CN203209374U - Air knife device - Google Patents
Air knife device Download PDFInfo
- Publication number
- CN203209374U CN203209374U CN 201320175376 CN201320175376U CN203209374U CN 203209374 U CN203209374 U CN 203209374U CN 201320175376 CN201320175376 CN 201320175376 CN 201320175376 U CN201320175376 U CN 201320175376U CN 203209374 U CN203209374 U CN 203209374U
- Authority
- CN
- China
- Prior art keywords
- air knife
- plate body
- gas chamber
- knife apparatus
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model discloses an air knife device. The air knife device comprises an air knife body, wherein the air knife body comprises a first plate body and a second plate body, the first plate body and the second plate body are arranged in an opposite mode, a gas chamber is formed between the first plate body and the second plate body, at least one air inlet is formed in the surface of the first plate body, and a gas ejection opening which is communicated with the gas chamber is formed in one side of the air knife body. The air knife device further comprises a cleaning knife, wherein the cleaning knife comprises a knife body, and the knife body extends to the interior of the gas chamber through the gas ejection opening, and can move back and forth from one end of the gas chamber to the other end of the gas chamber. According to the air knife device, the cleaning knife which is in programmable control is used for cleaning blocking objects which prevent the air knife device from blowing airflow out, the airflow blown by the gas ejection opening can be even, the number of poor drying areas on the surface of a substrate is reduced, and thus the yield of products is improved.
Description
Technical field
The utility model relates to the manufacturing technology of LCD, relates in particular to a kind of air knife apparatus.
Background technology
TFT-LCD (Thin Film Transistor-Liquid Crystal Display, the TFT LCD) is flat-panel monitor commonly used at present, display panels is as important components among the TFT-LCD, the quality of its manufacture craft is related to the qualification rate of TFT-LCD, and along with the maximization of glass substrate in the display panels, for guaranteeing the qualification rate of product, the homogeneity of each step process requires to be faced with bigger challenge in the production technology of TFT-LCD.
In the manufacture process of each substrate of display panels, adopt wet etching, technology such as clean or peel off by needs.Wherein, wet etching is to utilize mix acid liquor that the unlapped metal of substrate surface photoresist is carried out etching, thereby forms needed metal pattern; Peeling off is the photoresist that utilizes stripper flushing etching metacoxal plate remained on surface; The flushing that cleaning is cleaning equipment by pure water comes the clean substrate surface.In the actual process process, the rear end of equipment cleaning unit all is equipped with air knife, uses the pure air of drying that the water of substrate surface is dried up, and reaches drying effect.
The air knife apparatus of prior art as shown in Figure 1, its main body comprises upper plate 1 and lower plate 2, the upper surface of upper plate 1 has some air admission holes 3, upper plate 1 forms a chamber (not shown) with the opposite face of lower plate 2, the main body side mask has the gas ejection ports 4 that is communicated with chamber.In actual applications, because the chamber of air knife apparatus as shown in Figure 1 and gas ejection ports 4 are often stopped up by dust, soup crystallization, make the air-flow that is blown out by this obstruction place weaken relatively, the air-flow that whole gas ejection ports blows out is inhomogeneous, thereby the subregion of causing substrate is not blown to by air-flow or current rate is not enough, cause substrate surface to have the underdry zone, influence the product yield.
The utility model content
The purpose of this utility model provides a kind of air knife apparatus, can remove dust and the soup crystallization of stopping up gas ejection ports, and the air-flow that gas ejection ports is blown out is even, and then improves the quality of products.
The purpose of this utility model is achieved through the following technical solutions:
The utility model embodiment provides a kind of air knife apparatus, comprise the air knife body, described air knife body comprises first plate body and second plate body that is oppositely arranged, form a gas chamber between described first plate body and second plate body, the surface of described first plate body is provided with at least one air inlet, described air knife body one side is provided with the gas ejection ports that is communicated with described gas chamber, described air knife apparatus also comprises the cleaning cutter, described cleaning cutter comprises cutter hub, described cutter hub and can move around from described gas chamber one end to the other end in described gas ejection ports extends to described gas chamber.
