CN203348046U - Piezoelectric ceramic diaphragm pump - Google Patents
Piezoelectric ceramic diaphragm pump Download PDFInfo
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- CN203348046U CN203348046U CN 201320237764 CN201320237764U CN203348046U CN 203348046 U CN203348046 U CN 203348046U CN 201320237764 CN201320237764 CN 201320237764 CN 201320237764 U CN201320237764 U CN 201320237764U CN 203348046 U CN203348046 U CN 203348046U
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Abstract
The utility model discloses a piezoelectric ceramic diaphragm pump which comprises an elastic membrane, a ball shell, a vibration tube, a piezoelectric element, a pump cavity upper cover, a sealing gasket, a pump cavity bottom cover, an inlet one-way valve, an outlet one-way valve and a membrane. The piezoelectric element is connected to the outer wall of one end of the vibration tube. The ball shell is connected to the end face of the other end of the vibration tube. An opening position of the ball shell is sealed by the elastic membrane. A common end of the piezoelectric element and the vibration tube are fixedly connected to the pump cavity upper cover. The membrane is arranged in the pump cavity upper cover. The pump cavity upper cover is fixedly connected with the sealing gasket and the pump cavity bottom cover. The inlet one-way valve and the outlet one-way valve are arranged on the pump cavity bottom cover. By the adoption of the technical scheme, the piezoelectric ceramic diaphragm pump has the advantages of being simple in structure, convenient to control, high in output efficiency, capable of driving high with frequency, free of pollution, corrosion resistant, large in liquid pumping amount at one time, and capable of maintaining quantitative input liquid.
Description
Technical field
The utility model belongs to fluid pump technical field in precision optical machinery, is specifically related to a kind of piezoelectric constant diaphragm pump.
Background technique
Traditional have a valve formula piezoelectric constant displacement pump, (as Chinese patent CN100392245C, CN 102192135 B, CN101589233B, CN1179127C) utilizes the periodicity bending deflection of piezoelectricity metal laminate structure, change the pump chamber volume, thereby cause that pump chamber pressure changes, realize the directional flow of liquid under the cooperation of importing and exporting one-way valve opens and closes.The resonant frequency of the laminated structure of its piezoelectric constant generally could be brought into play preferably the performance of piezoceramic material more than the hundreds of hertz.But traditional one-way valve dynamic response characteristic is poor, and the time there is serious hysteresis quality in the work of Piezoelectric Laminated respective outer side edges, causes having the frequency optimum traffic of valve formula piezoelectricity displacement pump generally all below 200 Hz, therefore its efficiency is not fully exerted.Than the passive type one-way valve, although use the driving type piezoelectric actuator aggressive valve, as piezo-stack type or piezo crystals chip aggressive valve (as Chinese patent CN201057136Y), frequency of okperation to the raising piezoelectric pump is favourable, reduced to a certain extent the hysteresis quality of valve, but it exists valve port to open the problem that displacement is less or ouput force is less and cause flow to descend, under high frequency condition, the pump oscillator is difficult for synchronizeing with the valve oscillator, and the valve control system complexity needed, be not easy to Integration Design.The size that reduces valve is conducive to the raising of its resonant frequency, therefore utilizes unidirectional micro-valve of MEMS fabrication techniques to have good high frequency characteristics (as U.S. Pat 20090214358A1), but the MEMS complex manufacturing technology, cost is higher, is unfavorable for promoting.
Moreover the laminated structure of piezoelectric constant is because the hysteresis quality of valve can't be operated under resonant frequency, its deformation quantity is less, causes single to extract flow quantity less.And one-way valve can not be fully idealized, more or less can there be liquid flowing loss in the one-way valve place, finally causes the drawing liquid decrease in efficiency of pump.In the situation that contain bubble or impurity in liquid stream, the little one-way valve that more easily causes of single drawing liquid amount stops up, normally extracting liquid.
