CN203345513U - Liquid tank device - Google Patents

Liquid tank device Download PDF

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Publication number
CN203345513U
CN203345513U CN 201320372528 CN201320372528U CN203345513U CN 203345513 U CN203345513 U CN 203345513U CN 201320372528 CN201320372528 CN 201320372528 CN 201320372528 U CN201320372528 U CN 201320372528U CN 203345513 U CN203345513 U CN 203345513U
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CN
China
Prior art keywords
liquid tank
leve monitor
pipe
monitoring pipe
leve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201320372528
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Chinese (zh)
Inventor
何
杨小军
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Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Beijing Corp
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Application filed by Semiconductor Manufacturing International Beijing Corp filed Critical Semiconductor Manufacturing International Beijing Corp
Priority to CN 201320372528 priority Critical patent/CN203345513U/en
Application granted granted Critical
Publication of CN203345513U publication Critical patent/CN203345513U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model provides a liquid tank device which comprises a liquid tank, a liquid supply pipe, a liquid inlet pipe, a first monitoring pipe, a first liquid level overflowing monitor and a dryer. The liquid supply pipe is connected with the bottom of the liquid tank, the liquid inlet pipe stretches into the liquid tank, the two ends of the first monitoring pipe are communicated with the upper part and the bottom of the liquid tank respectively, the first liquid level overflowing monitor is arranged on the first monitoring pipe, and the dryer is arranged on the first monitoring pipe. The dryer is arranged at a position, close to the first liquid level overflowing monitor, of the first monitoring pipe and is used for removing liquid accumulating around the first liquid level overflowing monitor, thus reliability of liquid level overflowing alarming is improved, and occurrence a false alarm is avoided.

