CN201240847Y - Ultra-pure hydrogen peroxide continuous production apparatus - Google Patents
Ultra-pure hydrogen peroxide continuous production apparatus Download PDFInfo
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- CN201240847Y CN201240847Y CNU2008200365848U CN200820036584U CN201240847Y CN 201240847 Y CN201240847 Y CN 201240847Y CN U2008200365848 U CNU2008200365848 U CN U2008200365848U CN 200820036584 U CN200820036584 U CN 200820036584U CN 201240847 Y CN201240847 Y CN 201240847Y
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Abstract
The utility model relates to a high-purity hydrogen dioxide continuous processing device, being composed of a raw material groove (1), an active carbon pre-mixer (2), a micro-filtration ultra-filtration filter (3), a rectifying tower (4) which is formed by connecting multiple towers in series, a counter-osmosis device (5), a nano-filtration device (6), a finished product receiving device (7), a pump (8) and a valve (9); the outlet of the raw material groove (1) is communicated with the inlet of the active carbon pre-mixer (2), the outlet of the active carbon pre-mixer (2) is communicated with the inlet of the micro-filtration ultra-filtration filter (3), the out let of the micro-filtration ultra-filtration filter (3) is communicated with the inlet of the pump (8), the outlet of the pump (8) is communicated with the inlet of the rectifying tower (4) which is formed by connecting multiple towers in series, the outlet of the rectifying tower (4) which is formed by connecting multiple towers in series is communicated with the counter-osmosis device (5) by pipelines, the outlet of the counter-osmosis device (5) is communicated with the inlet of the valve (9) by the pipelines, the outlet of the valve (9) is communicated with the inlet of the nano-filtration device (6) by the pipelines, the outlet of the nano-filtration device (6) is communicated with the finished product receiving device (7) by the pipelines. The manufacturing of the continuous processing device is simple, the cost is low, the technique continuity is high, the quality separating effect is good, the product purity is high, foreign ion content is low, thus being suitable for industrial production in a large scale.
Description
Technical field
The utility model relates to the production equipment of the high-purity chemical reagent of a kind of ultra-clean, especially relates to a kind of ultra-pure hydrogen phosphide quantity-produced device.Ultra-pure hydrogen phosphide is applicable to that mainly microelectronics industry makes in the large-scale integrated circuit semiconducter device industry as cleaning and the usefulness of corrosion.
Background technology
The high-purity chemical reagent of ultra-clean claims microelectronics chemistry product again, is critical base mateiral in the microelectronic industry processing and manufacturing, is mainly used in cleaning and etching in the little course of processing of unicircuit (IC).Its purity and cleanliness factor have very great influence to yield rate, electrical property and the reliability of unicircuit.Along with improving constantly of IC storage content, capacity is also constantly increasing, thereby oxide film becomes thinner.But the alkali metal impurity in the microelectronics chemistry product as impurity such as sodium, calcium, can dissolve in the oxide film and go, thereby caused the decline of anti-insulation voltage, if beavy metal impurity on the surface attached to silicon wafer, will make the proof voltage of P-N knot reduce as copper, iron, chromium, silver etc.Therefore, also more and more higher to the requirement of the granule content of microelectronics chemistry reagent and metals content impurity.
Ultra-pure hydrogen phosphide is a kind of crucial microelectronics chemistry reagent, and being that feed purification is refining with the technical grade hydrogen peroxide normally forms.At present most industrial hydrogen peroxide manufacture technology adopt anthraquinone.The technical grade hydrogen peroxide contains organism, various metal and nonmetallic impurity, mainly contains heavy aromatics, trioctyl phosphate and anthraquinone and derivative thereof etc.At present, the method for industrialization purifying hydrogen peroxide has two kinds: the one, adopt organic carbon adsorpting anion exchange process.It is that raw material is carried out ion-exchange by pump input polymeric adsorbent, remove by filter granule foreign at last, thereby obtain the ultra-pure hydrogen phosphide product, its raw materials for production hydrogen peroxide utilization ratio is low, the production cost height, inferior separating effect, product purity can only meet the SEMI-C1 standard of semiconductor equipment and material structure.The 2nd, adopt single zwitterion exchange to add the zwitterion exchange process.It is that the technical grade superoxol is passed through negatively charged ion, positively charged ion, anion-cation exchange resin continuously, is prepared into the high-purity hydrogen peroxide product.Raw material hydrogen peroxide utilization ratio is low in process of production for it, inferior separating effect, and purity can only reach the requirement of SEMI-C7 standard.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, provides that a kind of technology is continuously strong, good separating effect, purity height, ultra-pure hydrogen phosphide quantity-produced device that foreign matter content is low.