Therefore, the contradiction between the high frequency characteristics of the low frequency characteristic of one-way valve and piezoelectric element and increase single drawing liquid amount become the problem that has valve formula piezoelectric constant displacement pump to solve.
In addition, in the patent application (a kind of centrifugal principle that utilizes is realized the piezoelectric ceramic pump that fluid is mobile) of China Science & Technology University, the patent No. (CN 101435421B) is used piezoelectric element to drive metal tube to do fan-shaped or circumference yaw motion, under the effect of centrifugal force, the liquid in metal tube is extracted out.During this pump work, the liquid discharge head piece is all the time in vibrational state, and liquid is the sprinkling shape, is difficult to meet the demand of practical application.The piezoelectric constant diaphragm pump the utility model proposes can effectively address this problem, and utilizes isolating film to accomplish pollution-free and corrosion-resistant, has improved working life.
The model utility content
For the high frequency characteristics that solves piezoelectric element in valve piezoelectricity displacement pump and the incompatible problem of low frequency characteristic of valve, the utility model provides a kind of piezoelectric constant diaphragm pump.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the utility model is achieved through the following technical solutions:
A kind of piezoelectric constant diaphragm pump, comprise elastic film, spherical shell, vibrating tube, piezoelectric element, the pump chamber upper cover, sealing gasket, the pump chamber bottom, the import one-way valve, outlet one-way valve and barrier film, one end outer wall of described vibrating tube connects described piezoelectric element, the end face of the other end connects described spherical shell, and the opening of described spherical shell is sealed by described elastic film, the common end of described piezoelectric element and described vibrating tube is fixedly connected on described pump chamber upper cover, in described pump chamber upper cover, described barrier film is installed, and described pump chamber upper cover and described sealing gasket, described pump chamber bottom is fixedly connected with, described import one-way valve and described outlet one-way valve are installed on described pump chamber bottom.
Further, described elastic film, described spherical shell, described vibrating tube, described pump chamber upper cover and described barrier film form Seal cage, and are marked with driving liquid in described Seal cage; Described pump chamber upper cover, described sealing gasket and described pump chamber bottom have formed pump chamber; The influent stream mouth also is installed on described pump chamber bottom and goes out head piece.
Further, described piezoelectric element can and be connected in outer wall one side of described vibrating tube for one; Described piezoelectric element can and be connected in the deformation that the outer wall relative position of described vibrating tube produces opposite direction for two; Described piezoelectric element can be 2n n=2,3,4 ..., and the outer wall that is connected in described vibrating tube evenly places along the external diameter of described vibrating tube, and oscillator is equally divided into symmetrical two groups in position, and described two groups of oscillators produce the distortion of opposite direction.
Further, described piezoelectric element can adopt piezoelectric ceramic, piezoelectric ceramic tube, piezoelectric constant doughnut or be deposited on a kind of in the piezoelectric thin-film structure of described vibrating tube outer wall.
Further, described piezoelectric element adopts described piezoelectric ceramic tube, and described piezoelectric ceramic tube is socketed on described vibrating tube, the outer wall of its inwall and described vibrating tube bonding, and common bonding end is fixed in described pump chamber; Described piezoelectric ceramic tube wall electrode on average is divided into 2 parts, and the two-way drive voltage signal applied is phase phase difference 180 degree when vibrating tube is vibrated, and while stopping vibrating, are consistent.
Further, described vibrating tube adopts metallic material; Described spherical shell adopts plastics or glass material; Described elastic film and described barrier film adopt rubber or latex material; Described driving liquid is the liquid that water or density and the ratio of viscosity are greater than water.
Further, described metal tube external diameter is 0.1～6mm, and internal diameter is 0.05～5mm, and length is more than or equal to 20 times of external diameter, and described metal tube length is greater than 3 times of described piezoelectric element length.
