CN203365493U - Electrical property tester for MEMS accelerometers - Google Patents
Electrical property tester for MEMS accelerometers Download PDFInfo
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- CN203365493U CN203365493U CN 201320440499 CN201320440499U CN203365493U CN 203365493 U CN203365493 U CN 203365493U CN 201320440499 CN201320440499 CN 201320440499 CN 201320440499 U CN201320440499 U CN 201320440499U CN 203365493 U CN203365493 U CN 203365493U
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Abstract
The utility model discloses an electrical property tester for MEMS accelerometers. The tester comprises an upper clamping plate, a lower clamping plate and a positioning mechanism. The upper surface and the lower surface of the upper clamping plate are provided with an upper groove and a lower groove respectively. A plurality of T-shaped through holes are successively arranged between the upper groove and the lower groove of the upper clamping plate, and each T-shaped through hole is formed by a first pin hole and a concave hole which communicate with each other. An elastic probe is embedded in each T-shaped through hole and a through hole, with one end of the probe passing through the first pin hole and a second pin hole successively and extending out of a chip slot, and the other end passing through and extending out of the through hole. The positioning mechanism comprises a cover with a through hole at the center, and two bolts composed of rods and heads; and a cap, a second spring and a T-shaped push rod for pressing against the back of a MEMS sensor chip are successively arranged inside the through hole from top to bottom. The tester provided can position precisely and self-adapt to fasten a MEMS chip. The tester can also adjust the contact pressure between the elastic probe and MEMS chip pins according to the features of each MEMS chip.
Description
Technical field
The utility model relates to the electric performance test technical field, is specifically related to a kind of MEMS acceleration transducer electric characteristic detecting apparatus.
Background technology
In the research and development and large-scale production process of semi-conductor chip, all need all kinds of performances of chip are tested, chip test base is the critical component in proving installation.The function of test bench is by the transmission of electric signal and electric current between chip positioning clamping and wiring board, good and bad reliability and the accuracy that directly affects chip testing of its function.Along with the travelling speed of chip improves with electronic product size Minus less day by day, the requirement of test bench performance is also improved day by day.In general, the critical piece of test bench comprises spring probe, probe carriage, other electronics web members.The pin cave is arranged to place the needle body of spring probe in probe carriage, needle body is clamping upper moving pin, spring and the lower moving pin that is placed on its inside, and keeps good contact to guarantee the transmission of electric current and electric signal with moving pin.Moving pin move to keep the electronics connection between chip and lower-class line plate in needle body up and down, also can compensation chips and the dimensional tolerence of the another parts of proving installation.
Summary of the invention
The utility model purpose is to provide a kind of MEMS acceleration transducer electric characteristic detecting apparatus, this electric characteristic detecting apparatus can accurately be located and the fixing MEMS chip of self-adaptation, and can should adjust the contact of flexibility test rod and MEMS chip pin according to MEMS chip specific phase separately, thereby improve measuring accuracy and accuracy.
For achieving the above object, the technical solution adopted in the utility model is: a kind of MEMS acceleration transducer electric characteristic detecting apparatus, comprise train wheel bridge, lower plate and detent mechanism, the upper surface of described train wheel bridge and lower surface have upper groove and low groove, train wheel bridge is positioned at the upper groove both sides and is respectively equipped with left arc slot, right arc slot, left arc slot one end has the installation through hole, and the right arc slot other end has another through hole is installed;
Offer successively several between the upper groove of described train wheel bridge and low groove and be communicated with " T " through hole formed by the first pin hole and shrinkage pool, described lower plate embeds in low groove and has the through hole corresponding with " T " through hole, one supporting plate with the chip groove for placing the MEMS sensing chip embeds in described upper groove, is provided with several the second pin holes in this chip groove;
One flexibility test rod embeds in described " T " through hole and through hole, and an end of flexibility test rod runs through the first pin hole, the second pin hole exposed chip groove successively, and the other end of flexibility test rod runs through through hole and exposes;
Described detent mechanism comprises that center has in the lid of through hole and 2 keys that are comprised of rod and head, this through hole and is disposed with from top to bottom button lid, the second spring and for being pressed in the "T"-shaped push rod at the MEMS sensing chip back side, the rod of described 2 keys is installed on respectively on the lid lower surface, the head of key is used for embedding in the installation through hole of described left arc slot, right arc slot, thereby realizes that rod moves in left arc slot, right arc slot.
