CN203479456U - 微机械真空传感器 - Google Patents
微机械真空传感器 Download PDFInfo
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- CN203479456U CN203479456U CN201320441949.6U CN201320441949U CN203479456U CN 203479456 U CN203479456 U CN 203479456U CN 201320441949 U CN201320441949 U CN 201320441949U CN 203479456 U CN203479456 U CN 203479456U
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CN201320441949.6U CN203479456U (zh) | 2013-07-24 | 2013-07-24 | 微机械真空传感器 |
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CN201320441949.6U CN203479456U (zh) | 2013-07-24 | 2013-07-24 | 微机械真空传感器 |
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CN203479456U true CN203479456U (zh) | 2014-03-12 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103424224A (zh) * | 2013-07-24 | 2013-12-04 | 无锡微奇科技有限公司 | 微机械真空传感器 |
CN105021345A (zh) * | 2014-04-28 | 2015-11-04 | 国家电网公司 | 一种全硅结构的mens真空传感器 |
CN107976277A (zh) * | 2016-10-20 | 2018-05-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 基于石墨烯氧化物的真空传感器及其制备方法与应用 |
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2013
- 2013-07-24 CN CN201320441949.6U patent/CN203479456U/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103424224A (zh) * | 2013-07-24 | 2013-12-04 | 无锡微奇科技有限公司 | 微机械真空传感器 |
CN105021345A (zh) * | 2014-04-28 | 2015-11-04 | 国家电网公司 | 一种全硅结构的mens真空传感器 |
CN107976277A (zh) * | 2016-10-20 | 2018-05-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 基于石墨烯氧化物的真空传感器及其制备方法与应用 |
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Owner name: WUXI YUANCHUANG HUAXIN MICROELECTROMECHANICAL CO., Free format text: FORMER OWNER: WUXI WEIQI SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150323 Owner name: WUXI WEIQI SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150323 |
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Free format text: CORRECT: ADDRESS; FROM: 214000 WUXI, JIANGSU PROVINCE TO: 214200 WUXI, JIANGSU PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20150323 Address after: 214200 No. 16 apricot Road, Yixing Economic Development Zone, Wuxi, Jiangsu Patentee after: WUXI YCM CHIP MICRO-ELECTRO-MECHANICAL CO., LTD. Patentee after: Wuxi Weiqi Science & Technology Co., Ltd. Address before: 214000 Jiangsu New District of Wuxi City Branch Park Chinese Sensor Network International Innovation Park B Building 1 floor Patentee before: Wuxi Weiqi Science & Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140312 Termination date: 20160724 |