Further, described piezoelectric ceramic thickness is 0.01～5mm, and width is 0.5～10mm, and length is greater than 5 times of thickness; Described to be deposited on the outer field Thin Piezoelectric film thickness of metal tube be 0.01～0.2mm, and length is greater than 5 times of external diameter; Described piezoelectric ceramic tube or described piezoelectric constant doughnut external diameter are 0.1～10mm, and internal diameter is 0.08～5mm, and length is greater than 5 times of external diameter.
Further, described piezoelectric element and described vibrating tube adopt epoxy resin glue or AB glue or Instant cement bonding, or described piezoelectric element adopts the piezoelectric constant sintering process to be cemented on the metal tube outer wall.
Further, described barrier film and described pump chamber upper cover adopt epoxy resin glue or AB glue or Instant cement bonding, and described elastic film and described spherical shell adopt epoxy resin glue or AB glue or Instant cement bonding.
Preferably, the utility model can adopt different piezoelectric element structures, thereby realizes the interior fan-shaped yaw motion of face of metal tube, has following four kinds of technological schemes:
Technological scheme one:
As shown in Figure 5, piezoelectric element adopts the piezo-electric sheet structure, the polarization of piezo-electric sheet through-thickness, and arrangement parallel with metal tube, be connected in the metal tube outer wall along its length, with a lateral electrode of metal tube bonding, connects publicly, and the opposite side electrode connects drive voltage signal.Can reduce the drive voltage signal quantity needed by the change of piezoelectric element polarised direction.
Technological scheme two:
As shown in Figure 6, piezoelectric element adopts piezo tube or piezoelectricity doughnut structure, the piezo tube radial polarised, and arrangement parallel with metal tube, be connected in the metal tube outer wall along its length.Piezo tube wall electrode ground connection, the inwall electrode connects drive voltage signal, can improve operating security.
Technological scheme three:
As shown in Figure 7, piezoelectric element adopts piezoelectric thin-film structure, adopts coating process to be attached directly on the metal tube outer wall.Piezoelectric film radially polarizes, and with the inwall electrode grounding that metal tube adheres to, wall electrode connects respectively the driving signal after being divided into two parts, and the two-way drive voltage signal applied is phase phase difference 180 degree when vibrating tube is vibrated, and while stopping vibrating, are consistent.
Technological scheme four:
As shown in Figure 8, piezoelectric element adopts the larger piezo tube structure of internal diameter, and the piezo tube internal diameter is a bit larger tham the metal tube external diameter, and piezoelectric ceramic tube is socketed on metal tube, its inwall and metal tube outer wall bonding.The piezo tube radial polarised, piezo tube inwall electrode grounding, wall electrode connects respectively the driving signal after being divided into two parts, and the two-way drive voltage signal applied is phase phase difference 180 degree when vibrating tube is vibrated, and while stopping vibrating, are consistent.
Further, can adopt different vibrating tube structures, realize the efficient coupling of piezoelectric element and vibrating tube, have following two kinds of technological schemes:
Technological scheme five:
As shown in Figure 9, the metal tube cross section is square, and inner hole section is circular.Piezoelectric element is connected on two relative square faces of position.While adopting piezo-electric sheet, coupling effect is better.
Technological scheme six:
As shown in figure 10, use the array type metal tubular construction, be bonded together as four metal tubes are mutually to 90 degree positions placements, share a spherical shell, piezoelectric element is connected to the both sides of oscillating body.
For piezoelectric constant diaphragm pump of the present utility model, also there are some links through particular design, shown in being summarized as follows:
The utility model piezoelectric constant diaphragm pump, because drive part vibrates, if make the vibrational energy of drive part that the least possible loss be arranged, the volume and weight that increases pump chamber is the most direct way, but this method is unfavorable for the microminiaturization of pump; As shown in figure 11, adopt the technological scheme of tuning-fork type fixed structure, weight to base requires greatly to reduce, it is less that the pump housing can be done, and two identical driving structure A1 be placed on same planes parallel with A2 share a pump chamber, two drive parts vibrate simultaneously and stop simultaneously, but direction of vibration is contrary all the time, the stressed of base is balance all the time, cut off the path of Vibration propagation.
