CN203025209U - Device for preparing pure-tungsten probe of tunnel scanning microscope - Google Patents
Device for preparing pure-tungsten probe of tunnel scanning microscope Download PDFInfo
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- CN203025209U CN203025209U CN 201320008970 CN201320008970U CN203025209U CN 203025209 U CN203025209 U CN 203025209U CN 201320008970 CN201320008970 CN 201320008970 CN 201320008970 U CN201320008970 U CN 201320008970U CN 203025209 U CN203025209 U CN 203025209U
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Abstract
The utility model discloses a device for preparing a pure-tungsten probe of a tunnel scanning microscope. The device comprises a first three-dimensional adjustable bracket (1), wherein a magnet (2) is perpendicularly arranged on a transverse rod of the first three-dimensional adjustable bracket (1); a probe tray (3) is fixed at the lower end of the magnet (2); an upper coil (4) is arranged at the bottom of a supporting disk (5); a circular hole (6) is formed in the center of a protruded part at the bottom of the supporting disk (5); a lower coil (7) is arranged below the circular hole (6) and is coaxial with the circular hole (6); and wire lead ends of the upper coil (4) and the lower coil (7) are fixed on a circular vertical column of a second three-dimensional adjustable bracket (8). By the device, the problems that the device for preparing the pure-tungsten probe by the conventional electrochemical corrosion method is simple, a voltage signal, the concentration of electrolyte and the power failure time cannot be effectively controlled, the prepared probe is not pointed enough, has a large curvature radius and is easy to passivate, the whole process needs the participation of workers, the efficiency is low, and the preparation success rate is low are solved.
Description
Technical field
The utility model relates to preparation scanning tunnel microscope technical field, relates in particular to a kind of device for preparing scanning tunnel microscope pure tungsten probe.
Background technology
Ultimate principle according to scanning tunnel microscope (STM), one of principal element that we can know decision STM performance is the quality of scanning probe tip, probe forms tunnel current by sample surfaces and characterizes as the pattern of feedback signal to sample, therefore prepares high performance probe significant to improving the precision of measuring and processing.
Preparation STM needle point main material is generally selected single crystal tungsten wire (W) preparation at present.Tungsten filament has good electric conductivity and high hardness, and cheap.Probe preparation method commonly used mainly contains mechanical shearing method and electrochemical erosion method.Mechanical shearing method depends on the personnel operation experience for tradition, and the probe tip radius of producing is excessive, and the probe overall profile is asymmetric, and measurement performance is also bad; Electrochemical erosion method is the modal method for preparing probe, traditional electrochemical erosion method Upgrading is had a lot, such as: liquid-film method, the public method of alternating current-direct current etc., but its preparation facilities is very simple, to voltage signal, concentration of electrolyte, power-off time can't effectively be controlled, lack ripe preparation technology, the preparation probe mainly contains following shortcoming: 1, needle point is sharp-pointed not, and radius-of-curvature is large, easily passivation; 2, whole process all needs someone to participate in, inefficiency; 3, be prepared into power not high.
Summary of the invention
The technical problems to be solved in the utility model: a kind of device for preparing scanning tunnel microscope pure tungsten probe is provided, to prepare its preparation facilities of pure tungsten probe simple to solve traditional electrochemical erosion method, to voltage signal, concentration of electrolyte, power-off time can't effectively be controlled, the probe of preparing exists needle point sharp-pointed not, and radius-of-curvature is large, easily passivation; Whole process all needs someone to participate in inefficiency; Be prepared into the not high problem of power.
Technical solutions of the utility model:
A kind of device for preparing scanning tunnel microscope pure tungsten probe, it comprises the first three-dimensional adjustable support and the second three-dimensional adjustable support, be vertically installed with magnet on the cross bar of the first three-dimensional adjustable support, the probe pallet is fixed on the lower end of magnet, top coil is placed on bottom supporting disk, there is circular hole at center, supporting disk bottom protrusion place, the below coil be placed in circular hole below and coaxial with circular hole, the lead end of top coil and below coil is fixed on the circular abutment of the second three-dimensional adjustable support.
Top coil connects power cathode, and the below coil connects positive source.
