CN202991416U - Valve-less micro-pump driven by acoustic standing wave - Google Patents

Valve-less micro-pump driven by acoustic standing wave Download PDF

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Publication number
CN202991416U
CN202991416U CN 201320003222 CN201320003222U CN202991416U CN 202991416 U CN202991416 U CN 202991416U CN 201320003222 CN201320003222 CN 201320003222 CN 201320003222 U CN201320003222 U CN 201320003222U CN 202991416 U CN202991416 U CN 202991416U
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CN
China
Prior art keywords
wave
standing
pump
micropump
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201320003222
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Chinese (zh)
Inventor
魏长智
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University of Jinan
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University of Jinan
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Filing date
Publication date
Application filed by University of Jinan filed Critical University of Jinan
Priority to CN 201320003222 priority Critical patent/CN202991416U/en
Application granted granted Critical
Publication of CN202991416U publication Critical patent/CN202991416U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a valve-less micro-pump driven by acoustic standing wave. The valve-less micro-pump comprises a standing wave cavity, a piezoelectric sheet, a reflector, a micro-pump outlet and a micro-pump inlet, wherein the piezoelectric sheet is arranged on one side of the standing wave cavity; the reflector is arranged on the other side of the standing wave cavity; and the micro-pump outlet and the micro-pump inlet are formed in the standing wave cavity. Great pressure fluctuation can be generated through small vibration displacement only; a movable part is not required, and the valve-less micro-pump is high in reliability and easy to manufacture; the damage on suspended particles is small; the working voltage is low; the pump does not generate heat; the conveyed liquid/gas types are not limited, and the valve-less micro-pump can be used for conveying liquid comprising DNA and other biological samples.

Description

The valve free pump that a kind of sound standing wave drives
Technical field
The utility model relates to the valve free pump that a kind of sound standing wave drives.
Background technique
Micropump is the crucial power unit of microfluid system, uses very extensive.Test and medical aspect, Micropump can be used for DNA and detects analysis and the transmission of medicine in human body; Aerospace field, Micropump can be used for the fuel of miniature aerospace vehicle and micro detector and supply with; At microelectronic, Micropump can be used the conveying with microelectronic liquid-cooling system cooling liquid; At chemical field, Micropump can be used for the conveying of chemical products and the accurate configuration of valuable drug.
Have the valve Micropump usually to adopt mechanical part to realize rectification, rectification effect is better, but has the problem of movable member wearing and tearing and fatigue ruption, and miniaturization and working life are restricted.
The model utility content
The utility model provides a kind of valve free pump that drives based on the sound standing wave of sound standing wave principle for solving the problems of the technologies described above.
To achieve these goals, the utility model adopts following technological scheme.
The valve free pump that a kind of sound standing wave drives, comprise standing-wave cavity, piezo-electric sheet, reflector, Micropump outlet and Micropump entrance, described piezo-electric sheet is positioned over a side of standing-wave cavity, and reflector is positioned over the opposite side of standing-wave cavity, also is provided with Micropump outlet and Micropump entrance on described standing-wave cavity.
When the length of standing-wave cavity during near the integral multiple of sound wave half-wavelength, the sound wave that the sound wave of piezo-electric sheet generation of vibration and reflector the reflect sound standing wave that superposes out in standing-wave cavity.When the length of standing-wave cavity equals a wave length of sound, can produce two acoustic pressure wave nodes and three acoustic pressure wave antinodes in standing-wave cavity.The Micropump entrance is arranged on the acoustic pressure wave Nodes.Micropump outlet is arranged on acoustic pressure wave antinode place, and is designed to collapsible tube/expansion cast.
The research of valve free pump starts from 1993, and the people such as Sweden Eric. Si Taimo (E.Stemme) design expansion/contraction cast Micropump, utilizes the difference of the resistance that the nonsymmetry convection cell of port structure produces to realize rectification.After this, numerous scholars to the Micropump of this type from processing method, driving mode, pump housing material and packaging method etc. not ipsilateral carried out comprehensive research, be the most active field of present valve free pump research.
Working procedure of the present utility model is: at the acoustic pressure wave Nodes, hydrodynamic pressure is identical with peripheral fluid; At acoustic pressure wave antinode place, pressure can produce sinusoidal fluctuation, i.e. p (t)=Psinwt.Because the Micropump outlet is collapsible tube/expansion cast, be positive p (t) at pressure〉0 o'clock, the standing-wave cavity inner fluid pumps from the Micropump outlet under the effect of positive pressure, this moment, standing-wave cavity inner fluid quality reduced, static pressure descends, the standing-wave cavity internal pressure is lower than the Micropump inlet pressure, and fluid flows into from the Micropump entrance; Be positive p (t)<0 o'clock at pressure, the standing-wave cavity outer fluid sucks from the Micropump outlet under the effect of negative pressure; Because the flow resistance that pumps when sucking is different, thereby obtain to obtain net flow on the time average meaning in the Micropump outlet.
The beneficial effects of the utility model: this Micropump only needs less vibration displacement can produce larger pressure surge; No-movable part, reliability is high; Be easy to make; Little to the suspended particle damage; Operating voltage is low; Do not generate heat; To the not restriction of the liquid/gas type transmitted, can be used for transmitting the liquid that comprises DNA and other Biosample etc.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Wherein, 1, standing-wave cavity; 2, piezo-electric sheet; 3, reflector; 4, Micropump outlet; 5, Micropump entrance; 6, acoustic pressure wave node; 7, acoustic pressure wave antinode.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing and embodiment.
As shown in Figure 1, the valve free pump that a kind of sound standing wave drives, comprise standing-wave cavity 1, piezo-electric sheet 2, reflector 3, Micropump outlet 4 and 5 five parts of Micropump entrance, described piezo-electric sheet 2 is positioned over the left side of standing-wave cavity 1, reflector 3 is positioned over the right side of standing-wave cavity 1, also is provided with Micropump outlet 4 and Micropump entrance 5 on described standing-wave cavity 1.
When the length of standing-wave cavity 1 during near the integral multiple of sound wave half-wavelength, the left lateral sound wave that the right lateral sound wave of piezo-electric sheet 2 generation of vibrations and reflector 3 the reflect sound standing wave that superposes out in standing-wave cavity 1.When the length of standing-wave cavity 1 equals a wave length of sound, produce two acoustic pressure wave nodes 6 and three acoustic pressure wave antinodes 7 in standing-wave cavity 1.Micropump entrance 5 is arranged on acoustic pressure wave node 6 places; Micropump outlet 4 is arranged on acoustic pressure wave antinode 7 places, and is designed to collapsible tube/expansion cast.
The utility model can adopt micro-processing technology to make, and the matrix adopting silicon materials are coated optical resist on 5 positions, the good etching period of Depth determination as required at standing-wave cavity 1 and Micropump outlet 4, Micropump entrance.After etching is completed, by the anode linkage stacked coated glass sheets, at last piezo-electric sheet 2 and reflector 3 are adhered to the relative both sides of standing-wave cavity 1 at upper surface.
Although above-mentionedly by reference to the accompanying drawings embodiment of the present utility model is described; but be not the restriction to the utility model protection domain; one of ordinary skill in the art should be understood that; on the basis of the technical solution of the utility model, those skilled in the art do not need to pay various modifications that creative work can make or distortion still in protection domain of the present utility model.