In technique scheme, further improved plan is as follows:
1. in such scheme, the rod of described key embeds in Gan hole, lid lower surface, and this lid side surface offers the threaded hole be communicated with the bar hole, and a threaded rod screws in threaded hole, for fastening described key.
2. in such scheme, the upper groove of described train wheel bridge and low groove vertical setting in the horizontal direction.
Because technique scheme is used, the utility model compared with prior art has following advantages and effect:
The utility model MEMS acceleration transducer electric characteristic detecting apparatus, its detent mechanism comprises that center has lid and 2 keys that are comprised of rod and head of through hole, be disposed with from top to bottom the button lid in this through hole, the second spring and for being pressed in the MEMS sensing chip back side and being positioned at the "T"-shaped push rod directly over the chip groove, the rod of described 2 keys is installed on respectively on the lid lower surface, the head of key is for embedding described left arc slot, in the installation through hole of right arc slot, thereby realize that rod is at left arc slot, mobile in right arc slot, knob lid is regulated T-shaped push rod by the second spring and is withstood chip and make the position of the pin of chip over against pin hole, the position of every two pin hole grooves and the site error of chip pin are no more than 0.01MM, secondly, during operation, key need move along left and right arc slot, thereby is conducive to adjust the surface of contact of MEMS chip and flexibility test rod.
The accompanying drawing explanation
Fig. 1 is the utility model MEMS acceleration transducer electric characteristic detecting apparatus structural representation;
Fig. 2 is the utility model detent mechanism structural representation;
Fig. 3 is electric characteristic detecting apparatus partial structurtes schematic diagram one for the utility model MEMS acceleration transducer;
Fig. 4 is electric characteristic detecting apparatus partial structurtes schematic diagram two for the utility model MEMS acceleration transducer.
In above accompanying drawing: 1, train wheel bridge; 2, lower plate; 3, detent mechanism; 4, upper groove; 5, low groove; 6, left arc slot; 7, right arc slot; 81, through hole is installed; 82, through hole is installed; 9, " T " through hole; 91, the first pin hole; 92, shrinkage pool; 10, through hole; 11, chip groove; 111, the second pin hole; 12, supporting plate; 13, flexibility test rod; 14, lid; 141, through hole; 142, bar hole; 143, threaded hole; 15, key; 151, rod; 152, head; 16, button lid; 17, the second spring; 18, "T"-shaped push rod; 19, threaded rod.
Embodiment
Below in conjunction with embodiment, the utility model is further described:
Embodiment: a kind of MEMS acceleration transducer electric characteristic detecting apparatus, comprise train wheel bridge 1, lower plate 2 and detent mechanism 3, the upper surface of described train wheel bridge 1 and lower surface have upper groove 4 and low groove 5, train wheel bridge 1 is positioned at upper groove 4 both sides and is respectively equipped with left arc slot 6, right arc slot 7, left arc slot 6 one ends have installs through hole 81, and right arc slot 7 other ends have another through hole 82 is installed;
Offer successively several between the upper groove 4 of described train wheel bridge 1 and low groove 5 and be communicated with " T " through hole 9 formed by the first pin hole 91 and shrinkage pool 92, described lower plate 2 embeds in low groove 5 and has the through hole 10 corresponding with " T " through hole 9, one supporting plate 12 with the chip groove 11 for placing the MEMS sensing chip embeds in described upper groove 4, is provided with several the second pin holes 111 in this chip groove 11;
One flexibility test rod 13 embeds in described " T " through hole 9 and through hole 10, and an end of flexibility test rod 13 runs through the first pin hole 91, the second pin hole 111 exposed chip groove 11 successively, and the other end of flexibility test rod 13 runs through through hole 10 and exposes;
Described detent mechanism 3 comprises that center has in the lid 14 of through hole 141 and 2 keys 15 that are comprised of rod 151 and head 152, this through hole 141 and is disposed with from top to bottom button lid the 16, second spring 17 and for being pressed in the "T"-shaped push rod 18 at the MEMS sensing chip back side, the rod 151 of described 2 keys 15 is installed on respectively on lid 14 lower surfaces, the head 152 of key 15 is in the installation through hole 81,82 that embeds described left arc slot 6, right arc slot 7, thereby realizes that rod 151 is in left arc slot 6, the interior movement of right arc slot 7.