Description

The liquid tank device
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of liquid tank device.
Background technology
In the semi-conductor integrated circuit manufacturing process, need to use various chemical liquids, water, when contain fluid, need to be monitored liquid level etc., prevent its leakage or overflow, stop potential safety hazard.
In prior art, the liquid tank device as shown in Figure 1, comprise: liquid tank 10, discharger 11, freeing pipe 12, feed pipe 13, the first feed tube 15, the second feed tube 16, monitoring pipe 14 and some leve monitors, wherein, described discharger 11 is connected with described liquid tank 10 sidewalls, and the top of close described liquid tank 10, prevent that liquid is too much, for discharging unnecessary liquid; Described freeing pipe 12 is connected with the top of described liquid tank 10, for discharging unnecessary gas; Described feed pipe 13 is connected with the bottom of described liquid tank 10, for supplying liquid; Described the first feed tube 15 and the second feed tube 16 stretch into described liquid tank 10 inside, to described liquid tank 10 filling liquids; The two ends of described monitoring pipe 14 are connected with the two ends up and down of described liquid tank 10 respectively, play a part the U-shaped pipe; Leve monitor comprises and overflows leve monitor 21, high leve monitor 22, middle leve monitor 23 and low leve monitor 24; Wherein, whether the described leve monitor 21 that overflows exists the possibility of overflowing for monitoring liquid level, is convenient to monitor the liquid level in described liquid tank 10, guarantees the liquid level of liquid in safety in liquid tank 10.
Yet, in actual use, because the liquid in described monitoring pipe 14 can evaporate, and accumulate in the sidewall of described monitoring pipe 14, very easily described, overflow near cohesion leve monitor 21, and make the described warning that leve monitor 21 sends overflow of overflowing, because liquid level is not overflowed, this type of warning is also false signal.So how to avoid the generation of such spurious alarm just to become the technical matters that those skilled in the art are badly in need of solution.
The utility model content
The purpose of this utility model is to provide reliable for increasing the liquid level overflow alarm of a kind of liquid tank device
To achieve these goals, the utility model proposes a kind of liquid tank device, comprising:
Liquid tank, feed pipe, feed tube, the first monitoring pipe, first are overflowed leve monitor and airer, wherein, described feed pipe is connected with described liquid tank bottom, described feed tube stretches into described liquid tank inside, the two ends of described the first monitoring pipe are communicated with top and the bottom of described liquid tank respectively, described first overflows leve monitor is arranged on described the first monitoring pipe, and described airer is arranged on described the first monitoring pipe.
Further, described airer is an air blowing device, and described air blowing device comprises gas pipe line, hand valve and control cock; Described hand valve and control cock are arranged on described gas pipe line; Described gas pipe line stretches in described the first monitoring pipe, and the air extractor duct of described gas pipe line overflows leve monitor near described first.
Further, described airer is a shaking device, and described shaking device comprises electromagnetic shaker and vibrations ring; Described vibrations ring is arranged at described the first monitoring pipe near described the first position of overflowing leve monitor, and described electromagnetic shaker is connected with the vibrations ring.
Further, to overflow leve monitor be 1cm～5cm to described vibrations ring distance described first.
Further, described liquid tank device also comprises the second monitoring pipe, and described the second monitoring pipe is parallel with the first monitoring pipe, and the two ends of described the second monitoring pipe are connected with the two ends of the first monitoring pipe respectively and all are connected with bottom with the top of level tank.
Further, described the second monitoring pipe is provided with second and overflows leve monitor.
Further, described the second monitoring pipe is provided with a plurality of the second leve monitors, described the second leve monitor is positioned at second and overflows leve monitor below, described the second leve monitor by lower from comprise that second hangs down leve monitor and the second high leve monitor in leve monitor, second.
Further, described liquid tank device also comprises a plurality of the first leve monitors, described the first leve monitor is arranged on described the first monitoring pipe, and be positioned at described first and overflow leve monitor below, described the first leve monitor by lower from comprise that first hangs down leve monitor and the first high leve monitor in leve monitor, first.
Further, described liquid tank device also comprises discharger and freeing pipe, and described discharger is arranged at the position of described liquid tank sidewall near top, and described freeing pipe is arranged at the top of described liquid tank.
Further, described feed tube is two.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: on described the first monitoring pipe, near the first position of overflowing leve monitor, one airer is set, accumulate in described first for removal and overflow near the liquid of monitor, thereby increase the reliability of liquid level overflow alarm, avoid the generation of spurious alarm.
The accompanying drawing explanation
The structural representation that Fig. 1 is liquid tank device in prior art;
The structural representation that Fig. 2 is liquid tank device in the utility model embodiment mono-;
The structural representation that Fig. 3 is liquid tank device in the utility model embodiment bis-;
The structural representation that Fig. 4 is liquid tank device in the utility model embodiment tri-.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, the liquid tank device the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.
Embodiment mono-
Please refer to Fig. 2, in the present embodiment, propose a kind of liquid tank device, comprising:
Liquid tank 100, feed pipe 130, feed tube, the first monitoring pipe 140, first are overflowed leve monitor 210, a plurality of the first leve monitor and airer, and wherein, described feed pipe 130 is connected with described liquid tank 100 bottoms, for liquid is provided; Described feed tube stretches into described liquid tank inside, toward the inner filling liquid of described liquid tank 100; The two ends of described the first monitoring pipe 140 are communicated with top and the bottom of described liquid tank 100 respectively, play a part the U-shaped pipe; A plurality of the first leve monitors are positioned at first and overflow under leve monitor 210, described first overflows leve monitor 210 is arranged on described the first monitoring pipe 140, described airer is arranged on described the first monitoring pipe 140, accumulate near the described first liquid overflowed leve monitor 210 for removing, thereby can avoid described first to overflow leve monitor 210 and send false signal.
