CN203392870U - Ultrapure ammonia water production system - Google Patents
Ultrapure ammonia water production system Download PDFInfo
- Publication number
- CN203392870U CN203392870U CN201320303281.9U CN201320303281U CN203392870U CN 203392870 U CN203392870 U CN 203392870U CN 201320303281 U CN201320303281 U CN 201320303281U CN 203392870 U CN203392870 U CN 203392870U
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- ultrapure
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- ammonia
- production system
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model discloses an ultrapure ammonia water production system. The ultrapure ammonia water production system comprises a liquid ammonia tank, a pre-treatment tank, an ultrapure water tank, a reduced pressure distillation device, a semi-finished product tank I, a semi-finished product tank II, a pure water tank, a filtering system and a finished product tank. The ultrapure ammonia water production system has the advantages that ultrapure water is injected into the pre-treatment tank by virtue of the ultrapure water tank, liquid ammonia is washed by ultrapure water, metallic ion impurities and non-metallic ion impurities can be effectively removed, secondary pollution is avoided, the filtering system adopts a multistage membrane recycling filtering system, and particulate matters with the diameter being more than 0.5 microns can be removed in large quantity, so that purity of ultrapure ammonia water reaches PPT (part per trillion) level; a production technology of a great scale integrated circuit can be met, so that domestication and localization of the great scale integrated circuit are realized.
Description
Technical field
The utility model relates to superhigh-purity reagent purification techniques, is specifically related to a kind of ultra-pure ammonia water production system.
Background technology
Superhigh-purity reagent is one of indispensable key basic chemical industry raw material during electronic applications microfabrication is made, and is mainly used in cleaning and the etching of chip.
Electronic chemical product generally refers to as the supporting specialty chemicals of electronic industry, and ultra-pure wet electronic chemical product mainly comprises unicircuit and chemical for discrete device, crystal silicon solar by chemical and flat pannel display with chemical etc., its have specification of quality high, functional strong, to producing and the requirement of environment for use cleanliness factor is high and product is more consummate.
Summary of the invention
The utility model pin is swift and violent mainly for domestic microelectronics, photoelectron industry, and the development of electronic chemical product lags behind, required for meeting its production technique, company makes its production domesticization localization by introducing, digest and absorbing advanced foreign technology, the production cost that lowers industry, provides a kind of ultra-pure ammonia water production system.
The scheme that the utility model solves prior art problem is: a kind of ultra-pure ammonia water production system, comprise ammonia tank, pre-treatment tank, ultrapure water pot, vacuum distillation apparatus, work in-process tank one, work in-process tank two, pure water tank, filtering system, finished pot, described ammonia tank is connected to pre-treatment tank middle part, ultrapure water pot is connected to pre-treatment tank top, pre-treatment tank connects vacuum distillation apparatus, vacuum distillation apparatus connects work in-process tank one, work in-process tank one connects work in-process tank two, work in-process tank two tops connect pure water tank, work in-process Guan Er bottom connects filtration unit, filtering system connects finished pot.
As such scheme preferably, described filtering system is Using Multistage Membranes circulated filter system.
The beneficial effects of the utility model are: the utility model injects pre-treatment tank by ultrapure water pot by ultrapure water, liquefied ammonia is washed through ultrapure water, can effectively remove impurity metal ion and nonmetallic ion impurity, avoid occurring secondary pollution phenomenon, filtering system adopts Using Multistage Membranes circulated filter system, can remove in a large number diameter and be greater than 0.5 μ m particulate matter, makes its purity reach PPT level, meet great scale integrated circuit production technique, make its production domesticization, localization.
Accompanying drawing explanation
Fig. 1 is system chart of the present utility model;
Embodiment
As shown in Figure 1, a kind of ultra-pure ammonia water production system, comprise ammonia tank, pre-treatment tank, ultrapure water pot, vacuum distillation apparatus, work in-process tank one, work in-process tank two, pure water tank, filtering system, finished pot, described ammonia tank is connected to pre-treatment tank middle part, ultrapure water pot is connected to pre-treatment tank top, pre-treatment tank connects vacuum distillation apparatus, vacuum distillation apparatus connects work in-process tank one, work in-process tank one connects work in-process tank two, work in-process tank two tops connect pure water tank, work in-process Guan Er bottom connects filtration unit, filtering system connects finished pot, filtering system is Using Multistage Membranes circulated filter system.
The foregoing is only the preferred embodiment that embodies the utility model principle, therefore do not limit protection domain of the present utility model, within every equalization of doing according to the utility model changes the scope of the claims of all containing at the utility model with modification.
Claims (2)
1. a ultra-pure ammonia water production system, it is characterized in that: comprise ammonia tank, pre-treatment tank, ultrapure water pot, vacuum distillation apparatus, work in-process tank one, work in-process tank two, pure water tank, filtering system, finished pot, described ammonia tank is connected to pre-treatment tank middle part, ultrapure water pot is connected to pre-treatment tank top, pre-treatment tank connects vacuum distillation apparatus, vacuum distillation apparatus connects work in-process tank one, work in-process tank one connects work in-process tank two, work in-process tank two tops connect pure water tank, work in-process Guan Er bottom connects filtration unit, and filtering system connects finished pot.
2. ultra-pure ammonia water production system as claimed in claim 1, is characterized in that: described filtering system is Using Multistage Membranes circulated filter system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320303281.9U CN203392870U (en) | 2013-05-30 | 2013-05-30 | Ultrapure ammonia water production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320303281.9U CN203392870U (en) | 2013-05-30 | 2013-05-30 | Ultrapure ammonia water production system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203392870U true CN203392870U (en) | 2014-01-15 |
Family
ID=49904417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320303281.9U Expired - Lifetime CN203392870U (en) | 2013-05-30 | 2013-05-30 | Ultrapure ammonia water production system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203392870U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104743575A (en) * | 2015-03-19 | 2015-07-01 | 苏州晶瑞化学有限公司 | Continuous production method of high-purity ammonia water |
| CN105523570A (en) * | 2016-02-16 | 2016-04-27 | 江苏达诺尔科技股份有限公司 | Preparation method of ppt-scale ultrapure ammonium hydroxide |
| CN114712933A (en) * | 2019-04-09 | 2022-07-08 | 液体堆栈控股有限责任公司 | Method and apparatus for recovering dielectric fluid for immersion cooling |
-
2013
- 2013-05-30 CN CN201320303281.9U patent/CN203392870U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104743575A (en) * | 2015-03-19 | 2015-07-01 | 苏州晶瑞化学有限公司 | Continuous production method of high-purity ammonia water |
| CN104743575B (en) * | 2015-03-19 | 2017-04-12 | 苏州晶瑞化学股份有限公司 | Continuous production method of high-purity ammonia water |
| CN105523570A (en) * | 2016-02-16 | 2016-04-27 | 江苏达诺尔科技股份有限公司 | Preparation method of ppt-scale ultrapure ammonium hydroxide |
| CN114712933A (en) * | 2019-04-09 | 2022-07-08 | 液体堆栈控股有限责任公司 | Method and apparatus for recovering dielectric fluid for immersion cooling |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140115 |
|
| CX01 | Expiry of patent term |