The beneficial effects of the utility model:
The three-dimensional adjustable support of the utility model first and support and the second three-dimensional adjustable support can be used for fine adjustment tungsten filament residing position, prepare regular shape, needle point that radius-of-curvature is enough little; The liquid level of solution area is large in supporting disk, has effectively avoided the liquid film that causes due to the NaOH solution consumption in the corrosion process with respect to the variation of corrosion position, and can realize the adjusting of thickness of liquid film, further realizes the adjusting of length of needlepoint.Can hightail liquid level after the vertical separate design of supporting disk and below coil makes the lower end tungsten filament break and realize automatically cutting off current path; The pulling function of lower end tungsten filament gravity is drawn carefullyyer before making needle point fracture, makes the radius-of-curvature at needle point top enough little.Circuit automatic break time short (approximately 2ms), effectively stop aftercurrent to the further corrosion at needle point top, the radius-of-curvature at assurance needle point top is enough little, install simple and easy, working stability, easy to operate, use the etchant solution amount few, realize the automatic cutout of open circuit potential by extremely easy device.The tungsten filament needle point radius-of-curvature of preparation is enough little, the enough rules of shape, and yield rate is high; Having solved traditional electrochemical erosion method, to prepare its preparation facilities of pure tungsten probe simple, to voltage signal, and concentration of electrolyte, power-off time can't effectively be controlled, and the probe of preparing exists needle point sharp-pointed not, and radius-of-curvature is large, easily passivation; Whole process all needs someone to participate in inefficiency; Be prepared into the not high problem of power.
Description of drawings:
Fig. 1 is the utility model device schematic diagram;
Fig. 2 is the utility model support plate structure enlarged diagram.
Embodiment:
A kind of device for preparing scanning tunnel microscope pure tungsten probe, it comprises the first three-dimensional adjustable support 1 and the second three-dimensional adjustable support 8, be vertically installed with magnet 2 on the cross bar of the first three-dimensional adjustable support 1, probe pallet 3 is fixed on the lower end of magnet 2, top coil 4 is placed on supporting disk 5 bottoms, there is circular hole 6 at supporting disk 5 centers, bottom protrusion place, the below coil 7 be placed in circular hole 6 belows and coaxial and parallel with circular hole 6, the lead end of top coil 4 and below coil 7 is fixed on the circular abutment of the second three-dimensional adjustable support 8.
Supporting disk 5 can adopt plastic pallet, joins in supporting disk as corrosive liquid with NaOH solution, and tungsten filament is inserted probe pallet 3, and the probe pallet vertically is fixed on magnet 2.Add in the supporting disk 5 etchant solution to make and form the liquid film that thickness is about 0.5mm on bottom of device circular hole 6, coil 7 adds NaOH solution to form very thin liquid film downwards simultaneously.By the X of the first three-dimensional adjustable support 1 regulating magnet 2, Y, the Z direction, the center of two liquid films on the top coil 4 that makes tungsten filament vertically insert to be fixed on the second three-dimensional adjustable support 8 and below coil 7, and make tungsten filament outstanding below coil.Thereby obtain needle point for tungsten filament in the small sircle hole place liquid film that makes supporting disk 5 bottoms is corroded, supporting disk 5 is connect power cathode, lower end-coil connects positive source.
After place in circuit, the reaction of galvanic corrosion is:
Anode: Wu=Wu
2++ 2e
-Perhaps Wu=Wu
3++ 3e
-
Negative electrode: 2H
++ 2e
-=H
2
By regulating power source voltage, to control the speed of galvanic corrosion.Be in that in the etchant solution liquid film in supporting disk 5 bottom circular aperture, tungsten filament is corroded.The interior liquid level of solution area of supporting disk 5 is large, has effectively avoided the liquid film that causes due to the NaOH solution consumption in the corrosion process with respect to the variation of corrosion position, and can realize the adjusting of thickness of liquid film, further realizes the adjusting of length of needlepoint.Along with passage of time is more and more thinner at the tungsten filament at the circular hole 6 liquid film places of supporting disk 5 bottoms, in whole galvanic corrosion circuit, electric current is more and more lower.The pulling function of lower end tungsten filament gravity is drawn carefullyyer before making the needle point fracture, and final tungsten filament fracture is come and broken away from liquid level (when tungsten filament disconnects, electric current is in the uA magnitude), and whole galvanic corrosion power circuit cuts off automatically, forms needle point.By calculating, the time of tungsten filament liquid level from rupture to breaking away from is about 2ms, demonstrates the cut-out circuit speed very fast; Because electric current in corrosion process can diminish gradually, therefore the rear aftercurrent of tungsten filament fracture is little, has effectively avoided needle point to break away from liquid level time internal cause aftercurrent at the latter half tungsten filament and continued corrosion and make needle point become the problem of timing.
