CN203474963U - Chemical vapor deposition equipment for producing silicon carbide epitaxial wafer - Google Patents
Chemical vapor deposition equipment for producing silicon carbide epitaxial wafer Download PDFInfo
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- CN203474963U CN203474963U CN201320397113.0U CN201320397113U CN203474963U CN 203474963 U CN203474963 U CN 203474963U CN 201320397113 U CN201320397113 U CN 201320397113U CN 203474963 U CN203474963 U CN 203474963U
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- silicon carbide
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Abstract
The utility model provides equipment for improving the uniformity of a silicon carbide epitaxial wafer. According to the chemical vapor deposition equipment, the silicon carbide epitaxial wafer with the uniform thickness can grow. An arc-shaped airflow stopping ring is mounted below airflow of a reaction cavity and then a silicon carbide substrate is arranged on a supporting platform; the reaction cavity is heated to a temperature needed by epitaxy and reaction gas and carrier gas are introduced; finally, a silicon carbide epitaxial layer is formed on the silicon carbide substrate. According to the equipment provided by the utility model, the thickness of the prepared silicon carbide epitaxial wafer is uniform and the device is simple; the most feasible and cheapest method for improving traditional equipment is provided; excessive cost input is not needed and the equipment is good for industrial production.
Description
[technical field]
The utility model belongs to chemical vapour deposition field, specifically relates to a kind of chemical vapor depsotition equipment for the production of silicon carbide epitaxy sheet.
[background technology]
Silicon carbide (SiC) is third generation semiconductor material with wide forbidden band, there is the features such as broad-band gap, high critical breakdown electric field, high thermal conductivity, high carrier saturation drift velocity, be particularly suitable for making the semiconducter device such as high temperature, high pressure, high-power electric and electronic, the development of the industries such as blended electric power automobile, electromobile, solar inverter and intelligent grid is had very important significance.
The making of carbofrax material, is that crystal is grown or epitaxy is all difficult for, and the epitaxial wafer of growing high-quality is especially to a kind of challenge of technique.Cleanliness factor and other processing parameters (temperature, pressure, reactant gases flow velocity etc.) of the outer time delay reaction cavity of traditional chemical Vapor deposition process growing silicon carbide, reaction cavity all can exert an influence to the quality of silicon carbide epitaxial layers (surface imperfection, doping content, concentration homogeneity, epitaxy layer thickness, thickness evenness etc.).Wherein the thickness evenness of epitaxial wafer and the thickness of epitaxial film all can directly affect the performance of resulting devices, thereby the thickness of thickness evenness and epitaxial wafer is regarded as the important indicator of epitaxial wafer quality.The parameter that affects the thickness of thickness evenness and epitaxial wafer in epitaxy has: reaction cavity structure, the distribution of temperature in reaction cavity, the size of air flow rate in reaction cavity, the distribution situation of each position gas concentration etc. in reaction cavity.The horizontal vapor deposition apparatus of tradition as shown in Figure 1, when epitaxy, due in reaction process, when reacting gas source passes through reaction cavity, there is " exhausting " phenomenon, when reactant gases is parallel to substrate flow, larger in the inflow direction concentration of air-flow, because " consumption " phenomenon is less in the outflow direction concentration of air-flow, so can be thicker near the epitaxial film of air flow stream Inbound and can be thinner at the epitaxial film near air flow stream outgoing direction at substrate surface.On device, manufacture causes very large impact to this ununiformity, especially thicker epitaxial film.
The patent No. is ZL98812328.2, a kind of chemical gaseous phase depositing process of improvement is disclosed in the patent of utility model title for the very uniform silicon carbide epitaxial layers of growth, reactor is heated to sic raw material gas and on reactor endobasal-body, forms the temperature of epitaxial film, the reactor that allows unstripped gas and carrier gas stream cross heating forms silicon carbide epitaxial layers on matrix, carrier gas simultaneously comprises the mixed gas of hydrogen and the second gas, wherein the thermal conductance of the second gas will be lower than hydrogen thermal conductance, lower when making unstripped gas its consumption rate being used single hydrogen to do carrier gas when by reactor, but its operating procedure is complicated, and increase extra gas source, manufacturing cost is increased.In recent years, aspect low-voltage device, silicon carbide epitaxy technology is very ripe, and the thick epitaxy technology of silicon carbide aspect high tension apparatus still exists many deficiencies, as the problem due to homogeneity and surface imperfection is difficult to realize thicker silicon carbide epitaxial layers; Growth velocity is too low, the high cost of the required thick silicon carbide epitaxy sheet of high tension apparatus that causes growing.
