CN203002031U - Gas-liquid separation device and liquid supply device - Google Patents
Gas-liquid separation device and liquid supply device Download PDFInfo
- Publication number
- CN203002031U CN203002031U CN 201220674878 CN201220674878U CN203002031U CN 203002031 U CN203002031 U CN 203002031U CN 201220674878 CN201220674878 CN 201220674878 CN 201220674878 U CN201220674878 U CN 201220674878U CN 203002031 U CN203002031 U CN 203002031U
- Authority
- CN
- China
- Prior art keywords
- liquid separation
- gas
- separation device
- liquid
- separation container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model provides a gas-liquid separation device. The gas-liquid separation device comprises a gas-liquid separation container, a supply pipeline, an output pipeline and an exhaust pipeline. Chemical articles flow into the gas-liquid separation container from the supply pipeline, and foams from the supply pipeline can be automatically separated from the chemical articles in the gas-liquid separation container so that the foams can be exhausted from the exhaust pipeline; and then chemical articles without foams can be continuously supplied from an output pipeline at the bottom of the gas-liquid separation container so that stable supply can be ensured and zero interruption of the supply is realized. Furthermore, the utility model provides a liquid supply device comprising the gas-liquid separation device and capable of providing chemical articles without foams to a supply filter so that the supply filter can be prevented from being damaged and the service life of the supply filter is prolonged.
Description
Technical field
This area relates to field of semiconductor manufacture, relates in particular to a kind of gas-liquid separation device and liquid supplying apparatus.
Background technology
In the semiconductor integrated circuit manufacturing process, the chemical substance that usually need to use large quantity of fluid satisfies need of production.In general, chemical substance is stored in the Raw material pail of certain capacity.In normal productive process, storage tank can be supplied to the equipment board by supply line, to realize production.
Please refer to Fig. 1, at present, liquid supplying apparatus comprises:
Transmission kinetic pump 20, described transmission kinetic pump 20 is connected by supply line 60 with described Raw material pail 10;
Described supply filter 30 connects described equipment board 40 by supply line 60;
Collecting vessel groove 50, described collecting vessel groove 50 is connected by supply line 60 with described supply filter 30, be used for storing a large amount of chemical substances, the situation of cut-off appears in the parts such as the pipeline in described Raw material pail 10 appearance accidents or described liquid supplying apparatus or supply filter 30, described collecting vessel groove 50 can play emergent effect, is continuously within a certain period of time described equipment board 40 chemical substance is provided.
Wherein, be provided with multi-layer isolation films in described supply filter 30, for the microparticle of isolation chemical substance diameter greater than 0.05 micron, prevent contaminated equipment board 40.
Because the volume of Raw material pail 10 is fixed, can only store a certain amount of chemical substance, when the chemical substance in Raw material pail 10 is about to run out of, just need to change Raw material pail 10.In general, Raw material pail 10 is to need periodic replacement to keep the demand of production.When changing Raw material pail 10, have air in described supply line 60 and enter, form bubble in described supply line 60.When being again described equipment board 40 supplying chemical article, bubble can be sent to described supply filter 30 and described equipment board 40 along with chemical substance.When the air in supply line 60 is accumulated to a certain degree, can't guarantee on the one hand to described equipment board 40 normal continue bubble-free chemical substance is provided; Bubble can accumulate in the interior filter membrane of described supply filter 30 on the other hand, affects the work of described supply filter 30.
The utility model content
In order to address the above problem, the purpose of this utility model is to propose the generation that a kind of gas-liquid separation device and liquid supplying apparatus can be avoided bubble, and the equipment board of being continuously provides chemical substance.
To achieve these goals, the utility model proposes a kind of gas-liquid separation device, comprising:
The gas-liquid separation container;
Supply line is connected with described gas-liquid separation container;
Output pipe, an end stretches into the bottom of described gas-liquid separation container, and an end stretches out described gas-liquid separation container;
Gas exhaust piping, an end is connected with the top of described gas-liquid separation container, and an end leads to atmosphere.
Further, described gas-liquid separation device also comprises a tank fill level inductor, and described tank fill level inductor is arranged on described gas-liquid separation container.
Further, described gas-liquid separation device also comprises a supply control pneumatic operated valve, is arranged on described output pipe.
