CN203333814U - Mono-crystal furnace heat field heater with anti-corrosion block and heat field - Google Patents
Mono-crystal furnace heat field heater with anti-corrosion block and heat field Download PDFInfo
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- CN203333814U CN203333814U CN201320325064XU CN201320325064U CN203333814U CN 203333814 U CN203333814 U CN 203333814U CN 201320325064X U CN201320325064X U CN 201320325064XU CN 201320325064 U CN201320325064 U CN 201320325064U CN 203333814 U CN203333814 U CN 203333814U
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- protection against
- against corrosion
- heater
- corrosion block
- crystal furnace
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Abstract
The utility model discloses a mono-crystal furnace heat field heater with an anti-corrosion block. The mono-crystal furnace heat field heater comprises a heater blade and the anti-corrosion block arranged at the upper end of or above the heater blade. Due to design and manufacturing of the anti-corrosion block of the heater, the heater can be protected, so that silicon liquid sputtered during the collapse of materials can be prevented from falling on the heater, and the service life of the heater is prolonged; when the anti-corrosion block can be broken through severe reaction with the sputtered silicon liquid, the anti-corrosion block is only required to be replaced, and therefore, according to the technical scheme disclosed by the utility model, the anti-corrosion block only needs to be arranged at the upper end of or above an existing mono-crystal furnace heat field heater. The mono-crystal furnace heat field heater disclosed by the utility model has the characteristics of reasonable design, simplicity in operation, high practicability and the like.
Description
Technical field
The utility model relates to silicon single crystal and manufactures field, particularly relates to a kind of single-crystal furnace thermal field heater with the protection against corrosion block, and the thermal field that uses this well heater.
Background technology
Single crystal growing furnace is in inert gas environment, adopts graphite resistance heater, by the silicon materials fusing, and the equipment of employing Grown by CZ Method dislocation-free single crystal.Single crystal growing furnace has the process of the material that collapses when operation material programsegment, the material that collapses refers to the phenomenon that a kind of silicon material that single crystal growing furnace occurs when operation material programsegment collapses, after the single crystal growing furnace heating, silicon material near the well heater surrounding in quartz crucible first starts to melt, after being melted to a certain degree, because the silicon material that is positioned at the top part of quartz crucible will fall down, drop among the silicon liquid in quartz crucible.This process of expecting of collapsing may splash silicon liquid, the upper edge that the four silicon material that go out to splash can be fallen well heater, because the material of well heater is carbon, at high temperature carbon can with silicon generation chemical reaction Formed SiClx, when serious, can cause well heater crackle or fracture to occur, affect the work-ing life of well heater, increased production cost.
The utility model content
For solving the problems of the technologies described above, the utility model provides a kind of and has protected well heater by the protection against corrosion block is set, and the silicon liquid spilt while preventing from collapsing material drops on the single-crystal furnace thermal field heater on well heater and uses the thermal field of this well heater.
For realizing above-mentioned utility model purpose, the technical scheme that the utility model provides is as follows:
A kind of single-crystal furnace thermal field heater with the protection against corrosion block, comprise heater blade and the protection against corrosion block that is arranged on heater blade upper end or top.
Further, described protection against corrosion block is groove shape structure, and lower surface is identical with the upper surface shape of heater blade.
Further, the width of described protection against corrosion block is 34.5mm, is highly 10mm, and groove depth is 5mm, and the groove edge width is 5mm, and two long limits of groove are the arc identical with the blade radian.
Further, the open holes on described protection against corrosion block is arranged on the center of protection against corrosion block, and diameter is 4mm.
Further, described blade upper end is provided with screw hole, and screw coordinates installation through after the protection against corrosion block with screw hole.
Further, described blade is 24, and each blade upper end is a protection against corrosion block of corresponding installation all.
Further, described protection against corrosion block is the annular groove-shaped structure, and described annular groove-shaped structure is arranged on the well heater upper end, and identical with well heater upper end shape.
Further, the groove depth of described annular groove-shaped structure is 5mm.
A kind of thermal field of single crystal furnace with the protection against corrosion block, comprise the above-mentioned single-crystal furnace thermal field heater with the protection against corrosion block, and described protection against corrosion block is positioned at the below of support ring, and with support ring, does not contact.
Further, settle plumbago crucible in described well heater, the upper edge of described plumbago crucible is not less than the upper end of described protection against corrosion block.
Adopt technique scheme, the beneficial effects of the utility model have:
The utility model, by designing and producing well heater protection against corrosion block, is protected well heater, and the silicon liquid spilt while preventing from collapsing material drops on well heater, has improved the work-ing life of well heater; There will be crack conditions react seriously with the silicon liquid spilt when the protection against corrosion block after, now only need to change the protection against corrosion block and get final product; Therefore, technical scheme provided by the utility model only need to existing single-crystal furnace thermal field heater upper end or above settle the protection against corrosion block, the characteristics such as it has reasonable in design, simple to operate, practical.
