CN105043255A - Combined cantilever probe sensing method based on optical fiber emergent light detection and device - Google Patents
Combined cantilever probe sensing method based on optical fiber emergent light detection and device Download PDFInfo
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- CN105043255A CN105043255A CN201510381723.5A CN201510381723A CN105043255A CN 105043255 A CN105043255 A CN 105043255A CN 201510381723 A CN201510381723 A CN 201510381723A CN 105043255 A CN105043255 A CN 105043255A
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- probe
- optical fiber
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- 239000000523 sample Substances 0.000 title claims abstract description 41
- 239000013307 optical fiber Substances 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000001514 detection method Methods 0.000 title abstract description 16
- 239000000835 fiber Substances 0.000 claims description 41
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a combined cantilever probe sensing method based on optical fiber emergent light detection and a device, which belongs to the technical field of size measurement. A laser beam is emergent via the optical fiber and then focused via a lens, a photodetector detects a positioning of a focused light spot, when a probe is contacted with an object, the optical fiber emergent end is driven to deviate, the light spot position formed on the photodetector by the emergent light in a focusing mode deviates, and sensing is completed. The device comprises a laser, the optical fiber, a clamp, a lens, the photodetector and the probe. The method and the device have the advantages that the probe is convenient to make, miniaturization demands can be met, the detection light has a high strength, detection is east, a three-dimensional detection ability is provided, the resolution is high, the overall device is simple, and the size is small.
Description
Technical field
The invention belongs to size measurement technique field, relate generally to a kind of combination socle beam probe method for sensing based on fiber exit photodetection and device.
Background technology
Have the inner-cavity structure fields of measurement of micro-dimension and large aspect ratio, using optical fiber fabrication probe to be an important solution, have and be easy to microminiaturized, be easy to the advantages such as making, existing probe is as follows:
(1) " double optical fiber coupling contact type micro measuring force aiming sensor " described by application number 200510072254.5, in that patent, propose a kind of new construction sensor, its mode utilizing two optical fiber to fire coupling ball realizes the reverse transfer of light, and detects emergent light.
Similar patent has: the two optical fiber with end face microstructure are total to ball coupling micro measuring force aiming sensor (application number: the micro measuring force aiming sensor (application number: 201410118924.1), based on two incident optical be total to the micro measuring force aiming sensor (application number: 201410118968.4) that ball is coupled 201410118922.2), based on three optical fiber being total to ball coupling.
(2) " based on the small inner cavity size of two-dimensional micro-focus collimation and three-dimensional coordinate method for sensing and device " described by application number 200910071623.7, utilizes optical fiber be collimated into picture as post lens to pointolite thus realize detection.
201110438936.9), orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor (application number: 201110456022.5) similar patent has: based on the small inner cavity size of the micro-focus collimation of one dimension and two-dimensional coordinate method for sensing and device (application number: 200910071624.1), based on the micro-aperture measuring device of orthogonal two-dimensional micro-focus collimation and method (application number:.
(3) " pore size measurement mechanism and method based on Fiber Bragg Grating FBG " described by application number 201110456011.7, make use of Fiber Bragg Grating FBG by external force cause pitch change so that cause its reflected light centre wavelength change character detect.
Similar patent has: the contact temperature based on Fiber Bragg Grating FBG is noninductive three-dimensional detection sensor (application number: 201110456051.1), based on the three-dimensional micro-scale measurement device and method (application number: 201410030736.3) of four-core fiber grating, based on the two-dimentional micro-scale measurement device and method (application number: 201410030737.8) of three core fibre gratings, based on the two-dimentional micro-scale measurement device and method (application number: 201410030738.2) of twin-core fiber grating, based on the two-dimentional micro-scale measurement device and method (application number: 201410030739.7) of double optical fiber grating.
(4) " the partially flat coupling fiber ball microscale sensor of two incident guarantor based on polarization state detects " described by application number 201410118970.1, the coupling ball utilizing optical fiber to fire realizes light reverse transfer, realizes detection by detecting outgoing polarisation of light state.
Similar patent has: the guarantor's partially flat coupling fiber ball microscale sensor (application number: 201410118966.5) detected based on polarization state.
(5) list of references (1. GaoliangDai, HelmutWolff, FrankPohlenz.Atomicforceprobeforsidewallscanningofnano-a ndmicrostructures [J] .AppliedPhysicsLetters.2006, 88 (17): 171908. 2. GaoliangDai, HelmutWolff, Hans-UlrichDanzebrink.Atomicforcemicroscopecantileverbas edmicrocoordinatemeasuringprobefortruethree-dimensionalm easurementsofmicrostructures [J] .AppliedPhysicsLetters.2007, 91 (12): 121912.) the combination cantilever beam probe that a kind of atomic force microscope semi-girder makes is mentioned in, it utilizes atomic force microscope principle to detect.
