm is 0～90 °.
4. the board that removes photoresist according to claim 1, is characterized in that: described liquid joint is connected with a SPM electric hybrid module.
5. the board that removes photoresist according to claim 1, is characterized in that: described transfusion arm is linearity or bending.
6. the board that removes photoresist according to claim 1, is characterized in that: described time pulse relay adopts electromagnetic relay.
7. the board that removes photoresist according to claim 1, is characterized in that: described time pulse relay is dynamic circuit connector type, moving fault or conversion hysteria.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320524034.1U CN203481189U (en) | 2013-08-26 | 2013-08-26 | Photoresist remover bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320524034.1U CN203481189U (en) | 2013-08-26 | 2013-08-26 | Photoresist remover bench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203481189U true CN203481189U (en) | 2014-03-12 |
Family
ID=50229470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320524034.1U Expired - Fee Related CN203481189U (en) | 2013-08-26 | 2013-08-26 | Photoresist remover bench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203481189U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110502049A (en) * | 2019-08-30 | 2019-11-26 | 北京北方华创微电子装备有限公司 | Chuck temperature control method, chuck temperature control system and semiconductor equipment |
-
2013
- 2013-08-26 CN CN201320524034.1U patent/CN203481189U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110502049A (en) * | 2019-08-30 | 2019-11-26 | 北京北方华创微电子装备有限公司 | Chuck temperature control method, chuck temperature control system and semiconductor equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140312 Termination date: 20190826 |