The utility model piezoelectric constant diaphragm pump, independence separately due to drive part and drawing liquid part, the mode that can adopt array to drive, realize the output of larger flow and pressure, its technological scheme is: each drive part is separate, line up array, share a pump chamber, keep synchronous vibration and stop.
The utility model piezoelectric constant diaphragm pump, operation cycle is by imbibition and release two processes of liquid and form, and the imbibition overlong time can be aggravated the discontinuous of flow of fluid.In order to improve the persistency of flow of fluid; As shown in figure 12, can adopt the dual-drive technology scheme: two diaphragm pumps share a fluid passage, and four passive type one-way valves are regulated suction and the extrusion of fluid, and drive part A1 and A2 be vibration alternately, during the left-half imbibition, right half part is released liquid, and during the right half part imbibition, left-half is released liquid.
The utility model piezoelectric constant diaphragm pump, during vibration, can adopt sine wave, square wave or pyramidal wave to drive piezoelectric element, the single order crooked syntony frequency that driver frequency is system, stop afterwards powering up, complete a drawing liquid cycle, a kind of drive waveforms U1 and U2 as shown in figure 13 is the two-way drive voltage signal, and when two paths of signals vibrates in vibrating tube, phase phase difference 180 degree, be consistent while stopping vibrating.Vibrating tube, in vibration processes, drives in pipeline liquid from starting to flow to the vibrating tube retainer shaft to relative static, and the resonant frequency of whole vibration system can change, and the resonant frequency of system is mainly on a declining curve, after balance, remains unchanged; During closed loop control, obtain the drift of resonant frequency by the phase difference of the electric current on the detection piezoelectric element and voltage, add feeder loop to carry out frequency compensation.Can come by regulating driving voltage amplitude flow and the delivery pressure of control pump.
Compared with prior art, the utlity model has following beneficial effect:
The utility model adopts drive part and drawing liquid part separate design, and having solved has piezoelectric element in valve piezoelectricity displacement pump high frequency characteristics and one-way valve can only be operated in the problem of low frequency preferably; Single Liquid extracting amount is large, has reduced one-way valve and the requirement for the treatment of drawing liquid body ideality; And the liquid that single extracts can keep for a long time; Structure and driving mode are simple; Due to the effect of isolating film, can also accomplish pollution-free and corrosion-resistant: treat the drawing liquid body and drive liquid to be separated from each other, treat that the drawing liquid body only contacts pump chamber, the not contaminated and contact of other any parts of the pump housing; Pump housing miscellaneous part can not treated the drawing liquid body yet and produce pollution, coats resistant material at the pump chamber position and can extract corrosive liquids.The structural design of employing tuning-fork type has reduced the loss of vibrational energy, has improved the operational efficiency of pump; Adopt array architecture can meet different traffic demands; Adopt two driving structure can reduce the pulsating nature of liquid stream.Radial dimension can reach millimeter, submillimeter rank.Can be used on the fields such as medical treatment and pharmacy, Aero-Space.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technological means of the present utility model, and can be implemented according to the content of specification, below with preferred embodiment of the present utility model and coordinate accompanying drawing to be described in detail as follows.Embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
The accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and schematic description and description of the present utility model, for explaining the utility model, does not form improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the utility model piezoelectricity barrier film pump structure master sectional view.
