CN202975473U - Optical focal plane compensating device based on three wedge prisms - Google Patents
Optical focal plane compensating device based on three wedge prisms Download PDFInfo
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- CN202975473U CN202975473U CN 201220586392 CN201220586392U CN202975473U CN 202975473 U CN202975473 U CN 202975473U CN 201220586392 CN201220586392 CN 201220586392 CN 201220586392 U CN201220586392 U CN 201220586392U CN 202975473 U CN202975473 U CN 202975473U
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- faceted pebble
- prism wedge
- wedge
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- plane
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Abstract
The utility model discloses an optical focal plane compensating device based on three wedge prisms. The device comprises an image optics system, a detector focal plane and a parallel plate assembly arranged between light paths of the image optics system and the detector focal plane. The parallel plate assembly successively contains a first wedge prism, a second wedge prism and a third wedge prism. The first wedge prism and the third wedge prism are right-angle wedge prisms. The second wedge prism is an isosceles wedge prism. Inclined planes of the first and third wedge prisms respectively fit against the two isosceles surfaces of the second wedge prism. Light beams successively pass through the first wedge prism, the second wedge prism and the third wedge prism, and are focused and imaged on the detector focal plane. Through moving the third wedge prism along the joint surface between the second wedge prism and the third wedge prism, thicknesses of the three wedge prisms in the direction of optical axis are changed so as to change the optical path for focusing.
Description
Technical field
The utility model relates to optical technical field, relates in particular to a kind of device based on three prism wedge compensate for optical focal planes.
Background technology
Optical system when causing out of focus, need to be carried out defocusing compensation due to a variety of causes (such as zoom process, perhaps temperature variation) to system.And existing optical focal plane compensating machanism usually general be the mechanical type focus control, control the position of one or more pieces optical elements by focus control, defocusing amount is eliminated at the interval that changes optical element.But when compensating out of focus by mobile lens, can affect the aberration of system.
Summary of the invention
In view of above-mentioned analysis, the utility model aims to provide a kind of device based on three prism wedge compensate for optical focal planes, in order to address the above problem.
The purpose of this utility model mainly is achieved through the following technical solutions:
A kind of device that adopts prism wedge compensate for optical focal plane, comprise: imaging optical system and detector focal plane, and the parallel flat assembly between the light path of described imaging optical system and described detector focal plane, described parallel flat assembly is three prism wedges; Described prism wedge comprises the first prism wedge, the second prism wedge and the 3rd prism wedge that sets gradually, described the first prism wedge and described the 3rd prism wedge are the right angle prism wedge, described the second prism wedge is the isosceles prism wedge, fits with the central planes such as two of described the second prism wedge respectively in the inclined-plane of described the first prism wedge and described the 3rd prism wedge;
Described imaging optical system may be comprised of a slice or multi-disc lens or catoptron, light beam by the imaging optical system focal imaging on described detector focal plane.
Light beam passes described the first prism wedge, described the second prism wedge and described the 3rd prism wedge successively, and at place, described detector focal plane focal imaging, move described the 3rd prism wedge by the binding face along described the second prism wedge and described the 3rd prism wedge, change the thickness of three prism wedges on optical axis direction and then change light path and focus.
Preferably, described the first prism wedge comprises the first faceted pebble, the second faceted pebble and the first inclined-plane, and described the second prism wedge comprises the 3rd inclined-plane, the 4th inclined-plane and the 7th faceted pebble, and described the 3rd prism wedge comprises the 4th faceted pebble, the 5th faceted pebble and the second inclined-plane;
Light beam enters described the first prism wedge along described the first faceted pebble, then passes successively described the first inclined-plane, the 3rd inclined-plane, the 4th inclined-plane and the second inclined-plane, passes from the 5th faceted pebble of described the 3rd prism wedge;
Described the first faceted pebble is all vertical with optical axis direction with described the 5th faceted pebble;
Described the second faceted pebble, described the 4th faceted pebble and described the 7th faceted pebble are all parallel with optical axis direction.