Preferably, described cleaning cutter comprises the handle of a knife of fixedlying connected with cutter hub, and described air knife apparatus also comprises drive disk assembly;
Described drive disk assembly is connected with described handle of a knife, and drives described cutter hub by described handle of a knife and can move around from described gas chamber one end to the other end in described gas chamber.
Preferably, described drive disk assembly comprises two drives, the motor that is connected with a drive wherein of an end that is arranged at described air knife body respectively and is installed on transmission bar on the two described drives;
The handle of a knife of described cleaning cutter is connected with described transmission bar, and the rotation by motor makes described transmission bar drive described cleaning cutter and moves.
Preferably, also be provided with a rail plate on described first plate body, described rail plate is provided with slide unit;
Described drive disk assembly comprises two drives, the motor that is connected with a drive wherein of an end that is arranged at described air knife body respectively and is installed on transmission bar on the two described drives;
The handle of a knife of described cleaning cutter is connected with described slide unit, and described slide unit is connected with described transmission bar;
Rotation by motor makes described transmission bar drive described slide unit and drives described cleaning cutter and move.
Preferably, described air knife apparatus also comprises control assembly;
Described control assembly is connected with described drive disk assembly, is used for the described drive disk assembly motion of control.
Preferably, described control assembly is central processor CPU or programmable logic controller (PLC) PLC.
Preferably, described air inlet evenly distributes along the length direction of described air knife body.
Preferably, described first plate body and described second plate body are an integral body.
Preferably, described first plate body and described second plate body are plate body independently, and the two is fixedly connected.
Preferably, has gasket seal between two faces that described first plate body is relative with described second plate body.
The utility model embodiment beneficial effect is as follows: removing by the cleaning cutter of control able to programme influences the tamper that air knife blows out air-flow, and the air-flow that gas ejection ports is blown out is even, reduces the underdry zone of substrate surface, and then improves the product yield.
Description of drawings
Fig. 1 is the sectional perspective schematic diagram of air knife apparatus in the prior art;
Fig. 2 is the side-looking partial cutaway schematic of air knife apparatus among the utility model embodiment two;
Fig. 3 is cleaning cutter and the driving belt connection diagram of air knife apparatus among the utility model embodiment two;
Fig. 4 is the front elevational schematic of air knife apparatus among the utility model embodiment two;
Fig. 5 is the rail plate of the utility model embodiment two described air knife apparatus and the schematic diagram of slide unit;
Fig. 6 is the schematic diagram that the cleaning cutter of the utility model embodiment two described air knife apparatus is connected with driving belt by slide unit.
Reference numeral:
10, air knife main body, 11, first plate body,
12, second plate body, 13, gas chamber,
14, air inlet, 15, gas ejection ports,
16, cleaning cutter, 161, handle of a knife,
162, cutter hub, 17, driving belt,
18, fixed screw, 19, motor,
20, drive, 21, rail plate,
22, slide unit, 221, the perforation of slide unit.
The specific embodiment
Be elaborated below in conjunction with the implementation procedure of Figure of description to the utility model embodiment.
The utility model embodiment one, a kind of air knife apparatus is provided, comprise the air knife body, the air knife body comprises first plate body and second plate body that is oppositely arranged, form a gas chamber between first plate body and second plate body, the surface of first plate body is provided with at least one air inlet, air knife body one side is provided with the gas ejection ports that is communicated with gas chamber, air knife apparatus also comprises the cleaning cutter, the cleaning cutter comprises cutter hub, cutter hub and can move around from gas chamber's one end to the other end in gas ejection ports extends to gas chamber.