The location diagram that Fig. 2 is the utility model piezoelectricity diaphragm pump piezoelectric element and vibrating tube while adopting the excitation of single piezoelectric element;
The location diagram of piezoelectric element and vibrating tube when Fig. 3 is two piezoelectric elements excitations of the utility model piezoelectricity diaphragm pump employing;
The location diagram that Fig. 4 is the utility model piezoelectricity diaphragm pump piezoelectric element and vibrating tube while adopting the excitation of a plurality of piezoelectric elements;
One of sectional drawing that when Fig. 5 (a) is two piezo-electric sheets of the utility model piezoelectricity diaphragm pump employing, piezoelectric element is connected with vibrating tube;
Two of the sectional drawing that when Fig. 5 (b) is two piezo-electric sheets of the utility model piezoelectricity diaphragm pump employing, piezoelectric element is connected with vibrating tube;
One of sectional drawing that when Fig. 6 (a) is two piezo tube of the utility model piezoelectricity diaphragm pump employing or piezoelectricity doughnut, piezoelectric element is connected with vibrating tube;
Two of the sectional drawing that when Fig. 6 (b) is two piezo tube of the utility model piezoelectricity diaphragm pump employing or piezoelectricity doughnut, piezoelectric element is connected with vibrating tube;
The sectional drawing that when Fig. 7 is the utility model piezoelectricity diaphragm pump employing piezoelectric film, piezoelectric element is connected with vibrating tube;
Fig. 8 is the utility model piezoelectricity diaphragm pump sectional drawing that piezoelectric element is connected with vibrating tube while adopting the larger piezo tube of internal diameter;
The sectional drawing that when Fig. 9 is the utility model piezoelectricity diaphragm pump employing square-outside and round-inside vibrating tube, piezoelectric element is connected with vibrating tube;
The sectional drawing that when Figure 10 is the utility model piezoelectricity diaphragm pump employing array-type vibrating tube, piezoelectric element is connected with vibrating tube;
Figure 11 is the main sectional view that the utility model piezoelectricity diaphragm pump adopts the tuning-fork type structure;
Figure 12 is the main sectional view that the utility model piezoelectricity diaphragm pump adopts two drive-type structures;
A kind of driving voltage waveform figure that Figure 13 is the utility model piezoelectricity diaphragm pump.
Number in the figure explanation: 1, elastic film, 2, spherical shell, 3, drive liquid, 4, vibrating tube, 5, piezoelectric element, 501, piezo-electric sheet, 502, piezo tube or piezoelectricity doughnut, 503, piezoelectric film, 504, the piezo tube that internal diameter is larger, 6, the pump chamber upper cover, 7, sealing gasket, 8, the pump chamber bottom, 9, the import one-way valve, 10, the outlet one-way valve, 11, barrier film, 12, epoxy glue or Instant cement or AB glue, 13, the vibrating tube of square-outside and round-inside, A1, the first drive part, A2 the second drive part, U1, the first drive voltage signal, U2, the second drive voltage signal.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the utility model in detail.
As shown in Figure 1, a kind of piezoelectric constant diaphragm pump, comprise elastic film 1, spherical shell 2, vibrating tube 4, piezoelectric element 5, pump chamber upper cover 6, sealing gasket 7, pump chamber bottom 8, import one-way valve 9, outlet one-way valve 10 and barrier film 11, one end outer wall of described vibrating tube 4 connects described piezoelectric element 5, the end face of the other end connects described spherical shell 2, and the opening of described spherical shell 2 is by described elastic film 1 sealing, the common end of described piezoelectric element 5 and described vibrating tube 4 is fixedly connected on described pump chamber upper cover 6, described barrier film 11 is installed in described pump chamber upper cover 6, and described pump chamber upper cover 6 and described sealing gasket, described pump chamber bottom 8 is fixedly connected with, described import one-way valve 9 and described outlet one-way valve 10 are installed on described pump chamber bottom 8.
Further, described elastic film 1, described spherical shell 2, described vibrating tube 4, described pump chamber upper cover 6 and described barrier film 11 form Seal cage, and are marked with driving liquid 3 in described Seal cage; Described pump chamber upper cover 6, described sealing gasket 7 and described pump chamber bottom 8 have formed pump chamber; The influent stream mouth also is installed on described pump chamber bottom 8 and goes out head piece.
Further, as shown in Figure 2, described piezoelectric element 5 can and be connected in outer wall one side of described vibrating tube 4 for one; As shown in Figure 3, described piezoelectric element 5 can and be connected in the deformation that the outer wall relative position of described vibrating tube 4 produces opposite direction for two; As shown in Figure 4, described piezoelectric element 5 can be 2n and n=2,3,4 ... and the outer wall that is connected in described vibrating tube 4 is evenly placed along the external diameter of described vibrating tube 4, oscillator is equally divided into symmetrical two groups in position, and described two groups of oscillators produce the distortion of opposite direction.