Above-mentioned file and the existing probe weak point described in documents mentioned thereof are: (1) probe manufacturing difficulty is large, and not easily realizes microminiaturization; (2) intensity detecting light is weak, is difficult to detection; (3) without three-dimensional detection ability or three-dimensional detection ability weak; (4) resolving power is low; (5) single unit system is complicated.
Summary of the invention
The object of the invention is for above-mentioned prior art Problems existing, design provides a kind of combination socle beam probe method for sensing based on fiber exit photodetection and device, reaches that probe structure is simple, resolving power is high and has the compact object of three-dimensional detection ability, single unit system.
The object of the present invention is achieved like this:
A kind of combination socle beam probe method for sensing based on fiber exit photodetection, laser beam by after fiber exit through lens focus, the position of focal beam spot is detected by photodetector, when probe drives the skew of fiber exit end when contacting object, the facula position causing emergent light to focus on formation on photodetector offsets, and completes sensing.
A kind of combination socle beam probe sensing device based on fiber exit photodetection, the light that laser instrument sends passes through fiber exit, described optical fiber is fixed by clamper, form single-ended fixing optic fibre cantilev, the emitting light path of described optic fibre cantilev configures lens and photodetector successively, and the middle part of probe and described optic fibre cantilev is connected.
Described optic fibre cantilev and probe are mutually vertical.
Described clamper vibrates with certain frequency, drives described optic fibre cantilev and probe face in vibration mode.
Advantage of the present invention is: (1) probe manufacturing facilitates and meets microminiaturized demand; (2) intensity of light is detected high and be easy to detection; (3) three-dimensional detection ability is possessed; (4) resolving power is high; (5) single unit system is simple and size is less.
Accompanying drawing explanation
Fig. 1 is three-dimensional structure schematic diagram of the present invention.
In figure: 1. laser instrument, 2. optical fiber, 3. clamper, 4. optic fibre cantilev, 5. lens, 6. photodetector, 7. probe.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
A kind of combination socle beam probe method for sensing based on fiber exit photodetection, laser beam by after fiber exit through lens focus, the position of focal beam spot is detected by photodetector, when probe drives the skew of fiber exit end when contacting object, the facula position causing emergent light to focus on formation on photodetector offsets, and completes sensing.
A kind of combination socle beam probe sensing device based on fiber exit photodetection, the light that laser instrument 1 sends is by optical fiber 2 outgoing, described optical fiber 2 is fixed by clamper 3, form single-ended fixing optic fibre cantilev 4, the emitting light path of described optical fiber 2 configures lens 5 and photodetector 6 successively, and probe 7 is connected with the middle part of described optic fibre cantilev 4.
Described optic fibre cantilev 4 is mutually vertical with probe 7.
Described clamper 3, with certain frequency vibration, drives described optic fibre cantilev 4 and probe 7 to be operated in vibration mode.
Principle of work of the present invention is as follows:
When detecting object, the light that laser instrument 1 sends is coupled after outgoing by optical fiber 2 and is focused on by lens 5, the position of focal beam spot is detected by photodetector 6, probe 7 drives optic fibre cantilev 4 to bend when contacting object, thus the free end (i.e. the exit end of optical fiber 2) of optic fibre cantilev 4 is offset, the facula position causing emergent light to focus on formation on photodetector 6 offsets, and complete sensing, now system works is at static schema.
When clamper 3 vibrates, drive optic fibre cantilev 4 and probe 7 are vibrated, now system works is in vibration mode, when probes touch object, the vibration characteristics of probe 7 and optic fibre cantilev 4 will be affected, the final facula position change affecting photodetector 6 and detect, can adopt lock-in amplifier to carry out signal transacting; Vibration mode effectively can overcome absorption affinity during miniature probe detection, improves detection accuracy.
Claims (4)
1. the combination socle beam probe method for sensing based on fiber exit photodetection, it is characterized in that: laser beam by after fiber exit through lens focus, the position of focal beam spot is detected by photodetector, when probe drives the skew of fiber exit end when contacting object, the facula position causing emergent light to focus on formation on photodetector offsets, and completes sensing.
2. the combination socle beam probe sensing device based on fiber exit photodetection, it is characterized in that: the light that laser instrument (1) sends is by optical fiber (2) outgoing, described optical fiber (2) is fixed by clamper (3), form single-ended fixing optic fibre cantilev (4), the emitting light path of described optical fiber (2) configures lens (5) and photodetector (6) successively, and probe (7) is connected with the middle part of described optic fibre cantilev (4).
3. the combination socle beam probe sensing device based on fiber exit photodetection according to claim 2, is characterized in that: described optic fibre cantilev (4) is mutually vertical with probe (7).