The air knife apparatus that present embodiment provides, extend to the cleaning cutter of one in the gas chamber by arranging once the gas ejection ports place, this cleaning cutter moves with gas ejection ports in the air knife chamber, removing influences the tamper that air knife blows out air-flow, the air-flow that gas ejection ports is blown out is even, reduce the underdry zone of substrate surface, and then improve the product yield.
In addition, the cleaning cutter comprises the handle of a knife of fixedlying connected with cutter hub, and this air knife apparatus also comprises drive disk assembly; Drive disk assembly is connected with handle of a knife, and can move around from gas chamber's one end to the other end in gas chamber by handle of a knife drive cutter hub.This air knife apparatus also comprises control assembly; Control assembly is connected with drive disk assembly, is used for the motion of control drive disk assembly.
For the body of this air knife apparatus, its first plate body and second plate body can be holistic structure, thereby form a chamber at the two opposite face, and have the gas ejection ports that this chamber links to each other and is positioned at air knife body side; Certain first plate body and second plate body also can be independent structures separately, and the two is fixedly connected, thereby make first plate body that matches and the opposite face of second plate body form a chamber, and have the gas ejection ports that this chamber links to each other and is positioned at air knife body side.First plate body is fastenedly connected and can be connected by holding screw with second plate body, and this holding screw passes second plate body and first plate body is fastening; Also can connect by screw, this screw passes second plate body and first plate body is fastening; Perhaps can connect by bolt, this bolt passes behind second plate body and first plate body by locked, makes first plate body and second plate body fastening; Can certainly pass through fastening first plate body of other similar modes and second plate body.It should be noted that, when first plate body and second plate body are independent structures separately, when fixedly connected to the two, can between first plate body and the second plate body joint, gasket seal be set, with the air-tightness of the body of the air knife apparatus that guarantees its composition, the air-flow that good air-tightness helps gas ejection ports is blown out between the plate body is even.
The main body structure of air knife apparatus, the size of chamber and the size of gas ejection ports, be not limited with present embodiment, can design according to actual needs, certainly be necessary to adjust shape or the size of cleaning cutter pointed in the utility model, requirement with the body that adapts to air knife apparatus, it should be noted that, on the gas ejection ports bearing of trend of opening perpendicular to air knife, the thickness of the cutter hub of cleaning cutter is slightly less than the open height of gas ejection ports, influence the tamper that gas ejection ports blows out air-flow to guarantee to clean, do not contact with the last lower edge of gas ejection ports again.Simultaneously, the cutter hub of cleaning cutter need have certain intensity, in order to avoid cause distortion, generally, the material selection solid-state metallic material of the cutter hub of cleaning cutter, the iron, steel or the alloy that preferably have preferable hardness; It is in corrosion resistant purpose, and further preferably not saturating steel material is made cutter hub.
And the air inlet that the first plate body upper surface arranges preferably is arranged to a row, and distributes uniformly, and this helps the even of air inlet.
For the cleaning cutter of this air knife apparatus, its shape can U-shaped or L type, but not as limit, can decide according to actual conditions, needs cooperating of satisfied and drive disk assembly.
For drive disk assembly, it can be arranged on the body of air knife apparatus fully, also can partly be arranged on the body of air knife apparatus.Drive disk assembly can adopt servo motor, driving belt device, air cylinder device, geared system etc., can be wherein one or more the combination that can finish present embodiment separately.In the present embodiment, preferred following two kinds of drive disk assemblies:
First kind, drive disk assembly comprise two drives, the motor that is connected with a drive wherein of an end that is arranged at the air knife body respectively and are installed on transmission bar on two drives; The handle of a knife of cleaning cutter is connected with the transmission bar, and the rotation by motor makes the drive of transmission bar clean cutter and moves.
Also be provided with a rail plate on second kind, first plate body, rail plate is provided with slide unit; Drive disk assembly comprises two drives, the motor that is connected with a drive wherein of an end that is arranged at the air knife body respectively and is installed on transmission bar on two drives; The handle of a knife of cleaning cutter is connected with slide unit, and slide unit is connected with the transmission bar; Rotation by motor is moved transmission bar driving slide unit drive cleaning cutter.