Claims (5)

1. the valve free pump that drives of a sound standing wave, it is characterized in that, comprise standing-wave cavity, piezo-electric sheet, reflector, Micropump outlet and Micropump entrance, described piezo-electric sheet is positioned over a side of standing-wave cavity, reflector is positioned over the opposite side of standing-wave cavity, also is provided with Micropump outlet and Micropump entrance on described standing-wave cavity.
2. the valve free pump of sound standing wave driving as claimed in claim 1, is characterized in that, the Micropump entrance is arranged on the acoustic pressure wave Nodes.
3. the valve free pump that drives of sound standing wave as claimed in claim 1, is characterized in that, the Micropump outlet is arranged on acoustic pressure wave antinode place, and is designed to collapsible tube/expansion cast.
4. the valve free pump that drives of sound standing wave as claimed in claim 2, is characterized in that, the Micropump outlet is arranged on acoustic pressure wave antinode place, and is designed to collapsible tube/expansion cast.
5. the valve free pump of sound standing wave driving as described in claim 1 or 4, is characterized in that, the length of standing-wave cavity equals a wave length of sound.
CN 201320003222 2013-01-05 2013-01-05 Valve-less micro-pump driven by acoustic standing wave Expired - Fee Related CN202991416U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320003222 CN202991416U (en) 2013-01-05 2013-01-05 Valve-less micro-pump driven by acoustic standing wave

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320003222 CN202991416U (en) 2013-01-05 2013-01-05 Valve-less micro-pump driven by acoustic standing wave

Publications (1)

Publication Number Publication Date
CN202991416U true CN202991416U (en) 2013-06-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201320003222 Expired - Fee Related CN202991416U (en) 2013-01-05 2013-01-05 Valve-less micro-pump driven by acoustic standing wave

Country Status (1)

Country Link
CN (1) CN202991416U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2535467A (en) * 2015-02-16 2016-08-24 Pubble Hill Ltd Acoustic pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2535467A (en) * 2015-02-16 2016-08-24 Pubble Hill Ltd Acoustic pump
GB2535467B (en) * 2015-02-16 2019-10-02 Pubble Hill Ltd Acoustic pump

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130612

Termination date: 20140105