CN203411600U - Linear evaporation source - Google Patents
Linear evaporation source Download PDFInfo
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- CN203411600U CN203411600U CN201320357682.2U CN201320357682U CN203411600U CN 203411600 U CN203411600 U CN 203411600U CN 201320357682 U CN201320357682 U CN 201320357682U CN 203411600 U CN203411600 U CN 203411600U
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- main body
- evaporation source
- cover plate
- linear evaporation
- source according
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Abstract
The utility model discloses a linear evaporation source which comprises a main body and a cover plate arranged above the main body; the main body is integrally formed; grooves are symmetrically formed in two ends of the inner part of the main body; evaporation elements are arranged in the grooves; a heating element is arranged between the two grooves and is positioned below the main body; a row of through holes are formed in the cover plate to form a spray nozzle; the cover plate and the main body are in threaded connection with each other. The linear evaporation source has low possibility of deformation, is high in working efficiency, and can achieve the purpose that thick films are high in uniformity.
Description
Technical field
The utility model relates to a kind of vacuum thermal evaporation coating technique, is specifically related to a kind of linear evaporation source in vacuum thermal evaporation coating technique.
Background technology
Vacuum thermal evaporation plated film is at flat-panel monitor (FPD: be widely used in manufacturing processed Flat Panel Display) and in the industrialization of respective films device such as organic EL (Electro Luminescence) indicating meters, its ultimate principle is to utilize the means of heating to make source be subject to thermal evaporation, by solid phase/liquid phase, become gas phase, then gas molecule or atom transport between evaporation source and substrate (substrate), and the molecule of final evaporation or atom are in the upper deposition of substrate (substrate).
In organic light-emitting display device, the organic luminous layer of transmitting visible ray and the organic layer that approaches organic luminous layer are by utilizing the whole bag of tricks to form, and especially vacuum thermal evaporation film coating method is often used due to its simple technique.In vacuum thermal evaporation film coating method, powdery or solid-state deposition material are filled in smelting furnace, and on the region of expectation, form deposited film by smelting furnace is heated.In vacuum thermal evaporation film coating method, evaporation source is a kind of requisite equipment, yet existing evaporation source in use often there will be following problem: evaporation source long-time heating is easily distortion after using, and efficiency is lower, and plated film is in uneven thickness.
Chinese patent ZL201220704968.9, ZL201020140696.5 have disclosed the structure of different linear evaporation sources, but because the singularity of line source structure causes the scope of its application wideless.
Utility model content
The utility model object is to provide a kind of not yielding, and working efficiency is high, and can realize the linear evaporation source of high uniformity thick film.
The technical solution of the utility model is: a kind of linear evaporation source, for big area, manufacture flat-panel monitor and illumination panel, comprise the main body of linear evaporation source and be arranged at the cover plate of the main body top of linear evaporation source, described main body is one-body molded, at described body interior two ends, symmetry offers groove, in described groove, be provided with evaporation element and form evaporation element, between described two grooves, be positioned at main body below and be provided with heating unit; On described cover plate, offer an exhausting hole and form nozzle, between described cover plate and described main body, be threaded.
Preferably, the 1/8-1/5 that described recess width is described body width.
Preferably, described groove is quartz cell, is provided with evaporation element and forms evaporation element in it.
Preferably, described heating unit is strip heater, and the main body of described strip heater and top is conflicted.
Preferably, described main body two ends offer screw, and on described cover plate also offer screw corresponding to described screw, coordinates and be also provided with bolt with described screw, between described main body and cover plate, through bolt and screw, connect and compose described being threaded.
Preferably, described through-hole aperture is 0.5-5mm, and described through hole length accounts for the 2/5-4/5 of cover plate length, is also provided with baffle plate above described through hole.
Preferably, the distance 1-3cm between described through hole lower end and described main body upper end.
Preferably, described main body and cover plate outside are provided with warming plate.
Preferably, described main body below is also provided with magnetism servo-electric motor water-cooling.
The beneficial effects of the utility model are: by by the main body integrated moulding of linear evaporation source, make main body not yielding, heating unit contacts with the main body of its top, shorten the distance between the through hole on main body and cover plate simultaneously, heating source is placed in the mid-way of two material chambers, make to keep nozzle in the condition of high temperature in evaporate process, prevent from being plugged, working efficiency is higher; The recessed of step examination arranged at cover plate bottom, and cover plate surrounding is closely connected with main body with screw, prevents that material from overflowing from gap, improves material use efficiency, in the through hole of cover plate, baffle plate can be set simultaneously, realizes high uniformity thick film.Simultaneously on line source bottom and both sides line source wall, water cooling plant is housed, guarantee evaporation complete after rapid cooling, to improve products production efficiency.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further described:
Fig. 1 is the structural representation of the utility model embodiment mono-;
Fig. 2 is the structural representation of main body in the utility model embodiment mono-;
Fig. 3 is the vertical view of Fig. 2;
Fig. 4 is the structural representation of the utility model embodiment mono-cover plate;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 is the schematic diagram of the utility model embodiment mono-.
Wherein: 1, heating unit; 2, groove; 3, main body; 4, screw; 5, through hole; 7, upper end; 8, warming plate.
Embodiment
Embodiment mono-: referring to shown in Fig. 1 to 3, a kind of linear evaporation source, comprise the main body 3 of linear evaporation source and be arranged at the cover plate of the main body top of linear evaporation source, described main body is one-body molded, at described body interior two ends, symmetry offers groove 2, in described groove 2, be provided with evaporation element and form evaporation element, between described two grooves 2, be positioned at main body 3 belows and be provided with heating unit 1; On described cover plate, offer an exhausting hole 5 and form nozzles, between described cover plate and described main body, be threaded.