Preferably, described the first prism wedge also comprises the 3rd faceted pebble, and described the 3rd faceted pebble is parallel with described the second faceted pebble, and described the second faceted pebble and described the 3rd faceted pebble are positioned at the two ends of described the first faceted pebble;
Described the 3rd prism wedge also comprises the 6th faceted pebble, and described the 6th faceted pebble is parallel with described the 4th faceted pebble, and described the 6th faceted pebble and described the 4th faceted pebble are positioned at the two ends of described the 5th faceted pebble.
Preferably, the length of the intersection of described the first faceted pebble and described the second faceted pebble is for being X, X 〉=X
0
The length on another limit of described the first faceted pebble is Y, wherein Y 〉=X
0
The length on another limit of described the second faceted pebble is t
1, the limit of described three faceted pebble relative with it is t
2, t
1=t
2+ Ytan α;
The length of the 7th faceted pebble of described the second prism wedge and the intersection on the 3rd inclined-plane is also X, X 〉=X
0The length on another limit of described the 7th faceted pebble is m, m 〉=2X
0Tan α;
Described the 3rd prism wedge along perpendicular to optical axis direction movably ultimate range be
Described the 5th faceted pebble is Y along the length perpendicular to optical axis direction
1,
The intersection of the 5th faceted pebble and the 4th faceted pebble is X
1, X
1〉=X
0The length that the 4th faceted pebble is parallel to the limit of optical axis direction is t
3, the length of side of its corresponding the 6th faceted pebble (16) is t
4, t
3=t
4+ Y
1Tan α.
When the accessible maximum focusing amount of optical system is ± d
max, described the first prism wedge, the second prism wedge and described the 3rd changeable maximum axial distance of prism wedge are
The axial gross thickness of described the first prism wedge, the second prism wedge and described the 3rd prism wedge
Wherein, L is the distance between optical system and detector focal plane; L
1Be the distance between described parallel flat assembly and described detector focal plane; X
0That distance between described parallel flat assembly and described detector focal plane is L
1The time, the light beam clear aperture on described first faceted pebble of described the first right angle prism wedge; N is the refractive index of described right angle prism wedge; D is the defocusing amount of optical system focal plane; ± d
maxMaximum defocus amount for optical system focal plane; Δ x is that described right angle prism wedge is along the rate of travel perpendicular to optical axis direction; Δ T is that described right angle prism wedge is along the rate of travel that is parallel to optical axis direction; β is picture side's aperture angle of optical system.
Preferably, the angle that described the second faceted pebble is corresponding is wedge angle α, and the angle of total reflection of described prism wedge is
The scope of described wedge shape corner angle α is
The angle of described the second prism wedge that preferably, described the 7th faceted pebble is corresponding is 2 α.
The angle of described the 3rd prism wedge that preferably, described the 4th faceted pebble is corresponding is α.
The utility model beneficial effect is as follows:
The utility model provides a kind of device based on three prism wedge compensate for optical focal planes, by on the light path between optical system and detector focal plane, the parallel flat assembly being set, described parallel flat assembly comprise the first prism wedge, the 3rd prism wedge and be placed in described the first prism wedge and described the second prism wedge between the 3rd prism wedge; Light path passes described the first prism wedge, described the second prism wedge and described the 3rd prism wedge successively; Move described the 3rd prism wedge by the inclined-plane along described the second prism wedge, the axial cross section thickness of three prism wedges that change light passes is focused thereby change from the light path of prism wedge arrival detector, the compensate for optical defocusing amount.
Other feature and advantage of the present utility model will be set forth in the following description, and becoming apparent from instructions of part perhaps understood by implementing the utility model.The purpose of this utility model and other advantages can realize and obtain by specifically noted structure in the instructions of writing, claims and accompanying drawing.