Further, described piezoelectric element 5 can adopt piezoelectric ceramic, piezoelectric ceramic tube, piezoelectric constant doughnut or be deposited on a kind of in the piezoelectric thin-film structure of described vibrating tube 4 outer walls.
Further, as shown in Figure 8, described piezoelectric element 5 adopts described piezoelectric ceramic tube, and described piezoelectric ceramic tube is socketed on described vibrating tube 4, the outer wall of its inwall and described vibrating tube 4 bonding, and common bonding end is fixed in described pump chamber; Described piezoelectric ceramic tube wall electrode on average is divided into 2 parts, and the two-way drive voltage signal applied is phase phase difference 180 degree when vibrating tube is vibrated, and while stopping vibrating, are consistent.
Further, described vibrating tube 4 adopts metallic material; Described spherical shell 2 adopts plastics or glass material; Described elastic film 1 and described barrier film 11 adopt rubber or latex material; Described driving liquid 3 is greater than the liquid of water for water or density and the ratio of viscosity.
Further, described metal tube external diameter is 0.1～6mm, and internal diameter is 0.05～5mm, and length is more than or equal to 20 times of external diameter, and described metal tube length is greater than 3 times of described piezoelectric element 5 length.
Further, described piezoelectric ceramic thickness is 0.01～5mm, and width is 0.5～10mm, and length is greater than 5 times of thickness; Described to be deposited on the outer field Thin Piezoelectric film thickness of metal tube be 0.01～0.2mm, and length is greater than 5 times of external diameter; Described piezoelectric ceramic tube or described piezoelectric constant doughnut external diameter are 0.1～10mm, and internal diameter is 0.08～5mm, and length is greater than 5 times of external diameter.
Further, described piezoelectric element 5 adopts epoxy resin glue or AB glue or Instant cement bonding with described vibrating tube 4, or described piezoelectric element 5 adopts the piezoelectric constant sintering process to be cemented on the metal tube outer wall.
Further, described barrier film 11 adopts epoxy resin glue or AB glue or Instant cement bonding with described pump chamber upper cover 6, and described elastic film 1 adopts epoxy resin glue or AB glue or Instant cement bonding with described spherical shell 2.
Embodiment:
Take and adopt two piezoelectricity chip oscillators and round metal tube concrete working process and the driving mode of the utility model piezoelectric constant diaphragm pump to be described as representative instance.
Piezo-electric sheet 501 length are 20mm, and width is 5mm, and thickness is 1mm.Using conducting resinl bonding or electric soldering iron welding that wire is fixed on the electrode of piezo-electric sheet 501, near piezo-electric sheet 501 bottom fixed end edges, take and do not affect the fixed and system vibration of piezo-electric sheet and metal tube as main as far as possible in fixed position.The silicone oil that piezo-electric sheet 501 is placed in to 80 degree polarizes, and polarized voltage is 2000V/mm, continues 20 minutes.Piezo-electric sheet 501 after polarization is used alcohol or other washing agents to clean up.Diaphragm of rubber 11 is sticked in the cavity of pump chamber upper cover 6, passive type one-way valve 9,10 is arranged on pump chamber bottom 8, sealing gasket 7 is placed in to rear three between pump chamber upper cover 6 and pump chamber bottom 8 and is fixed together.Metal tube adopts Stainless Steel Tube, internal diameter 1mm, external diameter 3mm, length 130mm.Use epoxy resin glue 12 that piezo-electric sheet and metal tube are sticked together, guarantee piezo-electric sheet 501 and the placement of metal tube parallel to an axis, relatively be arranged in the both sides of metal tube.The metal tube end face is polished flat, be fixed in the perforate of pump chamber upper cover 6, and be communicated with in pump chamber upper cover 6 chambeies, stretch out pump chamber upper cover 6 metal tube length 100mm.Plastics hemispherical Shell 2 bottom opening diameters equate with the metal tube internal diameter, inject after being connected with metal tube and drive liquid 3, re-use rubber film 1 by the hemispherical Shell top seal, may be in depositing the Seal cage that drives liquid 3 residual bubble, but do not affect the performance of the normal function of pump.Fill with in pump chamber and treat the drawing liquid body, inlet connects water source by plastic flexible pipe.The lateral electrode that two piezoelectric elements 5 are connected with metal tube connects COMMON, and lateral electrode applies signal frequency, amplitude is identical, and vibration phase differs voltage signal U1, the U2 of 180 degree.During the metal tube vibration, barrier film 11 produces epirelief deformation, and the pump chamber internal pressure reduces, and treats that the drawing liquid body flows into pump chamber through import one-way valve 9.When metal tube stops vibrating, barrier film 11 produces reverse strain, and the pump chamber internal pressure increases, and treats that the drawing liquid body flows out pump chamber through outlet one-way valve 10.