The accompanying drawing explanation
Fig. 1, Fig. 2, Fig. 3 is one embodiment of the invention schematic diagram;
Fig. 4 is a kind of wiring layout of the thermal field of single crystal furnace with the protection against corrosion block provided by the present invention;
Fig. 5 is A section enlarged view in Fig. 4;
Fig. 6 is further embodiment of this invention schematic diagram.
Wherein, 1 protection against corrosion block, 11 long limits, 12 open holess, 13 screws, 2 blades, 21 screw holes, 3 support rings, 4 plumbago crucibles, 5 molybdenum ropes, 6 external flow guiding cylinders, 7 inner draft tubes.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.
Fig. 1, Fig. 2, Fig. 3 is one embodiment of the invention schematic diagram, as shown in the figure, a kind of single-crystal furnace thermal field heater with the protection against corrosion block provided by the invention, comprise heater blade 2 and the protection against corrosion block 1 that is arranged on heater blade 2 upper ends or top.Described protection against corrosion block 1 is groove shape structure, and lower surface is identical with the upper surface shape of heater blade 2, and two long limits 11 of groove shape structure are the arc identical with blade 2 radians.The center of described protection against corrosion block 1 is provided with open holes 12, and described blade 2 upper ends are provided with screw hole 21, and screw 13 coordinates installation through the open holes 12 on protection against corrosion block 1 is rear with screw hole 21.
Preferably, as depicted in figs. 1 and 2, protection against corrosion block 1 is 34.5mm for width, be highly 10mm, groove depth is 5mm, the width of groove edge is 5mm, two long limits 11 of groove are the circular arc of concentric, the diameter that is positioned at the open holes 12 at protection against corrosion block 1 center is 4mm, for being fixed in the blade top of well heater, corresponding, as shown in Figure 3, increased along mid-way on original heater blade 2 that diameter is that be 4mm, corresponding with open holes 12 positions screw hole 21, the screw hole diameter is 4mm.
While adopting above-mentioned single-crystal furnace thermal field heater work; single crystal growing furnace operation melt section; while collapsing material; silicon liquid splashes; the silicon material splashed everywhere can be fallen on the protection against corrosion block of well heater; prevent the silicon material Direct Contact Heating device generation chemical reaction spilt, protected well heater, improved the work-ing life of well heater.There will be crack conditions react seriously with the silicon liquid spilt when well heater protection against corrosion block after, now only need to change the protection against corrosion block and get final product.This programme has reasonable in design, simple to operate, practical characteristics.
Fig. 6 is further embodiment of this invention schematic diagram, the single-crystal furnace thermal field heater with the protection against corrosion block as shown in Figure 6, described protection against corrosion block 1 is arranged on the well heater upper end, and be the annular groove-shaped structure identical with well heater upper end shape, this annular groove-shaped structure, around well heater one circle, is blocked the upper surface of well heater.As the present embodiment preferably, the groove depth of described annular groove-shaped structure is 5mm, groove edge width width is 5mm, be used for installing the open holes of stationary annular groove shape structure in the setting of annular groove-shaped structural base, in the position corresponding with blade 2, screw hole is set, can on the position corresponding at each blade, screw hole be set, for the dismounting and change convenience, screw hole also can be set on 1-3 blade to fix this annular groove-shaped structure, screw 13 coordinates installation through open holes with screw hole.
In another embodiment of the present invention, as the annular groove-shaped structure of protection against corrosion block, can also be installed on its adjacent middle heat-preservation cylinder inwall, the outside of the inwall of middle heat-preservation cylinder and annular groove-shaped structure is fixed to installation.
Adopt the protection against corrosion block of said structure, the silicon liquid splashed while collapsing material falls in ring groove, with well heater, does not directly contact, and can not cause damage to well heater.And, while adopting a ring texture, while changing the protection against corrosion block, operate also simpler, convenient.