Description of drawings
Fig. 1 is the device schematic diagram based on three prism wedge compensate for optical focal planes of the utility model embodiment;
Fig. 2 is the schematic diagram of the first prism wedge of the utility model embodiment;
Fig. 3 is the schematic diagram of the second prism wedge of the utility model embodiment;
Fig. 4 is the schematic diagram of the 3rd prism wedge of the utility model embodiment;
Reference numeral: 1-optical system, 2-the first prism wedge, 3-the second prism wedge, 4-the 3rd prism wedge, 5-detector focal plane, 6-the first faceted pebble, 7-the second faceted pebble, 8-the 3rd faceted pebble, 9-the first inclined-plane, 10-the 3rd inclined-plane, 11-the 4th inclined-plane, 12-the 7th faceted pebble, 14-the 4th faceted pebble, 15-the 5th faceted pebble, 16-the 6th faceted pebble, 13-the second inclined-plane.
Embodiment
Specifically describe preferred embodiment of the present utility model below in conjunction with accompanying drawing, wherein, accompanying drawing consists of the application's part, and is used from explaination principle of the present utility model with embodiment one of the present utility model.For clear and simplification purpose, when it may make theme of the present utility model smudgy, with illustrating in detail of known function and structure in omission device described herein.
The utility model embodiment provides a kind of device based on three prism wedge compensate for optical focal planes, referring to Fig. 1, this device comprises:
Imaging optical system 1 and detector focal plane 5, and the parallel flat between the light path of described imaging optical system 1 and described detector focal plane 2, described parallel flat is three prism wedges; Described prism wedge comprises the first prism wedge 2, the second prism wedge 3 and the 3rd prism wedge 4 that sets gradually, described the first prism wedge 2 and described the 3rd prism wedge 4 are the right angle prism wedge, described the second prism wedge 3 is the isosceles prism wedge, specifically as shown in Figure 3, fit with the central planes such as two of described the second prism wedge 3 respectively in the inclined-plane of described the first prism wedge 2 and described the 3rd prism wedge 4;
Described imaging optical system 1 may be comprised of a slice or multi-disc lens or catoptron, light beam by imaging optical system 1 focal imaging on described detector focal plane 5.
Light beam passes described the first prism wedge 2, described the second prism wedge 3 and described the 3rd wedge shape rib 4 mirrors successively, and at described detector focal plane 5 place's focal imagings, move described the 3rd prism wedge 4 by the binding face along described the second prism wedge 3 and described the 3rd prism wedge 4, the thickness that changes three prism wedges on optical axis direction is focused.
The utility model embodiment arranges the parallel flat assembly on the light path between imaging optical system and detector focal plane, move described the 3rd prism wedge by the inclined-plane along described the second prism wedge, the section thickness of three prism wedges that change light passes, focus thereby change from the light path of prism wedge arrival detector, the compensate for optical defocusing amount.This device is simple to operate, does not need to have in mobile system the lens of focal power to focus, and is little to the system optics performance impact, can realize the continuous variation of defocusing amount, can realize more accurately the focal plane compensation.And two sections clearances that form in the middle of three prism wedges are symmetrical, can solve the optical axis vertical direction that single clearance that two prism wedges consist of causes and produce the problem of skew.
As shown in Figure 2, described the first prism wedge comprises the first faceted pebble 6, the second faceted pebble 7 and the first inclined-plane 9, described the second prism wedge comprises the 3rd inclined-plane 10, the 4th inclined-plane 11 and the 7th faceted pebble 12, as shown in Figure 4, described the 3rd prism wedge 4 comprises the 4th faceted pebble 14, the 5th faceted pebble 15 and the second inclined-plane 13;
Light beam enters described the first wedge shape prism wedge 2 along described the first faceted pebble 6, then passes successively described the first inclined-plane 9, the 3rd inclined-plane 10, the 4th inclined-plane 11 and the second inclined-plane 13, passes from the 5th faceted pebble 15 of described the 3rd prism wedge 4;
Described the first inclined-plane 9 contacts with described the 3rd inclined-plane 10, and described the 4th inclined-plane 11 and described the second inclined-plane 13 contact;
Described the first faceted pebble 6 is parallel with described the 5th faceted pebble 15, and described the first faceted pebble 6 is all vertical with optical axis direction with described the 5th faceted pebble 15;
Described the second faceted pebble 7 is all parallel with described the 7th faceted pebble 12 with described the 4th faceted pebble 4, and described the second faceted pebble 7, described the 4th faceted pebble 4 are all parallel with optical axis direction with described the 7th faceted pebble 12.