The rod 151 of above-mentioned key 15 embeds in lid 14 Gan holes, lower surface 142, and these lid 14 side surfaces offer threaded hole 143, one threaded rods 19 that are communicated with bar hole 142 and screw in threaded hole 143, for fastening described key 15.
The upper groove 4 of above-mentioned train wheel bridge 1 and low groove 5 vertical setting in the horizontal direction.
While adopting above-mentioned MEMS acceleration transducer to use electric characteristic detecting apparatus, its knob lid is regulated T-shaped push rod by the second spring and is withstood chip and make the position of the pin of chip over against pin hole, and the position of every two pin hole grooves and the site error of chip pin are no more than 0.01MM; Secondly, during operation, key need move along left and right arc slot, thereby is conducive to adjust the surface of contact of MEMS chip and flexibility test rod.
Above-described embodiment is only explanation technical conceive of the present utility model and characteristics, and its purpose is to allow the person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (3)
1. a MEMS acceleration transducer electric characteristic detecting apparatus, it is characterized in that: comprise train wheel bridge (1), lower plate (2) and detent mechanism (3), the upper surface of described train wheel bridge (1) and lower surface have upper groove (4) and low groove (5), train wheel bridge (1) is positioned at upper groove (4) both sides and is respectively equipped with left arc slot (6), right arc slot (7), left arc slot (6) one ends have installs through hole (81), and right arc slot (7) other end has another through hole (82) is installed;
Offer successively several between the upper groove (4) of described train wheel bridge (1) and low groove (5) and be communicated with " T " through hole (9) formed by the first pin hole (91) and shrinkage pool (92), described lower plate (2) embeds in low groove (5) and has the through hole (10) corresponding with " T " through hole (9), one supporting plate (12) with the chip groove (11) for placing the MEMS sensing chip embeds in described upper groove (4), is provided with several the second pin holes (111) in this chip groove (11);
One flexibility test rod (13) embeds in described " T " through hole (9) and through hole (10), one end of flexibility test rod (13) runs through the first pin hole (91), the second pin hole (111) exposed chip groove (11) successively, and the other end of flexibility test rod (13) runs through through hole (10) and exposes;
Described detent mechanism (3) comprises that center has the lid of through hole (141) (14) and 2 keys (15) that are comprised of rod (151) and head (152), be disposed with from top to bottom button lid (16) in this through hole (141), the second spring (17) and for being pressed in the "T"-shaped push rod (18) at the MEMS sensing chip back side, the rod (151) of described 2 keys (15) is installed on respectively on lid (14) lower surface, the head (152) of key (15) is for embedding described left arc slot (6), the installation through hole (81 of right arc slot (7), 82) in, thereby realize that rod (151) is in left arc slot (6), mobile in right arc slot (7).
2. MEMS acceleration transducer electric characteristic detecting apparatus according to claim 1, it is characterized in that: the rod (151) of described key (15) embeds in Gan hole, lid (14) lower surface (142), this lid (14) side surface offers the threaded hole (143) be communicated with bar hole (142), one threaded rod (19) screws in threaded hole (143), for fastening described key (15).
3. MEMS acceleration transducer electric characteristic detecting apparatus according to claim 1, is characterized in that: the upper groove (4) of described train wheel bridge (1) and low groove (5) vertical setting in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320440499 CN203365493U (en) | 2013-07-23 | 2013-07-23 | Electrical property tester for MEMS accelerometers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320440499 CN203365493U (en) | 2013-07-23 | 2013-07-23 | Electrical property tester for MEMS accelerometers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203365493U true CN203365493U (en) | 2013-12-25 |
Family
ID=49813238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320440499 Expired - Lifetime CN203365493U (en) | 2013-07-23 | 2013-07-23 | Electrical property tester for MEMS accelerometers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203365493U (en) |
-
2013
- 2013-07-23 CN CN 201320440499 patent/CN203365493U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20131225 |