Further, described gas-liquid separation device also comprises a pipeline level sensor and an exhaust pneumatic operated valve, described pipeline level sensor and described exhaust pneumatic operated valve all are arranged on described gas exhaust piping, and described pipeline level sensor is near described gas-liquid separation container, and described exhaust pneumatic operated valve is away from described gas-liquid separation container.
Further, described gas exhaust piping is by the logical atmosphere of an exhaust duct.
Further, described gas-liquid separation device also comprises a discharge pipe, discharging hand valve and a delivery pipe, one end of described discharge pipe is connected with described gas-liquid separation container, and the other end of described discharge pipe is connected with described delivery pipe, and described discharging hand valve is arranged on described discharge pipe.
Further, the utility model also proposes a kind of liquid supplying apparatus, is used for to equipment board supplying chemical article, and described liquid supplying apparatus comprises:
Raw material pail;
The transmission kinetic pump, described transmission kinetic pump is connected by supply line with described Raw material pail;
Gas-liquid separation device, described gas-liquid separation device is connected by supply line with described transmission kinetic pump; Described gas-liquid separation device connects described equipment board by output pipe.
Further, in described liquid supplying apparatus, described liquid supplying apparatus also comprises the supply filter, and described supply filter is connected between described gas-liquid separation device and described equipment board by output pipe.
Further, in described liquid supplying apparatus, described filter is connected with the equipment board with described collecting vessel groove respectively by output pipe.
Further, in described liquid supplying apparatus, described gas-liquid separation device also comprises a tank fill level inductor, and described tank fill level inductor is arranged on described gas-liquid separation container.
Further, in described liquid supplying apparatus, described gas-liquid separation device also comprises a supply control pneumatic operated valve, is arranged on described output pipe.
Further, in described liquid supplying apparatus, described gas-liquid separation device also comprises a pipeline level sensor and an exhaust pneumatic operated valve, described pipeline level sensor and described exhaust pneumatic operated valve all are arranged on described gas exhaust piping, and described pipeline level sensor is near described gas-liquid separation container, and described exhaust pneumatic operated valve is away from described gas-liquid separation container.
Further, in described liquid supplying apparatus, described gas exhaust piping is by the logical atmosphere of an exhaust duct.
Further, in described liquid supplying apparatus, described gas-liquid separation device also comprises a discharge pipe, discharging hand valve and a delivery pipe, one end of described discharge pipe is connected with described gas-liquid separation container, the other end of described discharge pipe is connected with described delivery pipe, and described discharging hand valve is arranged on described discharge pipe.
Further, in described liquid supplying apparatus, the material of described gas-liquid separation container, described supply line and described output pipe is the soluble poly tetrafluoroethene.
Compared with prior art, the beneficial effect of gas-liquid separation device of the present utility model is mainly reflected in: described gas-liquid separation device comprises gas-liquid separation container, supply line, output pipe and gas exhaust piping, chemical substance flow to the gas-liquid separation container from supply line, bubble from supply line can separate with chemical substance in the gas-liquid separation container automatically, thereby can discharge from gas exhaust piping, the output pipe that stretches into the gas-liquid separation container bottom just can continually provide the not chemical substance of bubbles, guarantee stable supply, realize supply zero interruption.
Further, the utility model proposes a kind of liquid supplying apparatus, use above-mentioned gas-liquid separation device, thereby can provide the not chemical substance of bubbles for the supply filter, avoid the supply filter is damaged, and then extend the service life of supply filter.
Description of drawings
Fig. 1 is the structural representation of a liquid supplying apparatus in prior art;
Fig. 2 is the structural representation of gas-liquid separation device in the utility model one embodiment;
Fig. 3 is the structural representation of liquid supplying apparatus in the utility model one embodiment.
The specific embodiment
For convenience of explanation, below in conjunction with specific embodiments and the drawings, the utility model is done more detailed description.
Please refer to Fig. 2, the utility model proposes a kind of gas-liquid separation device 700, comprising:
Gas-liquid separation container 710 for separating of bubble and chemical substance, is stored a certain amount of chemical substance simultaneously; The volume of described gas-liquid separation container 710 can be selected according to real needs;
in the present embodiment, described gas-liquid separation device 700 comprises a controller (not shown in Fig. 2) and a tank fill level inductor 720, described tank fill level inductor 720 is arranged on described gas-liquid separation container 710, described tank fill level inductor 720 is used for monitoring the liquid level of described gas-liquid separation container 710 interior chemical substances, when the chemical substance liquid level during lower than described tank fill level inductor 720, described tank fill level inductor 720 will send signal and be about to use up to controller prompting chemical substance, described controller is controlled described output pipe 760 and is stopped exporting chemical substance, will to send signal too much to gas in the described gas-liquid separation container 710 of controller prompting for described tank fill level inductor 720 on the other hand, and described controller is controlled and opened described gas exhaust piping 770 and carry out pump-down process, as shown in Figure 2, the optimum range of the liquid level of described gas-liquid separation container 710 interior chemical substances is between L1 ~ L3, and the height of described tank fill level inductor 720 is L2, and wherein L2 is between L1 ~ L3.