Specifically shown in Figure 2, groove 2 width are the 1/8-1/5 of described main body 3 width, and described heating unit 1 is strip heater, and the main body of described strip heater and top is conflicted; Described main body two ends offer screw 4, and on described cover plate also offer screw corresponding to described screw, coordinates and be also provided with bolt with described screw, between described main body and cover plate, through bolt and screw, connect and compose described being threaded.
Specifically shown in Figure 3, through hole 5 apertures are 0.5-5mm, and described through hole length accounts for the 2/5-4/5 of cover plate length, above described through hole 5, are also provided with baffle plate; The distance 1-3cm of 7 of the upper ends of described through hole 5 lower ends and described main body 3.
In described main body 3 and cover plate outside, be provided with warming plate 8, described main body below is also provided with magnetism servo-electric motor water-cooling.
Adopt the linear evaporation source designing in the utility model, carry out film uniformity test.On the glass substrate of 300mm * 300mm, on longitudinally equidistant position, stick six silicon chips and carry out thickness test.Linear evaporation source size designs according to glass size, the long 400mm of line source, and cover plate upper end nozzle length is 360mm, it is the baffle plate of 120mm that length is placed in nozzle mid-way, covers the nozzle of middle part.In the evaporation element of linear evaporation source, fill organic evaporating materials NPB, utilize PID temperature regulating device to make heater strip be heated to 260 degree, carry out evaporation.As shown in Figure 4, test homogeneity is 4% to test result, has met well the requirement that becomes film preparation in big area.
Above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalent transformations of doing according to the spirit of the utility model main technical schemes or modification, within all should being encompassed in protection domain of the present utility model.
Claims (9)
1. a linear evaporation source, manufactures flat-panel monitor and illumination panel for big area, it is characterized in that: comprise the main body (3) of linear evaporation source and be arranged at the cover plate of the main body top of linear evaporation source, described main body (3) is one-body molded; In the inner two ends of described main body (3) symmetry, offer and in groove (2), described groove, be provided with evaporation element and form evaporation element; Between described two grooves (2), be positioned at main body (3) below and be provided with heating unit (1); On described cover plate, offer an exhausting hole (5) and form nozzle, between described cover plate and described main body, be threaded.
2. a kind of linear evaporation source according to claim 1, is characterized in that: described groove (2) width is the 1/8-1/5 of described main body (3) width.
3. a kind of linear evaporation source according to claim 1, is characterized in that: described groove is quartz cell, is provided with evaporation element and forms evaporation element in it.
4. a kind of linear evaporation source according to claim 1, is characterized in that: described heating unit (1) is strip heater, and the main body of described strip heater and top is conflicted.
5. a kind of linear evaporation source according to claim 1, it is characterized in that: described main body (3) two ends offer screw (4), on described cover plate also offer screw corresponding to described screw, coordinate and be also provided with bolt with described screw, between described main body and cover plate, through bolt and screw, connect and compose described being threaded.
6. a kind of linear evaporation source according to claim 1, is characterized in that: described through hole (5) aperture is 0.5-5mm, and described through hole length accounts for the 2/5-4/5 of cover plate length, is also provided with baffle plate above described through hole.
7. a kind of linear evaporation source according to claim 1, is characterized in that: the distance 1-3cm between described through hole lower end and described main body upper end (7).
8. a kind of linear evaporation source according to claim 1, is characterized in that: described main body (3) and cover plate outside are provided with warming plate (8).
9. a kind of linear evaporation source according to claim 1, is characterized in that: described main body below is also provided with magnetism servo-electric motor water-cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320357682.2U CN203411600U (en) | 2013-06-21 | 2013-06-21 | Linear evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320357682.2U CN203411600U (en) | 2013-06-21 | 2013-06-21 | Linear evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203411600U true CN203411600U (en) | 2014-01-29 |
Family
ID=49974504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320357682.2U Expired - Lifetime CN203411600U (en) | 2013-06-21 | 2013-06-21 | Linear evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203411600U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290365A (en) * | 2013-06-21 | 2013-09-11 | 苏州方昇光电装备技术有限公司 | A linear evaporation source |
| CN105132868A (en) * | 2015-09-25 | 2015-12-09 | 京东方科技集团股份有限公司 | Evaporation source, manufacturing method thereof and evaporation method |
-
2013
- 2013-06-21 CN CN201320357682.2U patent/CN203411600U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290365A (en) * | 2013-06-21 | 2013-09-11 | 苏州方昇光电装备技术有限公司 | A linear evaporation source |
| CN105132868A (en) * | 2015-09-25 | 2015-12-09 | 京东方科技集团股份有限公司 | Evaporation source, manufacturing method thereof and evaporation method |
| US9831430B2 (en) | 2015-09-25 | 2017-11-28 | Boe Technology Group Co., Ltd. | Evaporation system and fabricating method and evaporation method thereof |
| CN105132868B (en) * | 2015-09-25 | 2019-09-27 | 京东方科技集团股份有限公司 | Evaporation source and preparation method thereof, evaporation coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 215125 Room 102, A4 Building, 218 Xinghu Street, Suzhou Industrial Park, Jiangsu Province Patentee after: SUZHOU FANGSHENG PHOTOELECTRICITY SHARE CO.,LTD. Address before: 215125 A4-102, 218 Xinghu Street, Suzhou Park, Jiangsu Province Patentee before: SUZHOU FANGSHENG OPTOELECTRONICS EQUIPMENT & TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140129 |
|
| CX01 | Expiry of patent term |