Fig. 4 is a kind of wiring layout of the thermal field of single crystal furnace with the protection against corrosion block provided by the invention, as shown in Figure 4, this thermal field hangs guide shell the molybdenum rope 5 used and the flexible axle that promotes crystal and adopts commaterial (regularly being changed in use procedure), the top thermal insulation material adopts hard felt (preferably adopting the hard felt of Japanese Wu Yu FR200), and coated with carbon element dust layer, the thermal insulation material of filling double-deck guide shell interlayer (double-deck guide shell comprises external flow guiding cylinder 6 and inner draft tube 7) adopts soft felt (preferably adopting the thick soft felt of 3mm of Japanese Wu Yu FR203G), remaining thermal insulation material also adopts soft felt (preferably adopting the thick soft felt of 10mm of Japanese Wu Yu FR210G).The well heater of this thermal field of single crystal furnace has 24 blades, as shown in Figure 5, a protection against corrosion block 1 of corresponding installation on each blade 2, described protection against corrosion block 1 is positioned at the below of support ring 3, and with support ring 3, does not contact.Settle plumbago crucible 4 in described well heater, the upper edge of described plumbago crucible 4 is not less than the upper end of described protection against corrosion block 1.Protection against corrosion block 1 is arranged on blade 2 by screw 13, and its top is support ring 3, and inboard is plumbago crucible 4, thermal insulation layer in the next-door neighbour of the outside.
The above-mentioned thermal field of single crystal furnace with the protection against corrosion block, because it has assembled the protection against corrosion block, avoided the silicon liquid directly etching heater blade of splashing, and the protection against corrosion block can be changed according to service condition, increased the work-ing life of thermal field of single crystal furnace.
The above embodiment has only expressed embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model the scope of the claims.It should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise utility, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. the single-crystal furnace thermal field heater with the protection against corrosion block, is characterized in that, comprises heater blade and the protection against corrosion block that is arranged on heater blade upper end or top.
2. the single-crystal furnace thermal field heater with the protection against corrosion block according to claim 1, is characterized in that, described protection against corrosion block is groove shape structure, and lower surface is identical with the upper surface shape of heater blade.
3. the single-crystal furnace thermal field heater with the protection against corrosion block according to claim 2, is characterized in that, the width of described protection against corrosion block is 34.5mm, be highly 10mm, groove depth is 5mm, and the groove edge width is 5mm, and two long limits of groove are the arc identical with the blade radian.
4. the single-crystal furnace thermal field heater with the protection against corrosion block according to claim 3, is characterized in that, the open holes on described protection against corrosion block is arranged on the center of protection against corrosion block, and diameter is 4mm.
5. according to the described single-crystal furnace thermal field heater with the protection against corrosion block of any one claim in claim 1-4, it is characterized in that, described blade upper end is provided with screw hole, and screw coordinates installation through after the protection against corrosion block with screw hole.
6. according to the described single-crystal furnace thermal field heater with the protection against corrosion block of any one claim in claim 1-4, it is characterized in that, described blade is 24, and each blade upper end is a protection against corrosion block of corresponding installation all.
7. the single-crystal furnace thermal field heater with the protection against corrosion block according to claim 1, is characterized in that, described protection against corrosion block is the annular groove-shaped structure, and described annular groove-shaped structure is arranged on the well heater upper end, and identical with well heater upper end shape.
8. the single-crystal furnace thermal field heater with the protection against corrosion block according to claim 7, is characterized in that, the groove depth of described annular groove-shaped structure is 5mm.
9. the thermal field of single crystal furnace with the protection against corrosion block, it is characterized in that, comprise the described single-crystal furnace thermal field heater with the protection against corrosion block of any one claim in claim 1-8, described protection against corrosion block is positioned at the below of support ring, and with support ring, does not contact.
10. the thermal field of single crystal furnace with the protection against corrosion block according to claim 9, is characterized in that, settles plumbago crucible in described well heater, and the upper edge of described plumbago crucible is not less than the upper end of described protection against corrosion block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320325064XU CN203333814U (en) | 2013-06-06 | 2013-06-06 | Mono-crystal furnace heat field heater with anti-corrosion block and heat field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320325064XU CN203333814U (en) | 2013-06-06 | 2013-06-06 | Mono-crystal furnace heat field heater with anti-corrosion block and heat field |
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| Publication Number | Publication Date |
|---|---|
| CN203333814U true CN203333814U (en) | 2013-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320325064XU Expired - Fee Related CN203333814U (en) | 2013-06-06 | 2013-06-06 | Mono-crystal furnace heat field heater with anti-corrosion block and heat field |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593863A (en) * | 2015-01-05 | 2015-05-06 | 英利集团有限公司 | Single-crystal furnace |
| CN108468083A (en) * | 2018-06-20 | 2018-08-31 | 南京晶能半导体科技有限公司 | A kind of semiconductor silicon single crystal stove with concealed heater |
-
2013
- 2013-06-06 CN CN201320325064XU patent/CN203333814U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593863A (en) * | 2015-01-05 | 2015-05-06 | 英利集团有限公司 | Single-crystal furnace |
| CN108468083A (en) * | 2018-06-20 | 2018-08-31 | 南京晶能半导体科技有限公司 | A kind of semiconductor silicon single crystal stove with concealed heater |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131211 Termination date: 20160606 |