4. the combination socle beam probe sensing device based on fiber exit photodetection according to claim 2, it is characterized in that: described clamper (3), with certain frequency vibration, drives described optic fibre cantilev (4) and probe (7) to be operated in vibration mode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510381723.5A CN105043255B (en) | 2015-07-02 | 2015-07-02 | Combination socle beam probe method for sensing and device based on fiber exit optical detection |
| PCT/CN2015/086950 WO2017000363A1 (en) | 2015-07-02 | 2015-08-14 | Combined cantilever beam and probe sensing method and apparatus based on optical fibre emergent light detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510381723.5A CN105043255B (en) | 2015-07-02 | 2015-07-02 | Combination socle beam probe method for sensing and device based on fiber exit optical detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105043255A true CN105043255A (en) | 2015-11-11 |
| CN105043255B CN105043255B (en) | 2018-01-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510381723.5A Expired - Fee Related CN105043255B (en) | 2015-07-02 | 2015-07-02 | Combination socle beam probe method for sensing and device based on fiber exit optical detection |
Country Status (2)
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| CN (1) | CN105043255B (en) |
| WO (1) | WO2017000363A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105841608A (en) * | 2016-03-22 | 2016-08-10 | 哈尔滨工业大学 | Optical fiber emergent light collimation detection-based combined cantilever beam probe sensing device and sensing method thereof |
| CN115406357A (en) * | 2022-06-09 | 2022-11-29 | 东北林业大学 | Confocal detection-based large depth-diameter ratio micropore measurement sensing method and device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1149715A (en) * | 1995-11-07 | 1997-05-14 | 东南大学 | Weak force sensor |
| JP2001208671A (en) * | 2000-01-26 | 2001-08-03 | Seiko Instruments Inc | Optical fiber probe, cantilever having microscopic opening and method of forming opening therein |
| CN101833018A (en) * | 2010-05-21 | 2010-09-15 | 清华大学 | Scanning probe surface measurement system and measurement method based on optical fiber sensor |
| US20110252512A1 (en) * | 2010-04-09 | 2011-10-13 | Byung Kim | Cantilever-based optical interfacial force microscope |
| CN103900468A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2239620Y (en) * | 1995-11-07 | 1996-11-06 | 东南大学 | Micro-force sensor |
| JPH09203626A (en) * | 1996-01-25 | 1997-08-05 | Ricoh Co Ltd | Probing device for measuring instrument |
| US5837998A (en) * | 1996-06-24 | 1998-11-17 | Dinev; Petko D. | Two-dimensional fiber optic acceleration and vibration sensor |
| US6525307B1 (en) * | 1999-09-16 | 2003-02-25 | Ut-Battelle, Llc | Integrated optical interrogation of micro-structures |
| JP2005147979A (en) * | 2003-11-19 | 2005-06-09 | Jeol Ltd | Scanning probe microscope |
| US7900527B1 (en) * | 2006-12-22 | 2011-03-08 | University Of Central Florida Research Foundation, Inc. | Electrically deflected nanomechanical sensors |
-
2015
- 2015-07-02 CN CN201510381723.5A patent/CN105043255B/en not_active Expired - Fee Related
- 2015-08-14 WO PCT/CN2015/086950 patent/WO2017000363A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1149715A (en) * | 1995-11-07 | 1997-05-14 | 东南大学 | Weak force sensor |
| JP2001208671A (en) * | 2000-01-26 | 2001-08-03 | Seiko Instruments Inc | Optical fiber probe, cantilever having microscopic opening and method of forming opening therein |
| US20110252512A1 (en) * | 2010-04-09 | 2011-10-13 | Byung Kim | Cantilever-based optical interfacial force microscope |
| CN101833018A (en) * | 2010-05-21 | 2010-09-15 | 清华大学 | Scanning probe surface measurement system and measurement method based on optical fiber sensor |
| CN103900468A (en) * | 2014-03-20 | 2014-07-02 | 哈尔滨工业大学 | Double-fiber ball-shared coupling micro-measuring-force targeting sensor with end face micro-structure |
Non-Patent Citations (1)
| Title |
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| 于唤唤等: "触针式光电三维微位移测量***设计及标定", 《电子测量与仪器学报》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105841608A (en) * | 2016-03-22 | 2016-08-10 | 哈尔滨工业大学 | Optical fiber emergent light collimation detection-based combined cantilever beam probe sensing device and sensing method thereof |
| CN115406357A (en) * | 2022-06-09 | 2022-11-29 | 东北林业大学 | Confocal detection-based large depth-diameter ratio micropore measurement sensing method and device |
| CN115406357B (en) * | 2022-06-09 | 2023-09-05 | 东北林业大学 | Large depth-diameter ratio micropore measurement sensing device based on confocal detection |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017000363A1 (en) | 2017-01-05 |
| CN105043255B (en) | 2018-01-26 |
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Granted publication date: 20180126 |