In the present embodiment, described a plurality of the first leve monitors be arranged on described the first monitoring pipe 140 by lower from comprise leve monitor 230 and the first high leve monitor 220 in the first low leve monitor 240, first, for monitoring different liquid levels.Described airer is an air blowing device, and described air blowing device comprises gas pipe line 410, hand valve 420 and control cock 430; Described hand valve 420 and control cock 430 are arranged on described gas pipe line 410; Described gas pipe line 410 stretches in described the first monitoring pipe 140, and the air extractor duct of described gas pipe line overflows leve monitor 210 near described first, and wherein, described hand valve 420 is for cutting out and open the transmission of gas; Described control cock 430 is for the uninterrupted of adjustments of gas; The gas used is dry nitrogen or argon gas, and flow range is 3sccm～5sccm.
In the present embodiment, described liquid tank 100 devices also comprise that discharger 110 and freeing pipe 120, described discharger 110 are arranged at the position of described liquid tank 100 sidewalls near top, the liquid overflowed for discharge; Described freeing pipe 120 is arranged at the top of described liquid tank 100, for discharging unnecessary gas; In the present embodiment, feed tube is 2, is respectively the first feed tube 150 and the second feed tube 160, and described the first feed tube 150 is for injecting hydrogen peroxide, and described the second feed tube 160 is for injecting pure water.
In concrete use procedure, what air blowing device continued overflows near dry nitrogen or the argon gas of the spray of leve monitor 210 to described first, thereby can prevent that fluid accumulation from overflowing near leve monitor 210 described first, and then avoid first to overflow leve monitor 210 and send spurious alarm.
Embodiment bis-
Please refer to Fig. 3, the liquid tank device proposed has in the present embodiment added shaking device on the basis of embodiment mono-, comprising:
Liquid tank 100, feed pipe 130, feed tube, the first monitoring pipe 140, first are overflowed leve monitor 210, a plurality of the first leve monitor and airer, and wherein, described feed pipe 130 is connected with described liquid tank 100 bottoms, for liquid is provided; Described feed tube stretches into described liquid tank inside, toward the inner filling liquid of described liquid tank 100; The two ends of described the first monitoring pipe 140 are communicated with top and the bottom of described liquid tank 100 respectively, play a part the U-shaped pipe; A plurality of the first leve monitors are positioned at first and overflow under leve monitor 210, described first overflows leve monitor 210 is arranged on described the first monitoring pipe 140, described airer is arranged on described the first monitoring pipe 140, accumulate near the described first liquid overflowed leve monitor 210 for removing, thereby can avoid described first to overflow leve monitor 210 and send false signal.
In the present embodiment, the combination that described airer is an air blowing device and shaking device, described air blowing device is identical with embodiment mono-, please refer to embodiment mono-, does not repeat them here; Described shaking device comprises electromagnetic shaker 520 and vibrations ring 510; Described vibrations ring 510 is arranged at described the first monitoring pipe 140 near described the first position of overflowing leve monitor 210, wherein, described vibrations ring 510 distances described first are overflowed leve monitor 210 for 1cm～5cm, for example 2cm, described electromagnetic shaker 520 is connected with vibrations ring 510, for giving vibrations ring 510, provides signal.
Shaking device in use, electromagnetic shaker 520 sends signal to described vibrations ring 510, and vibrations ring 510 is shaken, because vibrations ring 510 is close to described the first monitoring pipe 140 and overflows leve monitor 210 near described first, the vibrations of vibrations ring 510 can be removed and are formed near the described first liquid overflowed leve monitor 210, thereby avoid described first to overflow leve monitor 210 and send false signal.
Embodiment tri-
Please refer to Fig. 4, the liquid tank device that the present embodiment proposes is based on the basis of embodiment bis-and has added the second monitoring pipe, specifically comprises:
Liquid tank 100, feed pipe 130, feed tube, the first monitoring pipe 140, first are overflowed leve monitor 210, a plurality of the first leve monitor and airer, and wherein, described feed pipe 130 is connected with described liquid tank 100 bottoms, for liquid is provided; Described feed tube stretches into described liquid tank inside, toward the inner filling liquid of described liquid tank 100; The two ends of described the first monitoring pipe 140 are communicated with top and the bottom of described liquid tank 100 respectively, play a part the U-shaped pipe; A plurality of the first leve monitors are positioned at first and overflow under leve monitor 210, described first overflows leve monitor 210 is arranged on described the first monitoring pipe 140, described airer is arranged on described the first monitoring pipe 140, accumulate near the described first liquid overflowed leve monitor 210 for removing, thereby can avoid described first to overflow leve monitor 210 and send false signal.
In the present embodiment, the combination that described airer is an air blowing device and shaking device, described air blowing device is identical with embodiment mono-, identical with in embodiment bis-of described shaking device, both all repeat no more at this;
In the present embodiment, described liquid tank device also comprises the second monitoring pipe 141, described the second monitoring pipe 141 is parallel with the first monitoring pipe 140, and the two ends of described the second monitoring pipe 141 are connected with the two ends of the first monitoring pipe 140 respectively and all are connected with bottom with the top of level tank 100; Described the second monitoring pipe 141 is provided with a plurality of the second leve monitors and one second and overflows leve monitor 211; Described a plurality of the second leve monitor is positioned at described second and overflows under leve monitor 211, described a plurality of the second leve monitor be arranged on described the second monitoring pipe by lower from comprise leve monitor 231 and the second high leve monitor 221 in the second low leve monitor 241, second, for monitoring different liquid levels.
The effect of adding described the second monitoring pipe 141 is to overflow liquid level for whether dual assurance liquid level reaches; If the first leve monitor 210 in the first monitoring pipe 140 sends warning, and the second leve monitor 211 in the second monitoring pipe 141 does not send warning, illustrating that liquid level does not arrive overflows liquid level, and this alerting signal is false signal.
This kind of combination can be more perfect the overflow alarm that judges whether be false signal, can avoid the generation of false signal simultaneously, increase the reliability of alerting signal, other embodiment beyond the present embodiment, can adopt above three kinds of isolated systems or multiple combination device, all can reach the effect of the generation of avoiding false signal.
To sum up, in the level tank device provided at the utility model embodiment, near the first position of overflowing leve monitor, one airer is set on described the first monitoring pipe, accumulate in described first for removal and overflow near the liquid of monitor, thereby increase the reliability of liquid level overflow alarm, avoid the generation of spurious alarm.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; in the scope that does not break away from the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not break away from the technical solution of the utility model, within still belonging to protection domain of the present utility model.