[utility model content]
For obtaining the silicon carbide epitaxy sheet having good uniformity, the utility model provides a kind of chemical vapor depsotition equipment for growing silicon carbide epitaxial wafer, by improving cavity configuration, set up therein an arc air-flow catch ring, by being heated to extension in reaction cavity, generate required temperature, pass into again reactant gases and carrier gas, the final silicon carbide epitaxial layers that forms in silicon carbide substrates.The air-flow catch ring of setting up can improve the concentration that air-flow flows out region reaction gases relatively, make up thickness that " consumption " phenomenon causes compared with minor issue to realize the object of silicon carbide epitaxial growth even thickness.
A kind of chemical vapor depsotition equipment for the production of silicon carbide epitaxy sheet of the present utility model, equipment cavity is followed successively by graphite brace table, graphite soft felt layer, quartzy parietal layer and heat induced coil from inside to outside, and equipment cavity also comprises that is fixed on an arc air-flow catch ring on graphite brace table.
Equipment of the present utility model, wherein, catch ring is shaped as arc, wide 0.8～the 1.2cm(of arc catch ring as shown in Figure 8), the silicon carbide substrates adopting in the utility model be shaped as circle, large 1～the 1.5cm of radius of the radius ratio substrate wafer of the arc catch ring arranging, the radian of catch ring adopts 90～180 degree.
Equipment of the present utility model, wherein, catch ring is graphite catch ring, make catch ring at 1500 ℃～1700 ℃,, there is not deformation, ruckbildung in good stability, has guaranteed the stable of gas concentration in catch ring region, when catch ring is high purity graphite, can reduce the impact of impurity on silicon carbide epitaxial growth.
Equipment of the present utility model, wherein, catch ring contact brace table, is directly added and is fixed on graphite brace table by graphite screw, and arranging of catch ring is highly 0.3～0.7cm, balanced to the resistance of air-flow, do not produce eddy current, guaranteed the stable of air-flow.
Production, particularly silicon carbide epitaxy sheet by equipment of the present utility model for epitaxial wafer.
Equipment of the present utility model, wherein, the surface of catch ring is coated with silicon carbide or tantalum carbide coating, to stop the impurity in graphite to spread in reaction cavity.
The equipment that the utility model provides, solved the problem of silicon carbide epitaxial layers air flow stream Inbound and outflow direction uneven thickness, improve the reaction cavity of silicon carbide epitaxial growth, air flow stream outgoing direction in cavity is installed an air-flow catch ring, by the concentration that is used for improving air flow stream outgoing direction region reaction gases of catch ring, make up the less problem of thickness that " consumption " phenomenon causes.
Compared with prior art, the utility model has overcome the thicker gentle side of flowing down of thickness, air-flow top thickness that traditional reaction source produces because of " exhausting " phenomenon on air flow line compared with minor issue.Effect by catch ring increases air-flow below gas source concentration, make the thickness of air-flow below approach top thickness, owing to having reduced the thickness difference of above and below, make homogeneity become less, silicon carbide epitaxy layer thickness becomes more even, and the thickness evenness of the epitaxial wafer that integral body makes is reduced to 1～1.4% by 1.9～2.5%; The utility model also has an advantage to be: in use economical, simply and not cause too much cost to drop into.
Traditional chemical vapour deposition (Chemical Vapor Deposition, be called for short CVD) method, silicon carbide epitaxy generally adopts the method general technology flow process to be: first silicon carbide substrates is packed in reaction cavity, then toward passing into rare gas element in reaction cavity, (be generally H
2gas), and make to maintain in cavity certain pressure, then reaction cavity is heated, generally will be heated to more than 1500 ℃, then pass into reacting gas source (such as SiH
4as silicon source, C
2h
4as carbon source, H
2be generally carrier gas), with this understanding, can in silicon carbide substrates, deposit one deck carborundum films, be epitaxial film, finally cooling.As shown in Figure 2, reaction cavity described in the utility model is cylindrical, from inside to outside, be followed successively by: graphite brace table 4, be used for supporting silicon carbide substrates 5, can prevent that graphite soft felt layer 3 from high temperature decomposing the generation to cavity and polluting, graphite brace table 4 surroundings are by graphite soft felt layer 3 parcel, as thermal insulation layer and ruhmkorff coil 1 in the lump for maintaining the required temperature condition of silicon carbide epitaxial growth in reaction cavity, graphite soft felt layer 3 outside are quartzy parietal layers 2, as reaction chamber body wall, quartzy parietal layer 2 outsides are circle ruhmkorff coils 1, for reaction cavity provides heat, the left side is inlet mouth 7, the right is air outlet 6, air-flow is come in from reaction cavity left end, process high-temperature area also deposits one deck carborundum films in heated silicon carbide substrates, it is epitaxial film, then tail gas is discharged from right-hand member.During experiment, first under normal pressure, to in reaction cavity, clean out, then put into silicon carbide substrates 5, placing catch ring 8, vacuumizing, make cavity internal pressure maintain low-pressure state (20～60Torr) being filled with hydrogen, general 40Torr, start heating, being heated to 1500 ℃～1550 ℃ keeps 5～20 minutes, pass into hydrogen (2～20slm) and ethane and carry out in-situ etch, to clear up surperficial particle or damage, the object that passes into ethane is mainly to suppress overetch and is suppressed at the silica drop formation in etching, then continuing to be heated to 1600～1700 ℃, pass into (2～50sccm) such as (2～50sccm) such as reacting gas source silicon source SiH4 and carbon source C2H4 and doping agent and carry out epitaxy, Deng growing into, target thickness can cut off reaction source and power supply begins to cool down.Utilize Fourier's infrared spectrometric analyzer (FTIR), along air flow line testing experiment point test thickness, determine the homogeneity of air flow line epitaxial wafer, test-results is in Table 1.