Claims (2)
1. device for preparing scanning tunnel microscope pure tungsten probe, it comprises the first three-dimensional adjustable support (1) and the second three-dimensional adjustable support (8), it is characterized in that: be vertically installed with magnet (2) on the cross bar of the first three-dimensional adjustable support (1), probe pallet (3) is fixed on the lower end of magnet (2), top coil (4) is placed on bottom supporting disk (5), there is circular hole (6) at center, supporting disk (5) bottom protrusion place, below coil (7) be placed in circular hole (6) below and coaxial with circular hole (6), the lead end of top coil (4) and below coil (7) is fixed on the circular abutment of the second three-dimensional adjustable support (8).
2. a kind of device for preparing scanning tunnel microscope pure tungsten probe according to claim 1, it is characterized in that: top coil (4) connects power cathode, and below coil (7) connects positive source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320008970 CN203025209U (en) | 2013-01-09 | 2013-01-09 | Device for preparing pure-tungsten probe of tunnel scanning microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320008970 CN203025209U (en) | 2013-01-09 | 2013-01-09 | Device for preparing pure-tungsten probe of tunnel scanning microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203025209U true CN203025209U (en) | 2013-06-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320008970 Expired - Fee Related CN203025209U (en) | 2013-01-09 | 2013-01-09 | Device for preparing pure-tungsten probe of tunnel scanning microscope |
Country Status (1)
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| CN (1) | CN203025209U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370891A (en) * | 2016-10-24 | 2017-02-01 | 中南大学 | Preparation method for scanning probe of scanning tunneling microscope and control circuit |
| CN106501555A (en) * | 2016-12-01 | 2017-03-15 | 西安交通大学 | A kind of preparation facilitiess of ultralow roughness tungsten tipped probe and method |
| CN106771377A (en) * | 2017-03-14 | 2017-05-31 | 贵州大学 | The draw bail and probe rod fixing means of a kind of vertical fixed probe rod |
| CN106841689A (en) * | 2017-03-27 | 2017-06-13 | 贵州大学 | Make the probe rod vibration absorber and method of tunneling scanning microscope probe equipment |
| CN107102174A (en) * | 2017-05-16 | 2017-08-29 | 中国计量科学研究院 | A kind of preparation method for the extraordinary probe that micro-measurement apparatus is scanned for needlepoint type |
| CN111054453A (en) * | 2019-12-10 | 2020-04-24 | 浙江大学 | Preparation method of tungsten filament microelectrode array for extracellular recording |
| CN113341179A (en) * | 2021-06-18 | 2021-09-03 | 中国科学院大连化学物理研究所 | Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion |
| CN114076833A (en) * | 2020-08-18 | 2022-02-22 | 中国科学院大连化学物理研究所 | Needle tip processing method for enhancing needle tip selective resolution by using two-dimensional oxide |
-
2013
- 2013-01-09 CN CN 201320008970 patent/CN203025209U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370891A (en) * | 2016-10-24 | 2017-02-01 | 中南大学 | Preparation method for scanning probe of scanning tunneling microscope and control circuit |
| CN106370891B (en) * | 2016-10-24 | 2023-09-15 | 中南大学 | Preparation method and control circuit of scanning probe of scanning tunnel microscope |
| CN106501555A (en) * | 2016-12-01 | 2017-03-15 | 西安交通大学 | A kind of preparation facilitiess of ultralow roughness tungsten tipped probe and method |
| CN106771377A (en) * | 2017-03-14 | 2017-05-31 | 贵州大学 | The draw bail and probe rod fixing means of a kind of vertical fixed probe rod |
| CN106841689A (en) * | 2017-03-27 | 2017-06-13 | 贵州大学 | Make the probe rod vibration absorber and method of tunneling scanning microscope probe equipment |
| CN107102174A (en) * | 2017-05-16 | 2017-08-29 | 中国计量科学研究院 | A kind of preparation method for the extraordinary probe that micro-measurement apparatus is scanned for needlepoint type |
| CN111054453A (en) * | 2019-12-10 | 2020-04-24 | 浙江大学 | Preparation method of tungsten filament microelectrode array for extracellular recording |
| CN114076833A (en) * | 2020-08-18 | 2022-02-22 | 中国科学院大连化学物理研究所 | Needle tip processing method for enhancing needle tip selective resolution by using two-dimensional oxide |
| CN113341179A (en) * | 2021-06-18 | 2021-09-03 | 中国科学院大连化学物理研究所 | Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion |
| CN113341179B (en) * | 2021-06-18 | 2023-03-21 | 中国科学院大连化学物理研究所 | Device and method for preparing scanning tunnel microscope needle tip based on liquid film electrochemical corrosion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130626 Termination date: 20160109 |