Claims (10)

1. a liquid tank device, is characterized in that, described device comprises:
Liquid tank, feed pipe, feed tube, the first monitoring pipe, first are overflowed leve monitor and airer, wherein, described feed pipe is connected with described liquid tank bottom, described feed tube stretches into described liquid tank inside, the two ends of described the first monitoring pipe are communicated with top and the bottom of described liquid tank respectively, described first overflows leve monitor is arranged on described the first monitoring pipe, and described airer is arranged on described the first monitoring pipe.
2. liquid tank device as claimed in claim 1, is characterized in that, described airer is an air blowing device, and described air blowing device comprises gas pipe line, hand valve and control cock; Described hand valve and control cock are arranged on described gas pipe line; Described gas pipe line stretches in described the first monitoring pipe, and the air extractor duct of described gas pipe line overflows leve monitor near described first.
3. liquid tank device as claimed in claim 1, is characterized in that, described airer is a shaking device, and described shaking device comprises electromagnetic shaker and vibrations ring; Described vibrations ring is arranged at described the first monitoring pipe near described the first position of overflowing leve monitor, and described electromagnetic shaker is connected with the vibrations ring.
4. liquid tank device as claimed in claim 3, is characterized in that, it is 1cm～5cm that described vibrations ring distance described first is overflowed leve monitor.
5. liquid tank device as claimed in claim 1, it is characterized in that, described liquid tank device also comprises the second monitoring pipe, and described the second monitoring pipe is parallel with the first monitoring pipe, and the two ends of described the second monitoring pipe are connected with the two ends of the first monitoring pipe respectively and all are connected with bottom with the top of level tank.
6. liquid tank device as claimed in claim 5, is characterized in that, described the second monitoring pipe is provided with second and overflows leve monitor.
7. liquid tank device as claimed in claim 6, it is characterized in that, described the second monitoring pipe is provided with a plurality of the second leve monitors, described the second leve monitor is positioned at second and overflows leve monitor below, described the second leve monitor by lower from comprise that second hangs down leve monitor and the second high leve monitor in leve monitor, second.
8. liquid tank device as claimed in claim 1, it is characterized in that, described liquid tank device also comprises a plurality of the first leve monitors, described the first leve monitor is arranged on described the first monitoring pipe, and be positioned at described first and overflow leve monitor below, described the first leve monitor by lower from comprise that first hangs down leve monitor and the first high leve monitor in leve monitor, first.
9. liquid tank device as claimed in claim 1, is characterized in that, described liquid tank device also comprises discharger and freeing pipe, and described discharger is arranged at the position of described liquid tank sidewall near top, and described freeing pipe is arranged at the top of described liquid tank.
10. liquid tank device as claimed in claim 1, is characterized in that, described feed tube is two.
CN 201320372528 2013-06-26 2013-06-26 Liquid tank device Expired - Fee Related CN203345513U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201320372528 CN203345513U (en) 2013-06-26 2013-06-26 Liquid tank device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201320372528 CN203345513U (en) 2013-06-26 2013-06-26 Liquid tank device

Publications (1)

Publication Number Publication Date
CN203345513U true CN203345513U (en) 2013-12-18

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CN 201320372528 Expired - Fee Related CN203345513U (en) 2013-06-26 2013-06-26 Liquid tank device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103728085A (en) * 2013-12-20 2014-04-16 国家电网公司 Uplift pressure measuring device of hydraulic power plant basis gallery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103728085A (en) * 2013-12-20 2014-04-16 国家电网公司 Uplift pressure measuring device of hydraulic power plant basis gallery

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131218

Termination date: 20190626