Working principle of the present utility model:
Be full of and treat the drawing liquid body in pump chamber before work, then apply driving voltage, electric energy is done positive work, drive vibrating tube by piezoelectric element and do fan-shaped yaw motion generation centrifugal force in face in its resonant frequency, centrifugal force pulls drives liquid to flow to the vibration spherical shell, and due to the continuous and incompressibility of liquid, elastic film produces epirelief deformation, the barrier film that simultaneously is connected in the pump chamber upper cover produces epirelief deformation, treats under the effect of negative pressure that in chamber the drawing liquid body flows into pump chamber by the import one-way valve; Electric energy stops acting or does negative work afterwards, and piezoelectric element stops vibration, and vibrating tube sets back, drive liquid to produce backflow under the effect of the elastic-restoring force of elastic film, barrier film restores to the original state, and will treat that the drawing liquid body extrudes by going out head piece, completes single liquid and carries; Circulation constantly, can be carried continuously and treat the drawing liquid body.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (10)
1. a piezoelectric constant diaphragm pump, comprise elastic film (1), spherical shell (2), vibrating tube (4), piezoelectric element (5), pump chamber upper cover (6), sealing gasket (7), pump chamber bottom (8), import one-way valve (9), outlet one-way valve (10) and barrier film (11), it is characterized in that, one end outer wall of described vibrating tube (4) connects described piezoelectric element (5), the end face of the other end connects described spherical shell (2), and the opening of described spherical shell (2) is sealed by described elastic film (1), the common end of described piezoelectric element (5) and described vibrating tube (4) is fixedly connected on described pump chamber upper cover (6), described barrier film (11) is installed in described pump chamber upper cover (6), and described pump chamber upper cover (6) and described sealing gasket (7), described pump chamber bottom (8) is fixedly connected with, described import one-way valve (9) and described outlet one-way valve (10) are installed on described pump chamber bottom (8).
2. piezoelectric constant diaphragm pump according to claim 1, is characterized in that, described elastic film (1), described spherical shell (2), described vibrating tube (4), described pump chamber upper cover (6) and described barrier film (11) form Seal cage, and are marked with driving liquid (3) in described Seal cage; Described pump chamber upper cover (6), described sealing gasket (7) and described pump chamber bottom (8) have formed pump chamber; The influent stream mouth also is installed on described pump chamber bottom (8) and goes out head piece.
3. piezoelectric constant diaphragm pump according to claim 1, is characterized in that, described piezoelectric element (5) can and be connected in outer wall one side of described vibrating tube (4) for one; Described piezoelectric element (5) can and be connected in the deformation that the outer wall relative position of described vibrating tube (4) produces opposite direction for two; Described piezoelectric element (5) can be 2n and n=2,3,4 ... outer wall individual and that be connected in described vibrating tube (4) is evenly placed along the external diameter of described vibrating tube (4), and piezoelectric vibrator is equally divided into symmetrical two groups in position, and described two groups of oscillators produce the distortion of opposite direction.