The transmission bar that more than relates to can be driving belt or driving chain.
For above two kinds of situations, the cleaning handle of a knife of cutter and being connected of transmission bar or slide unit adopt screw to fix usually, and perhaps other more firm fixed forms can not occur being offset or coming off with assurance cleaning cutter in the course of the work.
Certainly, above preferred embodiment does not form restriction for utility model just in order more to clearly demonstrate the air knife apparatus that this enforcement provides, and the drive disk assembly of other situations is similar with it, therefore gives an example no longer one by one.
For control assembly, preferably, be central processor CPU or programmable logic controller (PLC) PLC, by fixed its startup of programming metric, work, stop condition, finish automatic driving drive disk assembly, finish the gas chamber of air knife apparatus and the cleaning of gas ejection ports thereby make drive disk assembly drive the cleaning cutter.
The utility model embodiment two provides a kind of air knife apparatus, and the side-looking partial cutaway schematic of this air knife apparatus comprises first plate body 11, second plate body 12 that air knife body 10, air knife body 10 comprise as shown in Figure 2; The upper surface of gas chamber's 13, the first plate bodys that the opposite face of first plate body 11 and second plate body 12 forms is formed with some air inlets 14;
The gas ejection ports 15 that is formed at air knife body side and is connected with gas chamber;
Wherein, the distribution of air inlet 14 on first plate body 11 and shown in Figure 1 similar here no longer is shown specifically.
In the present embodiment, drive disk assembly comprises driving belt 17, Fig. 3 shows the schematic diagram that the cleaning cutter 16 of this air knife apparatus is connected with driving belt 17, cleaning cutter 16 comprises handle of a knife 161 and cutter hub 162 as shown in Figure 2, and the handle of a knife 161 that wherein cleans cutter 16 is anchored on the driving belt 17 by screw 18.
In the present embodiment, drive disk assembly comprises that also motor 19(is in order clearly to illustrate motor 19, the drive 20 of this position is not shown) and drive 20, the front elevational schematic of air knife apparatus as shown in Figure 4, wherein the side cross-sectional of the air knife body 10 of air knife apparatus is as shown in Figure 2.Motor 19 and drive 20 are arranged at the two ends of air knife body 10 respectively, and driving belt 17 is arranged on the two, and cleaning cutter 16 is fixed on the driving belt 17, and motor 19 is connected in control assembly (not shown at this).
Need to prove, for the more clearly syndeton that driving belt 17 or driving belt 17 are shown, in Fig. 4, driving belt 17 is to arrange with the plane perpendicular to first plate body 11, be that the plane that is parallel to first plate body 11 arranges in Fig. 3 and Fig. 6, it is identical that person skilled should be able to be understood its essence.
By the interior rotation at interval at the appointed time of control assembly control motor 19, make connection driving belt 17 left and right sides translations thereon, drive cleaning cutter 16 at the 13(of gas chamber with reference to shown in Figure 2) and gas ejection ports 15 in moved repeatedly by an end to the other end, reach the purpose that cleans the solid tamper.
The utility model embodiment three provides a kind of air knife apparatus, have as structure the embodiment two-phase, difference is, the drive disk assembly of present embodiment, also comprise a slide unit 22 that is arranged at the rail plate 21 on the air knife body 10 and cooperates with rail plate 21 as shown in Figure 5, this slide unit 22 can slide at the length direction of rail plate 21 upper edge air knife bodies 10.
As shown in Figure 6, cleaning cutter 16 is connected with slide unit 22, and driving belt 17 is connected with slide unit 22, and is all fastening by screw 18.In addition, the perforation 221 of slide unit 22 is used for passing rail plate 21 as shown in Figure 5, and slide unit 22 can be slided at rail plate 21.
