CN202880904U - Hydrogenated tail gas and reduced tail gas heat energy recovery system - Google Patents
Hydrogenated tail gas and reduced tail gas heat energy recovery system Download PDFInfo
- Publication number
- CN202880904U CN202880904U CN201220478607.7U CN201220478607U CN202880904U CN 202880904 U CN202880904 U CN 202880904U CN 201220478607 U CN201220478607 U CN 201220478607U CN 202880904 U CN202880904 U CN 202880904U
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- tail gas
- recovery system
- heat energy
- energy recovery
- vaporizer
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Abstract
The utility model discloses a hydrogenated tail gas and reduced tail gas heat energy recovery system, which is characterized by comprising a water cooler and a gasifier, wherein the cooled fluid inlet of the water cooler is communicated with a 80-150 DEG C tail gas inlet; and the cooled fluid outlet of the water cooler is communicated with the cooled fluid inlet of the gasifier. According to the hydrogenated tail gas and reduced tail gas heat energy recovery system, a comprehensive utilization of a great amount of heat energy carried by the hydrogenated tail gas or reduced tail gas and a great amount of cold energy carried by hydrogen chloride liquid of minus 40 DEG C is achieved.
Description
Technical field
The utility model relates to a kind of field of polysilicon production, is specifically related to improved Siemens and produces the hydrogenation tail gas of polysilicon, reduction tail gas recycle field.
Background technology
Produce hydrogenation tail gas, the reduction exhaust gas recovery system of polysilicon at improved Siemens, the low pressure cold coagulation zone mainly is to adopt the mode of step by step cooling to cool off, the employing electric heater of liquid hydrogenchloride is delivered to the synthetic use of trichlorosilane after heating vaporization in the exhaust gas recovery system simultaneously, the high-temperature barren liquor chlorosilane that hydrogenation tail gas, reduction exhaust gas recovery system high pressure are resolved the Analytic Tower tower reactor discharge of distinguishing is carried with pump by after the interchanger water-cooled again.Synthesis tail gas recovery system mesohigh is resolved district's tower reactor reboiler and is used steam to heat, and idiographic flow is as follows:
Hydrogenation tail gas or reduction exhaust gas recovery system low pressure area: the compositions such as hydrogen, hydrogenchloride, dichloro-dihydro silicon, trichlorosilane and silicon tetrachloride in 80～150 ℃ of tail gas are through tail gas water cooler, tail gas gas-to-gas heat exchanger ,-20 ℃ of chilled brine interchanger and tail gas supercooler, exhaust temperature is reduced to-30～-45 ℃, utilize the boiling point of each component in the tail gas different, wherein dichloro-dihydro silicon, trichlorosilane and silicon tetrachloride are condensed and are stored in the chlorosilane surge tank.
At the Analytic Tower cat head ,-40 hydrogenchloride liquid are plucked out of, and deliver to vaporizer and carry out the electrically heated vaporization.
Tail gas carries amount of heat in said process needs refrigerant to cool off gradually the consumption cold, needs thermal source to heat consumption of calorie and-40 ℃ of hydrogenchloride liquid carry a large amount of colds.Can find out that in this process improved Siemens produces the cold that tail gas carries in the hydrogenation tail gas of polysilicon, the reduction exhaust gas recovery system heat and-40 ℃ of hydrogenchloride liquid carry and effectively do not utilize, hydrogenation tail gas, reduction exhaust gas recovery system heat integration are unreasonable.
The utility model content
Technical problem to be solved in the utility model is for hydrogenation tail gas, reduction exhaust gas recovery system heat energy utilization irrationality in the improved Siemens of producing polysilicon, the system of a kind of hydrogenation tail gas, reduction exhaust gas recovery system heat integration is provided, reduces the energy consumption of hydrogenation tail gas, reduction exhaust gas recovery system.
The purpose of this utility model is come specific implementation by the following technical programs:
A kind of hydrogenation tail gas or reduction tail gas heat energy recovery system, comprise water cooler, vaporizer, the fluid intake that is cooled of described water cooler is communicated with 80～150 ℃ gas inlet, and the fluid outlet that is cooled of described water cooler is communicated with the fluid intake that is cooled of described vaporizer.
The fluid intake that is cooled of described vaporizer is provided with by-pass valve, makes the temperature of tail gas of the fluid outlet that is cooled of described vaporizer be down to 15～25 ℃.
The fluid intake that is heated of described vaporizer is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of described vaporizer forms 10～20 ℃ of hydrogen chloride gas.
Described vaporizer is provided with the chlorosilane outlet, and the conduit that the outlet of described chlorosilane connects is communicated with the chlorosilane surge tank.
Be provided with vaporizer tube side tapping line showering guilding valve in described conduit.
The utility model has been realized a large amount of colds that hydrogenation tail gas or the reduction amount of heat that carries of tail gas and-40 ℃ of hydrogenchloride liquid carry are fully utilized.