The purpose of this utility model is achieved in that a kind of ultra-pure hydrogen phosphide quantity-produced device, it is characterized in that described device is made up of raw material tank, gac premixed device, micro-filtration ultra filtration filter, multitower series connection rectifying tower, counter-osmosis device, nanofiltration device, finished product susceptor, pump and valve
Described raw material tank outlet is connected with the import of active carbon premixed device by pipeline; The outlet of active carbon premixed device is connected with the import of micro-filtration ultra filtration filter by pipeline; The outlet of micro-filtration ultra filtration filter is connected with pump inlet by pipeline; Pump discharge is connected with the import of multitower series rectification tower by pipeline; The outlet of multitower series rectification tower is connected with the counter-osmosis device import by pipeline; The counter-osmosis device outlet is connected with the valve import by pipeline; Valve outlet port is connected with the import of nanofiltration device by pipeline; The outlet of nanofiltration device is connected with the finished product recipient by pipeline
The aperture of microfiltration membrane is 0.9 μ m in the described micro-filtration ultra filtration filter, and the aperture of ultra-filtration membrane is 0.06 μ m, and the aperture of the nanofiltration membrane of nanofiltration device is 2nm,
The reverse osmosis membrane of described microfiltration membrane, ultra-filtration membrane, counter-osmosis device and nanofiltration membrane all adopt the pyromellitic acid dianhydride material to make.
The utility model device is made comparatively simple, and cost is low, and the technology continuity is strong, mass separation is effective, product purity is high, and impurity ion content is low, is fit to large-scale industrial production.
Description of drawings
Fig. 1 is the overall structure synoptic diagram of the utility model ultra-pure hydrogen phosphide quantity-produced device.
Among the figure: raw material tank 1, gac premixed device 2, micro-filtration ultra filtration filter 3, multitower series connection rectifying tower 4, counter-osmosis device 5, nanofiltration device 6, finished product susceptor 7, pump 8, valve 9.
Embodiment
Referring to Fig. 1, the ultra-pure hydrogen phosphide quantity-produced device that the utility model relates to mainly is made up of raw material tank 1, gac premixed device 2, micro-filtration ultra filtration filter 3, multitower series connection rectifying tower 4, counter-osmosis device 5, nanofiltration device 6, finished product susceptor 7, pump 8 and valve 9.
Described raw material tank 1 outlet is connected with 2 imports of gac premixed device by pipeline, 2 outlets of gac premixed device are connected with 3 imports of micro-filtration ultra filtration filter by pipeline, 3 outlets of micro-filtration ultra filtration filter are connected with pump 8 imports by pipeline, pump 8 outlets are connected with 4 imports of multitower series connection rectifying tower by pipeline, 4 outlets of multitower series connection rectifying tower are connected with counter-osmosis device 5 imports by pipeline, counter-osmosis device 5 outlets are connected with valve 9 imports by pipeline, valve 9 outlets are connected with 6 imports of nanofiltration device by pipeline, and 6 outlets of nanofiltration device are connected with finished product susceptor 7 by pipeline.
The aperture of microfiltration membrane is 0.9 μ m in the described micro-filtration ultra filtration filter 3, and the aperture of ultra-filtration membrane is 0.06 μ m, and the aperture of the nanofiltration membrane of nanofiltration device 6 is 2nm.
The reverse osmosis membrane of described microfiltration membrane, ultra-filtration membrane, counter-osmosis device and nanofiltration membrane all adopt the pyromellitic acid dianhydride material to make.
Its production technique is as follows:
Elder generation is mixed with modified activated carbon the hydrogen peroxide raw material of the technical grade of 1 li of raw material tank at gac premixed device 2, filtering product micro-filtration ultra filtration filter 3 successively carries out classified filtering, filter pump 8 is extracted into multitower series connection rectifying tower 4, in first step tower, add the complexing of metal ion agent, the work in-process that go out tower enter counter-osmosis device 5 and enter reverse osmosis, after treating that reverse osmosis finishes, after valve 9 enters 6 filtrations of nanofiltration device, entering finished product susceptor 7 under the operating pressure of 0.5～0.8MPa, obtain the ultra-pure hydrogen phosphide product at last.