Table 1 epitaxial wafer thickness evenness experimental result
| |
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 | 10 | Homogeneity | mean | Standard deviation |
| Tradition | 7.86 | 7.81 | 7.8 | 7.75 | 7.74 | 7.68 | 7.65 | 7.57 | 7.5 | 7.41 | 2.95% | 7.677 | 0.145 |
| Embodiment 1 | 7.87 | 7.86 | 7.84 | 7.81 | 7.79 | 7.76 | 7.71 | 7.7 | 7.69 | 7.69 | 1.16% | 7.772 | 0.072 |
| |
7.88 | 7.87 | 7.84 | 7.82 | 7.78 | 7.75 | 7.69 | 7.67 | 7.66 | 7.66 | 1.42% | 7.762 | 0.088 |
[accompanying drawing explanation]
Below in conjunction with accompanying drawing and example, further the utility model is described,
Fig. 1 is the schematic diagram of traditional horizontal chemical Vapor deposition process growing silicon carbide epitaxial wafer;
Fig. 2 is the schematic diagram of the utility model horizontal chemical Vapor deposition process growing silicon carbide epitaxial wafer;
Fig. 3 vertical view of the present utility model (catch ring radian is 180 °);
Fig. 4 vertical view of the present utility model (catch ring is 90 °);
Fig. 5 test point schematic diagram;
Fig. 6 implements one result figure;
Fig. 7 implements two result figure;
Fig. 8 is catch ring width indication figure;
Wherein: 1-heat induced coil, the quartzy parietal layer of 2-, 3-graphite soft felt layer, 4-graphite brace table, 5-silicon carbide substrates, 6-air stream outlet, 7-airflow inlet, 8-catch ring.
[embodiment]
As shown in Figure 3, the radian of catch ring is 180 degree, and width is 0.9cm, and arranging is highly 0.4cm, by above-mentioned technical process, completes the growth of epitaxial wafer.On the corresponding air flow line of silicon carbide substrates, interval measurement 10 points, put 1 corresponding air-flow top, put 10 corresponding air-flows belows, obtain measuring result as shown in Figure 5, the thickness of the silicon carbide epitaxy sheet that embodiment 1 obtains has been reduced to 0.97% from 2.13%.
As shown in Figure 4, the radian of catch ring is 90 degree, and width is 1.0cm, while arranging highly for 0.5cm, by above-mentioned technical process, completes the growth of epitaxial wafer.On the corresponding air flow line of silicon carbide substrates, interval measurement 10 points, put 1 corresponding air-flow top, put 10 corresponding air-flows belows, obtain measuring result as shown in Figure 6, the thickness evenness of the silicon carbide epitaxy sheet that embodiment 2 obtains has been reduced to 1.19% from 2.13%.
The wide of graphite catch ring is 0.8cm, and height is 0.3cm, the large 1cm of width of radius ratio substrate wafer, and radian is that the thickness evenness of 100 epitaxial wafers that make while spending is reduced to 1.21% by 2.16%.
The wide of graphite catch ring is 1.0cm, and height is 0.5cm, the large 1.2cm of width of radius ratio substrate wafer, and radian is that the thickness evenness of 110 epitaxial wafers that make while spending is reduced to 1.20% by 1.99%.
Be coated with carborundum graphite catch ring wide be 1.2cm, height is 0.7cm, the large 1.5cm of width of radius ratio substrate wafer, radian is that the thickness evenness of 150 epitaxial wafers that make while spending is reduced to 1.21% by 2.16%.