In the present embodiment, described tank fill level inductor 720 and described gas-liquid separation container 710 bottoms maintenance certain distances, guarantee that described tank fill level inductor 720 has a certain amount of chemical substance, this distance can be formulated according to different need of productions, also can formulate according to the container amount of described gas-liquid separation container 710.Preferably, described output pipe 760 stretches into an end of described gas-liquid separation container 710 lower than described tank fill level inductor 720, thereby can guarantee that described output pipe 760 submerges in chemical substance fully, avoids bubble to enter.
Described gas-liquid separation device 700 also comprises a supply control pneumatic operated valve 742, described supply is controlled pneumatic operated valve 742 and is arranged on described output pipe 760, and be connected with described controller, described controller is controlled pneumatic operated valve 742 by described supply and is controlled the conveying of chemical substance and stop sending.
Described gas-liquid separation device 700 also comprises a pipeline level sensor 730 and an exhaust pneumatic operated valve 741, and described pipeline level sensor 730 and an exhaust pneumatic operated valve 741 are arranged on described gas exhaust piping 770, and are connected with described controller.Described exhaust hand valve 741 is opened just can discharge gas in described gas-liquid separation container 710; Described pipeline level sensor 730 is near described gas-liquid separation container 710, and described exhaust pneumatic operated valve 741 is away from described gas-liquid separation container 710; Described pipeline level sensor 730 is used for whether having chemical substance to overflow in monitoring gas exhaust piping 770, when chemical substance is spilled over to described gas exhaust piping 770 and monitored by described pipeline level sensor 730, described pipeline level sensor 730 can send warning signal to controller, can point out the chemical substance from supply line 600 to overflow on the one hand, described controller is controlled described supply line 600 according to this caution signal and is stopped continuing input; Point out on the other hand the gas in described gas-liquid separation container 710 to drain, described controller controls and cuts out exhaust pneumatic operated valve 741.
Described gas-liquid separation device 700 also comprises an exhaust duct 780, and the open to atmosphere described exhaust duct 780 of termination of described gas exhaust piping 770 facilitates the discharge of gas.
Described gas-liquid separation device 700 also comprises a discharge pipe 751, a discharging hand valve 752, a delivery pipe 790, described discharging hand valve 752 is arranged on described discharge pipe 751, described discharge pipe 751 1 ends connect described gas-liquid separation container 710, and the other end connects described delivery pipe 790.When the chemical substance in described gas-liquid separation container 710 overflows, can open described discharging hand valve 752 and discharge a part of chemical substance through described discharge pipe 751 and delivery pipe 790.
In the present embodiment, the material of described gas-liquid separation container 710, described supply line 600 and described output pipe 760 is the soluble poly tetrafluoroethene, and it has corrosion resistant advantage.
In the present embodiment, also propose a kind of liquid supplying apparatus that comprises above-mentioned gas-liquid separation device, be used for to equipment board 400 supplying chemical article, described liquid supplying apparatus comprises:
Raw material pail 100 is used for providing chemical substance, is detachable type, can change when chemical substance is about to use up;
Transmission kinetic pump 200, described transmission kinetic pump 200 is connected by supply line 600 with described Raw material pail 100, and described transmission kinetic pump 200 is used for transmitting chemical substance;
Gas-liquid separation device 700, described gas-liquid separation device 700 is connected by supply line 600 with described transmission kinetic pump 200, chemical substance is sent to described gas-liquid separation device 700 by described transmission kinetic pump 200, and described gas-liquid separation device 700 connects described equipment board 400 by output pipe 760.
Preferably, described liquid supplying apparatus also comprises supply filter 300, described supply filter 300 is connected between described gas-liquid separation device 700 and described equipment board 400 by output pipe 760, described supply filter 300 prevents microparticle contaminated equipment board 400 for filtering the microparticle of the interior chemical substance diameter of described output pipe 760 greater than 0.05 micron.