Compare with existing hydrogenation solvent recovery technology from vent gas and reduction solvent recovery technology from vent gas, the technical process of the utility model method is simple, energy consumption is low, the Analytic Tower overhead extraction obtain-40 ℃ of hydrogenchloride liquid can be directly as the heat-eliminating medium of tail gas in hydrogenation tail gas or the reduction exhaust gas recovery system, and the thermal source of tail gas directly conduct-40 ℃ hydrogenchloride vaporizing liquid.Namely-40 ℃ hydrogenchloride liquid is become hydrogen chloride gas by tail gas heating, and tail gas is by-40 ℃ of hydrogenchloride liquid cooling coolings simultaneously.The utility model has reduced the consumption of hydrogenation tail gas, reduction exhaust gas recovery system low pressure cold coagulation zone cold, and cold and hot the measuring rationally of hydrogenation tail gas, reduction exhaust gas recovery system utilized fully.
Description of drawings
The below is described in further detail the utility model with embodiment with reference to the accompanying drawings.
Fig. 1 is the structure iron of the described hydrogenation tail gas of the utility model embodiment or reduction tail gas heat energy recovery system.
Embodiment
As shown in Figure 1, the described hydrogenation tail gas of the utility model embodiment or reduction tail gas heat energy recovery system, comprise water cooler 1, vaporizer 2, the fluid intake that is cooled of described water cooler 1 is communicated with 80～100 ℃ gas inlet, and the fluid outlet that is cooled of described water cooler 1 is communicated with the fluid intake that is cooled of described vaporizer 2.
The fluid intake that is cooled of described vaporizer 2 is provided with by-pass valve 3, makes the temperature of tail gas of the fluid outlet that is cooled of described vaporizer 2 be down to 15～25 ℃.
The fluid intake that is heated of described vaporizer 2 is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of described vaporizer 2 forms 10～20 ℃ of hydrogen chloride gas.
Described vaporizer 2 is provided with the chlorosilane outlet, and the conduit that the outlet of described chlorosilane connects is communicated with the chlorosilane surge tank.
Be provided with vaporizer tube side tapping line showering guilding valve 4 in described conduit.
The utility model has realized that a large amount of colds that amount of heat that tail gas is carried and-40 ℃ of hydrogenchloride liquid carry fully utilize.
Compare with existing hydrogenation solvent recovery technology from vent gas and reduction solvent recovery technology from vent gas, the technical process of the utility model method is simple, energy consumption is low, the Analytic Tower overhead extraction obtain-40 ℃ of hydrogenchloride liquid can be directly as the heat-eliminating medium of tail gas in hydrogenation tail gas or the reduction exhaust gas recovery system, and the thermal source of tail gas directly conduct-40 ℃ hydrogenchloride vaporizing liquid.Namely-40 ℃ hydrogenchloride liquid is become hydrogen chloride gas by tail gas heating, and tail gas is by-40 ℃ of hydrogenchloride liquid cooling coolings simultaneously.The utility model has reduced the consumption of hydrogenation tail gas, reduction exhaust gas recovery system low pressure cold coagulation zone cold, and cold and hot the measuring rationally of hydrogenation tail gas, reduction exhaust gas recovery system utilized fully.
Claims (5)
1. a hydrogenation tail gas, reduction tail gas heat energy recovery system, it is characterized in that, comprise water cooler, vaporizer, the fluid intake that is cooled of described water cooler is communicated with 80～150 ℃ gas inlet, and the fluid outlet that is cooled of described water cooler is communicated with the fluid intake that is cooled of described vaporizer.
2. hydrogenation tail gas as claimed in claim 1, reduction tail gas heat energy recovery system is characterized in that, the fluid intake that is cooled of described vaporizer is provided with by-pass valve, make the temperature of tail gas of the fluid outlet that is cooled of described vaporizer be down to 15～25 ℃.
3. hydrogenation tail gas as claimed in claim 1, reduction tail gas heat energy recovery system, it is characterized in that, the fluid intake that is heated of described vaporizer is communicated with-40 ℃ of hydrogenchloride fluid supplies, and the fluid outlet that is heated of described vaporizer forms 10～20 ℃ of hydrogen chloride gas.
4. hydrogenation tail gas as claimed in claim 1, reduction tail gas heat energy recovery system is characterized in that, described vaporizer is provided with the chlorosilane outlet, and the conduit that the outlet of described chlorosilane connects is communicated with the chlorosilane surge tank.
5. hydrogenation tail gas as claimed in claim 4, reduction tail gas heat energy recovery system is characterized in that, are provided with vaporizer tube side tapping line showering guilding valve in described conduit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220478607.7U CN202880904U (en) | 2012-09-19 | 2012-09-19 | Hydrogenated tail gas and reduced tail gas heat energy recovery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201220478607.7U CN202880904U (en) | 2012-09-19 | 2012-09-19 | Hydrogenated tail gas and reduced tail gas heat energy recovery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202880904U true CN202880904U (en) | 2013-04-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201220478607.7U Expired - Lifetime CN202880904U (en) | 2012-09-19 | 2012-09-19 | Hydrogenated tail gas and reduced tail gas heat energy recovery system |
Country Status (1)
| Country | Link |
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| CN (1) | CN202880904U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838119A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in hydrogenated and reduced tail gas |
-
2012
- 2012-09-19 CN CN201220478607.7U patent/CN202880904U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838119A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in hydrogenated and reduced tail gas |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130417 |
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| CX01 | Expiry of patent term |