Identical with embodiment two is, motor 19(is in order clearly to illustrate motor 19, and the drive 20 of this position is not shown) and drive 20 be arranged at the two ends of air knife body 10 respectively, driving belt 17 is arranged on the two, motor 19 is connected in control assembly.By the interior rotation at interval at the appointed time of control assembly control motor 19, make connection driving belt 17 left and right sides translations thereon, driving slide unit 22 slides on rail plate 21, the slide unit 22 that slides drive cleaning cuttves 16 at the 13(of gas chamber with reference to shown in Figure 2) and gas ejection ports 15 in moved repeatedly by an end to the other end, reach the purpose that cleans the solid tamper.
More than among each embodiment, control assembly can be for central processor CPU or programmable logic controller (PLC) PLC, in actual production, can be by to CPU or PLC programming, the positive and reverse return of control CD-ROM drive motor transfers the left and right sides translation that drives driving belt 17; And can arrange at regular intervals, the normal dry work of air knife apparatus temporarily stops, in substrate stops between buffering area, air knife apparatus begins automated cleaning, behind the certain hour, cleaning is finished, and proceeds normal dry work, cleaning cutter 16 rests on gas chamber 13 and gas ejection ports 15 high order ends or low order end, does not influence the transmission of substrate and the normal dry work of air knife apparatus.Certainly, the driving belt in the various embodiments described above 17 also can be realized with driving chain.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (10)
1. air knife apparatus, comprise the air knife body, described air knife body comprises first plate body and second plate body that is oppositely arranged, form a gas chamber between described first plate body and second plate body, the surface of described first plate body is provided with at least one air inlet, described air knife body one side is provided with the gas ejection ports that is communicated with described gas chamber, it is characterized in that:
Described air knife apparatus also comprises the cleaning cutter, and described cleaning cutter comprises cutter hub, and described cutter hub and can move around from described gas chamber one end to the other end in described gas ejection ports extends to described gas chamber.
2. air knife apparatus as claimed in claim 1 is characterized in that, described cleaning cutter comprises the handle of a knife of fixedlying connected with cutter hub, and described air knife apparatus also comprises drive disk assembly;
Described drive disk assembly is connected with described handle of a knife, and drives described cutter hub by described handle of a knife and can move around from described gas chamber one end to the other end in described gas chamber.
3. air knife apparatus as claimed in claim 2 is characterized in that, described drive disk assembly comprises two drives, the motor that is connected with a drive wherein of an end that is arranged at described air knife body respectively and is installed on transmission bar on the two described drives;
The handle of a knife of described cleaning cutter is connected with described transmission bar, and the rotation by motor makes described transmission bar drive described cleaning cutter and moves.
4. air knife apparatus as claimed in claim 2 is characterized in that, also is provided with a rail plate on described first plate body, and described rail plate is provided with slide unit;
Described drive disk assembly comprises two drives, the motor that is connected with a drive wherein of an end that is arranged at described air knife body respectively and is installed on transmission bar on the two described drives;
The handle of a knife of described cleaning cutter is connected with described slide unit, and described slide unit is connected with described transmission bar;
Rotation by motor makes described transmission bar drive described slide unit and drives described cleaning cutter and move.
5. as each described air knife apparatus of claim 2 to 4, it is characterized in that described air knife apparatus also comprises control assembly;
Described control assembly is connected with described drive disk assembly, is used for the described drive disk assembly motion of control.
6. air knife apparatus according to claim 5 is characterized in that, described control assembly is central processor CPU or programmable logic controller (PLC) PLC.
7. air knife apparatus according to claim 1 is characterized in that, described air inlet evenly distributes along the length direction of described air knife body.
8. air knife apparatus according to claim 1 is characterized in that, described first plate body and described second plate body are an integral body.
9. air knife apparatus according to claim 1 is characterized in that, described first plate body and described second plate body are plate body independently, and the two is fixedly connected.