Work as A
1B
10 o'clock, described the first prism wedge 2 is the right-angled trapezium prism wedge; Work as A
1B
1=0 o'clock, described the first prism wedge 2 was the right-angle triangle prism wedge;
Described the 3rd prism wedge 4 also comprises the 6th faceted pebble 16, and described the 6th faceted pebble 16 is parallel with described the 4th faceted pebble 14, and described the 6th faceted pebble 16 and described the 4th faceted pebble 14 are positioned at the two ends of described the 5th faceted pebble.
Work as R
1Q
10 o'clock, described the 3rd prism wedge 4 is the right-angled trapezium prism wedge; Work as R
1Q
1=0 o'clock, described the 3rd prism wedge 4 was the right-angle triangle prism wedge.
The length of the intersection AD of described the first faceted pebble and described the second faceted pebble is for being X, X 〉=X
0
Another limit AA of described the first faceted pebble
1Length be Y, wherein Y 〉=X
0
The length of another limit AB of described the second faceted pebble is t
1, the limit A of described three faceted pebble relative with it
1B
1Length be t
2, t
1=t
2+ Ytan α;
The length of the 7th faceted pebble 12 of described the second prism wedge 3 and the intersection GH on the 3rd inclined-plane 10 is also X, and namely the length with AD is identical; The length of another limit HN of described the 7th faceted pebble is m, m 〉=2X
0Tan α;
Described the 3rd prism wedge 4 along perpendicular to optical axis direction movably maximum vertical range be
Described the 5th faceted pebble is along the length RR of its moving direction
1Be Y
1,
The intersection RS of the 5th faceted pebble and the 4th faceted pebble is X
1, X
1〉=X
0The length that the 4th faceted pebble is parallel to the limit QR of optical axis direction is t
3, the limit Q of its corresponding the 6th faceted pebble
1R
1Long is t
4, t
3=t
4+ Y
1Tan α.When the accessible maximum focusing amount of optical system is ± d
max, described the first prism wedge 2, the second prism wedge 3 and described the 3rd changeable maximum axial thickness of prism wedge 4 are
The axial gross thickness of described the first prism wedge 2, the second prism wedge 3 and described the 3rd prism wedge 4 is the length of AB+QR
Wherein, L is the distance between optical system 1 and detector focal plane 5; L
1Be the distance between described parallel flat and described detector focal plane; X
0That distance between described parallel flat and described detector focal plane is L
1The time, the light beam clear aperture on described first faceted pebble of described the first right angle prism wedge; N is the refractive index of described right angle prism wedge; D is the defocusing amount of optical system focal plane; ± d
maxMaximum defocus amount for optical system focal plane; Δ x is that described right angle prism wedge is along the rate of travel perpendicular to optical axis direction; Δ T is that described right angle prism wedge is along the rate of travel that is parallel to optical axis direction; β is picture side's aperture angle of optical system.
The angle of described the second faceted pebble 7 correspondences is wedge angle α, and the angle of total reflection of described prism wedge is
The scope of described wedge shape corner angle α is
The angle of described second prism wedge 3 of described the 7th faceted pebble 12 correspondences is 2 α.The angle of described the 3rd prism wedge 4 of described the 4th faceted pebble 14 correspondences is α.