Preferably, described liquid supplying apparatus also comprises a collecting vessel groove 500, and described filter 300 is connected with the equipment board with described collecting vessel groove 500 respectively by output pipe 760 and is connected.Described collecting vessel groove 500 volumes are preferably greater than described Raw material pail 100, are used for storing a large amount of chemical substances.The situation of cut-off appears in the parts such as the pipeline in described Raw material pail 100 appearance accidents or described liquid supplying apparatus or supply filter 300, described collecting vessel groove 500 can play emergent effect, is continuously within a certain period of time described equipment board 400 chemical substance is provided.
In the present embodiment, use the liquid supplying apparatus of gas-liquid separation device 700 can effectively avoid bubble to enter in output pipe, thereby can be continual provide required chemical substance for the equipment board, also avoid simultaneously the supply filter is damaged, and then extend the service life of supply filter.
These are only preferred embodiment of the present utility model, the utility model is not played any restriction.Any person of ordinary skill in the field; in the scope that does not break away from the technical solution of the utility model; technical scheme and technology contents that the utility model discloses are made any type of changes such as replacement or modification that are equal to; all belong to the content that does not break away from the technical solution of the utility model, within still belonging to protection domain of the present utility model.
Claims (16)
1. a gas-liquid separation device, is characterized in that, comprising:
The gas-liquid separation container;
Supply line is connected with described gas-liquid separation container;
Output pipe, an end stretches into the bottom of described gas-liquid separation container, and an end stretches out described gas-liquid separation container;
Gas exhaust piping, an end is connected with the top of described gas-liquid separation container, and an end leads to atmosphere.
2. gas-liquid separation device as claimed in claim 1, is characterized in that, also comprises a tank fill level inductor, and described tank fill level inductor is arranged on described gas-liquid separation container.
3. gas-liquid separation device as claimed in claim 1, is characterized in that, also comprises a supply control pneumatic operated valve, is arranged on described output pipe.
4. gas-liquid separation device as claimed in claim 1, it is characterized in that, also comprise a pipeline level sensor and an exhaust pneumatic operated valve, described pipeline level sensor and described exhaust pneumatic operated valve all are arranged on described gas exhaust piping, and described pipeline level sensor is near described gas-liquid separation container, and described exhaust pneumatic operated valve is away from described gas-liquid separation container.
5. gas-liquid separation device as claimed in claim 4, is characterized in that, described gas exhaust piping is by the logical atmosphere of an exhaust duct.
6. gas-liquid separation device as claimed in claim 1, it is characterized in that, also comprise a discharge pipe, discharging hand valve and a delivery pipe, one end of described discharge pipe is connected with described gas-liquid separation container, the other end of described discharge pipe is connected with described delivery pipe, and described discharging hand valve is arranged on described discharge pipe.
7. gas-liquid separation device as claimed in claim 1, is characterized in that, the material of described gas-liquid separation container, described supply line and described output pipe is the soluble poly tetrafluoroethene.
8. a liquid supplying apparatus, be used for to equipment board supplying chemical article, it is characterized in that, described liquid supplying apparatus comprises:
Raw material pail;
The transmission kinetic pump, described transmission kinetic pump is connected by supply line with described Raw material pail;
Gas-liquid separation device as described in any one in claim 1 to 7, described gas-liquid separation device is connected by supply line with described transmission kinetic pump; Described gas-liquid separation device connects described equipment board by output pipe.
9. liquid supplying apparatus as claimed in claim 8, is characterized in that, described liquid supplying apparatus also comprises the supply filter, and described supply filter is connected between described gas-liquid separation device and described equipment board by output pipe.
10. liquid supplying apparatus as claimed in claim 9, is characterized in that, described filter is connected with the equipment board with described collecting vessel groove respectively by output pipe.
11. liquid supplying apparatus as claimed in claim 8 is characterized in that, described gas-liquid separation device also comprises a tank fill level inductor, and described tank fill level inductor is arranged on described gas-liquid separation container.
12. liquid supplying apparatus as claimed in claim 8 is characterized in that, described gas-liquid separation device also comprises a supply control pneumatic operated valve, is arranged on described output pipe.