4. piezoelectric constant diaphragm pump according to claim 1, it is characterized in that, described piezoelectric element (5) can adopt piezoelectric ceramic, piezoelectric ceramic tube, piezoelectric constant doughnut or be deposited on a kind of in the piezoelectric thin-film structure of described vibrating tube (4) outer wall.
5. piezoelectric constant diaphragm pump according to claim 4, it is characterized in that, described piezoelectric element (5) adopts described piezoelectric ceramic tube, described piezoelectric ceramic tube is socketed on described vibrating tube (4), the outer wall bonding of its inwall and described vibrating tube (4), and common bonding end is fixed in described pump chamber; Described piezoelectric ceramic tube wall electrode on average is divided into 2 parts, and the two-way drive voltage signal applied is phase phase difference 180 degree when vibrating tube is vibrated, and while stopping vibrating, are consistent.
6. piezoelectric constant diaphragm pump according to claim 2, is characterized in that, described vibrating tube (4) adopts metallic material; Described spherical shell (2) adopts plastics or glass material; Described elastic film (1) and described barrier film (11) adopt rubber or latex material; Described driving liquid (3) is greater than the liquid of water for water or density and the ratio of viscosity.
7. piezoelectric constant diaphragm pump according to claim 6, it is characterized in that, described vibrating tube (4) adopts metallic material to become metal tube, described metal tube external diameter is 0.1～6mm, internal diameter is 0.05～5mm, length is more than or equal to 20 times of external diameter, and described metal tube length is greater than 3 times of described piezoelectric element (5) length.
8. piezoelectric constant diaphragm pump according to claim 4, is characterized in that, described piezoelectric ceramic thickness is 0.01～5mm, and width is 0.5～10mm, and length is greater than 5 times of thickness; Described to be deposited on the outer field Thin Piezoelectric film thickness of metal tube be 0.01～0.2mm, and length is greater than 5 times of external diameter; Described piezoelectric ceramic tube or described piezoelectric constant doughnut external diameter are 0.1～10mm, and internal diameter is 0.08～5mm, and length is greater than 5 times of external diameter.
9. piezoelectric constant diaphragm pump according to claim 1, it is characterized in that, described piezoelectric element (5) adopts epoxy resin glue or AB glue or Instant cement bonding with described vibrating tube (4), or described piezoelectric element (5) adopts the piezoelectric constant sintering process to be cemented on the metal tube outer wall.
10. piezoelectric constant diaphragm pump according to claim 1, it is characterized in that, described barrier film (11) adopts epoxy resin glue or AB glue or Instant cement bonding with described pump chamber upper cover (6), and described elastic film (1) adopts epoxy resin glue or AB glue or Instant cement bonding with described spherical shell (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320237764 CN203348046U (en) | 2013-09-12 | 2013-09-12 | Piezoelectric ceramic diaphragm pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320237764 CN203348046U (en) | 2013-09-12 | 2013-09-12 | Piezoelectric ceramic diaphragm pump |
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| CN203348046U true CN203348046U (en) | 2013-12-18 |
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| CN 201320237764 Expired - Lifetime CN203348046U (en) | 2013-09-12 | 2013-09-12 | Piezoelectric ceramic diaphragm pump |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103306951A (en) * | 2013-07-25 | 2013-09-18 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric ceramic diaphragm pump |
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2013
- 2013-09-12 CN CN 201320237764 patent/CN203348046U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103306951A (en) * | 2013-07-25 | 2013-09-18 | 中国科学院苏州生物医学工程技术研究所 | Piezoelectric ceramic diaphragm pump |
| CN103306951B (en) * | 2013-07-25 | 2015-11-25 | 中国科学院苏州生物医学工程技术研究所 | A kind of piezoelectric ceramic diaphragm pump |
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Granted publication date: 20131218 |