In sum, the utility model embodiment provides a kind of device based on three prism wedge compensate for optical focal planes, and this device can bring following a kind of beneficial effect at least:
(1) do not need to have in mobile system the lens of focal power to focus, thus less to the system optics properties influence;
(2) can realize the continuous variation of defocusing amount by the continuous moving of the 3rd prism wedge, thereby realize more accurate focal plane compensation;
Two sections clearances of (3) three middle formation of prism wedge are symmetrical, can realize in the situation that do not change optical axis verticality the horizontal-shift of focal plane is compensated, efficiently solve the single clearance that two prism wedges consist of and to cause the optical axis vertical direction to produce the problem of skew.
The above; it is only the better embodiment of the utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement are within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.
Claims (7)
1. device based on three prism wedge compensate for optical focal planes, it is characterized in that, comprise: imaging optical system (1) and detector focal plane (5), and the parallel flat assembly between the light path of described imaging optical system (1) and described detector focal plane (2), described parallel flat assembly comprises three prism wedges, be followed successively by the first prism wedge (2) from described optical system to described detector focal plane direction, the second prism wedge (3) and the 3rd prism wedge (4), described the first prism wedge (2) and described the 3rd prism wedge (4) are the right angle prism wedge, described the second prism wedge (3) is the isosceles prism wedge, fit with the central planes such as two of described the second prism wedge (3) respectively in the inclined-plane of described the first prism wedge (2) and described the 3rd prism wedge (4),
Described imaging optical system (1) is comprised of a slice or multi-disc lens or catoptron, light beam by imaging optical system (1) and described parallel flat assembly focal imaging on described detector focal plane (5).
2. device according to claim 1, is characterized in that,
Described the first prism wedge comprises the first faceted pebble (6), the second faceted pebble (7) and the first inclined-plane (9), described the second prism wedge comprises the 3rd inclined-plane (10), the 4th inclined-plane (11) and the 7th faceted pebble (12), and described the 3rd prism wedge comprises the 4th faceted pebble (14), the 5th faceted pebble (15) and the second inclined-plane (13);
Described the first inclined-plane (9) contacts with described the 3rd inclined-plane (10), and described the 4th inclined-plane (11) and described the second inclined-plane (13) contact;
Described the first faceted pebble (6) is parallel with described the 5th faceted pebble (15), and described the first faceted pebble (6) is all vertical with optical axis direction with described the 5th faceted pebble (15);
Described the second faceted pebble (7) is all parallel with described the 7th faceted pebble (12) with described the 4th faceted pebble (4), and described the second faceted pebble (7), described the 4th faceted pebble (4) and described the 7th faceted pebble (12) are all parallel with optical axis direction.
3. device according to claim 2, is characterized in that,
Described the first prism wedge (2) also comprises the 3rd faceted pebble (8), and described the 3rd faceted pebble (8) is parallel with described the second faceted pebble (7), and described the second faceted pebble (7) and described the 3rd faceted pebble (8) are positioned at the two ends of described the first faceted pebble (6);
Described the 3rd prism wedge (4) also comprises the 6th faceted pebble (16), and described the 6th faceted pebble (16) is parallel with described the 4th faceted pebble (14), and described the 6th faceted pebble (16) and described the 4th faceted pebble (14) are positioned at the two ends of described the 5th faceted pebble.