10. air knife apparatus according to claim 9 is characterized in that, has gasket seal between described first plate body two faces relative with described second plate body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320175376 CN203209374U (en) | 2013-04-09 | 2013-04-09 | Air knife device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320175376 CN203209374U (en) | 2013-04-09 | 2013-04-09 | Air knife device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203209374U true CN203209374U (en) | 2013-09-25 |
Family
ID=49198945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320175376 Expired - Lifetime CN203209374U (en) | 2013-04-09 | 2013-04-09 | Air knife device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203209374U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107377521A (en) * | 2017-08-28 | 2017-11-24 | 深圳市华星光电技术有限公司 | A kind of self-cleaning structure of air knife or liquid cutter |
| CN108826927A (en) * | 2018-07-21 | 2018-11-16 | 洪波 | A kind of spinneret blowing-dry apparatus |
| CN112657941A (en) * | 2020-10-30 | 2021-04-16 | 深圳奥拓力机电科技有限公司 | Automatic plasma generator cleaning device and using method thereof |
-
2013
- 2013-04-09 CN CN 201320175376 patent/CN203209374U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107377521A (en) * | 2017-08-28 | 2017-11-24 | 深圳市华星光电技术有限公司 | A kind of self-cleaning structure of air knife or liquid cutter |
| CN108826927A (en) * | 2018-07-21 | 2018-11-16 | 洪波 | A kind of spinneret blowing-dry apparatus |
| CN112657941A (en) * | 2020-10-30 | 2021-04-16 | 深圳奥拓力机电科技有限公司 | Automatic plasma generator cleaning device and using method thereof |
| CN112657941B (en) * | 2020-10-30 | 2022-03-08 | 深圳奥拓力机电科技有限公司 | Automatic plasma generator cleaning device and using method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203209374U (en) | Air knife device | |
| US20150183005A1 (en) | Substrate cleaning device | |
| JP4776380B2 (en) | Processing apparatus and processing method | |
| KR101091095B1 (en) | Module for cleaning a substrate and Apparatus for processing a substrate having the same | |
| US20160365259A1 (en) | System for wet etching | |
| US9892940B2 (en) | Spray assembly and wet etching device having the same | |
| EP3226283B1 (en) | Liquid cutter cleaning device | |
| JP2017034101A (en) | Etching device | |
| KR100691473B1 (en) | Air knife module for drying substrate and drying device using thereof | |
| KR100762371B1 (en) | A glass dryness air knife | |
| KR20090066736A (en) | Etching apparatus | |
| JP5372695B2 (en) | Substrate processing equipment | |
| WO2020062365A1 (en) | Manufacturing device of display panel and cleaning method therefor | |
| KR102366909B1 (en) | Air knife module for drying substrate and Device for drying substrate comprising the same | |
| CN205718344U (en) | Flat pannel display panel glass wet-chemical processes the device of low wind speed purging residual liquid | |
| JP2001099569A (en) | Drying treating device for substrate | |
| DE102006026317A1 (en) | Method for increasing the productivity of loading vacuum coating installations comprises removing a treatment unit from a treatment section and inserting a treatment unit into the treatment section while maintaining the process vacuum | |
| CN109659261B (en) | Substrate etching equipment and processing system thereof | |
| JP2009279477A (en) | Apparatus for removing treatment liquid, apparatus for treating substrate, and method of setting up nozzle gap | |
| CN105972970B (en) | The technique that FPD panel glass wet-chemical processes low wind speed purging raffinate | |
| WO2012111602A1 (en) | Wet etching apparatus and wet etching method | |
| CN207872490U (en) | A kind of equipment improving bottle coating quality | |
| JP2006093591A (en) | Processor of substrate | |
| CN101604610A (en) | Chamber and processing unit | |
| KR20100103247A (en) | Air knife drying apparatus for flat display |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130925 |
|
| CX01 | Expiry of patent term |