Claims (4)
1. the chemical vapor depsotition equipment for the production of silicon carbide epitaxy sheet, equipment cavity is followed successively by graphite brace table, graphite soft felt layer, quartzy parietal layer and heat induced coil from inside to outside, and described equipment cavity also comprises that is fixed on an arc air-flow catch ring on graphite brace table.
2. equipment as claimed in claim 1, is characterized in that the wide 0.8～1.2cm of described arc catch ring, the large 1～1.5cm of radius of radius ratio substrate wafer, and arranging is highly 0.3～0.7cm.
3. equipment as claimed in claim 1, the radian that it is characterized in that described catch ring is 90～180 degree.
4. equipment as claimed in claim 1, is characterized in that described catch ring is fixed on brace table by graphite screw.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603048A (en) * | 2013-07-04 | 2014-02-26 | 国家电网公司 | Chemical vapor deposition equipment used for producing silicon carbide epitaxial wafer |
| CN104386698A (en) * | 2014-11-06 | 2015-03-04 | 清华大学 | Fluidized bed chemical vapor deposition preparation method of silicon carbide nanowire |
| CN104818527A (en) * | 2015-04-08 | 2015-08-05 | 上海晶盟硅材料有限公司 | Epitaxial wafer production equipment |
| CN112877775A (en) * | 2020-12-30 | 2021-06-01 | 华灿光电（浙江）有限公司 | Reactor of metal organic chemical vapor deposition equipment |
| CN113078050A (en) * | 2021-03-30 | 2021-07-06 | 芜湖启迪半导体有限公司 | C-surface SiC epitaxial structure and filling method of epitaxial groove |
| CN115537768A (en) * | 2022-12-01 | 2022-12-30 | 浙江晶越半导体有限公司 | Silicon carbide chemical vapor deposition method and multi-heat-source horizontal wall heating type reactor |
| CN115613139A (en) * | 2022-12-01 | 2023-01-17 | 浙江晶越半导体有限公司 | Chemical vapor deposition reactor and method for epitaxially growing silicon carbide film |
-
2013
- 2013-07-04 CN CN201320397113.0U patent/CN203474963U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103603048A (en) * | 2013-07-04 | 2014-02-26 | 国家电网公司 | Chemical vapor deposition equipment used for producing silicon carbide epitaxial wafer |
| CN104386698A (en) * | 2014-11-06 | 2015-03-04 | 清华大学 | Fluidized bed chemical vapor deposition preparation method of silicon carbide nanowire |
| CN104818527A (en) * | 2015-04-08 | 2015-08-05 | 上海晶盟硅材料有限公司 | Epitaxial wafer production equipment |
| CN112877775A (en) * | 2020-12-30 | 2021-06-01 | 华灿光电（浙江）有限公司 | Reactor of metal organic chemical vapor deposition equipment |
| CN113078050A (en) * | 2021-03-30 | 2021-07-06 | 芜湖启迪半导体有限公司 | C-surface SiC epitaxial structure and filling method of epitaxial groove |
| CN113078050B (en) * | 2021-03-30 | 2023-03-10 | 安徽长飞先进半导体有限公司 | C-surface SiC epitaxial structure and filling method of epitaxial groove |
| CN115537768A (en) * | 2022-12-01 | 2022-12-30 | 浙江晶越半导体有限公司 | Silicon carbide chemical vapor deposition method and multi-heat-source horizontal wall heating type reactor |
| CN115613139A (en) * | 2022-12-01 | 2023-01-17 | 浙江晶越半导体有限公司 | Chemical vapor deposition reactor and method for epitaxially growing silicon carbide film |
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| GR01 | Patent grant | ||
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Address after: 100031 Xicheng District West Chang'an Avenue, No. 86, Beijing Co-patentee after: GLOBAL ENERGY INTERCONNECTION Research Institute Patentee after: State Grid Corporation of China Address before: 100031 Xicheng District West Chang'an Avenue, No. 86, Beijing Co-patentee before: STATE GRID SMART GRID Research Institute Patentee before: State Grid Corporation of China |
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| CP01 | Change in the name or title of a patent holder | ||
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Effective date of registration: 20171031 Address after: 102211 Beijing city Changping District future science and Technology City Binhe Road No. 18 Co-patentee after: State Grid Corporation of China Patentee after: GLOBAL ENERGY INTERCONNECTION Research Institute Co-patentee after: STATE GRID ZHEJIANG ELECTRIC POWER Co. Address before: 100031 Xicheng District West Chang'an Avenue, No. 86, Beijing Co-patentee before: GLOBAL ENERGY INTERCONNECTION RESEARCH INSTITUTE Patentee before: State Grid Corporation of China |
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Granted publication date: 20140312 |
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