4. device according to claim 3, is characterized in that,
Described the first faceted pebble (6) is X, X 〉=X with the length of the intersection of described the second faceted pebble (7)
0
The length on another limit of described the first faceted pebble (6) is Y, wherein Y 〉=X
0
The length on another limit of described the second faceted pebble (7) is t1, and the limit of described three faceted pebble (8) relative with it is t
2, t
1=t
2+ Ytan α;
The 7th faceted pebble (12) of described the second prism wedge (3) is X with the length of the intersection on the 3rd inclined-plane (10), X 〉=X
0The length on another limit of described the 7th faceted pebble (12) is m, m 〉=2X
0Tan α;
Described the 3rd prism wedge (4) along perpendicular to optical axis direction movably ultimate range be
Described the 5th faceted pebble (15) is Y along the length perpendicular to the optical axis moving direction
1,
The intersection of the 5th faceted pebble (15) and the 4th faceted pebble (14) is X
1, X
1〉=X
0The length that the 4th faceted pebble (14) is parallel to the limit of optical axis direction is t
3, the length of side of its corresponding the 6th faceted pebble (16) is t
4, t
3=t
4+ Y
1Tan α;
When the accessible maximum focusing amount of optical system is ± d
max, described the first prism wedge (2), the second prism wedge (3) and the changeable maximum axial distance of described the 3rd prism wedge (4) are
The axial gross thickness of described the first prism wedge (2), the second prism wedge (3) and described the 3rd prism wedge (4)
Wherein, L is the distance between optical system (1) and detector focal plane (5); L
1Be the distance between described parallel flat assembly and described detector focal plane (5); X
0That the distance of working as between described parallel flat assembly and described detector focal plane (5) is L
1The time, the light beam clear aperture on described first faceted pebble (6) of described the first prism wedge (2); N is the refractive index of prism wedge; D is the defocusing amount of optical system focal plane (5); ± d
maxMaximum defocus amount for optical system focal plane (5); Δ x is that described the 3rd prism wedge (4) is along the rate of travel perpendicular to optical axis direction; Δ T is that described parallel flat assembly is along the rate of travel that is parallel to optical axis direction; β is picture side's aperture angle of optical system.
5. device according to claim 4, is characterized in that,
The angle that described the second faceted pebble (7) is corresponding is wedge angle α, and the angle of total reflection of prism wedge is
The scope of described wedge shape corner angle α is
6. device according to claim 5, is characterized in that, the angle of described the second prism wedge (3) that described the 7th faceted pebble (12) is corresponding is 2 α.
7. device according to claim 5, is characterized in that, the angle of described the 3rd prism wedge (4) that described the 4th faceted pebble (14) is corresponding is α.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220586392 CN202975473U (en) | 2012-11-08 | 2012-11-08 | Optical focal plane compensating device based on three wedge prisms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220586392 CN202975473U (en) | 2012-11-08 | 2012-11-08 | Optical focal plane compensating device based on three wedge prisms |
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| Publication Number | Publication Date |
|---|---|
| CN202975473U true CN202975473U (en) | 2013-06-05 |
Family
ID=48516531
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220586392 Expired - Lifetime CN202975473U (en) | 2012-11-08 | 2012-11-08 | Optical focal plane compensating device based on three wedge prisms |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535535A (en) * | 2015-01-16 | 2015-04-22 | 厦门大学 | Device and method for measuring refractive index based on self-mixing interference |
| CN104965395A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Fixed focusing device for photoetching direct-writing system |
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| CN117170196A (en) * | 2023-08-22 | 2023-12-05 | 安徽国芯光刻技术有限公司 | Exposure focusing system of laser direct-writing type photoetching machine |
-
2012
- 2012-11-08 CN CN 201220586392 patent/CN202975473U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535535A (en) * | 2015-01-16 | 2015-04-22 | 厦门大学 | Device and method for measuring refractive index based on self-mixing interference |
| CN104535535B (en) * | 2015-01-16 | 2018-01-19 | 厦门大学 | A kind of apparatus for measuring refractive index and method based on self-mixed interference |
| CN104965395A (en) * | 2015-07-21 | 2015-10-07 | 合肥芯硕半导体有限公司 | Fixed focusing device for photoetching direct-writing system |
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| CN117170196A (en) * | 2023-08-22 | 2023-12-05 | 安徽国芯光刻技术有限公司 | Exposure focusing system of laser direct-writing type photoetching machine |
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Granted publication date: 20130605 |