Claims (1)
1, a kind of ultra-pure hydrogen phosphide quantity-produced device, it is characterized in that described device is made up of raw material tank (1), gac premixed device (2), micro-filtration ultra filtration filter (3), multitower series connection rectifying tower (4), counter-osmosis device (5), nanofiltration device (6), finished product susceptor (7), pump (8) and valve (9)
Described raw material tank (1) outlet is connected with gac premixed device (2) import by pipeline, gac premixed device (2) outlet is connected with micro-filtration ultra filtration filter (3) import by pipeline, micro-filtration ultra filtration filter (3) outlet is connected with pump (8) import by pipeline, pump (8) outlet is connected with the import of multitower series connection rectifying tower (4) by pipeline, multitower series connection rectifying tower (4) outlet is connected with counter-osmosis device (5) import by pipeline, counter-osmosis device (5) outlet is connected with valve (9) import by pipeline, valve (9) outlet is connected with nanofiltration device (6) import by pipeline, nanofiltration device (6) outlet is connected with finished product susceptor (7) by pipeline
The aperture of microfiltration membrane is 0.9 μ m in the described micro-filtration ultra filtration filter (3), and the aperture of ultra-filtration membrane is 0.06 μ m, and the aperture of the nanofiltration membrane of nanofiltration device (6) is 2nm,
The reverse osmosis membrane of described microfiltration membrane, ultra-filtration membrane, counter-osmosis device and nanofiltration membrane all adopt the pyromellitic acid dianhydride material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200365848U CN201240847Y (en) | 2008-06-13 | 2008-06-13 | Ultra-pure hydrogen peroxide continuous production apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200365848U CN201240847Y (en) | 2008-06-13 | 2008-06-13 | Ultra-pure hydrogen peroxide continuous production apparatus |
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| CN201240847Y true CN201240847Y (en) | 2009-05-20 |
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| CNU2008200365848U Expired - Lifetime CN201240847Y (en) | 2008-06-13 | 2008-06-13 | Ultra-pure hydrogen peroxide continuous production apparatus |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102701158A (en) * | 2012-06-21 | 2012-10-03 | 苏州晶瑞化学有限公司 | Continuous preparation method for high-purity hydrogen peroxide |
| CN102757019A (en) * | 2012-06-14 | 2012-10-31 | 天津大学 | System and method for concentrating and purifying hydrogen peroxide |
| JP2016524531A (en) * | 2013-06-04 | 2016-08-18 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | Method for reducing total organic carbon in wastewater |
| CN108101002A (en) * | 2018-01-25 | 2018-06-01 | 江苏理文化工有限公司 | A kind of method for improving hydrogen peroxide quality of finished |
| CN112062096A (en) * | 2020-08-31 | 2020-12-11 | 北京化工大学 | Production device and production method of electronic-grade hydrogen peroxide aqueous solution |
-
2008
- 2008-06-13 CN CNU2008200365848U patent/CN201240847Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102757019A (en) * | 2012-06-14 | 2012-10-31 | 天津大学 | System and method for concentrating and purifying hydrogen peroxide |
| CN102757019B (en) * | 2012-06-14 | 2014-05-21 | 天津大学 | System and method for concentrating and purifying hydrogen peroxide |
| CN102701158A (en) * | 2012-06-21 | 2012-10-03 | 苏州晶瑞化学有限公司 | Continuous preparation method for high-purity hydrogen peroxide |
| JP2016524531A (en) * | 2013-06-04 | 2016-08-18 | ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ | Method for reducing total organic carbon in wastewater |
| CN108101002A (en) * | 2018-01-25 | 2018-06-01 | 江苏理文化工有限公司 | A kind of method for improving hydrogen peroxide quality of finished |
| CN108101002B (en) * | 2018-01-25 | 2021-09-14 | 江苏理文化工有限公司 | Method for improving quality of hydrogen peroxide finished product |
| CN112062096A (en) * | 2020-08-31 | 2020-12-11 | 北京化工大学 | Production device and production method of electronic-grade hydrogen peroxide aqueous solution |
| CN112062096B (en) * | 2020-08-31 | 2022-08-23 | 北京化工大学 | Production device and production method of electronic-grade hydrogen peroxide aqueous solution |
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| C14 | Grant of patent or utility model | ||
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| CP01 | Change in the name or title of a patent holder |
Address after: 214423, No. 1, Changqing North Road, Jiangyin Industrial Park, Zhouzhuang Town, Jiangsu, China Patentee after: Jiangyin Runma Electronic Material Co., Ltd. Address before: 214423, No. 1, Changqing North Road, Jiangyin Industrial Park, Zhouzhuang Town, Jiangsu, China Patentee before: Jiangyin Runma Electronic Material Co., Ltd. |
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| CX01 | Expiry of patent term |
Granted publication date: 20090520 |
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| CX01 | Expiry of patent term |