13. liquid supplying apparatus as claimed in claim 8, it is characterized in that, described gas-liquid separation device also comprises a pipeline level sensor and an exhaust pneumatic operated valve, described pipeline level sensor and described exhaust pneumatic operated valve all are arranged on described gas exhaust piping, and described pipeline level sensor is near described gas-liquid separation container, and described exhaust pneumatic operated valve is away from described gas-liquid separation container.
14. gas-liquid feeding mechanism as claimed in claim 13 is characterized in that, described gas exhaust piping is by the logical atmosphere of an exhaust duct.
15. liquid supplying apparatus as claimed in claim 8, it is characterized in that, described gas-liquid separation device also comprises a discharge pipe, discharging hand valve and a delivery pipe, one end of described discharge pipe is connected with described gas-liquid separation container, the other end of described discharge pipe is connected with described delivery pipe, and described discharging hand valve is arranged on described discharge pipe.
16. liquid supplying apparatus as claimed in claim 8 is characterized in that, the material of described gas-liquid separation container, described supply line and described output pipe is the soluble poly tetrafluoroethene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220674878 CN203002031U (en) | 2012-12-07 | 2012-12-07 | Gas-liquid separation device and liquid supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220674878 CN203002031U (en) | 2012-12-07 | 2012-12-07 | Gas-liquid separation device and liquid supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203002031U true CN203002031U (en) | 2013-06-19 |
Family
ID=48593669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220674878 Expired - Fee Related CN203002031U (en) | 2012-12-07 | 2012-12-07 | Gas-liquid separation device and liquid supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203002031U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111035966A (en) * | 2019-12-25 | 2020-04-21 | 苏州焜原光电有限公司 | Liquid gas circulation system |
| CN111346403A (en) * | 2020-03-02 | 2020-06-30 | 上海兄弟微电子技术有限公司 | Gas-liquid separation device |
| CN111517540A (en) * | 2020-04-28 | 2020-08-11 | 江南造船(集团)有限责任公司 | Exhaust fine filtration device |
-
2012
- 2012-12-07 CN CN 201220674878 patent/CN203002031U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111035966A (en) * | 2019-12-25 | 2020-04-21 | 苏州焜原光电有限公司 | Liquid gas circulation system |
| CN111346403A (en) * | 2020-03-02 | 2020-06-30 | 上海兄弟微电子技术有限公司 | Gas-liquid separation device |
| CN111517540A (en) * | 2020-04-28 | 2020-08-11 | 江南造船(集团)有限责任公司 | Exhaust fine filtration device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203002031U (en) | Gas-liquid separation device and liquid supply device | |
| CN201324459Y (en) | External pressurizing storage tank type septenary-fluorine propane fire-extinguishing system | |
| CN202670533U (en) | Liquid storage tank | |
| CN201017172Y (en) | Light blockage supply piping installation | |
| CN204159113U (en) | Negative pressure chamber's solid-liquid separation system | |
| CN201971192U (en) | Pneumatic cup handling machine | |
| CN201694464U (en) | Pressure-relief beer discharging device beer storage equipment | |
| CN102218275A (en) | Micro nano bubble generator | |
| CN101303488B (en) | Liquid feed system | |
| CN204841208U (en) | Vapour and liquid separator and gaseous liquid seal device that has gas -liquid separation function | |
| CN201200964Y (en) | Optical fiber coating and feeding system with function for preventing return of product | |
| CN202877059U (en) | Glue recovery structure of gluing machine | |
| CN201971455U (en) | Pneumatic cup receiving system for paper cup machine | |
| CN107983134A (en) | Gas purification tower and exhaust gas purification equipment | |
| CN202006090U (en) | Micro-nano bubble generator | |
| IN2012DN01263A (en) | ||
| CN110203989A (en) | A kind of high-purity water preparation apparatus of deoxidation and technique | |
| WO2008117250A3 (en) | Discharge device for viscous liquids | |
| CN205216285U (en) | Oily ware is received to continuous water | |
| CN209237221U (en) | The anti-frothing foam liquid conveying equipment of multichannel | |
| CN104180160B (en) | Oil-gas mixing transportation system for screw compressor | |
| CN209081469U (en) | A kind of high-purity water preparation apparatus of deoxidation | |
| CN202093284U (en) | Liquid crystal supply system | |
| CN206278301U (en) | The online sub-packaging system of chafing dish bottom flavorings | |
| CN206843046U (en) | Drink distributor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20181207 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |